CN217238169U

CN217238169U - Probe assembly capable of monitoring needle pressure gram weight

Info

Publication number: CN217238169U
Application number: CN202122975861.XU
Authority: CN
Inventors: 任泽霞; 陈锋
Original assignee: Hubei Guanganlun Chip Co ltd
Current assignee: Hubei Guanganlun Chip Co ltd
Priority date: 2021-11-30
Filing date: 2021-11-30
Publication date: 2022-08-19
Anticipated expiration: 2031-11-30

Abstract

The utility model belongs to the technical field of semiconductor device production and manufacturing, in particular to a probe assembly capable of monitoring the needle weight, which comprises a probe seat, a connector, a weighing sensor and a fixed frame; one end of the probe seat is provided with a groove for fixing a probe, and the other end of the probe seat is connected with one end of the weighing sensor through the connector; a first screw for fixing the needle handle is arranged on one side of the groove close to the connector; the other end of the weighing sensor is connected with the bottom of the fixing frame, and the top of the fixing frame is fixed on the probe platform. The utility model fixes the probe on the probe seat, and connects the probe seat with one end of the weighing sensor through the connector, thereby monitoring the needle weight in real time; and the straight needle can be directly inserted by matching the oblique angle of the top surface of the probe seat and the length of the probe with the pressing angle, so that the probe seat has the advantages of convenience in replacing the probe and convenience in angle adjustment, and the problem that the common probe seat is difficult to replace the needle is solved.

Description

Probe assembly capable of monitoring needle pressure gram weight

Technical Field

The utility model belongs to the technical field of semiconductor device manufacturing, concretely relates to can monitor probe assembly of needle weigh gram.

Background

In the production and manufacturing process of semiconductor devices, testing is an important means for checking whether the product performance is qualified, a probe is required to contact a chip electrode for chip testing, and power-up testing is carried out on the chip electrode, so that whether the needle pressure gram weight of the probe contacting the chip electrode is proper is important. If the gram weight of the probe is too small, the probe is not stably contacted with the chip, and the test parameters are not accurate; if the needle pressing gram weight is too large, the stress borne by the chip is too large, and the gold layer of the chip electrode can be damaged, so that the reliability of the chip is influenced. Under the common condition, when the needle pressure gram weight of the chip is between 3 and 5g, the stress of the chip is proper, namely, the situation of poor contact is avoided, and the gold layer of the electrode cannot be damaged.

At present, a probe assembly adopted by a semiconductor test can only judge whether a probe contacts a chip or not, and cannot monitor the specific needle grammage. The defects of the current probe assembly are as follows: firstly, the method for measuring the needle pressure gram weight is inconvenient to operate and comprises the following steps: the whole probe seat is disassembled, and the gram weight is measured by a needle manometer; secondly, the accuracy of the needle weight is not good enough: after the measurement is finished, the probe seat is mounted back, and the existence of the change of the needle pressure gram weight cannot be judged; thirdly, the service life of the probe cannot be accurately monitored: the abrasion of the probe is not uniform due to the change of the gram weight of the needle in the test process, and the service life of the probe cannot be ensured; fourth, test cost increases: the product performance test is inaccurate due to the change of the needle weight in the test process, and the test cost is increased due to retest or scrap caused by the damage of a gold layer of a chip electrode. At present, a curved needle is used in a probe assembly, the tail end of the needle is arranged in a hole, a needle handle is arranged in a clamping groove and then fixed through a screw, auxiliary tools such as a needle changer or tweezers are required during installation, the needle is inconvenient to disassemble and assemble, and the angle of the needle cannot be adjusted after being fixed.

Therefore, it is necessary to design a probe assembly capable of accurately monitoring the needle grammage and solving the disadvantages of the conventional probe assembly.

Disclosure of Invention

An object of the utility model is to overcome prior art's defect, provide a can accurate control needle grammes per square metre and change convenient probe subassembly, solved the partial problem among the prior art at least.

In order to achieve the purpose, the technical scheme of the utility model is a probe assembly capable of monitoring the gram weight of a probe, which comprises a probe seat, a connector, a weighing sensor and a fixing frame; one end of the probe seat is provided with a groove for fixing a probe, and the other end of the probe seat is connected with one end of the weighing sensor through the connector; a first screw for fixing the needle handle is arranged on one side of the groove close to the connector; the other end of the weighing sensor is connected with the bottom of the fixing frame, and the top of the fixing frame is fixed on the probe table.

Further, the probe seat comprises a left part and a right part, and an included angle between the top surface of the left part and the top surface of the right part is an oblique angle; the groove is arranged at the left end of the left part of the probe seat.

Furthermore, the right end of the right part of the probe seat is provided with an L-shaped connecting piece, and the left end of the connector is arranged on the horizontal part of the L-shaped connecting piece and connected through a second screw.

Furthermore, a plurality of through holes are formed in the probe seat.

Furthermore, the probe seat is made of brass, and the connector is made of plastic.

Further, the left end of the weighing sensor is arranged on the right end of the connector and connected through a third screw.

Furthermore, the bottom of mount set up in on weighing sensor's the right-hand member and through fourth screwed connection.

Furthermore, the top of the fixing frame is fixed with the probe station through a movable screw.

Furthermore, a wire slot is arranged on the fixing frame, and a probe seat wiring on the probe seat and a weighing sensor wiring on the weighing sensor are both fixed in the wire slot.

Furthermore, a fifth screw for fixing the probe seat wiring and the weighing sensor wiring is arranged on one side of the wiring groove, and a screw cap of the fifth screw at least partially extends into the wiring groove.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) the probe component capable of monitoring the needle weight provided by the utility model accurately controls the needle weight in real time through the weighing sensor;

(2) the utility model provides a but monitor not unidimensional probe of probe subassembly mountable of needle acryl grammes per square metre, and dress, get the convenience.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a perspective view of a probe assembly capable of monitoring a needle gage weight according to an embodiment of the present invention;

in the figure: 1. a probe base; 101. a trench; 102. a first screw; 103. a through hole; 104. wiring of the probe seat; 105. oblique angle; 2. a connector; 201. a second screw; 202. a third screw; 3. a weighing sensor; 301. wiring of the weighing sensor; 302. a fourth screw; 4. a fixed mount; 401. a wire slot; 402. a fifth screw; 403. a movable screw.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.

The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of the present invention, unless otherwise specified, "a number" means at least one.

As shown in fig. 1, the present embodiment provides a probe assembly capable of monitoring a needle grammage, which includes a probe base 1, a connector 2, a weighing sensor 3 and a fixing frame 4; one end of the probe seat 1 is provided with a groove 101 for fixing a probe, and the other end of the probe seat is connected with one end of the weighing sensor 3 through the connector 2; a first screw 102 for fixing a needle handle is arranged on one side of the groove 101 close to the connector 2; the other end of the weighing sensor 3 is connected with the bottom of the fixing frame 4, and the top of the fixing frame 4 is fixed on the probe table. This embodiment is through designing slot 101 on probe seat 1, fixes the probe in the slot 101 on probe seat 1 to probe seat 1 passes through connector 2 and is connected with weighing sensor 3's one end, and weighing sensor 3's the other end passes through mount 4 and is fixed with the probe platform, can monitor the needle weighing gram weight in real time through weighing sensor 3, thereby realizes accurate, real-time control needle weighing gram weight.

The size of the groove 101 in this embodiment can be set according to the diameter of the probe, and as an implementation manner, the groove 101 is a semi-circular groove with a diameter of 1 mm. In one embodiment, two first screws 102 are disposed at the right side of the groove 101, and the nut portion of the first screws 102 extends into the groove 101 for fixing the needle shaft in the groove 101.

Further, the probe seat 1 comprises a left part and a right part, and the included angle between the top surface of the left part and the top surface of the right part is an oblique angle 105; the groove 101 is disposed at the left end edge of the left portion of the probe holder 1. In the embodiment, an oblique angle 105 is formed between the top surfaces of the left part and the right part of the probe seat 1 and is used for controlling the inclination of the probe; the angle 105 may be modified according to the desired angle, and as an embodiment, the angle of the angle 105 is 120 °.

Furthermore, the right end of the right part of the probe base 1 is provided with an L-shaped connecting member, and the left end of the connector 2 is arranged on the horizontal part of the L-shaped connecting member and connected by a second screw 201. In this embodiment, the horizontal portion of the L-shaped connecting member and the left end of the connector 2 are correspondingly provided with two second screw holes, and the second screw holes on the L-shaped connecting member are connected with the corresponding second screw holes on the left end of the connector 2 through second screws 201.

Furthermore, a plurality of through holes 103 are formed on the probe base 1. As shown in fig. 1, through holes 103 are formed in the middle of the left and right sides of the probe holder 1 to reduce the weight of the probe holder 1, and the through holes 103 may be circular to provide a good appearance.

Further, the probe seat 1 is made of brass, and the connector 2 is made of plastic. The connector 2 of the present embodiment is a rectangular parallelepiped and is made of an insulator material, specifically, a plastic material. The weighing sensor 3 of the present embodiment may select sensors of different specifications according to the required gram weight, and as one implementation, the weighing sensor 3 weighs 300g at maximum.

Further, the left end of the load cell 3 is disposed on the right end of the connector 2 and connected by a third screw 202. In this embodiment the right-hand member of connector 2 with it is equipped with two third screw to correspond on weighing sensor 3's the left end, just third screw on the right-hand member of connector 2 with the third screw that corresponds on the weighing sensor 3 left end passes through third screw 202 and connects.

Further, the bottom of the fixing frame 4 is disposed on the right end of the weighing sensor 3 and connected by a fourth screw 302. In this embodiment, the right end of the weighing sensor 3 and the bottom of the fixing frame 4 are correspondingly provided with two fourth screw holes, and the fourth screw hole on the right end of the weighing sensor 3 is connected with the fourth screw hole corresponding to the bottom of the fixing frame 4 through a fourth screw 302.

Further, the top of the fixing frame 4 is fixed with the probe station through a movable screw 403. In this embodiment, the top of the fixing frame 4 is a small platform, and a screw hole is formed on the small platform for installing a movable screw 403 to fix the fixing frame 4 on the probe station, so as to fix the whole probe assembly on the probe station.

Further, a wire slot 401 is arranged on the fixing frame 4, and both the probe seat wiring 104 on the probe seat 1 and the weighing sensor wiring 301 on the weighing sensor 3 are fixed in the wire slot 401. In the embodiment, a probe seat wiring 104 is welded on the side surface of the L-shaped connecting piece of the probe seat 1 and is used for connecting electricity; the weighing sensor 3 is connected with a weighing sensor wiring 301; by providing the wire groove 401 at one side of the holder 4, the probe mount wire 104 and the load cell wire 301 can be placed in the wire groove 401.

Furthermore, a fifth screw 402 for fixing the probe seat wire 104 and the load cell wire 301 is disposed on one side of the wire slot 401, and a nut of the fifth screw 402 at least partially extends into the wire slot 401. In one embodiment, the wire groove 401 is arranged in a vertical direction, and the upper and lower portions of one side of the wire groove 401 are respectively provided with a fifth screw 402, and the probe mount wire 104 and the load cell wire 301 are fixed in the wire groove 401 by partially extending a nut of the fifth screw 402 into the wire groove 401.

The operation of the probe assembly capable of monitoring the needle grammage of the present embodiment is as follows: the groove 101 of the probe holder 1 houses and presses down the probe, which applies/releases pressure to the chip, transmitted through the load cell 3. The probe subassembly of this embodiment fixes the probe on probe seat 1, pushes down the angle through the bevel 105 and the probe length matching of probe seat 1 top surface, can directly place straight needle, has the convenient, the convenient advantage of angle regulation of change probe, has solved ordinary probe seat and has traded the exact point of the needle difficulty, but simultaneously real time monitoring needle presses grammes per square metre.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A probe assembly capable of monitoring the grammage of a probe is characterized in that: comprises a probe seat, a connector, a weighing sensor and a fixing frame; one end of the probe seat is provided with a groove for fixing a probe, and the other end of the probe seat is connected with one end of the weighing sensor through the connector; a first screw for fixing the needle handle is arranged on one side of the groove close to the connector; the other end of the weighing sensor is connected with the bottom of the fixing frame, and the top of the fixing frame is fixed on the probe table.

2. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the probe seat comprises a left side part and a right side part, and an included angle between the top surface of the left side part and the top surface of the right side part is an oblique angle; the groove is arranged at the left end of the left part of the probe seat.

3. A probe assembly for monitoring grammage of needles as claimed in claim 2, wherein: the right end of the right side part of the probe seat is provided with an L-shaped connecting piece, and the left end of the connector is arranged on the horizontal part of the L-shaped connecting piece and connected through a second screw.

4. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: and a plurality of through holes are formed in the probe seat.

5. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the probe seat is made of brass, and the connector is made of plastic.

6. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the left end of the weighing sensor is arranged on the right end of the connector and is connected with the right end of the connector through a third screw.

7. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the bottom of the fixing frame is arranged on the right end of the weighing sensor and connected through a fourth screw.

8. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the top of the fixing frame is fixed with the probe station through a movable screw.

9. A probe assembly for monitoring grammage of needles as claimed in claim 1, wherein: the fixing frame is provided with a wire slot, and the probe seat wiring on the probe seat and the weighing sensor wiring on the weighing sensor are fixed in the wire slot.

10. A probe assembly for monitoring grammage of needles as claimed in claim 9, wherein: and a fifth screw for fixing the probe seat wiring and the weighing sensor wiring is arranged on one side of the wiring groove, and a screw cap of the fifth screw at least partially extends into the wiring groove.