CN219223586U - Electrode distance calibrating device - Google Patents

Abstract

The application provides an electrode distance calibrating device, relates to semiconductor manufacture equipment detection technical field. The electrode distance calibration device comprises a bottom plate, a positioning hole and a positioning pin corresponding to the positioning hole. The bottom plate is provided with a first surface and a second surface which are opposite, and the positioning holes penetrate through the first surface and the second surface. The locating pin includes fixed part and the measuring part of being connected with the fixed part, and the fixed part is arranged in the locating hole, and the extrusion force that the locating pin acted on the fixed part through the locating hole is fixed with the bottom plate, and measuring part is used for measuring the interval between upper and lower electrode for the convex part of first surface. In the structure, the distance between the upper electrode and the lower electrode can be intuitively obtained through the measuring part of the locating pin, so that the operation steps are effectively simplified, the calibration efficiency and accuracy are improved, the equipment can be ensured to stably run for a long time, and the processing quality is ensured.

Description

Electrode distance calibrating device

Technical Field

The application relates to the technical field of semiconductor manufacturing equipment detection, in particular to an electrode distance calibration device.

Background

Semiconductor device etchers are a critical manufacturing tool for the fabrication of integrated circuits and other micro-nano scale devices. During use, the distance between the upper and lower electrodes may change due to physical factors, daily wear, etc., which may adversely affect the processing quality. Therefore, during maintenance of the apparatus, it is necessary to periodically calibrate the distance between the upper and lower electrodes to ensure that the apparatus is stably operated and a high quality product is manufactured. High-efficiency and accurate upper and lower electrode distance calibration is important to ensure long-term stable operation of an etching machine and ensure processing quality.

However, in the prior art, the calibration method adopted in the actual maintenance process is simpler and coarser due to the lack of a special calibration tool. The method comprises the steps of manufacturing the tinfoil into a ball shape, pressing the upper electrode to the tinfoil ball by a motor of an etching machine, measuring the thickness of the extruded tinfoil ball by using a caliper, and obtaining the distance between the upper electrode and the lower electrode of the etching machine.

From the quality angle analysis, the distance compensation data obtained by the existing electrode distance calibration method has errors, and the equipment parameters are not accurate enough, so that the quality of the produced product cannot be ensured; from the perspective of equipment maintenance analysis, the existing electrode distance calibration method is complex in operation and has large errors in accuracy, and the service performance of equipment is affected.

Disclosure of Invention

In order to overcome at least the above-mentioned shortcomings in the prior art, an object of the present application is to provide an electrode distance calibration device.

The embodiment of the application provides an electrode distance calibrating device, the electrode distance calibrating device includes bottom plate, locating hole and with the locating pin that the locating hole corresponds.

The bottom plate is provided with a first surface and a second surface which are opposite, and the positioning holes penetrate through the first surface and the second surface. The locating pin comprises a fixing part and a measuring part connected with the fixing part, the fixing part is arranged in the locating hole, the locating pin is fixed with the bottom plate through the extrusion force of the locating hole acting on the fixing part, and the part of the measuring part protruding relative to the first surface is used for measuring the distance between the upper electrode and the lower electrode of the etching machine.

In one possible implementation manner, the number of the positioning holes is a plurality, and in a plane parallel to the first surface, geometric center lines of cross sections of any two positioning holes are not parallel.

In one possible implementation, the bottom plate is a disc, and the plurality of positioning holes are distributed on the bottom plate in a central symmetry manner relative to the geometric center of the bottom plate.

In one possible implementation, the positioning hole includes a connection hole and a limiting hole, the connection hole being proximate to the first surface, the limiting hole being proximate to the second surface. The connecting hole and the limiting hole are cylindrical holes, the central axis of the connecting hole coincides with the central axis of the limiting hole, and the aperture of the connecting hole is smaller than that of the limiting hole.

The fixed part comprises a limiting part and a connecting part, and the limiting part is connected with the measuring part through the connecting part. The limiting part and the connecting part are cylindrical, the central axis of the limiting part coincides with the central axis of the connecting part, and the radius of the connecting part is smaller than the aperture of the connecting hole.

The locating pin is fixed with the bottom plate through the extrusion force of the limiting hole acting on the limiting part.

In one possible implementation, the measuring portion is cylindrical, a central axis of the measuring portion coincides with a central axis of the connecting portion, and a radius of the measuring portion is smaller than a bore diameter of the connecting hole.

The measuring part is provided with measuring marks distributed along the extending direction of the measuring part, and the measuring marks are used for measuring the distance between the upper electrode and the lower electrode of the etching machine.

In one possible implementation, the positioning holes include a first positioning hole near the bottom plate edge, and the bottom plate is provided with a first slit that communicates with the first positioning hole via the bottom plate edge.

In one possible implementation manner, the positioning hole includes a second positioning hole located at the center of the bottom plate, the bottom plate is provided with an auxiliary through hole close to the second positioning hole, and the bottom plate is further provided with a second gap, and the second gap communicates the second positioning hole with the auxiliary through hole.

In one possible implementation, the auxiliary through hole is an arc through hole; the arc of the auxiliary through hole faces the second positioning hole.

In one possible implementation, the bottom plate further includes a notch, and a bottom of the notch is close to the second positioning hole.

In one possible implementation manner, the material of the bottom plate includes one of polyethylene, polyvinylidene fluoride and polytetrafluoroethylene, and the material of the positioning pin includes one of polyvinylidene fluoride, polytetrafluoroethylene and nylon.

Based on any one of the above aspects, the electrode distance calibration device provided in the embodiments of the present application has the following beneficial effects: the positioning pin is fixed and limited on the bottom plate, the bottom plate is fixed with the positioning through the extrusion force of the positioning pin fixing part acted on by the positioning hole, and the distance between the upper electrode and the lower electrode of the etching machine is intuitively measured through the measuring part. Compared with the prior art, the electrode distance calibration device can effectively simplify operation steps and obtain distance compensation data with smaller error range, thereby achieving the purpose of high-efficiency and accurate upper and lower electrode distance calibration.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following description will briefly explain the drawings required for the embodiments, it being understood that the following drawings illustrate only some embodiments of the present application and are therefore not to be considered limiting of the scope, and that other related drawings may be obtained according to these drawings without the inventive effort of a person skilled in the art.

FIG. 1 is a schematic exploded view of one embodiment of an electrode distance calibration device of the present application;

FIG. 2 is one of the sectional views of the partial structure of the electrode distance calibration device provided in the present application;

FIG. 3 is a top view of a partial structure of an electrode distance calibration device provided herein;

FIG. 4 is a second cross-sectional view of a partial structure of an electrode distance calibration device provided herein;

FIG. 5 is a schematic view of a partial structure of an electrode distance calibration device provided in the present application;

FIG. 6 is a schematic diagram showing a partial structure of an electrode distance calibration device according to the present application.

Icon: 100-a bottom plate; 110-positioning holes; 110A-a first positioning hole; 110B-a second positioning hole; 111-connecting holes; 112-a limiting hole 112; 120A-a first surface; 120B-a second surface; 130A-a first gap; 130B-a first slit; 140-auxiliary through holes; 150-notch; 200-locating pins; 210-a fixing part; 211-a connection; 212-a limiting part; 220-measuring part.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present application, it should be noted that, the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship that is commonly put when the product of the application is used, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

In the description of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

It should be noted that, in the case of no conflict, different features in the embodiments of the present application may be combined with each other.

The following describes specific embodiments of the present utility model in detail with reference to the drawings.

The application provides an electrode distance calibration device, please refer to fig. 1 and 2, which includes a bottom plate 100, a positioning hole 110 and a positioning pin 200 corresponding to the positioning hole 110. The base plate 100 has a first surface 120A and a second surface 120B opposite to each other, and the positioning hole 110 penetrates the first surface 120A and the second surface 120B.

The positioning pin 200 includes a fixing portion 210 and a measuring portion 220 connected to the fixing portion 210, the fixing portion 210 is disposed in the positioning hole 110, the positioning pin 200 is fixed to the base plate 100 by a pressing force of the positioning hole 110 to the fixing portion 210, and a portion of the measuring portion 220 protruding with respect to the first surface 120A is used for measuring a gap between the upper and lower electrodes.

In the above structure, the distance between the upper and lower electrodes can be intuitively obtained through the measuring part 220 of the positioning pin 200, so that the operation steps are effectively simplified, the calibration efficiency and accuracy are improved, and the equipment can be ensured to stably operate for a long time and the processing quality is ensured. Meanwhile, the positioning pin 200 is fixed with the bottom plate 100 through the extrusion force, and the positioning pin 200 can be replaced according to the abrasion degree in the use process, so that the equipment replacement cost is effectively saved.

In one possible implementation manner of this embodiment, the number of the positioning holes 110 is plural, and in a plane parallel to the first surface, geometric center lines of cross sections of any two positioning holes are not parallel, so that when the plurality of positioning pins 200 are placed in the plurality of positioning holes 110, measurement portions of the plurality of positioning pins 200 can end to define a measurement plane parallel to the first surface, and the distance between different positions in the upper electrode and the lower electrode can be measured on the measurement plane.

Further, for better fitting the measuring areas of the upper and lower electrodes, referring to the top view of fig. 3, the bottom plate 100 may be a disk, and the plurality of positioning holes 110 are distributed on the bottom plate 100 symmetrically with respect to the geometric center of the bottom plate 100. Preferably, the number of the positioning holes 110 may be 5, wherein the 5 positioning holes 110 are respectively located at the geometric center of the disk, and four orientations of "up", "down", "left" and "right" around the geometric center, and the distances between the different positions of the upper and lower electrodes are measured more omnidirectionally.

In one possible implementation manner of this embodiment, referring to fig. 4, the positioning hole 110 includes a connection hole 111 and a limiting hole 112, where the connection hole 111 is close to the first surface 120A, and the limiting hole 112 is close to the second surface 120B. The connecting hole 111 and the limiting hole 112 are cylindrical holes, the central axis of the connecting hole 111 coincides with the central axis of the limiting hole 112, the central axis of the connecting hole 111 is perpendicular to the first surface 120A, and the aperture of the connecting hole 111 is smaller than that of the limiting hole 112.

The fixing portion 210 includes a limiting portion 212 and a connecting portion 211, the limiting portion 212 is connected with the measuring portion 220 through the connecting portion 211, the limiting portion 212, the connecting portion 211 and the measuring portion 220 are all cylindrical, and central axes of the limiting portion 212, the connecting portion 211 and the measuring portion 220 coincide. The radius of the limiting portion 212 is larger than that of the connecting hole 111, the radii of the connecting portion 211 and the measuring portion 220 are smaller than that of the connecting hole 111, and measuring marks distributed along the extending direction of the measuring portion 220 are arranged on the measuring portion 220.

Specifically, when the electrode distance calibration device with the above structure is used, the limiting portion 212 needs to be pushed to the end of the limiting hole 112 connected to the connecting hole 111, and the measuring portion 220 is completely exposed above the first surface 120A, where the central axis of the measuring portion 220 is perpendicular to the first surface 120A. The limiting part 212 can limit the positioning pin 200 in the positioning hole 110, so that the positioning pin 200 is prevented from being lost due to overlarge push-out force in the process of completely exposing the measuring part 220, and meanwhile, the positioning pin 200 can be fixed with the bottom plate 100 through the extrusion force of the limiting hole 112 acting on the limiting part 212.

In measurement, the upper electrode applies pressure to the positioning pin 200, the connection portion 211 and the measurement portion 220 of the positioning pin 200 slide in the direction of the limiting hole 112 at the connection hole 111, and the gap between the upper and lower electrodes is preliminarily measured by the measurement mark on the measurement portion 220 protruding with respect to the first surface 120A.

In one possible implementation of this embodiment, referring to fig. 5, the positioning hole 110 includes a first positioning hole 110A near an edge of the bottom plate 100, the bottom plate 100 is provided with a first slit 130A, and the first slit 130A communicates with the first positioning hole 110A via the edge of the bottom plate 100. In the process that the positioning hole 110 fixes the positioning pin 200 and the bottom plate 100 by pressing the fixing portion 210, the arrangement of the first slit 130A can increase the pressing space of the first positioning hole 110A, reduce the acting force generated by deformation, and prevent the bottom plate 100 from being damaged due to excessive deformation.

Further, the positioning hole 110 includes a second positioning hole 110B located at the center of the bottom plate 100, the bottom plate 100 is provided with an auxiliary through hole 140 adjacent to the second positioning hole 110B, the bottom plate 100 is further provided with a second slit 130B, and the second slit 130B communicates the second positioning hole 110B with the auxiliary through hole 140. Because the second positioning hole 110B has a certain distance from the edge of the bottom plate 100, if the second positioning hole 110B is provided with an excessively long communication gap, the bottom plate is easy to be broken if the second positioning hole 110B is not convenient to perform force control in the process of extruding the positioning pin 200, and the auxiliary through hole 140 is provided to effectively control the length of the second gap 130B, so that the extrusion space of the second positioning hole 110B is increased.

Further, the auxiliary through hole 140 is an arc-shaped through hole, and the arc-shape is toward the second positioning hole 110B. Providing the arc shape can better provide the extrusion space for the second positioning hole 110B, and the acting force is smaller when the second positioning hole 110B expands the extrusion space to both sides.

In one possible implementation of this embodiment, referring to fig. 6, the bottom plate 100 further includes a notch 150, and a bottom of the notch 150 is close to the second positioning hole 110B. The notch 150 is configured to facilitate secondary measurement of the center point distance using a measuring tool (e.g., a vernier caliper), further reducing measurement errors, and improving calibration accuracy.

In one possible implementation manner of this embodiment, in the process that the positioning hole 110 fixes the positioning pin 200 and the base plate 100 through the pressing force to the fixing portion 210, the base plate 100 will elastically deform due to the pressing force, and in order to ensure that the base plate 100 will not be broken during the elastic deformation, the base plate 100 is made of a polymer plastic material. Illustratively, the material of the base plate 100 includes one of Polyethylene (PE), polytetrafluoroethylene (PTFE), polyvinylidene fluoride (Polyvinylidene Difluoride, PVDF), and the like, and preferably, the base plate 100 is made of Polyethylene. In order to ensure that the positioning pin 200 does not damage the electrode when contacting the upper electrode, the positioning pin 200 may be made of a polymer plastic material, and the positioning pin 200 may be made of one of polyvinylidene fluoride Polyvinylidene Difluoride, PVDF), polytetrafluoroethylene (PTFE), nylon, and the like, preferably, the positioning pin 200 is made of nylon.

In this embodiment, the bottom plate 100 of the electrode distance calibration device may be set to an integrated structure, and may be integrally placed in an actual operation process, so that an error caused by inconsistent placement of points may not occur, and meanwhile, the use, storage and storage of the device are convenient.

In this embodiment, the electrode distance calibration device can be used for calibrating the distance between the upper electrode and the lower electrode in a plurality of fields and devices. The electrode distance calibration device can be used for calibrating the distance between an upper electrode and a lower electrode of an etching machine of semiconductor manufacturing equipment, and the specific working principle and the using flow can be as follows: first, the plurality of limiting portions 212 are pushed to the end of the limiting hole 112 connected to the connecting hole 111, the plurality of measuring portions 220 are protruded with respect to the first surface 120A, and then the bottom plate 100 is placed on the lower electrode, and the second surface 120B is in contact with the lower electrode. The motor then drives the upper electrode toward the lower electrode, pressing the positioning pin 200. After the pressing is finished, the distance data at different positions between the upper electrode and the lower electrode are primarily read according to the measuring marks on the positioning pin 200, and meanwhile, the distance of the center point at the notch can be secondarily confirmed and measured by using a vernier caliper, so that the accuracy of the data is ensured. And finally, collecting data of the obtained distance between the upper electrode and the lower electrode, and if the difference exists, performing data compensation by adjusting parameters in the etching machine software, and performing the test again until the set production requirement standard is reached.

In summary, the present application provides an electrode distance calibration device, which includes a bottom plate, a positioning hole, and a positioning pin corresponding to the positioning hole. The bottom plate is provided with a first surface and a second surface which are opposite, and the positioning holes penetrate through the first surface and the second surface. The locating pin includes fixed part and the measuring part of being connected with the fixed part, and the fixed part is arranged in the locating hole, and the extrusion force that the locating pin acted on the fixed part through the locating hole is fixed with the bottom plate, and measuring part is used for measuring the interval between upper and lower electrode for the convex part of first surface. In the structure, the distance between the upper electrode and the lower electrode can be intuitively obtained through the measuring part of the locating pin, so that the operation steps are effectively simplified, the calibration efficiency and accuracy are improved, and the equipment can be ensured to stably run for a long time and the processing quality is ensured.

The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the same, but rather, various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims (10)

1. The electrode distance calibration device is characterized by comprising a bottom plate, positioning holes and positioning pins corresponding to the positioning holes;

the bottom plate is provided with a first surface and a second surface which are opposite, and the positioning holes penetrate through the first surface and the second surface;

the locating pin comprises a fixing part and a measuring part connected with the fixing part, the fixing part is arranged in the locating hole, the locating pin is fixed with the bottom plate through the extrusion force of the locating hole acting on the fixing part, and the part of the measuring part protruding relative to the first surface is used for measuring the distance between the upper electrode and the lower electrode of the etching machine.

2. The electrode distance calibration device according to claim 1, wherein the number of the positioning holes is plural, and geometric center lines of cross sections of any two positioning holes are not parallel in a plane parallel to the first surface.

3. The electrode distance calibration device of claim 2, wherein the base plate is a disk;

the positioning holes are distributed on the bottom plate in a central symmetry mode relative to the geometric center of the bottom plate.

4. An electrode distance calibration device according to any one of claims 1 to 3, the positioning hole comprising a connection hole and a limiting hole, the connection hole being adjacent to the first surface and the limiting hole being adjacent to the second surface;

the connecting holes and the limiting holes are cylindrical holes, the central axis of each connecting hole coincides with the central axis of each limiting hole, and the aperture of each connecting hole is smaller than that of each limiting hole;

the fixed part comprises a limiting part and a connecting part, and the limiting part is connected with the measuring part through the connecting part; the limiting part and the connecting part are cylindrical, the central axis of the limiting part coincides with the central axis of the connecting part, and the radius of the connecting part is smaller than the aperture of the connecting hole;

the locating pin is fixed with the bottom plate through the extrusion force of the limiting hole acting on the limiting part.

5. The electrode distance calibration device according to claim 4, wherein the measuring portion is cylindrical, a central axis of the measuring portion coincides with a central axis of the connecting portion, and a radius of the measuring portion is smaller than a bore diameter of the connecting hole;

the measuring part is provided with measuring marks distributed along the extending direction of the measuring part, and the measuring marks are used for measuring the distance between the upper electrode and the lower electrode of the etching machine.

6. The electrode distance calibration device of claim 4, wherein the positioning hole comprises a first positioning hole near an edge of the base plate, the base plate being provided with a first slit, the first slit communicating with the first positioning hole via the edge of the base plate.

7. The electrode distance calibration device according to claim 6, wherein the positioning hole includes a second positioning hole located at a center of the bottom plate, the bottom plate is provided with an auxiliary through hole near the second positioning hole, the bottom plate is further provided with a second slit, and the second slit communicates the second positioning hole with the auxiliary through hole.

8. The electrode distance calibration device according to claim 7, wherein the auxiliary through hole is an arc-shaped through hole; the arc of the auxiliary through hole faces the second positioning hole.

9. The electrode distance calibration device of claim 7, wherein the base plate further comprises a notch, a bottom of the notch being proximate the second locating hole.

10. The electrode distance calibration device according to claim 4, wherein the base plate is made of one of polyethylene, polyvinylidene fluoride and polytetrafluoroethylene, and the positioning pin is made of one of polyvinylidene fluoride, polytetrafluoroethylene and nylon.

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