CN219156966U - Constant-temperature waterway monitoring device and system and PVD equipment - Google Patents
Constant-temperature waterway monitoring device and system and PVD equipment Download PDFInfo
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- CN219156966U CN219156966U CN202223420458.1U CN202223420458U CN219156966U CN 219156966 U CN219156966 U CN 219156966U CN 202223420458 U CN202223420458 U CN 202223420458U CN 219156966 U CN219156966 U CN 219156966U
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- 238000012806 monitoring device Methods 0.000 title claims abstract description 36
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- 239000000110 cooling liquid Substances 0.000 claims abstract description 27
- 238000012544 monitoring process Methods 0.000 claims abstract description 22
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- 238000001816 cooling Methods 0.000 claims description 5
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- 230000005540 biological transmission Effects 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
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- 238000007733 ion plating Methods 0.000 description 1
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Abstract
The utility model provides a constant-temperature waterway monitoring device and system and PVD equipment, and relates to the technical field of integrated circuit manufacturing. The constant temperature waterway monitoring device comprises: the shell is internally provided with a cavity for cooling liquid to circulate, and the cavity is communicated with the circulating waterway; the sensor assembly is arranged in the cavity and is used for monitoring the temperature of the cooling liquid in the cavity and the water pressure of the cooling liquid flowing out of the cavity; and the display is electrically connected with the sensor assembly and is used for displaying the temperature parameter and the pressure parameter. According to the utility model, the temperature of the cooling liquid and the water pressure of the cooling liquid flowing out of the cavity are monitored through the sensor assembly, so that a worker can observe the temperature and the pressure change of the cooling liquid in the working process of the PVD equipment conveniently, and can make countermeasures conveniently and rapidly, the normal operation of the equipment is ensured, and the average service life of the equipment is prolonged.
Description
Technical Field
The utility model relates to the technical field of integrated circuit manufacturing, in particular to a constant-temperature waterway monitoring device and system and PVD equipment.
Background
Physical vapor deposition (Physical Vapor Deposition, PVD) refers to a process in which physical processes are used to transfer atoms or molecules from a sputtering cathode or vapor source to a surface of a substrate (e.g., a wafer) and is used to spray particles having specific properties (e.g., high strength, wear resistance, heat dissipation, corrosion resistance, etc.) onto a lower performing precursor, resulting in better performance of the precursor. Basic methods of PVD equipment processing include vacuum evaporation, sputtering, ion plating, and the like.
In PVD processes, the chamber lid (chamber lid) of the chamber is at a high temperature and is easily damaged at a high temperature and high pressure, so that the chamber lid needs to be cooled. In the existing PVD equipment, a constant-temperature waterway is communicated with a water quantity monitoring device, and a machine table chamber upper cover is cooled through the constant-temperature waterway, but the water quantity monitoring device can only monitor whether water quantity exists in the constant-temperature waterway and cannot display parameters such as pressure, temperature and the like in the constant-temperature waterway, so that abnormal conditions such as abnormal pressure, abnormal temperature and the like in the constant-temperature waterway cannot be displayed, workers cannot easily perceive abnormal conditions in the working of the PVD equipment, and the conditions such as water leakage and water seepage of the machine table chamber upper cover are easily caused, so that the normal work of peripheral electronic elements is influenced, and the average service life is influenced.
Disclosure of Invention
The utility model aims to provide a constant-temperature waterway monitoring device and a constant-temperature waterway monitoring system, which are used for solving the problems that the existing PVD equipment cannot monitor and display the pressure and the temperature in the constant-temperature waterway, so that a worker cannot easily perceive the abnormal condition in the working of the PVD equipment, and the problem that the chamber lid is easy to leak water and water is solved.
In order to solve the technical problems, the utility model provides a constant-temperature waterway monitoring device for monitoring cooling liquid of PVD equipment, which comprises: the shell is internally provided with a cavity for cooling liquid to circulate, and the cavity is communicated with the circulating waterway;
the sensor assembly is arranged in the cavity and is used for monitoring the temperature of the cooling liquid in the cavity and the water pressure of the cooling liquid flowing out of the cavity;
and the display is electrically connected with the sensor assembly and is used for displaying the temperature parameter and the pressure parameter.
Optionally, the sensor assembly includes:
the temperature sensor is fixed on the shell, the induction end of the temperature sensor stretches into the cavity, and the temperature sensor is electrically connected with the display;
the pressure sensor is arranged at the water inlet or the water outlet of the cavity and is electrically connected with the display.
Optionally, the temperature parameter monitored by the temperature sensor is between-20 degrees and 85 degrees.
Optionally, the pressure parameter monitored by the pressure sensor is between-150 PA and 150 PA.
Optionally, the cavity is provided with a water inlet pipeline and a water outlet pipeline, and the water inlet pipeline, the water outlet pipeline and the circulating water channel are communicated through a joint.
Optionally, the water inlet pipeline, the water outlet pipeline and the circulating waterway are all provided with first sealing elements.
The utility model also provides a constant-temperature waterway monitoring system for monitoring the cooling liquid of the PVD equipment, which comprises a water supply device, a machine chamber upper cover, a circulating waterway and a monitoring device;
the water supply device is communicated with the upper cover of the machine chamber through the circulating waterway;
the monitoring device is arranged in the circulating waterway, and the constant-temperature waterway monitoring device is adopted by the monitoring device.
Optionally, a cooling water channel is arranged in the upper cover of the machine chamber, and the cooling water channel is communicated with the circulating water channel.
Optionally, the communication part of the cooling water channel and the circulating water channel is provided with a second sealing piece.
Optionally, the device further comprises a power supply device, and the power supply device is electrically connected with the water supply device and the monitoring device.
The utility model also provides PVD equipment, which comprises the constant-temperature waterway monitoring system.
According to the constant-temperature waterway monitoring device and system provided by the utility model, the temperature and the pressure of the cooling liquid in the circulating waterway are monitored in real time through the temperature sensor and the pressure sensor, and the temperature parameter and the pressure parameter are displayed through the display, so that a worker can observe the change of the temperature parameter and the pressure parameter of the cooling liquid in the actual working process, and further can detect the abnormal condition of PVD equipment in working, so that the worker can timely take countermeasures, the conditions of water leakage, water seepage and the like of the upper cover (chamber lid) of the machine chamber are reduced, the normal operation of the equipment is ensured, and the average service life of the equipment is prolonged.
Drawings
Those of ordinary skill in the art will appreciate that the figures are provided for a better understanding of the present utility model and do not constitute any limitation on the scope of the present utility model. Wherein:
FIG. 1 is a schematic diagram of a constant temperature waterway monitoring device according to an embodiment of the present utility model;
fig. 2 is a schematic structural diagram of a constant-temperature waterway monitoring system according to an embodiment of the present utility model.
Description of element numbers:
1-a constant-temperature waterway monitoring device; 11-a cavity; 111-a water inlet pipeline; 112-an outlet line; a 12-sensor assembly; 121-a temperature sensor; 122-a pressure sensor; 13-a display; 14-linker;
2-a machine chamber upper cover;
3-a water supply device;
4-a circulating waterway; 41. a water inlet pipe; 42. and a water outlet pipeline.
Detailed Description
Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings. In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.
Fig. 1 is a schematic structural diagram of a constant-temperature waterway monitoring device according to an embodiment of the present utility model, and fig. 2 is a schematic structural diagram of a constant-temperature waterway monitoring system according to an embodiment of the present utility model. Referring to fig. 1 and 2, the present embodiment provides a constant-temperature waterway monitoring device 1 for monitoring a coolant of a PVD apparatus. Including a housing (not shown), a sensor assembly 12 and a display 13. The inside of the shell is provided with a cavity 11 for cooling liquid to circulate, and the cavity 11 is communicated with the circulating waterway 4. The sensor assembly 12 is disposed within the cavity 11 for monitoring the temperature of the cooling fluid within the cavity 11 and the pressure of the cooling fluid exiting the cavity 11. A display 13 is electrically connected to the sensor assembly 12 for displaying the temperature and pressure parameters.
The cooling liquid in this embodiment may be water, but in a specific implementation, the cooling liquid may be alcohol, glycerin, ethylene glycol, propylene glycol, or the like.
Referring to fig. 1 and 2, in the present embodiment, the volume in the cavity 11 is square, and the cooling liquid enters the cavity 11, passes through the measurement of the sensor assembly 12, and then flows out of the cavity 11 to enter the upper cover of the machine chamber or the water supply device. The shape of the cavity 11 may be set according to the actual installation environment, and may be a cylinder, a sphere, or other irregular shape without interfering with each other, and the shape is not limited thereto.
In the present embodiment, the chamber 11 has a water inlet pipe 111 and a water outlet pipe 112, and the water inlet pipe 111, the water outlet pipe 112 and the circulation water path 4 are respectively communicated through the joint 14. Specifically, two connectors 14 may be provided, the water inlet pipeline 111 communicates with the circulation waterway 4 through one connector 14, and the water outlet pipeline 112 communicates with the circulation waterway 4 through the other connector 14. As an alternative example, a quarter portion of the water inlet pipe 111 and the water outlet pipe 112, which are far from each other, are provided as threaded pipes, and the length of the portion of the water inlet pipe 111 and the water outlet pipe 112, which is provided as the threaded pipes, may be adaptively selected according to the connection strength and the tightness.
In addition, when the water inlet pipe 111 and the water outlet pipe 112 are threaded pipes, and the pipes in the circulating water channel 4 are internally threaded pipes, the two ends of the joint 14 are externally threaded pipes and are matched with the water inlet pipe 111, the water outlet pipe 112 and the pipes in the circulating water channel 4. When the water inlet pipe 111 and the water outlet pipe 112 are provided with threaded pipes and the pipes in the circulating water channel 4 are external threaded pipes, the two ends of the joint 14 are internal threaded pipes and are matched with the water inlet pipe 111, the water outlet pipe 112 and the pipes in the circulating water channel 4.
In a preferred embodiment, the water inlet pipeline 111 and the water outlet pipeline 112 are respectively provided with a first sealing member (not shown in the figure) at the communication position of the circulating water channel 4. The sealing performance of the communication between the cavity 11 and the circulating waterway 4 can be improved by the first sealing piece, and the occurrence of water leakage and water seepage at the communication position is reduced. The first sealing element can be a sealing ring, a rubber ring, a sealing rubber strip and the like.
Referring to fig. 1 and 2, in the present embodiment, the sensor assembly 12 includes a temperature sensor 121 and a pressure sensor 122. The temperature sensor 121 is fixed on the housing, and the sensing end of the temperature sensor 121 extends into the cavity 11 and is electrically connected with the display 13. The temperature sensor 121 transmits the monitored temperature of the cooling liquid in the cavity 11 to the display 13 through a data transmission line, and a worker can observe the change of the temperature parameter in real time through the display 13 to judge whether the temperature of the cooling liquid is within the standard parameter range. For example, the temperature parameter monitored by the temperature sensor 121 is between-20 degrees and 85 degrees, and the adaptation (limit) temperature of the machine chamber upper cover 2 is about 65 degrees.
In this embodiment, the pressure sensor 122 may be disposed at the water inlet of the cavity 11, or may be disposed at the water outlet of the cavity 11, and electrically connected to the display 13. The pressure sensor 122 transmits the pressure parameter monitored at the water inlet or the water outlet of the cavity 11 to the display 13 through a data transmission line, and a worker can observe the change of the pressure parameter in real time through the display 13 to judge whether the pressure of the cooling liquid is within the standard parameter range. For example, the pressure sensor 122 monitors a pressure parameter between-150 PA and 150 PA.
In this embodiment, a display 13 is provided, and the pressure sensor 122 and the temperature sensor 121 are electrically connected to the display 13, and the display 13 can display the temperature parameter and the pressure parameter for reference of the staff. In practice, two displays 13 may be provided, and the two displays 13 are electrically connected to the pressure sensor 122 and the temperature sensor 121, respectively, so that the temperature parameter and the pressure parameter are displayed on the two displays 13, respectively.
Referring to fig. 1 and 2, the embodiment of the utility model further provides a constant-temperature waterway monitoring system, which comprises a water supply device 3, a machine chamber upper cover 2, a circulating waterway 4 and a monitoring device 1. Wherein, the water supply device 3 is communicated with the machine chamber upper cover 2 through the circulating waterway 4. The monitoring device 1 is arranged in the circulating waterway 4, and the constant-temperature waterway monitoring device 1 is adopted by the monitoring device 1. The constant-temperature waterway monitoring system can also comprise a power supply device, wherein the power supply device is electrically connected with the water supply device 3 and the monitoring device 1 and provides power for the water supply device 3 and the monitoring device 1.
Referring to fig. 1 and 2, a cooling water channel is provided in the upper cover 2 of the machine chamber, and the cooling water channel is communicated with the circulating water channel 4. Specifically, the cooling water path can be cast and formed in the machine cavity upper cover 2, and is continuously distributed in an S shape in the machine cavity upper cover 2, so that the cooling liquid can circulate in any part of the machine cavity upper cover 2 as much as possible, and the omnibearing constant temperature operation of the machine cavity upper cover 2 is realized.
In addition, the circulating waterway 4 comprises a water inlet pipeline 41 and a water outlet pipeline 42, wherein two ends of the water outlet pipeline 42 are respectively communicated with the water outlet of the water supply device 3 and the water inlet of the cooling waterway, and two ends of the water inlet pipeline 41 are respectively communicated with the water inlet of the water supply device 3 and the water outlet of the cooling waterway. The constant-temperature waterway monitoring device 1 in the embodiment can be communicated with a water inlet pipeline 41 in the circulating waterway 4 and can also be communicated with a water outlet pipeline 42 in the circulating waterway 4.
Referring to fig. 1 and 2, the communicating parts of the cooling water channel and the circulating water channel 4 are respectively provided with a second sealing member, and the second sealing members can improve the tightness of the communicating parts of the cooling water channel and the circulating water channel 4, so that the occurrence of water leakage and water seepage at the communicating parts of the cooling water channel and the circulating water channel 4 is reduced. The second sealing element can be a sealing ring, a rubber ring, a sealing rubber strip and the like.
The embodiment of the utility model also provides PVD equipment, which comprises the constant-temperature waterway monitoring system. Since the present utility model does not involve improvement of other parts of the PVD apparatus, it is not described in detail, but it should be understood how to implement it according to the common general knowledge of a person skilled in the art and the disclosure of the present application.
In summary, the temperature sensor and the pressure sensor monitor the temperature and the pressure of the cooling liquid in the circulating waterway in real time, and the temperature parameter and the pressure parameter are displayed through the display, so that a worker can observe the change of the temperature parameter and the pressure parameter of the cooling liquid in the actual working process, and further can detect the abnormal condition of the PVD equipment in working, and can make countermeasures in time, the situations of water leakage, water seepage and the like of the upper cover (chamber lid) of the machine chamber are reduced, the normal operation of the equipment is ensured, and the average service life of the equipment is prolonged. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (10)
1. A constant temperature water route monitoring devices for monitoring PVD equipment's coolant liquid, its characterized in that includes:
the shell is internally provided with a cavity for cooling liquid to circulate, and the cavity is communicated with the circulating waterway;
the sensor assembly is arranged in the cavity and is used for monitoring the temperature of the cooling liquid in the cavity and the water pressure of the cooling liquid flowing out of the cavity;
and the display is electrically connected with the sensor assembly and is used for displaying the temperature parameter and the pressure parameter.
2. The thermostatic waterway monitoring device of claim 1, wherein the sensor assembly includes:
the temperature sensor is fixed on the shell, the induction end of the temperature sensor stretches into the cavity, and the temperature sensor is electrically connected with the display;
the pressure sensor is arranged at the water inlet or the water outlet of the cavity and is electrically connected with the display.
3. The constant temperature waterway monitoring device of claim 2, wherein the temperature parameter monitored by the temperature sensor is between-20 and 85 degrees, and the pressure parameter monitored by the pressure sensor is between-150 PA and 150 PA.
4. The constant temperature waterway monitoring device of claim 1, wherein the cavity has a water inlet pipeline and a water outlet pipeline, the water inlet pipeline, the water outlet pipeline and the circulating waterway being in communication through a joint.
5. The constant temperature waterway monitoring device of claim 4, wherein the water inlet pipeline, the water outlet pipeline and the circulating waterway are all provided with first sealing elements.
6. The constant-temperature waterway monitoring system is used for monitoring cooling liquid of PVD equipment and is characterized by comprising a water supply device, a machine chamber upper cover, a circulating waterway and a monitoring device;
the water supply device is communicated with the upper cover of the machine chamber through the circulating waterway;
the monitoring device is arranged in the circulating waterway, and the constant-temperature waterway monitoring device as claimed in any one of claims 1 to 5 is adopted as the monitoring device.
7. The constant temperature waterway monitoring system of claim 6, wherein the cabinet chamber upper cover has a cooling waterway therein, the cooling waterway being in communication with the circulation waterway.
8. The constant temperature waterway monitoring system of claim 7, wherein the cooling waterway and the circulating waterway are each provided with a second seal.
9. The constant temperature waterway monitoring system of claim 6, further comprising a power device electrically coupled to the water supply device and the monitoring device.
10. PVD apparatus comprising a thermostatic waterway monitoring system according to any of claims 6 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223420458.1U CN219156966U (en) | 2022-12-16 | 2022-12-16 | Constant-temperature waterway monitoring device and system and PVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223420458.1U CN219156966U (en) | 2022-12-16 | 2022-12-16 | Constant-temperature waterway monitoring device and system and PVD equipment |
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| Publication Number | Publication Date |
|---|---|
| CN219156966U true CN219156966U (en) | 2023-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223420458.1U Active CN219156966U (en) | 2022-12-16 | 2022-12-16 | Constant-temperature waterway monitoring device and system and PVD equipment |
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| Country | Link |
|---|---|
| CN (1) | CN219156966U (en) |
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- 2022-12-16 CN CN202223420458.1U patent/CN219156966U/en active Active
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