CN219179238U

CN219179238U - Detection equipment

Info

Publication number: CN219179238U
Application number: CN202223276468.2U
Authority: CN
Inventors: 吴晓萍; 袁俊超; 蒋延标
Original assignee: Jiangsu Yongding Optoelectronic Technology Co ltd
Current assignee: Jiangsu Yongding Optoelectronic Technology Co ltd
Priority date: 2022-12-07
Filing date: 2022-12-07
Publication date: 2023-06-13
Anticipated expiration: 2032-12-07

Abstract

The utility model discloses detection equipment, and relates to the technical field of semiconductor production detection; the utility model comprises a round rotating plate, wherein three circular placing grooves are formed in the rotating plate in a penetrating way, a vertically arranged blanking cylinder is arranged right above one of the placing grooves, and a fixing plate with the diameter larger than that of the rotating plate is arranged right below the rotating plate; according to the utility model, the motor drives the swinging plate and the swinging rod to rotate through the vertical rod, so that the swinging rod pushes the movable plate to rotate, when the swinging rod rotates for one circle along with the swinging plate, the swinging rod is inserted into the next movable groove on the movable plate again, the driving shaft intermittently rotates, after a silicon wafer is discharged from the discharging opening, the silicon wafers in the discharging barrel can be automatically and intermittently discharged one by one, a worker can be not required to perform discharging one by one, then detection is performed, the detection efficiency of the semiconductor silicon wafers is improved, and the workload of the worker is reduced.

Description

Detection equipment

Technical Field

The utility model relates to the technical field of semiconductor production detection, in particular to detection equipment.

Background

Semiconductors refer to materials that have electrical conductivity properties intermediate between conductors and insulators at normal temperatures. The semiconductor refers to a material with controllable conductivity ranging from an insulator to a conductor, and in the production process of the semiconductor, a silicon wafer is a production raw material commonly used for the semiconductor.

The semiconductor silicon wafer is required to be detected after production and processing, the defect of the produced semiconductor silicon wafer is avoided from influencing subsequent production, but when the semiconductor silicon wafer is detected and fed, only a worker singly places the silicon wafer by hand, and the labor workload of the worker is increased.

In view of the above problems, the inventors propose a detection apparatus for solving the above problems.

Disclosure of Invention

In order to solve the problems that when the semiconductor silicon wafers are subjected to detection feeding, the silicon wafers are only placed by a single worker, and the labor workload of the worker is increased; the utility model aims to provide a detection device.

In order to solve the technical problems, the utility model adopts the following technical scheme: the utility model provides a detection equipment, includes and is circular shape revolving board, run through on the revolving board and set up three and be annular distribution and be circular shape standing groove, one of them the setting groove is equipped with the unloading section of thick bamboo of vertical setting directly over, and the unloading is stored in the section of thick bamboo, and will put the silicon chip again in the next standing groove after revolving board rotates, be equipped with the fixed plate that the diameter is greater than self under the revolving board, the first recess has been seted up to the fixed plate upper surface shell, be equipped with the blotter of rubber material in the first recess, cushion protection is carried out to the silicon chip that falls, avoid the atress to lead to damaging, the revolving board is put and is set up in first recess, the fixed plate is located one of them standing groove below and has been seted up the feed opening, conveniently arranges the silicon chip on the revolving board to collect in the cover, the feed opening diameter is slightly greater than the standing groove, the fixed plate below is close to the feed opening and is equipped with four risers that are the rectangle setting, four vertical plates are provided with conveying belts in a transmission manner, collecting sleeves are arranged on the surfaces of the conveying belts at equal intervals, the collecting sleeves are integrally flexible, the collecting sleeves can bend and conveniently bypass a driving roller, are flexible, buffer protection is carried out on the discharged silicon wafers, the discharged silicon wafers are collected, the discharged silicon wafers are moved to a position below a detection device through the conveying belts to be detected, a vertically arranged driving shaft is fixedly arranged at the center of the lower surface of the rotating plate, an intermittent rotating device is arranged at the lower end of the driving shaft and comprises a movable plate, four movable grooves distributed at equal intervals are formed in the movable plate, a swinging rod is movably inserted in the movable grooves, a horizontally arranged swinging plate is fixedly arranged at the lower end of the swinging rod, a vertical rod is fixedly arranged at one end of the swinging plate far away from the swinging rod, the lower end of the vertical rod is provided with a driving device, the vertical rod drives the swinging plate and the swinging rod to rotate, when the swinging rod is movably inserted in the movable groove and is subjected to rotating force, the movable plate can be pushed to rotate, the movable plate drives the rotating plate at the upper end of the driving shaft to rotate, after the swinging rod rotates along with the swinging plate for one circle, the swinging rod is inserted in the next movable groove on the movable plate again, and the movable plate is continuously pushed to rotate, so that the driving shaft intermittently rotates.

Preferably, the driving device comprises a transverse plate, the transverse plate is fixedly arranged on two vertical plates close to the driving shaft, the lower end of the vertical rod penetrates through the transverse plate, a motor is arranged below the transverse plate and close to the vertical rod, the output end of the motor is fixedly connected to the vertical rod and driven by the motor, enough force can be provided to drive the vertical rod to rotate, the lower end of the driving shaft is rotationally arranged on the transverse plate, a first support which is L-shaped is fixedly arranged at one end, far away from the vertical rod, of the transverse plate, the discharging barrel is fixedly arranged at the upper end of the first support, the lower end of the driving shaft is rotationally arranged on the transverse plate, the driving shaft can be stably rotated, and the discharging barrel is fixedly arranged at the upper end of the first support and is fixedly arranged.

Preferably, the driving rollers are rotatably arranged between two adjacent vertical plates, the conveying belt is sleeved on the two driving rollers, a connecting shaft is fixedly arranged at one end of the driving roller close to the driving shaft, two bevel gears which are meshed are fixedly arranged above the movable plate and away from the driving shaft, a connecting rod is fixedly arranged on the bevel gears of the driving shaft, the connecting rod is connected with the connecting shaft through belt transmission, the driving shaft is connected with the driving rollers through bevel gears, belts and the connecting shaft, the driving rollers also rotate along with the driving shafts when the driving shafts rotate, intermittent movement is completed, and the collecting sleeve on the conveying belt can be used for receiving fallen silicon wafers.

Preferably, a second bracket in an L shape is arranged between the two vertical plates on the same side, a silicon wafer defect observer is arranged at one end of the second bracket, which is positioned on the upper surface of the conveying belt, and the silicon wafer defect observer observes the defects of the silicon wafer, so that the effect is very obvious, and the silicon wafer defect observer comprises dislocation, stacking fault, scratch, edge breakage and the like which cannot be observed by naked eyes.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the motor drives the swinging plate and the swinging rod to rotate through the vertical rod, so that the swinging rod pushes the movable plate to rotate, when the swinging rod rotates for one circle along with the swinging plate, the swinging rod is inserted into the next movable groove on the movable plate again, the driving shaft intermittently rotates, after a silicon wafer is discharged from the discharging opening, the silicon wafers in the discharging barrel can be automatically and intermittently discharged one by one, a worker can be not required to perform discharging one by one, then detection is performed, the detection efficiency of the semiconductor silicon wafers is improved, and the workload of the worker is reduced.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of a front view structure of the present utility model.

Fig. 2 is a schematic side view of the present utility model.

FIG. 3 is a schematic view of the structure of the rotating plate of the present utility model.

Fig. 4 is a schematic view of the structure of the driving shaft of the present utility model.

Fig. 5 is a schematic view of a vertical plate structure of the present utility model.

In the figure: 1. a rotating plate; 11. a placement groove; 12. a fixing plate; 13. a first groove; 14. a feed opening; 15. a blanking cylinder; 16. a vertical plate; 17. a conveyor belt; 18. collecting the sleeve; 19. a cushion pad; 2. a drive shaft; 21. a movable plate; 22. a movable groove; 23. a swinging rod; 24. a swinging plate; 25. a vertical rod; 26. a cross plate; 27. a motor; 28. a first bracket; 3. a driving roller; 31. a connecting shaft; 32. bevel gears; 33. a connecting rod; 34. a belt; 35. a second bracket; 36. and a silicon wafer defect observer.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Examples: as shown in fig. 1-5, the utility model provides a detection device, which comprises a circular rotating plate 1, wherein three circular placing grooves 11 are formed in a penetrating manner on the rotating plate 1, a vertically arranged blanking cylinder 15 is arranged right above one of the placing grooves 11, silicon chips are stored in the blanking cylinder 15, after the rotating plate 1 rotates, a fixed plate 12 with the diameter larger than that of the rotating plate 1 is arranged right below the rotating plate 1, a first groove 13 is formed in a drawing shell on the upper surface of the fixed plate 12, the rotating plate 1 is arranged in the first groove 13, a blanking port 14 is formed below one of the placing grooves 11 of the fixed plate 12, the silicon chips on the rotating plate 1 are conveniently discharged into a collecting sleeve 18, the diameter of the blanking port 14 is slightly larger than that of the placing groove 11, four rectangular vertical plates 16 are arranged below the fixed plate 12, a conveying belt 17 is arranged between the four vertical plates 16 in a transmission manner, a collecting sleeve 18 is arranged on the surface of the conveying belt 17 at equal intervals, the silicon chips are collected by moving the conveying belt 17 to the position of the detecting device, and a driving shaft 2 is arranged below the rotating shaft 2.

The intermittent rotating device comprises a movable plate 21, four equidistant movable grooves 22 are formed in the movable plate 21, a swinging rod 23 is movably inserted in the movable grooves 22, a swinging plate 24 which is horizontally arranged is fixedly arranged at the lower end of the swinging rod 23, a vertical rod 25 which is vertically arranged is fixedly arranged at one end, away from the swinging rod 23, of the swinging plate 24, and a driving device is arranged at the lower end of the vertical rod 25.

Through adopting above-mentioned technical scheme, pole setting 25 drives swing plate 24 and swinging arms 23 and rotates for when the activity inserts and establishes swinging arms 23 in movable groove 22 receives pivoted power, can promote movable plate 21 and rotate, and movable plate 21 drives the rotating plate 1 of drive shaft 2 upper end and rotates, and after swinging arms 23 rotated the swing plate 24 round thereupon, will insert again in next movable groove 22 on movable plate 21, continue to promote movable plate 21 and rotate, thereby makes drive shaft 2 intermittent type rotate.

The driving device comprises a transverse plate 26, the transverse plate 26 is fixedly arranged on two vertical plates 16 close to the driving shaft 2, the lower ends of vertical rods 25 penetrate through the transverse plate 26, a motor 27 is arranged below the transverse plate 26 close to the vertical rods 25, and the output ends of the motor 27 are fixedly connected to the vertical rods 25.

By adopting the above technical solution, the motor 27 is used for driving, so that enough force can be provided to drive the upright rod 25 to rotate.

The lower extreme rotation setting of drive shaft 2 is on diaphragm 26, and diaphragm 26 is kept away from pole setting 25 one end fixed be equipped with be L type first support 28, and feed cylinder 15 is fixed to be set up in first support 28 upper end.

Through adopting above-mentioned technical scheme, drive shaft 2 lower extreme rotation sets up on diaphragm 26 for drive shaft 2 can steadily rotate, and feed cylinder 15 is fixed to be set up in first support 28 upper end, fixes feed cylinder 15.

A cushion pad 19 made of rubber is arranged at the inner bottom of the first groove 13.

By adopting the technical scheme, the fallen silicon wafer is buffered and protected, and damage caused by stress is avoided.

The collection sleeve 18 is generally flexible.

Through adopting above-mentioned technical scheme for collection cover 18 self can take place to bend, conveniently bypasses drive roller 3, and self is the flexibility, carries out buffer protection to the silicon chip of unloading.

The driving rollers 3 are rotatably arranged between two adjacent vertical plates 16, the conveying belt 17 is sleeved on the two driving rollers 3 in a transmission manner, a connecting shaft 31 is fixedly arranged at one end of the driving roller 3 close to the driving shaft 2, two bevel gears 32 which are meshed are fixedly arranged above the movable plate 21 on the driving shaft 2, a connecting rod 33 is fixedly arranged on the bevel gears 32 far away from the driving shaft 2, and the connecting rod 33 is connected with the connecting shaft 31 in a transmission manner through a belt 34.

Through adopting above-mentioned technical scheme, connect through bevel gear 32, belt 34 and connecting axle 31 between drive shaft 2 and the drive roller 3, drive shaft 2 also can rotate thereupon when rotating, accomplishes intermittent type removal for collection cover 18 on the conveyer belt 17 can carry out the material to the silicon chip that falls.

A second L-shaped bracket 35 is arranged between the two vertical plates 16 at the same side, and a silicon wafer defect observer 36 is arranged at one end of the second bracket 35, which is positioned on the upper surface of the conveying belt 17.

By adopting the above technical scheme, the silicon wafer defect observer 36 observes the defects of the silicon wafer, and the effect is very obvious, including dislocation, stacking fault, scratch, edge breakage and the like which cannot be observed by naked eyes.

Working principle: during the use, can place a plurality of silicon chips in advance in the feed cylinder 15, start motor 27, motor 27 passes through pole setting 25 and drives swing plate 24 and swinging arms 23 and rotate, when making the activity insert and establish in movable groove 22 swing arms 23 receive pivoted power, can promote movable plate 21 and rotate, thereby make drive shaft 2 intermittent type rotate drive plate 1 of drive shaft 2 upper end, a silicon chip atress in the standing groove 11 will rotate and can move to feed opening 14 department this moment, fall to collecting sleeve 18 through feed opening 14, in this process, drive shaft 2 and drive roller 3 are connected through bevel gear 32, belt 34 and connecting axle 31, drive shaft 2 also can rotate thereupon when rotating, swing arms 23 rotate the round with the back of swing arms 24 with, will insert again in the next movable groove 22 on movable plate 21, continue to promote movable plate 21 and rotate, thereby make drive shaft 2 intermittent type rotate, after a silicon chip is discharged from feed opening 14, will fall in the feed opening 15, drive shaft 2 drives intermittent type rotation of rotary plate 1, fall to the carrier 1 through the carrier of falling from the place in the place of the carrier 17, can reduce the defect that the defect is carried out in the semiconductor chip 1 through the carrier 17 to the carrier that the personnel is carried out in the defect detecting personnel who observe in the semiconductor wafer 1, the defect detecting device is carried out in the carrier 17.

It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims

1. A detection device comprising a rotating plate (1) in the shape of a circle, characterized in that: three annular distribution is circular shape standing groove (11) have been run through on rotating board (1), one of them be equipped with vertically setting's feed cylinder (15) directly over standing groove (11), be equipped with fixed plate (12) that the diameter is greater than self under rotating board (1), first recess (13) have been seted up to fixed plate (12) upper surface shell, rotating board (1) are put and are set up in first recess (13), fixed plate (12) are located one of them standing groove (11) below and have been seted up feed opening (14), feed opening (14) diameter slightly is greater than standing groove (11), fixed plate (12) below is close to feed opening (14) and is equipped with four risers (16) that are the rectangle setting, four the transmission is equipped with conveyer belt (17) between riser (16), conveyer belt (17) surface equidistant interval is equipped with and collects cover (18), rotating board (1) lower surface center department is fixed and is equipped with vertical drive shaft (2) that set up, drive shaft (2) lower extreme is equipped with intermittent type rotation device.

2. The detection device as claimed in claim 1, wherein the intermittent rotation means comprises a movable plate (21), four movable grooves (22) distributed at equal intervals are formed in the movable plate (21), a swinging rod (23) is movably inserted in the movable grooves (22), a swinging plate (24) arranged horizontally is fixedly arranged at the lower end of the swinging rod (23), a vertical rod (25) arranged vertically is fixedly arranged at one end, far away from the swinging rod (23), of the swinging plate (24), and a driving device is arranged at the lower end of the vertical rod (25).

3. A testing device according to claim 2, characterized in that the driving means comprise a cross plate (26), said cross plate (26) being fixedly arranged on two uprights (16) close to the driving shaft (2), said uprights (25) being provided with a motor (27) below said cross plate (26) close to said uprights (25), the output of said motor (27) being fixedly connected to said uprights (25).

4. A testing device according to claim 3, wherein the lower end of the driving shaft (2) is rotatably arranged on a transverse plate (26), one end of the transverse plate (26) far away from the upright (25) is fixedly provided with a first bracket (28) in the shape of an L, and the blanking cylinder (15) is fixedly arranged at the upper end of the first bracket (28).

5. A testing device according to claim 1, characterized in that the inner bottom of the first recess (13) is provided with a cushion (19) of rubber material.

6. A testing device according to claim 1, wherein the collecting sheath (18) is flexible as a whole.

7. A detection device as claimed in claim 1, characterized in that a driving roller (3) is rotatably arranged between two adjacent vertical plates (16), the driving belt (17) is arranged on the two driving rollers (3) in a transmission sleeved mode, a connecting shaft (31) is fixedly arranged at one end of the driving roller (3) close to the driving shaft (2), two bevel gears (32) which are arranged in a meshed mode are fixedly arranged above the movable plate (21) on the driving shaft (2), a connecting rod (33) is fixedly arranged on the bevel gears (32) far away from the driving shaft (2), and the connecting rod (33) is connected with the connecting shaft (31) in a transmission mode through a belt (34).

8. A testing device according to claim 1, characterized in that a second L-shaped bracket (35) is arranged between the two vertical plates (16) on the same side, and a silicon wafer defect observer (36) is arranged at one end of the second bracket (35) positioned on the upper surface of the conveyor belt (17).