CN100416739C - Hole aligning device and method for double microchannel plate - Google Patents
Hole aligning device and method for double microchannel plate Download PDFInfo
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- CN100416739C CN100416739C CN200410073569.7A CN200410073569A CN100416739C CN 100416739 C CN100416739 C CN 100416739C CN 200410073569 A CN200410073569 A CN 200410073569A CN 100416739 C CN100416739 C CN 100416739C
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 12
- 238000007689 inspection Methods 0.000 claims abstract description 4
- 230000004447 accommodation reflex Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 1
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241001466460 Alveolata Species 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
A hole aligning device of a double microchannel plate and a hole aligning method thereof are disclosed, wherein the hole aligning device comprises: the pedestal is provided with a pillar and a reflector, the pillar is provided with an upper bracket and a lower bracket in one plane, and a left fixing plate and a right fixing plate in the other plane, the upper bracket and the lower bracket are provided with microchannel plate clamps, and the laser is also included. The hole aligning method using the hole aligning device includes: switching on a power supply of the laser to enable the laser to vertically enter the lower support and the upper support; fixing a microchannel plate on a microchannel plate clamp and placing the microchannel plate on a lower bracket; putting another microchannel plate on another lower microchannel plate clamp and placing the microchannel plate on an upper bracket; carrying out hole alignment; vacuum coating; and packaging and warehousing after quality inspection. The device has the advantages of simple structure, convenient operation, good hole aligning effect and the like. The method is simple and feasible. The double micro-channel plate for aligning holes by adopting the device and the method can be used for a high-time-resolution image converter tube.
Description
Technical field
The invention belongs to χ ray, gamma-rays, extreme ultraviolet line and charged particle detection technical field, be specifically related to two microchannel plates to aperture apparatus and to the hole method.
Background technology:
The planar microchannels plate is millions of the molten integrated two-dimensional arrays of the channel electron multiplier that is arranged in parallel, and each microchannel hollow pipe is equivalent to a miniature dynode electron multiplier, and two ends are added with certain voltage, can obtain very high electron gain.
Microchannel plate is the sheet type alveolate texture, be charged particle, short-wavelength light quantum detector and electronic image booster, the microchannel plate volume is little, and is in light weight, the electron gain height has been widely used in the detection and multiplication device of χ ray, gamma-rays, extreme ultraviolet line and charged particle.Up to a million electron multipliers are arranged on the microchannel plate surface, and the gain of its monolithic microchannel plate can reach 10
3Modern image converter tube and booster generally adopt the technology of this microchannel plate electron multiplication to improve gain.But along with science and technology development, this gain can not be satisfied the user, then the mode with two or three microchannel plate cascades is proposed, to improve the gain of image converter tube.Microchannel plate is a kind of photomultiplier transit device that angle of chamfer is arranged, and the angle of chamfer of microchannel plate typically refers to channel plane with respect to the angle between the channel vertical line.Just because of this angle of chamfer has been arranged, the two microchannel plates of V-type can realize that just direct puncture light is little, and big function gains.Like this, microchannel plate has just become a current technical problem that needs solution to the hole problem.
R.M.Jordan Co., Ltd microchannel plate the hole method is adopted in producing the microchannel plate technical process is nested together core material and cladding, the microchannel plate core material is a real plug, cladding is a hollow glass tube, after drawing monofilament, row's silk, drawing multifilament, fusion pressure, on the edge of bar-shaped microchannel plate, make marks earlier, section then, two face optical polishs are made microchannel plate.The so easy damage microchannel plate or the microchannel plate of making dirty reduce productivity ratio, and can influence the negative electrode making.Domestic northern night vision company also be adopt this method with the hole of two microchannel plates to.
When making image converter tube, need on to the microchannel plate of good direction, make the au cathode microstrip line, so need a kind of anchor clamps that can can carry out two microchannel plates plated film again to the hole, can will directly put into vacuum coating equipment to two microchannel plates, carry out vacuum coating respectively.During plated film, can not change good position, plated film after, direct clamping microchannel plate, and need not be more again to the hole.Because if change in location can't be repaired the au cathode microstrip line again, influential to the gain of electron multiplication output, even cause microchannel plate to be scrapped.Current another technical problem of solution that needs is a kind of clamping of making and regulates microchannel plate and the device of the direct plated film of energy.
Summary of the invention
A technical problem to be solved by this invention is to overcome the shortcoming of above-mentioned microchannel plate to the hole, provides a kind of reasonable in design, simple in structure, two microchannel plates that volume is little, easy to use to aperture apparatus.
Another technical problem to be solved by this invention be to provide a kind of pair of microchannel plate to the hole method.
Solving the problems of the technologies described above the technical scheme that is adopted is: base is provided with pillar and speculum, pillar is provided with upper bracket and lower carriage in a plane, is arranged on left fixed head and right fixed head in another plane, be provided with the microchannel plate anchor clamps at upper bracket and lower carriage, this also includes laser to aperture apparatus.
Microchannel plate anchor clamps of the present invention comprise microchannel plate anchor clamps and following microchannel plate anchor clamps, last microchannel plate anchor clamps are cirque structure, the upper surface of following microchannel plate anchor clamps is processed with the identical circular groove of interior circle diameter with last microchannel plate anchor clamps, radial position at circular groove is processed with 1～8 parallel microstrip line groove abreast, circumferential position is processed with two grooves symmetrically, is processed with connecting hole at the circumferencial direction of last microchannel plate anchor clamps and following microchannel plate anchor clamps.
The shape of the microstrip line groove of microchannel plate anchor clamps down of the present invention is straight trough through holes, and two grooves of circumferential position are rectangular recess.
Upper bracket of the present invention is parallel with lower carriage and vertical with pillar, and left fixed head is parallel with right fixed head and vertical with pillar, is processed with the circular hole identical with the microchannel plate external diameter respectively in the center of upper bracket and lower carriage.
Laser of the present invention is that wavelength is 400～700nm visible laser.
Adopt said apparatus the hole method is comprised the steps: to two microchannel plates
1, connect the power supply of laser, the accommodation reflex mirror incides on lower carriage and the upper bracket laser vertical.
2, a slice microchannel plate being fixed on one with the screw threads for fastening connector goes up between microchannel plate anchor clamps and the following microchannel plate anchor clamps, be placed on the lower carriage then, following microchannel plate anchor clamps are last during placement, the microstrip line groove of following microchannel plate anchor clamps is parallel with the front-back of pillar, vertical with right fixed head with left fixed head, can see diffraction and interfere coefficient blossom type hot spot above microchannel plate.
3, on upper bracket, put into another microchannel plate anchor clamps down, another down the microchannel plate anchor clamps the microstrip line groove down and parallel with the front-back of pillar, vertical with left fixed head with right fixed head, circular groove up, another sheet microchannel plate is put into another down circular groove of microchannel plate anchor clamps, the microchannel plate anchor clamps that a slice microchannel plate is housed and another time microchannel plate anchor clamps that another sheet microchannel plate is housed are fixed between left fixed head and the right fixed head.
4, regulate the position of another sheet microchannel plate with the tweezers of handling at the rectangular recess place of another following microchannel plate anchor clamps, another sheet microchannel plate is rotated a circle, observe the variation of the number of spots of another sheet microchannel plate surface output above the sheet microchannel plate from another, when having only a bright spot on another sheet microchannel plate, the interior microchannel of a slice microchannel plate becomes the position of V-type with the interior microchannel of another sheet microchannel plate, the interior microchannel of a slice microchannel plate and the interior microchannel of another sheet microchannel plate align.
5, with the screw threads for fastening connector microchannel plate anchor clamps on another are connected with microchannel plate anchor clamps under another.
6, on lower carriage and upper bracket, respectively another microchannel plate anchor clamps of the microchannel plate anchor clamps that a slice microchannel plate is housed and another sheet microchannel plate are taken off; put into vacuum coating equipment and carry out vacuum coating; surperficial evaporation 2000 dust gold at a slice microchannel plate and another sheet microchannel plate; behind the plated film, take down microchannel plate anchor clamps of a slice microchannel plate and another microchannel plate anchor clamps of another sheet microchannel plate.
7, after quality inspection, pack warehouse-in.
The present invention adopts two microchannel plates aperture apparatus is carried out the hole two microchannel plates with laser, has reduced the variety of issue that produces with other light source, and to not damaging microchannel plate behind the hole, the rate of reducing the number of rejects and seconds reduces cost.That apparatus of the present invention have is simple in structure, easy to operate, to advantage such as the hole is effective.The inventive method is simple, feasible.Adopt apparatus of the present invention and the inventive method two microchannel plates in hole to be can be used for the image converter tube of high time resolution.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is a structural representation of going up microchannel plate anchor clamps 4-1 among Fig. 1.
Fig. 3 is the structural representation of following microchannel plate anchor clamps 4-2 among Fig. 1.
Fig. 4 is the gain diagram to the two microchannel plates behind the hole.
Embodiment
The present invention is described in more detail below in conjunction with drawings and Examples, but the invention is not restricted to these embodiment.
Embodiment 1
In Fig. 1, two microchannel plates of present embodiment be to connect by pillar 1, left fixed head 2, upper bracket 3, microchannel plate anchor clamps 4, right fixed head 5, lower carriage 6, speculum 7, base 8, laser 9 to constitute to aperture apparatus.
On base 8, pillar 1 is installed by the threaded fastener connection, pillar 1 upper left side is equipped with left fixed head 2, the right side is equipped with right fixed head 5, left side fixed head 2 is vertical with pillar 1 with right fixed head 5, on the distance on the pillar 1, can adjust between left side fixed head 2 and the right fixed head 5, with the screw threads for fastening connector upper bracket 3 and lower carriage 6 are installed on the pillar 1, upper bracket 3 is parallel with lower carriage 6, center at upper bracket 3 and lower carriage 6 is processed with the circular hole identical with the microchannel plate external diameter respectively, and upper bracket 3 and lower carriage 6 are used to place microchannel plate anchor clamps 4.The microchannel plate anchor clamps 4 of present embodiment are made of last microchannel plate anchor clamps 4-1 and following microchannel plate anchor clamps 4-2.The upper surface of following microchannel plate anchor clamps 4-2 be processed with one with the identical circular groove c of microchannel plate size same thickness, radial position at the circular groove that descends microchannel plate anchor clamps 4-2 is processed with 4 parallel microstrip line groove b abreast, microstrip line groove b is shaped as the straight trough through hole, be used for plated film on microchannel plate, on microchannel plate during vacuum coating, the position of microstrip line groove b can plate film on the microchannel plate, and film is not plated at other position.Circumferential position at following microchannel plate anchor clamps 4-2 is processed with two rectangular recess a symmetrically, rectangular recess a is used for rotating the position of regulating microchannel plate to the hole time, the microchannel plate of making dirty when preventing to regulate, avoid microchannel plate to be scrapped, the uniform processing of circumferencial direction of following microchannel plate anchor clamps 4-2 is porose, be used for mounting screw, in the circular groove c of following microchannel plate anchor clamps 4-2, microchannel plate can be installed.Last microchannel plate anchor clamps 4-1 is a cirque structure, and the central circular groove c's of the size of center circle and following microchannel plate anchor clamps 4-2 is big or small identical, about last microchannel plate 4-1 can be fixed on microchannel plate, about the fixed position.With the screw threads for fastening connector speculum 7 that has been fixedly connected, speculum 7 is used for reverberation on base 8.The present invention also includes laser 9, and the laser 9 of present embodiment adopts the semiconductor laser of 640nm, does light source.The laser that semiconductor laser penetrates reflexes to through speculum 7 and is used for two microchannel plates on upper bracket 3 and the lower carriage 6 to the hole.Lower carriage 6 is used to place microchannel plate anchor clamps 4, upper bracket 3 is used to install another microchannel plate anchor clamps 4, during to the hole, a slice microchannel plate is installed in the microchannel plate anchor clamps 4 is placed on the lower carriage 6, another sheet microchannel plate is placed on another and is placed on the support 3 on microchannel plate anchor clamps 4-2 down, microchannel plate anchor clamps 4-2 is fixing with left fixed head 2 and right fixed head 5 down with another with microchannel plate anchor clamps 4 again, carry out then the hole, Kong Houyong screw threads for fastening connector is fixedly connected microchannel plate anchor clamps 4-1 on another and another following microchannel plate anchor clamps 4-2, take off microchannel plate anchor clamps 4 that a slice microchannel plate is housed and another microchannel plate anchor clamps 4 of another sheet microchannel plate, put into vacuum coating equipment and carry out vacuum coating.
Two microchannel plates of present embodiment as follows to the hole method:
1, connect the power supply of laser 9, the accommodation reflex mirror incides on lower carriage 6 and the upper bracket 3 laser vertical.
2, a slice microchannel plate being fixed on one with the screw threads for fastening connector goes up between microchannel plate anchor clamps 4-1 and the following microchannel plate anchor clamps 4-2, be placed on then on the lower carriage 6, a following microchannel plate anchor clamps 4-2 is last during placement, the microstrip line groove b of a following microchannel plate anchor clamps 4-2 is parallel with the front-back of pillar 1, vertical with left fixed head 2 with right fixed head 5, above microchannel plate, can see diffraction and interfere coefficient blossom type hot spot.
3, on upper bracket 3, put into another microchannel plate anchor clamps 4-2 down, another down microchannel plate anchor clamps 4-2 microstrip line groove b down and parallel with the front-back of pillar 1, vertical with left fixed head 2 with right fixed head 5, circular groove c up, another sheet microchannel plate is put into another down circular groove c of microchannel plate anchor clamps 4-2, the microchannel plate anchor clamps 4 that a slice microchannel plate is housed and another time microchannel plate anchor clamps 4-2 that another sheet microchannel plate is housed are fixed between left fixed head 2 and the right fixed head 5.
4, regulate the position of another sheet microchannel plate with the tweezers of handling at the rectangular recess a place of another following microchannel plate anchor clamps 4-2, another sheet microchannel plate is rotated a circle, observe the variation of the number of spots of another sheet microchannel plate surface output above the sheet microchannel plate from another, when having only a bright spot on another sheet microchannel plate, the interior microchannel of a slice microchannel plate becomes the position of V-type with the interior microchannel of another sheet microchannel plate, the interior microchannel of the interior microchannel of a slice microchannel plate and another sheet microchannel plate just aligns like this.
5, with the screw threads for fastening connector microchannel plate anchor clamps 4-1 on another is connected with microchannel plate anchor clamps 4-2 under another.
6, on lower carriage 6 and upper bracket 3, respectively another microchannel plate anchor clamps 4 anchor clamps of the microchannel plate anchor clamps 4 that a slice microchannel plate is housed and another sheet microchannel plate are taken off; put into vacuum coating equipment and carry out vacuum coating; surperficial evaporation 10000 dust gold at a slice microchannel plate and another sheet microchannel plate; behind the plated film, take down microchannel plate anchor clamps 4 of a slice microchannel plate and another microchannel plate anchor clamps 4 of another sheet microchannel plate.
7, after quality inspection, pack warehouse-in.
Embodiment 2
In the present embodiment, the radial position of the circular groove c of the following microchannel plate anchor clamps 4-2 of microchannel plate anchor clamps 4 is processed with 1 microstrip line groove b.The connecting relation of other parts and parts is identical with embodiment 1.
Embodiment 3
In the present embodiment, the radial position of the circular groove c of the following microchannel plate anchor clamps 4-2 of microchannel plate anchor clamps 4 is processed with 8 parallel microstrip line groove b abreast.The connecting relation of other parts and parts is identical with embodiment 1.
In order to verify beneficial effect of the present invention, the inventor adopts apparatus of the present invention and method to pack into to two microchannel plates behind the hole and tests in the image converter tube, import high electric field pulse with high voltage source to image converter tube, photograph the photo of the image converter tube gain that two microchannel plates are housed with digital camera, as shown in Figure 4, in this photo two microstrip lines be through the present invention to the hole method after, the static test image of the image converter tube that two microchannel plates of the aligning direction forming V-shape structure that obtains assemble.Among the figure, institute's making alive powers up than monolithic microchannel plate and forces down on two microchannel plates, gain much larger than the gain of the image converter tube of making by the monolithic microchannel plate and obtain microchannel plate, the interior microchannel that two microchannel plates are described aligns, if do not align, gain can be so not high, and Moire fringe can occur.
Claims (6)
1. two microchannel plates to aperture apparatus, it is characterized in that: base (8) is provided with pillar (1) and speculum (7), pillar (1) is provided with upper bracket (3) and lower carriage (6) in a plane, is arranged on left fixed head (2) and right fixed head (5) in another plane, be provided with microchannel plate anchor clamps (4) at upper bracket (3) and lower carriage (6), this also includes laser (9) to aperture apparatus.
According to described pair of microchannel plate of claim 1 to aperture apparatus, it is characterized in that: said microchannel plate anchor clamps (4) comprise microchannel plate anchor clamps (4-1) and following microchannel plate anchor clamps (4-2), last microchannel plate anchor clamps (4-1) are cirque structure, the upper surface of following microchannel plate anchor clamps (4-2) is processed with the circular groove (c) identical with the interior circle diameter of last microchannel plate anchor clamps (4-1), radial position at circular groove (c) is processed with 1～8 parallel microstrip line groove (b) abreast, circumferential position is processed with two grooves symmetrically, is processed with connecting hole at the circumferencial direction of last microchannel plate anchor clamps (4-1) and following microchannel plate anchor clamps (4-2).
According to described pair of microchannel plate of claim 2 to aperture apparatus, it is characterized in that: the shape of the microstrip line groove (b) of said down microchannel plate anchor clamps (4-2) is the straight trough through hole, and two grooves of circumferential position are rectangular recess (a).
According to described pair of microchannel plate of claim 1 to aperture apparatus, it is characterized in that: said upper bracket (3) is parallel with lower carriage (6) and vertical with pillar (1), left side fixed head (2) is parallel with right fixed head (5) and vertical with pillar (1), is processed with the circular hole identical with the microchannel plate external diameter respectively in the center of upper bracket (3) and lower carriage (6).
According to described pair of microchannel plate of claim 1 to aperture apparatus, it is characterized in that: said laser (9) is that wavelength is 400～700nm visible laser.
The two microchannel plates that use claim 3 to aperture apparatus to the hole method, it is characterized in that it comprises the steps:
(1) power supply of connection laser (9), accommodation reflex mirror (7) incides on lower carriage (6) and the upper bracket (3) laser vertical;
(2) a slice microchannel plate being fixed on one with the screw threads for fastening connector goes up between microchannel plate anchor clamps and the following microchannel plate anchor clamps, be placed on then on the lower carriage (6), following microchannel plate anchor clamps are last during placement, the microstrip line groove of following microchannel plate anchor clamps is parallel with the front-back of pillar (1), vertical with right fixed head (5) with left fixed head (2), can see diffraction and interfere coefficient blossom type hot spot above microchannel plate;
(3) on upper bracket (3), put into another microchannel plate anchor clamps down, another down the microchannel plate anchor clamps the microstrip line groove down and parallel with the front-back of pillar (1), vertical with left fixed head (2) with right fixed head (5), circular groove up, another sheet microchannel plate is put into another down circular groove of microchannel plate anchor clamps, the microchannel plate anchor clamps that a slice microchannel plate is housed and another time microchannel plate anchor clamps that another sheet microchannel plate is housed are fixed between left fixed head (2) and the right fixed head (5);
(4) descend the rectangular recess place of microchannel plate anchor clamps to regulate the position of another sheet microchannel plate with the tweezers of handling at another, another sheet microchannel plate is rotated a circle, observe the variation of the number of spots of another sheet microchannel plate surface output above the sheet microchannel plate from another, when having only a bright spot on another sheet microchannel plate, the interior microchannel of a slice microchannel plate becomes the position of V-type with the interior microchannel of another sheet microchannel plate, the interior microchannel of a slice microchannel plate and the interior microchannel of another sheet microchannel plate align;
(5) with the screw threads for fastening connector microchannel plate anchor clamps on another are connected with microchannel plate anchor clamps under another;
(6) on lower carriage (6) and upper bracket (3), respectively the microchannel plate anchor clamps that a slice microchannel plate is housed and another microchannel plate anchor clamps of another sheet microchannel plate are taken off, put into vacuum coating equipment and carry out vacuum coating, surperficial evaporation 2000 dust gold at a slice microchannel plate and another sheet microchannel plate, behind the plated film, take down microchannel plate anchor clamps of a slice microchannel plate and another microchannel plate anchor clamps of another sheet microchannel plate;
(7) after quality inspection, pack warehouse-in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200410073569.7A CN100416739C (en) | 2004-12-31 | 2004-12-31 | Hole aligning device and method for double microchannel plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200410073569.7A CN100416739C (en) | 2004-12-31 | 2004-12-31 | Hole aligning device and method for double microchannel plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1635601A CN1635601A (en) | 2005-07-06 |
| CN100416739C true CN100416739C (en) | 2008-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200410073569.7A Expired - Fee Related CN100416739C (en) | 2004-12-31 | 2004-12-31 | Hole aligning device and method for double microchannel plate |
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| CN (1) | CN100416739C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100511570C (en) * | 2005-11-17 | 2009-07-08 | 中国科学院西安光学精密机械研究所 | photoelectron multiplier |
| CN106409647A (en) * | 2016-12-06 | 2017-02-15 | 北京大学东莞光电研究院 | Ultraviolet cathode ray light source |
| CN112924140A (en) * | 2021-01-19 | 2021-06-08 | 北方夜视技术股份有限公司 | Axial vertical alignment device and method for porous optical element channel hole |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4825118A (en) * | 1985-09-06 | 1989-04-25 | Hamamatsu Photonics Kabushiki Kaisha | Electron multiplier device |
| US5410211A (en) * | 1991-12-26 | 1995-04-25 | Hamamatsu Photonics, K.K. | Electron tube with an electron multiplier having a plurality of stages of dynodes |
| CN1444771A (en) * | 2000-06-08 | 2003-09-24 | 浜松光子学株式会社 | Micro-charnnel plate |
-
2004
- 2004-12-31 CN CN200410073569.7A patent/CN100416739C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4825118A (en) * | 1985-09-06 | 1989-04-25 | Hamamatsu Photonics Kabushiki Kaisha | Electron multiplier device |
| US5410211A (en) * | 1991-12-26 | 1995-04-25 | Hamamatsu Photonics, K.K. | Electron tube with an electron multiplier having a plurality of stages of dynodes |
| CN1444771A (en) * | 2000-06-08 | 2003-09-24 | 浜松光子学株式会社 | Micro-charnnel plate |
Non-Patent Citations (1)
| Title |
|---|
| 双微通道板光电倍增的研究. 徐江涛.真空科学与技术，第20卷第5期. 2000 * |
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