CN218068209U - Test needle device and chip testing machine - Google Patents

Test needle device and chip testing machine Download PDF

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Publication number
CN218068209U
CN218068209U CN202221716920.XU CN202221716920U CN218068209U CN 218068209 U CN218068209 U CN 218068209U CN 202221716920 U CN202221716920 U CN 202221716920U CN 218068209 U CN218068209 U CN 218068209U
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China
Prior art keywords
test
plate
chip
testing
needle
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CN202221716920.XU
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Chinese (zh)
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段雄斌
张利利
庞华贵
何选民
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Shenzhen Biaopu Semiconductor Co ltd
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Shenzhen Biaopu Semiconductor Co ltd
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Abstract

The application belongs to the technical field of chip testing, and particularly relates to a testing needle device and a chip testing machine, wherein the testing needle device comprises a fixed seat, a strain sensor, a connecting seat and a testing needle; the strain sensor is provided with a fixed end and a detection end which are oppositely arranged, and the fixed end is arranged on the fixed seat; the connecting seat is connected with the detection end; the test needle has relative test end and the installation end that sets up, and the test end is used for contacting with the pin of chip, and the installation end is installed on the connecting seat. Whether this test needle device can accurately judge through this strain sensor feedback signal of telecommunication and test the needle and contact with the pin of chip, and need not to make a round trip to go up and down repeatedly the test needle, and the recognition time is short, and is efficient, and judges that the accuracy is good, and the precision is high, can avoid in the testing process yields erroneous judgement, in addition, can calculate the actual atress of test needle according to meeting an emergency to make the atress of test needle can quantify, realize the automatic data quantization that obtains the pressure that the test needle receives.

Description

Test needle device and chip testing machine
Technical Field
The application belongs to the technical field of chip testing, and particularly relates to a testing needle device and a chip testing machine.
Background
After the chip is manufactured, the chip is generally required to be subjected to photoelectric characteristic testing, at present, the chip is generally tested in a testing needle mode, a lifting device drives a testing needle to move downwards, and the testing needle is abutted against pins of the chip to realize the electrical conduction of the chip so as to obtain the electrical characteristics of the chip; however, in the actual testing process, the proximity switch is usually adopted to move the testing needle back and forth to obtain the position of the testing needle, and this obtaining method cannot accurately identify whether the testing needle abuts against the pin of the chip, so that the identification precision is low, the judgment time is long, the identification speed is slow, and the efficiency is low.
SUMMERY OF THE UTILITY MODEL
The application aims to provide a test needle device and a chip testing machine, and aims to solve the technical problems that whether a test needle is abutted to a pin of a chip or not cannot be accurately identified due to the fact that a test mode of a proximity switch is adopted in the position of the test needle in the prior art, identification precision is low, judgment time is long, identification speed is low, and efficiency is low.
In order to achieve the purpose, the technical scheme adopted by the application is as follows: a test pin device comprising:
a fixed seat;
the strain sensor is provided with a fixed end and a detection end which are oppositely arranged, and the fixed end is arranged on the fixed seat;
the connecting seat is connected with the detection end; and
the testing needle has a testing end and a mounting end which are arranged oppositely, the testing end is used for contacting with a pin of the chip, and the mounting end is mounted on the connecting seat.
Optionally, the strain gauge sensor is a balance beam load cell.
Optionally, the fixing seat includes a fixing block and a protective cover, the fixing end is connected to the fixing block, the protective cover is disposed outside the balance beam type weighing sensor, and the detection end is exposed outside the protective cover and connected to the connecting seat.
Optionally, the protective cover comprises a side plate, an upper protective plate and a lower protective plate, the upper protective plate and the lower protective plate are connected with the upper side and the lower side of the side plate, a protective groove is formed by the upper protective plate, the lower protective plate and the side plate in a surrounding mode, and the balance beam type weighing sensor is suspended in the protective groove.
Optionally, the connecting seat is provided with a weight position for the installation of a calibration weight.
Optionally, the connecting seat includes a supporting plate and a cover plate, the cover plate is mounted on the supporting plate, and the mounting end is clamped and fixedly mounted between the cover plate and the supporting plate.
Optionally, a fixing hole is formed in the supporting plate, the mounting end is bent to form a bending section, and the bending section penetrates through the fixing hole.
Optionally, the connecting seat further comprises an insulating block, and the insulating block is connected between the detection end of the strain gauge sensor and the supporting plate.
Optionally, the supporting plate is further connected with a signal connection plate for electrically connecting with an external control device.
One or more technical solutions in the test pin device provided by the present application have at least one of the following technical effects: when the chip is in operation, after the chip is placed at a preset position below the test needle, the lifting module drives the test needle to move downwards, so that the test end of the test needle to be tested is in contact with the pin of the chip, and in order to ensure good contact between the pin of the chip and the test needle, the test needle is usually tightly pressed on the pin of the chip, meanwhile, the chip can give an upward acting force to the test needle, the acting force can be transmitted to the detection end of the strain sensor through the test needle and the connecting seat, and the detection end of the strain sensor is driven to move upwards, so that the strain sensor is strained and feeds back an electric signal, and whether the test needle is in contact with the pin of the chip can be accurately judged through the electric signal fed back by the strain sensor without repeatedly lifting the test needle back and forth, the recognition time is short, the efficiency is high, the judgment accuracy is good, the accuracy is high, the yield misjudgment in the test process can be avoided, the response time accuracy of the test needle is high, the chip testing efficiency can be improved, the actual stress of the test needle can be quantified, the quantitative pressure of the test needle can be obtained automatically, and the damage of the chip can be reduced, and the chip can be stably tested in the use process.
The application adopts another technical scheme that: a chip testing machine comprises the testing needle device.
The chip testing machine is characterized in that the testing needle device is arranged on the base, the testing needle device comprises a strain type sensor, the strain type sensor is arranged on the base, the strain type sensor is arranged on the strain type sensor, the strain type sensor is used for feeding back an electric signal, the electric signal is used for feeding back the electric signal, the electric signal is used for judging whether the testing needle is in contact with a pin of a chip or not, the identification time is short, the efficiency is high, the judgment accuracy is good, the good product misjudgment in the testing process can be avoided, the feedback time through the strain type sensor is short, the efficiency is high, the response time and the accuracy of the testing needle are high, the chip testing efficiency can be improved, in addition, the actual stress of the testing needle can be calculated according to strain, the stress of the testing needle can be quantized, the data quantization of the pressure borne by the automatic testing needle is realized, then, the preset pressure range can be set in the actual using process, the stable contact between the testing needle and the pin of the chip can be ensured, the chip can be avoided, and the chip misjudgment of the good product quality and the chip can be reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the embodiments or the prior art description will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings may be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic structural diagram of a test pin device provided in an embodiment of the present application.
Fig. 2 is an exploded view of the test needle device shown in fig. 1.
Fig. 3 is a schematic structural diagram of a test pin device provided in an embodiment of the present application.
Wherein, in the figures, the various reference numbers:
10-fixed seat 11-fixed block 12-protective cover
20-strain sensor 21-fixed end 22-detection end
30-connecting seat 31-supporting plate 32-cover plate
33-insulating block 40-test needle 41-test end
42-mounting end 50-calibration weight 60-signal connecting plate
70-chip 120-protective groove 121-side plate
122-upper protection plate 123-lower protection plate 124-fixing plate
311-fixing hole 312-first clamping half-hole 321-weight position
421-bending section.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in fig. 1-3, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functionality throughout. The embodiments described below with reference to fig. 1 to 3 are exemplary and intended to be used for explaining the present application and should not be construed as limiting the present application.
In the description of the present application, it is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings only for the convenience of description and simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and thus, are not to be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
As shown in fig. 1 to 3, in an embodiment of the present application, a test pin device is provided, which is used in cooperation with a control device, and the test pin device can electrically connect a chip 70, and can obtain an electrical parameter of the chip 70, and feed the electrical parameter back to the control device, and the electrical property of the chip 70 is obtained after the parameter is analyzed by the control device, so as to implement an electrical test of the chip 70, where it should be noted that the control device may be formed by integrating an electrical control component, an information processing center and a data processing center, and may also be a control device that is mature in the market and can be applied in a chip tester, for example: a PLC controller or other control device such as a computer.
The test needle device of the embodiment of the application comprises a fixed seat 10, a strain sensor 20, a connecting seat 30 and a test needle 40; the fixing seat 10 is fixed on a lifting module in the chip testing machine, the lifting module drives the testing needle 40 to move up and down, so that the testing end 41 of the testing needle 40 is contacted with or separated from a pin of the chip 70, and when the testing end 41 of the testing needle 40 is contacted with the pin of the chip 70, the chip 70 is electrically conducted, so that the electrical parameters of the chip 70 are obtained and fed back to the control device, and the electrical performance of the chip 70 is obtained; the strain sensor 20 is provided with a fixed end 21 and a detection end 22 which are oppositely arranged, and the fixed end 21 is arranged on the fixed seat 10; it is understood that the strain gauge sensor 20 is a sensor based on measuring the strain caused by force-free deformation and capable of converting the strain into a resistance change; the connecting seat 30 is connected with the detecting end 22, the testing pin 40 has a testing end 41 and a mounting end 42 which are oppositely arranged, the testing end 41 is used for contacting with the pin of the chip 70, and the mounting end 42 is mounted on the connecting seat 30, it can be understood that the connecting seat 30 is used as a mounting base body of the testing pin 40 and plays a role of supporting and fixing the testing pin 40; the testing pin 40 is a needle structure capable of conducting electricity and electrically connected to the control device to feed back the electrical parameters of the chip 70 to the control device.
The working principle of the test pin device according to the embodiment of the present application is described below, after the chip 70 is placed at the preset position below the test pin 40, the lifting module drives the test pin 40 to move downward, so that the test end 41 of the test pin 40 to be tested contacts with the pin of the chip 70, and in order to ensure good contact between the pin of the chip 70 and the test pin 40, the test pin 40 is normally pressed against the pin of the chip 70, meanwhile, the chip 70 gives an upward acting force to the test pin 40, the acting force is transmitted to the test end 22 of the strain sensor 20 through the test pin 40 and the connecting seat 30, and drives the test end 22 of the strain sensor 20 to move upward, so that the strain sensor 20 is strained and feeds back an electrical signal, and whether the test pin 40 contacts with the pin of the chip 70 can be accurately determined by feeding back the electrical signal from the strain sensor 20, without repeatedly lifting the test pin 40 back and forth, the recognition time is short, the efficiency is high, the accuracy and precision is high, thereby avoiding erroneous determination of good products in the test process, and improving the accuracy of the response of the test pin 40, and ensuring that the chip 70 can be automatically tested according to the stress of the chip, and the chip 70, and the stress of the chip can be stably determined, and the chip 70, and the chip can be tested.
In this embodiment, it should be noted that the data relationship between the pressure applied to the test needle 40 and the strain obtained by the strain gauge sensor 20 may be obtained according to calculation and analysis or according to experimental test data, which is not described herein again.
In another embodiment of the present application, the strain gauge sensors 20 of the test pin apparatus are provided as a balanced beam load cell. The balance beam type weighing sensor is adopted, so that the precision is high, the structure is simple and compact, and the processing and the manufacturing of the test needle device are convenient; in addition, the balance beam type weighing sensor can stably support the connecting block and the test needle 40 without adopting other structures for supporting and fixing, so that the structure of the test needle device is simpler and more compact; of course, in other embodiments, other types of strain gauge sensors 20 may be used, and the pressure of the test needle 40 may be automatically obtained.
In another embodiment of the present application, as shown in fig. 1 and 2, a fixing base 10 of a test pin device is provided, which includes a fixing block 11 and a protective cover 12, wherein the fixing end 21 is connected to the fixing block 11, the protective cover 12 is covered outside the balance beam type weighing sensor, and the detecting end 22 is exposed outside the protective cover 12 and connected to a connecting base 30. The fixed block 11 is used for connecting the lifting end of the lifting module and plays a role in supporting the whole test pin device; the protective cover 12 covers the strain gauge sensor 20, and plays a role in protecting the balance beam type weighing sensor, so that the balance beam type weighing sensor can operate safely, stably and efficiently.
In another embodiment of the present application, as shown in fig. 1 and 2, the protective cover 12 of the testing needle device includes a side plate 121, an upper protection plate 122 and a lower protection plate 123, the upper protection plate 122 and the lower protection plate 123 are connected to the upper side and the lower side of the side plate 121, wherein the upper protection plate 122 and the lower protection plate 123 are arranged at an upper and a lower parallel interval and are located on the same side of the side plate 121, so that the upper protection plate 122, the lower protection plate 123 and the side plate 121 surround to form a protection groove 120, the balance beam type weighing sensor is suspended in the protection groove 120, and the interval between the upper protection plate 122 and the lower protection plate 123 is greater than the thickness of the balance beam type weighing sensor, so that the strain type sensor 20 can freely deform along with the testing needle 40 in the protection groove 120. The shield groove 120 provides a mounting space and a deformation space for the strain gauge sensor 20, and at the same time, the upper shield plate 122 and the lower shield plate 123 may block excessive deformation of the strain gauge sensor 20 upward or downward, thereby protecting the strain gauge sensor 20 from damage.
In another embodiment of the present application, as shown in fig. 1 and 2, the protective cover 12 of the test pin device further includes a fixing plate 124, the fixing plate 124 is connected to an end of the upper protection plate 122 facing away from the connection seat 30, and the fixing plate 124 is connected to the fixing block 11. The fixing plate 124 can increase the connection area between the protection cover 12 and the fixing block 11, so that the operation of connecting the protection cover 12 and the fixing block 11 is simple and convenient, and the connection reliability between the protection cover 12 and the fixing block 11 can also be increased.
In another embodiment of the present application, as shown in fig. 1 and fig. 2, the fixing plate 124, the side plate 121, the upper protection plate 122 and the lower protection plate 123 of the provided test needle device may be integrally injection-molded or integrally 3D-printed, so as to manufacture the protection cover 12 of an integrated structure, so that the protection cover 12 has high structural strength and has a better protection effect on the balance beam type weighing sensor; in addition, the manufacturing method of the protective cover 12 is simple, and the manufacturing cost of the test needle device is favorably reduced.
In another embodiment of the present application, as shown in fig. 1 and 2, a test pin device attaching seat 30 is provided with a weight position 321 for installing the calibration weight 50. In specific application, when the test pin 40 is not in contact with the chip 70, the calibration weight 50 with a preset weight can be placed at the weight position 321, the strain sensor 20 is subjected to the action of the gravity of the calibration weight 50 to generate strain so as to feed back an electric signal, corresponding pressure is obtained through analysis and calculation according to the feedback electric signal, and if the pressure is equal to the gravity of the calibration weight 50, the test pin device is in normal operation; if the pressure is not equal to the gravity of the calibration weight 50, the test error of the test pin device is indicated, so that the calibration of the test pin device can be realized at any time; if the calibration has a test error, the test error can be processed in time, so that the misjudgment of good products and defective products of the chip 70 is reduced; if errors occur in calibration, the method can be overhauled according to actual conditions or automatically calibrated by using a control device; the calibration can be realized by placing the preset calibration weight 50 at the weight position 321, and the calibration operation is simple, convenient and quick. The weight of the calibration weight 50 may be 2g, 5g, or the like, and may also be selected according to actual test requirements, which is not limited herein.
In another embodiment of the present application, as shown in fig. 1 and 2, the connecting socket 30 of the test pin device is provided to include a support plate 31 and a cover plate 32, the cover plate 32 is mounted on the support plate 31, and the mounting end 42 of the test pin 40 is fixedly clamped between the cover plate 32 and the support plate 31. The mounting end 42 of the test pin 40 is clamped and fixed by the supporting plate 31 and the cover plate 32, and the fixing mode is simple and reliable; in addition, the supporting plate 31 and the cover plate 32 are respectively provided with a first clamping half hole 312 and a second clamping half hole, when the cover plate 32 is fixed on the supporting plate 31, the first clamping half hole 312 and the second clamping half hole are surrounded to form a clamping hole, and the mounting end 42 of the test needle 40 is clamped and fixed in the clamping hole, so that the mounting end 42 of the test needle 40 is tightly attached to the inner wall of the clamping hole, the contact area is large, and the fixing reliability of the test needle 40 is good.
In another embodiment of the present application, as shown in fig. 1 and 2, a fixing hole 311 is provided on the supporting plate 31 of the testing needle device, and the mounting end 42 of the testing needle 40 is bent to form a bending section 421, and the bending section 421 is inserted into the fixing hole 311. Through the bending section 421 inserted in the fixing hole 311, the testing pin 40 does not rotate, the fixing reliability of the testing pin 40 is better, the testing end 41 of the testing pin 40 can be accurately and stably contacted with the chip 70, and the testing precision of the chip 70 is improved.
In this embodiment, weight position 321 sets up in the upper surface of apron 32, and has seted up the joint groove, and calibration weight 50's lower extreme block is in the joint inslot, and calibration weight 50 can not rock relative apron 32 like this to increase the accuracy of calibration.
In another embodiment of the present application, as shown in fig. 1 and 2, the connection holder 30 of the test pin device further includes an insulating block 33, and the insulating block 33 is connected between the detection end 22 of the strain gauge sensor 20 and the support plate 31. The arrangement of the insulating block 33 enables the testing needle 40 to be insulated from the strain gauge sensor 20, and the strain gauge sensor 20 cannot be damaged or errors in pressure testing of the testing needle 40 cannot occur due to the fact that the testing needle 40 is electrically conducted with the strain gauge sensor 20.
In this embodiment, the upper surface of the insulating block 33 is connected to the strain gauge 20, and the lower surface of the insulating block 33 is connected to the support plate 31, so that the strain gauge 20 is completely separated from the support plate 31.
In another embodiment of the present application, as shown in fig. 1 and 2, a signal connection board 60 for electrically connecting with an external control device is further connected to the supporting board 31 of the test pin device. The signal connection board 60 facilitates electrical connection between the test pin 40 and the control device.
It should be noted that the connection between the fixing block 11 and the lifting module may be a fixed connection, such as welding, or a detachable connection, such as screwing, clamping, etc.; similarly, the fixing plate 124 and the fixing block 11 may be fixedly connected, such as welded, or detachably connected, such as screwed, clamped, etc.; similarly, the connection between the balance beam type weighing sensor and the fixing plate 124 can be a fixed connection, such as welding, or a detachable connection, such as screwing, clamping, etc.; similarly, the connection between the insulating block 33 and the balance beam type weighing sensor can be fixed connection, such as welding, or detachable connection, such as screwing, clamping, etc.; the connection between the insulating block 33 and the supporting plate 31, between the supporting plate 31 and the cover plate 32, and between the signal connecting plate 60 and the supporting plate 31 may be fixed connection, such as welding, or detachable connection, such as screwing, clamping, etc.
The test needle device of this application embodiment includes fixing base 10, balanced beam type weighing sensor, connecting seat 30 and test needle 40, and balanced beam type weighing sensor is equipped with protection casing 12 outward, and balanced beam type weighing sensor's front end is equipped with insulating block 33, and insulating block 33 lower part is equipped with layer board 31, and test needle 40 is equipped with to layer board 31's front end, and signal connection board 60 is equipped with in the middle of layer board 31, and apron 32 is equipped with on the upper portion of test needle 40, and apron 32 top is equipped with calibration weight 50. During operation, as shown in fig. 3, the lifting module drives the testing needle device to move downwards, the strain gauge sensor 20 is not affected by external force during the movement process, after the testing needle 40 is in contact with the pin of the chip 70, the strain gauge sensor converts the actual stress of the testing needle 40 through the internal deformation, the precision can reach 0.01 g, the response time is within 20 milliseconds, the more the testing needle 40 is pressed down, and the larger the deformation of the strain gauge sensor 20 is, the larger the force is obtained. The guard plate with excessive deformation limits the deformation of the strain gauge sensor 20, thereby protecting the strain gauge sensor 20 from damage. The test pin device of the embodiment of the application adopts the method of automatically acquiring the pressure of the test pin 40, so that the test precision of the chip test machine is higher, the response time is faster, the working efficiency and the automation level of a production enterprise are directly improved, and the production cost is reduced.
In another embodiment of the present application, a chip testing machine is provided, which includes the above-mentioned test pin device.
The chip testing machine of the embodiment of the application adopts the testing needle device, whether the testing needle 40 is in contact with the pin of the chip 70 can be accurately judged by the electric signal fed back by the strain sensor 20 without repeatedly lifting the testing needle 40 back and forth, the recognition time is short, the efficiency is high, the judgment accuracy is good, the precision is high, the good product misjudgment in the testing process can be avoided, the feedback time through the strain sensor 20 is short, the efficiency is high, the response time of the testing needle 40 is fast, the precision is high, the chip 70 testing efficiency is favorably improved, in addition, the actual stress of the testing needle 40 can be calculated according to the strain, the stress of the testing needle 40 can be quantized, the data quantization of the pressure borne by the testing needle 40 can be automatically obtained, then in the actual using process, the preset pressure range can be set, the chip 70 cannot be damaged on the basis of ensuring the stable contact between the testing needle 40 and the pin of the chip 70, and the misjudgment of the good product of the chip 70 and the loss of the chip 70 in the testing are reduced.
Since the chip testing machine in the embodiment of the present application adopts all the technical solutions of all the embodiments described above, all the beneficial effects brought by the technical solutions of the embodiments described above are also achieved, and are not described in detail herein.
The present application is intended to cover various modifications, equivalent arrangements, and adaptations of the present application without departing from the spirit and scope of the present application.

Claims (10)

1. A test pin device, comprising:
a fixed seat;
the strain sensor is provided with a fixed end and a detection end which are oppositely arranged, and the fixed end is arranged on the fixed seat;
the connecting seat is connected with the detection end; and
the testing needle, the testing needle has relative test end and the installation end that sets up, the test end is used for contacting with the pin of chip, the installation end install in on the connecting seat.
2. The test needle device according to claim 1, wherein: the strain sensor is a balance beam type weighing sensor.
3. The test needle device according to claim 2, wherein: the fixing seat comprises a fixing block and a protective cover, the fixing end is connected with the fixing block, the protective cover is arranged outside the balance beam type weighing sensor, and the detection end is exposed outside the protective cover and connected with the connecting seat.
4. The test needle device according to claim 3, wherein: the protective cover comprises a side plate, an upper protective plate and a lower protective plate, the upper protective plate and the lower protective plate are connected with the upper side and the lower side of the side plate, a protective groove is formed by the upper protective plate, the lower protective plate and the side plate in an enclosing mode, and the balance beam type weighing sensor is arranged in the protective groove in a suspending mode.
5. The test pin device according to any one of claims 1 to 4, wherein: the connecting seat is provided with a weight position for mounting a calibration weight.
6. The test needle device according to any one of claims 1 to 4, wherein: the connecting seat comprises a supporting plate and a cover plate, the cover plate is arranged on the supporting plate, and the mounting end is clamped and fixedly arranged between the cover plate and the supporting plate.
7. The test needle device according to claim 6, wherein: the mounting end is provided with a mounting hole, the mounting end is bent to form a bending section, and the bending section penetrates through the mounting hole.
8. The test needle device according to claim 6, wherein: the connecting seat further comprises an insulating block, and the insulating block is connected between the detection end of the strain sensor and the supporting plate.
9. The test needle device according to claim 6, wherein: the supporting plate is also connected with a signal connecting plate which is electrically connected with an external control device.
10. A chip tester is characterized in that: comprising a test needle device according to any one of claims 1 to 9.
CN202221716920.XU 2022-07-05 2022-07-05 Test needle device and chip testing machine Active CN218068209U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221716920.XU CN218068209U (en) 2022-07-05 2022-07-05 Test needle device and chip testing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221716920.XU CN218068209U (en) 2022-07-05 2022-07-05 Test needle device and chip testing machine

Publications (1)

Publication Number Publication Date
CN218068209U true CN218068209U (en) 2022-12-16

Family

ID=84434984

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221716920.XU Active CN218068209U (en) 2022-07-05 2022-07-05 Test needle device and chip testing machine

Country Status (1)

Country Link
CN (1) CN218068209U (en)

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