CN219212927U

CN219212927U - Film plating clamp

Info

Publication number: CN219212927U
Application number: CN202320820110.7U
Authority: CN
Inventors: 高湛勋
Original assignee: Tangshan I Target Advanced Materials Co ltd
Current assignee: Tangshan I Target Advanced Materials Co ltd
Priority date: 2023-04-13
Filing date: 2023-04-13
Publication date: 2023-06-20
Anticipated expiration: 2033-04-13

Abstract

The utility model relates to the technical field of fixtures, in particular to a film plating fixture, which comprises: the device comprises a base, a plurality of substrate grooves and a plurality of pressing sheets; the substrate grooves are distributed on the base around the center of the base; the pressing sheets are correspondingly arranged on the outer sides of the substrate grooves respectively, the fixed ends of the pressing sheets are connected with the base, and the free ends of the pressing sheets extend into the substrate grooves. According to the embodiment of the utility model, the substrate groove and the pressing sheet are arranged on the base and combined to limit the substrate, so that the problem that the substrate is easy to displace due to the influence of air flow when a single pressing mechanism or a single substrate groove is fixed is avoided, errors are reduced, a film layer is more uniform, the consistency of a film coating process is realized, and the quality and stability of a film coating are improved.

Description

Film plating clamp

Technical Field

The utility model relates to the technical field of fixtures, in particular to a film plating fixture.

Background

The fixture is a device for fixing a machining object in a correct position in a mechanical manufacturing process to receive construction or detection, and is also called a fixture in a broad sense, and any process in the process for rapidly, conveniently and safely mounting a workpiece can be called a fixture.

The coating jig is an essential component of the coating process, and generally, the coating process is required to be used in the manufacturing process of an optical lens or a semiconductor chip.

At present, most of existing coating clamps in the market are single compression type or single limiting groove fixed type, however, the clamps in the two fixing modes tend to easily cause substrate movement due to the action of air flow in a furnace body in the coating process, so that the coating effect is affected.

Disclosure of Invention

The utility model aims to provide a coating clamp which is used for improving the stability of a substrate during coating.

In order to achieve the above purpose, the present utility model provides the following technical solutions: a plating jig comprising: the device comprises a base, a plurality of substrate grooves and a plurality of pressing sheets;

the substrate grooves are distributed on the base around the center of the base;

the pressing sheets are correspondingly arranged on the outer sides of the substrate grooves respectively, the fixed ends of the pressing sheets are detachably fixed on the base, and the free ends of the pressing sheets extend into the substrate grooves.

Preferably, the fixed end of the pressing piece is provided with a fastening screw in threaded connection with the base, and the fastening screw is used for adjusting tightness of the pressing piece.

Preferably, the fastening screw is located on an extension of a diagonal of the substrate slot, and the free end of the tab is directed toward the center of the substrate slot.

Preferably, four corners of the substrate groove are respectively communicated with one circular groove, each circular groove takes a vertex corresponding to the substrate groove as a circle center, and the free end of the pressing piece is positioned in the circular groove.

Preferably, all the substrate slots are arranged in a central symmetry.

Preferably, the plurality of substrate slots include large slots and small slots of different sizes, the large slots and the small slots being compactly arranged around a center of the base.

Preferably, the number of the large grooves is 6, and the number of the small grooves is 8.

Preferably, the substrate groove is square, 4 small grooves are spliced to form a square central area, 1 large groove is respectively arranged on the outer sides of four sides of the central area, 2 small grooves are respectively arranged on the outer sides of two opposite angles of the central area, and 1 large groove is respectively arranged on the outer sides of the other two opposite angles of the central area.

Preferably, the side length of the large groove is 20mm, and the side length of the small groove is 12mm.

Preferably, the depth of the substrate slot is 0.8mm.

Compared with the prior art, the utility model has the beneficial effects that:

1. through substrate groove and the preforming that sets up on the base, both combine to form spacingly to the substrate, avoided single hold-down mechanism or single substrate groove to lead to the problem of displacement because of the air current influence when fixed to reduce the error, make the rete more even, realized the uniformity of coating film process, improved the quality and the stability of coating film.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

FIG. 1 is a schematic view of a three-dimensional structure (excluding a tabletting portion) of a plating jig according to the present utility model;

FIG. 2 is a schematic diagram of the front structure of the plating jig according to the present utility model;

fig. 3 is a schematic view of the back structure of the plating fixture according to the present utility model.

Reference numerals: 10. a base; 20. a substrate slot; 21. a circular groove; 22. a large groove; 23. a small groove; 24. a central region; 30. tabletting; 31. and (5) fastening a screw.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and furthermore, the terms "first", "second", "third", "up, down, left, right", etc. are used for descriptive purposes only for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, so that the terms describing positional relationships in the drawings are only for exemplary illustration, and should not be construed as limiting, indicating or implying relative importance to the present patent, and the specific meanings of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances. Meanwhile, in the description of the present utility model, unless explicitly stated and defined otherwise, the terms "connected", "connected" and "connected" should be interpreted broadly, and for example, may be fixedly connected, detachably connected, or integrally connected; the mechanical connection and the electrical connection can be adopted; all other embodiments, which may be directly or indirectly through intermediaries, which may be obtained by a person of ordinary skill in the art without inventive effort based on the embodiments of the present utility model are within the scope of the present utility model.

The implementation of the present utility model will be described in detail below with reference to specific embodiments.

As shown in fig. 1-3, embodiments provided for by the present utility model.

The embodiment of the utility model provides a coating clamp, which comprises: a base 10, a plurality of substrate slots 20 and a plurality of preforms 30; the number of the substrate grooves 20 and the number of the pressing sheets 30 can be 1:1 or 1:2, a plurality of substrate grooves 20 are distributed on the base 10 around the center of the base 10, the base 10 is generally round or square, and in order to ensure the consistency of substrate film plating, all the substrate grooves 20 are close to the middle part, and the area close to the edge of the base 10 is left, so that film plating can be more uniform; the plurality of pressing pieces 30 are respectively and correspondingly arranged at the outer sides of the plurality of substrate grooves 20, the fixed ends of the pressing pieces 30 are detachably fixed on the base 10, the free ends of the pressing pieces 30 extend into the substrate grooves 20, and it is understood that the length of the pressing pieces 30 extending into the substrate grooves 20 does not enter the area needing to be coated on the substrate, so that coating is not affected. The depth of the substrate slot 20 is 0.8mm, which is sufficient to limit the bottom of the substrate in the horizontal direction. The fixed end of the pressing sheet 30 is provided with a fastening screw 31 in threaded connection with the base 10 for adjusting the tightness of the pressing sheet 30, and the pressing sheet can also be suitable for substrates with different thicknesses for coating. All the substrate slots 20 are arranged in a central symmetry manner, so that the base 10 can conveniently rotate in the coating machine. Through substrate groove 20 and preforming 30 that set up on base 10, put into substrate inslot 20 with the substrate of waiting to coating film, the cell wall forms the spacing of horizontal direction to the substrate all around of substrate groove 20, stretches into the spacing of vertical direction to the substrate of preforming 30 of top from substrate groove 20 one side, has avoided single hold-down mechanism or single substrate groove 20 to lead to the problem of displacement because of the air current influence easily when fixed to reduce the error of coating film, make the rete more even, realized the uniformity of coating film process, improved the quality and the stability of coating film.

Further, the fastening screw 31 is positioned on the extension of the diagonal line of the substrate slot 20, the free end of the presser bar 30 is directed to the center of the substrate slot 20, and when the substrate is taken out, the end of the presser bar 30 can be rotated out of the upper range of the substrate slot 20 by only a small angle no matter which side the presser bar 30 is rotated. Four corners of the substrate groove 20 are communicated and provided with a circular groove 21, each circular groove 21 takes the corresponding vertex of the substrate groove 20 as the center of a circle, the free end of the pressing sheet 30 is positioned in the circular groove 21, and when the size of the substrate is just equal to that of the substrate groove 20, the substrate can be more conveniently pulled out through the circular groove 21.

Furthermore, the plurality of substrate slots 20 comprise large slots 22 and small slots 23 with different sizes, so that the two substrates with different sizes can be conveniently adapted, and in a single coating operation, a plurality of two substrates with different numbers can be coated simultaneously, so that the efficiency of the single operation can be improved. The substrate slot 20 is square, the side length of the large slot 22 is 20mm, and the side length of the small slot 23 is 12mm. The number of the large grooves 22 is 6, the number of the small grooves 23 is 8, 4 small grooves 23 are spliced to form a square central area 24, 1 large groove 22 is respectively arranged on the outer sides of four sides of the central area 24, 2 small grooves 23 are respectively arranged on the outer sides of two opposite angles of the central area 24, 1 large groove 22 is respectively arranged on the outer sides of the other two opposite angles, and thus the arrangement can enable the 6 large grooves 22 and the 8 small grooves 23 to more compactly surround the central area 24 of the base 10 so as to ensure the uniformity degree of coating.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A coating fixture, comprising: a base (10), a plurality of substrate slots (20) and a plurality of press sheets (30);

the substrate grooves (20) are distributed on the base (10) around the center of the base (10);

the plurality of pressing sheets (30) are respectively and correspondingly arranged on the outer sides of the plurality of substrate grooves (20), the fixed ends of the pressing sheets (30) are detachably fixed on the base (10), and the free ends of the pressing sheets (30) extend into the substrate grooves (20).

2. The coating clamp according to claim 1, characterized in that the fixed end of the press piece (30) is provided with a fastening screw (31) in threaded connection with the base (10) for adjusting the tightness of the press piece (30).

3. The plating jig according to claim 2, wherein the fastening screw (31) is located on an extension of a diagonal line of the substrate groove (20), and the free end of the presser plate (30) is directed toward the center of the substrate groove (20).

4. A coating clamp according to claim 3, wherein four corners of the substrate groove (20) are communicated with each other and provided with a circular groove (21), each circular groove (21) takes a corresponding vertex of the substrate groove (20) as a center, and the free end of the pressing piece (30) is positioned in the circular groove (21).

5. The plating jig according to claim 1, wherein all the substrate slots (20) are arranged in central symmetry.

6. The plating jig according to claim 5, wherein the plurality of substrate grooves (20) includes large grooves (22) and small grooves (23) of different sizes, the large grooves (22) and the small grooves (23) being compactly arranged around the center of the base (10).

7. The plating jig according to claim 6, wherein the number of the large grooves (22) is 6 and the number of the small grooves (23) is 8.

8. The plating jig according to claim 7, wherein the substrate groove (20) is square, wherein 4 small grooves (23) are spliced to form a square central region (24), 1 large groove (22) is arranged on the outer sides of four sides of the central region (24), 2 small grooves (23) are arranged on the outer sides of two opposite corners of the central region (24), and 1 large groove (22) is arranged on the outer sides of the other two opposite corners.

9. The coating clamp according to claim 8, characterized in that the large groove (22) has a side length of 20mm and the small groove (23) has a side length of 12mm.

10. The plating jig according to claim 1, wherein the depth of the substrate groove (20) is 0.8mm.