CN219186242U

CN219186242U - Laser bonding-releasing gas discharging mechanism capable of preventing air pollution

Info

Publication number: CN219186242U
Application number: CN202223540384.5U
Authority: CN
Inventors: 任凯; 何雅彬; 许为民
Original assignee: Shanghai Bona Microelectronics Equipment Co ltd
Current assignee: Shanghai Bona Microelectronics Equipment Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-06-16
Anticipated expiration: 2032-12-29

Abstract

The utility model relates to an air pollution prevention laser bonding gas discharge mechanism which comprises a workbench, wherein a support is fixed on the lower surface of the workbench, a supporting rod is fixed on the upper surface of the workbench, a top plate is fixed on the other end of the supporting rod, an anti-pollution assembly is arranged on the upper surface of the top plate, and a separation assembly is arranged on the upper surface of the workbench. This prevent air pollution's laser bond gas emission mechanism that breaks down, cooperation through the air exhauster can give the air-supply line with wind-force transmission, thereby make harmful gas get into the air exhauster from the air-supply line in, cooperation through the tuyere can increase the scope of wind-force radiation, thereby avoid the air exhauster to fail to inhale harmful gas, cooperation through the connecting plate can avoid the air-supply line to rock, thereby influence the work of laser head, cooperation through filter and activated carbon sheet can carry out purification treatment to harmful gas, thereby avoid harmful gas to influence workshop environment.

Description

Laser bonding-releasing gas discharging mechanism capable of preventing air pollution

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to an air pollution prevention laser bonding gas discharge mechanism.

Background

The importance of semiconductors, which are materials having conductivity between that of conductors and insulators at normal temperature, is very great from the standpoint of technological and economic developments, and most electronic products, such as computers, mobile phones or digital recorders, have very close association with semiconductors.

The wafer is easy to generate fragments in the wafer flowing process, the carrier layer needs to be introduced, the wafer and the carrier layer are bonded together, the wafer is prevented from being damaged in the wafer flowing process, the wafer is subsequently required to be separated from the carrier layer through a bonding releasing mode, and accordingly the wafer is peeled off.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides an air pollution prevention laser bonding-release gas discharge mechanism, which has the advantages of treating harmful gas generated in the bonding-release process and the like, and solves the problems that the harmful gas is generated after an adhesive between a substrate and a wafer is heated, the environment of a workshop is influenced, the human body is endangered and the practicability is influenced by directly discharging the harmful gas.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an anti-air pollution's laser uncoupling gas emission mechanism, includes the workstation, the lower surface of workstation is fixed with the support, the upper surface of workstation is fixed with the bracing piece, the other end of bracing piece is fixed with the roof, the upper surface of roof is equipped with anti-pollution subassembly, the upper surface of workstation is equipped with the separation subassembly, the upper surface of roof is fixed with first electric putter, the output shaft of first electric putter runs through and extends to the downside of roof, and is fixed with the fixed plate, the lower surface of fixed plate is fixed with biax straight line module, the bottom of biax straight line module is fixed with the connecting rod, the bottom of connecting rod is fixed with the laser head, the upper surface of workstation is fixed with the backing plate;

the anti-pollution assembly comprises an exhaust fan fixed on the upper surface of a top plate, an air inlet pipe is communicated with the input end of the exhaust fan, the other end of the air inlet pipe penetrates through and extends to the lower side of a fixed plate, a connecting plate is fixed on the outer side of the connecting rod, a tuyere is fixed on the lower surface of the connecting plate, one end of the air inlet pipe, far away from the exhaust fan, penetrates through and extends to the inside of the connecting plate, and is communicated with the tuyere, an air outlet pipe is communicated with the output end of the exhaust fan, a purifying box is fixed on the upper surface of the top plate, the other end of the air outlet pipe is communicated with the right side of the purifying box, a filter plate is fixed between inner walls of one opposite sides of the purifying box, and an active carbon plate is fixed between inner walls of one opposite sides of the purifying box, and a fan is fixed inside of the left side wall of the purifying box.

Further, the number of the brackets is four, and the brackets are uniformly distributed at four corners of the lower surface of the workbench.

Further, the number of the supporting rods is four, and the supporting rods are uniformly distributed at four corners of the lower surface of the top plate.

Further, the number of the exhaust fans and the number of the purifying boxes are two, and the exhaust fans and the purifying boxes are symmetrically distributed on the left and right sides of the central axis of the top plate.

Further, the shape of purifying box is inside hollow cuboid, two the installing port has all been seted up to purifying box one side of being on the back of the body mutually, two the fan is located two installing ports respectively.

Further, the filter plate is located at one side close to the air outlet pipe, and the activated carbon plate is located at one side close to the fan.

Further, the separation assembly comprises a mounting plate fixed on the upper surface of the workbench, a second electric push rod is fixed on the left side of the mounting plate, an output shaft of the second electric push rod penetrates through and extends to the right side of the mounting plate, a pull rod is fixed on the output shaft, and a sucking disc is fixed on the other end of the pull rod.

Further, the number of the mounting plates is two, and the mounting plates are distributed in a bilateral symmetry mode through the central axis of the workbench.

Compared with the prior art, the technical scheme of the application has the following beneficial effects:

1. this prevent air pollution's laser bond gas emission mechanism that breaks down, cooperation through the air exhauster can give the air-supply line with wind-force transmission, thereby make harmful gas get into the air exhauster from the air-supply line in, cooperation through the tuyere can increase the scope of wind-force radiation, thereby avoid the air exhauster to fail to inhale harmful gas, cooperation through the connecting plate can avoid the air-supply line to rock, thereby influence the work of laser head, cooperation through filter and activated carbon sheet can carry out purification treatment to harmful gas, thereby avoid harmful gas to influence workshop environment.

2. This prevent air pollution's gaseous emission mechanism of laser bond off, through the cooperation of second electric putter, can control the removal of pull rod to the position of control sucking disc, through the cooperation of pull rod, can avoid the sucking disc directly to contact with the second electric putter, thereby influence the separation of wafer and carrier plate, through the cooperation of sucking disc, can adsorb wafer and carrier plate, thereby be convenient for after the laser head heats adhesive, separate wafer and carrier plate.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of an anti-contamination assembly of the present utility model;

FIG. 3 is a schematic view of a separation assembly according to the present utility model.

In the figure: 1 workbench, 2 brackets, 3 supporting rods, 4 top plates, 5 anti-pollution components, 501 exhaust fans, 502 air inlet pipes, 503 connecting plates, 504 air nozzles, 505 air outlet pipes, 506 purifying boxes, 507 filter plates, 508 active carbon plates, 509 fans, 6 separation components, 601 mounting plates, 602 second electric push rods, 603 pull rods, 604 sucking discs, 7 first electric push rods, 8 fixing plates, 9 double-shaft linear modules, 10 connecting rods, 11 laser heads and 12 backing plates.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1, an air pollution prevention laser de-bonding gas emission mechanism in this embodiment includes a workbench 1, a support 2 is fixed on the lower surface of the workbench 1, a support rod 3 is fixed on the upper surface of the workbench 1, a top plate 4 is fixed on the other end of the support rod 3, the support rod 3 supports and fixes the top plate 4, an anti-pollution assembly 5 is arranged on the upper surface of the top plate 4, harmful gas exhaust equipment is avoided, the damage to workshop working environment and the health of workers is avoided, a separation assembly 6 is arranged on the upper surface of the workbench 1, separation of a wafer and a carrier plate is facilitated, a first electric push rod 7 is fixed on the upper surface of the top plate 4, an output shaft of the first electric push rod 7 penetrates through and extends to the lower side of the top plate 4, a fixing plate 8 is fixed on the output shaft of the first electric push rod 7, a fixing plate 8 moves, a double-shaft linear module 9 is fixed on the lower surface of the fixing plate 8, a connecting rod 10 is fixed on the bottom end of the double-shaft linear module 9, the double-shaft linear module 9 drives the connecting rod 10 to move, the bottom end of the connecting rod 10 is fixed on the laser head 11, and the laser head 11 is driven by the connecting rod 11 to move to the laser head 11, and the laser head 11 is adjusted to the proper position of the laser head 1, and the laser head is prevented from being influenced by the laser head 11.

In this embodiment, the number of the brackets 2 is four, and the brackets are uniformly distributed at four corners of the lower surface of the workbench 1, so that the workbench 1 is more stable during working, the number of the supporting rods 3 is four, and the brackets are uniformly distributed at four corners of the lower surface of the top plate 4, so that the top plate 4 is more stable.

Referring to fig. 2, in order to avoid harm to workshop working environment and health of workers, the anti-pollution assembly 5 in this embodiment includes an exhaust fan 501 fixed on the upper surface of a top plate 4, an input end of the exhaust fan 501 is communicated with an air inlet pipe 502, the exhaust fan 501 transmits wind power into the air inlet pipe 502, the other end of the air inlet pipe 502 penetrates and extends to the lower side of a fixing plate 8, a connecting plate 503 is fixed on the outer side of a connecting rod 10 to avoid deviation of the position of the air inlet pipe 502 when the connecting rod 10 moves, influence on the exhaust efficiency, a wind nozzle 504 is fixed on the lower surface of the connecting plate 503, one end of the air inlet pipe 502 far from the exhaust fan 501 penetrates and extends to the inside of the connecting plate 503 and is communicated with the wind nozzle 504, the wind inlet pipe 502 transmits wind power to the wind nozzle 504, the wind nozzle 504 can increase the wind radiation range, and the wind nozzle 504 sucks harmful gas, the exhaust fan 501 is communicated with the air inlet pipe 502, the air outlet pipe 505 is communicated with the output end of the exhaust fan 501, the purifying box 506 is fixed on the upper surface of the top plate 4, harmful gas is purified, the other end of the air outlet pipe 505 is communicated with the right side of the purifying box 506, the harmful gas in the exhaust fan 501 is discharged into the purifying box 506 through the air outlet pipe 505, the filter plate 507 is fixed between the inner walls of the opposite sides of the purifying box 506, the harmful gas is filtered by the filter plate 507, the dust with larger volume is adsorbed on the filter plate 507 through static electricity, the activated carbon plate 508 is fixed between the inner walls of the opposite sides of the purifying box 506, the residual gas is adsorbed by the activated carbon plate 508, a fan 509 is fixed in the inner side of the left side wall of the purifying box 506, the filtered gas is discharged from the purifying box 506, avoiding secondary pollution caused by gas left in the purifying box 506.

In this embodiment, the quantity of air exhauster 501 and purifying box 506 is two, and all with the axis bilateral symmetry distribution of roof 4, improve the efficiency of convulsions and purification, avoid harmful gas to miss, the shape of purifying box 506 is inside hollow cuboid, make things convenient for internally mounted purifying element, the installing port has all been seted up to one side that two purifying boxes 506 are on the back mutually, two fans 509 are located two installing ports respectively, so that with the gaseous discharge that filters in the purifying box 506, the filter 507 is located the one side that is close to tuber pipe 505, the activated carbon plate 508 is located the one side that is close to fan 509, let harmful gas earlier pass through the filtration of filter 507, adsorb by activated carbon plate 508 again.

Referring to fig. 3, in order to facilitate separation of a wafer and a carrier plate, the separation assembly 6 in this embodiment includes a mounting plate 601 fixed on the upper surface of the workbench 1, a second electric push rod 602 is fixed on the left side of the mounting plate 601, an output shaft of the second electric push rod 602 penetrates through and extends to the right side of the mounting plate 601, a pull rod 603 is fixed on the output shaft, the second electric push rod 602 drives the pull rod 603 to move, and a sucker 604 is fixed on the other end of the pull rod 603, so that the wafer and the carrier plate can be adsorbed, and the wafer is prevented from falling and being damaged during separation.

In this embodiment, the number of mounting plates 601 is two, and the mounting plates are symmetrically distributed about the central axis of the table 1, so as to separate the wafer and the carrier plate respectively.

The working principle of the embodiment is as follows:

(1) Opening second electric putter 602, second electric putter 602 drives pull rod 603 and removes, control two pull rods 603 relative movement, make two sucking discs 604 be close to, adsorb one side of wafer on sucking disc 604, one side of carrier plate adsorbs on sucking disc 604 of another side, make the bonding body fixed, after the fixed bonding body, open first electric putter 7, the output shaft of first electric putter 7 drives fixed plate 8 and removes, fixed plate 8 drives biax straight line module 9 and removes, biax straight line module 9 drives connecting rod 10 and removes, connecting rod 10 drives laser head 11 and removes laser head 11 to suitable processing height, adjust the position of laser head 11 through biax straight line module 9, make laser head 11 aim at the position of adhesion agent, open laser head 11, laser head 11 launches laser and heats the adhesion agent, make the adhesion agent break away from, control second electric putter 602 can make wafer and carrier plate separate, and the absorption that has sucking disc 604 can avoid the wafer to break down when separating damages, it leads to wafer and carrier plate to adhere together once more to solidify after meeting the cold.

(2) When the laser head 11 heats the adhesive, the high temperature can cause the adhesive to generate harmful gas, the exhaust fan 501 is opened, the exhaust fan 501 transmits wind power into the air inlet pipe 502, the air inlet pipe 502 transmits wind power into the air nozzle 504, the air nozzle 504 can enlarge the range of wind power radiation, the air nozzle 504 sucks the harmful gas, the harmful gas is introduced into the exhaust fan 501 from the air inlet pipe 502, the harmful gas is discharged into the purifying box 506 through the air outlet pipe 505, the harmful gas is filtered by the filter plate 507, the dust with larger volume is adsorbed on the filter plate 507 through static electricity, the residual gas is adsorbed by the activated carbon plate 508, some harmful substances in the gas are adsorbed, and the filtered gas is discharged from the purifying box 506 under the catalysis of the fan 509, so that the gas is prevented from being polluted by secondary pollution in the purifying box 506.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a laser uncoupling gas emission mechanism of air pollution prevention, includes workstation (1), its characterized in that: the automatic feeding device is characterized in that a support (2) is fixed on the lower surface of the workbench (1), a supporting rod (3) is fixed on the upper surface of the workbench (1), a top plate (4) is fixed on the other end of the supporting rod (3), an anti-pollution assembly (5) is arranged on the upper surface of the top plate (4), a separation assembly (6) is arranged on the upper surface of the workbench (1), a first electric push rod (7) is fixed on the upper surface of the top plate (4), an output shaft of the first electric push rod (7) penetrates through and extends to the lower side of the top plate (4), a fixing plate (8) is fixed on the lower surface of the fixing plate (8), a double-shaft linear module (9) is fixed on the bottom end of the double-shaft linear module (9), a connecting rod (10) is fixed on the bottom end of the connecting rod (10), a laser head (11) is fixed on the bottom end of the connecting rod (10), and a base plate (12) is fixed on the upper surface of the workbench (1).

The anti-pollution assembly (5) is including fixing air exhauster (501) at roof (4) upper surface, the input intercommunication of air exhauster (501) has air-supply line (502), the other end of air-supply line (502) runs through and extends to the downside of fixed plate (8), the outside of connecting rod (10) is fixed with connecting plate (503), the lower fixed surface of connecting plate (503) has tuyere (504), the one end that air exhauster (501) was kept away from to air supply line (502) runs through and extends to the inside of connecting plate (503), and communicates with tuyere (504), the output intercommunication of air exhauster (501) has out tuber pipe (505), the upper surface of roof (4) is fixed with purifying box (506), the other end of air-supply line (505) is linked together with the right side of purifying box (506), be fixed with filter (507) between the inner wall of one side that purifying box (506) is opposite, be fixed with active carbon plate (508) between the inner wall of one side that purifying box (506) is opposite, the inside of purifying box (506) is fixed with fan (509).

2. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the number of the brackets (2) is four, and the brackets are uniformly distributed at four corners of the lower surface of the workbench (1).

3. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the number of the supporting rods (3) is four, and the supporting rods are uniformly distributed at four corners of the lower surface of the top plate (4).

4. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the number of the exhaust fans (501) and the number of the purifying boxes (506) are two, and the exhaust fans and the purifying boxes are symmetrically distributed on the left and right sides of the central axis of the top plate (4).

5. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the shape of purifying box (506) is inside hollow cuboid, and two purifying box (506) are all offered the installing port in one side that is opposite to each other, and two fan (509) are located two installing ports respectively.

6. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the filter plate (507) is positioned at one side close to the air outlet pipe (505), and the activated carbon plate (508) is positioned at one side close to the fan (509).

7. The air pollution prevention laser debonding gas venting mechanism of claim 1, wherein: the separating assembly (6) comprises a mounting plate (601) fixed on the upper surface of the workbench (1), a second electric push rod (602) is fixed on the left side of the mounting plate (601), an output shaft of the second electric push rod (602) penetrates through and extends to the right side of the mounting plate (601), a pull rod (603) is fixed, and a sucker (604) is fixed on the other end of the pull rod (603).

8. The air pollution prevention laser debonding gas venting mechanism of claim 7, wherein: the number of the mounting plates (601) is two, and the mounting plates are distributed symmetrically on the left and right sides by the central axis of the workbench (1).