CN219142687U - Surface detection device of optical part - Google Patents
Surface detection device of optical part Download PDFInfo
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- CN219142687U CN219142687U CN202223354306.6U CN202223354306U CN219142687U CN 219142687 U CN219142687 U CN 219142687U CN 202223354306 U CN202223354306 U CN 202223354306U CN 219142687 U CN219142687 U CN 219142687U
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Abstract
The utility model discloses a surface detection device of an optical part, which comprises a bracket, a liquid containing disc, supporting legs, a sample clamp, a third cross rod, an annular light source, a first cross rod, a camera, a lens and a second cross rod, wherein the first cross rod is arranged on the bracket; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the liquid containing disc is erected on the base through supporting legs; the sample fixture is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; an annular light source is located between the sample holder and the lens. For the optical part without opaque light, the device immerses the lower surface of the detected sample into the liquid with the refractive index close to that of the sample, so that the interference of the lower surface to the detection of the upper surface is reduced; further, the scattering influence of the lower surface is isolated by using the opaque wave band of the material, so that the surface defect detection is remarkably simplified, and the test is accurate and efficient.
Description
Technical Field
The utility model relates to a surface detection device of an optical part, and belongs to the technical field of surface detection of the optical part.
Background
The surface defect of the optical part is an important evaluation index of the surface quality of the optical part, can cause scattering and energy loss to light beams incident on the surface of the optical part, and can also generate serious diffraction phenomenon if the size of the defect is smaller, and phenomena such as film damage, diffraction stripes, energy absorption, defect distortion and the like appear to influence the service efficiency and service life of the optical part.
The detection of surface defects of optical parts is a long-standing but not well-solved practical engineering problem, and the complexity is derived from various aspects such as the depth of scratches, the directionality of the sides of the scratches, the roughness of the sides of the defects, and the like; there are also some kinds of surface defect detection difficulties due to the surface state of the part itself, such as complex surface shape like a prism, polished state of the lower surface, and the like.
The detection of surface defects of the existing optical parts is seriously affected by the lower surface, such as a laser cavity mirror with a frosted surface on the lower surface, a spherical mirror with a large curvature and the like.
Disclosure of Invention
The utility model provides a surface detection device of an optical part, which aims to solve the technical problem that the surface defect detection of the optical part with a frosted surface and the like on the lower surface is seriously affected by the lower surface.
In order to solve the technical problems, the technical scheme adopted by the utility model is as follows:
a surface detection method of an optical part utilizes a light source which is opaque to the optical part to carry out dark field illumination on the surface to be detected of the optical part, and obtains a dark field photo by matching with a lens and a camera which work in the same wave band as the light source, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection.
For example, when a photograph has bright spots, bright stripes, etc. with brightness significantly higher than that of the background, the photograph is a pit, scratch, etc. on the surface to be detected.
According to the method, the light source which is opaque to the optical part is used for carrying out dark field illumination on the surface to be measured of the optical part, illumination can be limited on the surface directly irradiated by the light, the light cannot penetrate into the material and cannot reach the lower surface of the optical part, interference of light reflection, refraction and scattering possibly beyond the light directly irradiated surface is eliminated, surface defect detection is obviously simplified, and the test is accurate and efficient.
The above method can be used for, but is not limited to, the inspection of the following optical parts: 1) Visible and near infrared bands are transparent, but ultraviolet is opaque, such as common crown optical glass parts; 2) Visible, ultraviolet and near infrared bands are transparent, but mid-and far-infrared bands are opaque, such as quartz-like glass optical parts; 3) Infrared transparent, but opaque in the visible and ultraviolet bands, such as infrared glass parts, infrared glass is another very important class of glass materials, such as various types of chalcogenide glass.
The method comprises the steps that an ultraviolet light opaque optical part is illuminated by an ultraviolet light source, and a lens and a camera working in an ultraviolet band are matched to image and detect defects on the upper surface of glass; since the material itself is opaque to ultraviolet light, ultraviolet light striking the upper surface of the glass article will not penetrate the glass material to reach the lower surface of the glass article, and thus there is no scattering interference from the lower surface; in this way, disturbances on the lower surface of the glazing can be eliminated, focusing on the detection of the upper surface of the glazing.
The optical parts opaque to the middle infrared and far infrared wave bands are illuminated by utilizing a light source of the middle infrared or the far infrared, and the imaging detection of the defects on the upper surface of the glass is carried out by matching with a lens and a camera working in the middle infrared or the far infrared wave bands; similarly, since the material itself is opaque to mid-infrared or far-infrared light, mid-infrared or far-infrared light striking the upper surface of the glass article will not penetrate the glass material to reach the lower surface of the glass article, and thus there is no scattering interference from the lower surface; in this way, disturbances on the lower surface of the glazing can be eliminated, focusing on the detection of the upper surface of the glazing.
The method comprises the steps of illuminating an opaque optical part in visible light and ultraviolet light bands by using a visible light or ultraviolet light source, and detecting defects on the upper surface of glass by matching a lens and a camera working in the visible light or ultraviolet light bands; similarly, since the material itself is opaque to the ultraviolet or visible light bands, the ultraviolet and/or visible light striking the upper surface of the glass article will not penetrate the glass material to reach the lower surface of the glass article, and thus there is no scattering interference from the lower surface; in this way, disturbances on the lower surface of the glazing can be eliminated, focusing on the detection of the upper surface of the glazing.
With ultraviolet and infrared light band detection, the cost is high relative to detection in the visible light band.
A detection device for realizing the detection method comprises: the device comprises a bracket, a sample clamp, a first cross rod, an annular light source, a second cross rod, a camera and a lens; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; an annular light source is located between the sample holder and the lens.
In order to conveniently adjust the transverse position and the longitudinal position of the annular light source, the camera and the lens, the first cross rod and the second cross rod are of a length-adjustable structure, and the heights of the first cross rod and the second cross rod on the longitudinal support rod are adjustable.
The length telescopic structure and the height of the telescopic structure are adjustable, the telescopic structure and the height of the telescopic structure are directly achieved through the existing structure with related functions, if the telescopic structure can be a double-layer sleeve structure which is relatively fixed through bolts, the existing automatic control structure and the like can be adopted, the contrast of the telescopic structure is not particularly improved, and therefore the telescopic structure is not repeated.
For convenient replacement, the camera is detachably connected to the second cross bar; the annular light source is detachably connected to the first cross bar. The detachable structure can be an existing plug-in type structure, a threaded connection structure or a clamp structure.
During detection, the surface to be detected of the optical part is upwards fixed on the sample clamp, the annular light source irradiates the surface to be detected at an angle of 30-75 degrees to carry out dark field illumination, namely, the illumination light source cannot directly reflect on the surface of the sample and enter a camera lens.
The annular light source, the camera and the lens all work in a wave band opaque to the optical parts, such as ultraviolet wave band, infrared wave band or visible light wave band, and the annular light source, the camera and the lens work in the same wave band. That is, the annular light source is opaque to the part to be measured, and the annular light source, the camera and the lens operate in the same wave band.
For an optical part without opaque light, soaking the surface opposite to the surface to be detected in liquid with the refractive index difference value of the surface to be detected within +/-0.05, carrying out dark field illumination on the surface to be detected by utilizing a light source of a visible light wave band, and acquiring a dark field photo by matching with a lens and a camera working in the visible light wave band, wherein defects of the surface to be detected are shot on the dark field photo, so that imaging detection is realized.
In this way, the strong scattering of the opposite surface of the surface to be detected can be restrained, and the interference of the opposite surface to be detected to the surface to be detected is reduced; the light source, the camera, the lens and other devices can still work in the conventional visible light wave band, and the defect detection on the upper surface of the part is shot on a picture under the illumination of dark field light, so that imaging detection is realized.
Of course, the method can be implemented by the liquid soaking mode for the optical parts with opaque light, and is simple, easy to operate and low in cost.
If the optical part is polished on one side, the upper surface of the optical part is polished, the lower surface of the optical part is frosted, the frosted surface is soaked in liquid with the refractive index difference value of the optical part within +/-0.05, scattering of the lower surface is restrained, interference of scattering of the lower surface on detection of the upper surface is reduced, a light source in a visible light wave band is utilized to carry out dark field illumination on the surface to be detected, a lens and a camera working in the visible light wave band are matched to obtain a dark field photo, and defects of the surface to be detected are shot on the dark field photo, so that imaging detection is realized.
The difficulty in detecting the surface defects of the optical part with single-sided polishing is that the scattering of the illumination light source on the frosted surface is so strong that the background intensity of the image is greatly increased, so that the extraction and interpretation of the optical surface defect signals are influenced, and the defect detection is difficult.
The frosted lower surface is soaked in the liquid with basically consistent refractive index, so that scattering inhibition on the frosted surface is realized, the scattering background is reduced, the relative signal to noise ratio of a target signal is improved, and defect detection on the polished surface is remarkably simplified.
The detection device for realizing the detection method comprises a bracket, a liquid containing disc, supporting legs, a sample clamp, a third cross rod, an annular light source, a first cross rod, a camera, a lens and a second cross rod; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the liquid containing disc is erected on the base through supporting legs; the sample fixture is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; an annular light source is located between the sample holder and the lens.
The bottom of the liquid containing disc is made of the same material as the optical part to be tested; the side wall of the liquid containing disc is based on the condition that light scattering is not affected, and if the diameter of the liquid containing disc is large enough, measurement is not affected, and the requirement on the side wall material is not required.
In order to facilitate the adjustment of the transverse positions and the longitudinal positions of the optical parts, the annular light source, the camera and the lens, the first cross rod, the second cross rod and the third cross rod are of telescopic structures in length, and the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal support rod are adjustable.
The annular light source, the camera and the lens all work in the visible light wave band.
During detection, the liquid containing disc contains liquid with the refractive index difference of +/-0.05, the surface to be detected of the optical part is upwards fixed on the sample clamp, the lower surface of the optical part is completely soaked in the liquid, the surface to be detected (upper surface) is completely exposed out of the liquid, the annular light source irradiates the surface to be detected at an angle of 30-75 degrees for dark field illumination, namely, the illumination light source cannot directly reflect on the surface of the sample and enter a camera lens.
The refractive index of the original liquid adopted for preparing the soaking liquid can be referred to the website: https: /(www.engineeringtoolbox.com)/reactive-index-d_1264. Html.
The technology not mentioned in the present utility model refers to the prior art.
The surface detection device of the optical part effectively solves the technical problem that the surface of the optical part is affected by the lower surface during surface detection, and the scattering effect of the lower surface is isolated by utilizing the opaque wave band of the material, so that the surface defect detection is remarkably simplified, and the test is accurate and efficient; further, for the optical part without opaque light, the lower surface of the detected sample is soaked in the liquid with the refractive index close to that of the sample, so that the strong scattering of the lower surface is restrained, the interference of the scattering of the lower surface on the detection of the upper surface is reduced, and the illumination and the shooting can be completed by utilizing the conventional visible light wave band.
Drawings
FIG. 1 is a schematic view of a crown optic part transparent to different light rays;
FIG. 2 shows the transparency of a quartz glass component to different light rays;
FIG. 3 is a view showing the transparency of an infrared glass part to different light rays;
FIG. 4 is a schematic diagram of a surface inspection apparatus for optical parts according to the present utility model;
FIG. 5 is a schematic diagram of a surface inspection apparatus for optical parts according to the present utility model;
in the figure, 1 is an optical part, 2 is a base, 3 is a longitudinal support rod, 4 is a sample clamp, 5 is a first cross rod, 6 is an annular light source, 7 is a second cross rod, 8 is a camera, 9 is a lens, 10 is a third cross rod, 11 is a liquid containing disc, and 12 is a support leg; a is ultraviolet light, b is visible light or infrared light, c is middle infrared light or far infrared light, d is ultraviolet light or visible light, and e is infrared light.
Detailed Description
For a better understanding of the present utility model, the following examples are further illustrated, but are not limited to the following examples.
The terms of orientation such as "longitudinal," "transverse," "upper," "lower," "top," "bottom," and the like in this application are based on relative orientations or positional relationships illustrated in the drawings and should not be construed as an absolute limitation of this application.
Example 1
As shown in FIG. 1, the optical parts to be detected are common crown optical glass parts, transparent to visible light and near infrared bands, but opaque to ultraviolet light, and are polished on one side, with polished upper surface and frosted lower surface.
As shown in fig. 4, the device for detection comprises a bracket, a sample clamp, a first cross bar, an annular light source, a second cross bar, a camera and a lens; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is detachably connected to the longitudinal support rod through the first cross rod, and the annular light source meeting the requirements can be replaced according to the requirement; the camera is detachably connected to the longitudinal support rod through the second cross rod, the lens is downward, and the camera and the lens which meet the requirements can be replaced according to the requirement; the annular light source is positioned between the sample clamp and the lens; the first cross rod and the second cross rod are of telescopic structures, the heights of the first cross rod and the second cross rod on the longitudinal support rod are adjustable, and therefore the transverse positions and the longitudinal positions of the annular light source, the camera and the lens can be adjusted according to requirements.
The crown optical glass part is opaque in ultraviolet band shorter than 310nm, in this example, 275nm UVC_LED is selected to manufacture an annular light source, the polished surface (surface to be measured) of the optical part is upwards fixed on a sample fixture, as shown in fig. 4, the sample fixture in this example is a groove which is arranged on a base and is matched with the shape of the optical part, the depth of the groove is smaller than the thickness of the optical part, and when in detection, the side surface of the optical part to be measured is upwards arranged in the groove. Since the light emitted by the annular light source does not pass through the optical part, the illumination light does not reach the lower surface, and is not affected by scattering of the roughness of the lower surface. The camera and the lens adopt a Sony XC-EU500 ultraviolet camera and a Pinerest UV1628CM quartz lens which work in an ultraviolet band, and the defects of pits, scratches and the like on the surface to be detected can scatter the irradiated UVC light to the whole space, enter the lens, image in the camera to form a dark field photo of the surface defects, and the bright spots and bright stripes with the brightness obviously higher than the background in the photo are pits and scratches on the detected surface, so that the accuracy required by the national standard is 5um and the precision is 0.1um.
Example 2
As shown in fig. 2, the optical part to be detected is a quartz glass optical part, transparent to visible light, ultraviolet light and near infrared bands, but opaque to middle and far infrared bands, and is polished on one side, with a polished upper surface and a frosted lower surface. The detection device used was the same as in example 1;
the quartz glass article is opaque in the infrared band greater than 4.5um, and in this example a medium wave LED light source with a wavelength longer than 4.5um is selected: the quantum cascade LED is manufactured into an annular light source, and then the illumination angle of 45-75 degrees is adopted to carry out dark field illumination on the tested sample, namely the illumination light source cannot directly reflect on the surface of the sample and enter a camera lens. Since the light emitted by the light source does not pass through the optical component, the illumination light does not reach the lower surface, and is not affected by scattering of roughness of the lower surface. In the embodiment, the camera can be four types of Tigris 640InSb, tigris 640InSb BB, tigris 640MCT and Tigris 640MCT BB which work in the mid-infrared band of Xenics company, and the lens can be three types of RS-L305/40MW, RS-L305/55MW, RS-L460IR and the like of vinci vision. Of course, the selection of the camera and the lens is not limited by the above models, and many other models can be selected and matched according to the cost performance requirement. Defects such as pits and scratches on the surface to be detected can scatter the irradiated infrared light to the whole space, the infrared light enters a lens, imaging is carried out in a camera to form a dark field photo of the surface defects, a camera Tigris 640InSb and a lens RS-L305/40MW are adopted to shoot a photo, bright spots and bright stripes with brightness obviously higher than that of the background in the photo are pits and scratches on the surface to be detected, the accuracy required by the national standard is 5um, and the accuracy is 0.1um.
Example 3
The optical part to be detected is made of fused quartz, the refractive index is 1.46, the optical part is polished on one side, the upper surface is a polished surface, and the lower surface is a frosted surface.
As shown in fig. 5, the device for detection comprises a bracket, a liquid containing disc, supporting legs, a sample clamp, a third cross rod, an annular light source, a first cross rod, a camera, a lens and a second cross rod; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the liquid containing disc is erected on the base through the support legs, namely the support legs are used for supporting the liquid containing disc, and the support legs can be directly arranged on the periphery of the bottom of the liquid containing disc, so that the bottom of the liquid containing disc is far away from the base, and interference of light scattering from the base is eliminated; the bottom of the liquid containing disc is made of fused quartz, the inner diameter of the liquid containing disc is more than 1.5 times of that of the optical part to be detected, and when the optical part to be detected is soaked in the center of the liquid containing disc, the side wall of the liquid containing disc cannot influence light scattering; the sample fixture is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; the annular light source is positioned between the sample clamp and the lens; the first cross rod, the second cross rod and the third cross rod are of telescopic structures in length, the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal support rod are adjustable, and therefore the transverse positions and the longitudinal positions of the optical parts, the annular light source, the camera and the lens can be adjusted according to requirements. The annular light source, the camera and the lens all work in the visible light wave band, in this example, the Leshi LTS-2HPR250-R/GBW annular light source, the MER2-502-79U3M POL camera with large constant image and the Leshi LTS-TC08110-5MP lens are specifically adopted.
As shown in fig. 5, the polished surface of the optical part is clamped on the sample clamp with the upper and lower frosted surfaces, in this example, the sample clamp is a clamp capable of stably clamping the side surface of the optical part, and the structure is similar to a test tube clamp, but the diameter capable of clamping is larger than that of the test tube clamp and is suitable for the optical part, or the clamp structure is adopted, the sample clamp is thinner and is smaller than 1/6 of the thickness of the optical part, so that the soaking of the lower surface is not affected, and the testing of the upper surface is not affected; the liquid containing tray is filled with carbon tetrachloride (CCl) with the depth of about 10mm 4 Refractive index 1.46), the frosted surface of the optical part is immersed in carbon tetrachloride (CCl) 4 ) 2-5 mm depth in liquid, polishing surface of optical part(upper surface) is completely exposed to liquid, since carbon tetrachloride (CCl 4 ) The liquid was substantially consistent with the refractive index of the fused silica optical part and the frosted surface (lower surface) immersed in the liquid was substantially invisible, i.e., substantially free of light scattered from the frosted surface (lower surface). At this time, the part to be inspected, carbon tetrachloride (CCl 4) liquid and the bottom of the container may be treated as one sample. The annular light source irradiates the surface to be detected at an angle of 45-75 degrees to carry out dark field illumination, the defect detection of the upper surface of the part is carried out on a dark field picture, bright spots and bright stripes with brightness obviously higher than that of the background in the picture are pits and scratch marks on the detected surface, the accuracy required by the national standard is 5um, and the accuracy is 0.1um.
Claims (10)
1. A surface inspection device for optical parts, characterized in that: the device comprises a bracket, a liquid containing disc, supporting feet, a sample clamp, a third cross rod, an annular light source, a first cross rod, a camera, a lens and a second cross rod; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the liquid containing disc is erected on the base through supporting legs; the sample fixture is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; an annular light source is located between the sample holder and the lens.
2. The surface inspection apparatus for optical parts according to claim 1, wherein: the material used at the bottom of the liquid containing disc is the same as the material of the optical part to be tested.
3. The surface inspection apparatus for optical parts according to claim 2, wherein: the inner diameter of the liquid containing disc is more than 1.5 times of the optical part to be measured.
4. A surface inspection apparatus for optical parts as claimed in any one of claims 1 to 3, wherein: the first cross rod, the second cross rod and the third cross rod are of a length-adjustable structure, and the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal support rod are adjustable.
5. A surface inspection apparatus for optical parts as claimed in any one of claims 1 to 3, wherein: the annular light source, the camera and the lens all work in the visible light wave band.
6. A surface inspection apparatus for optical parts as claimed in any one of claims 1 to 3, wherein: the liquid containing disc is filled with liquid with the refractive index difference value between the refractive index of the liquid containing disc and the refractive index of the optical part to be measured within +/-0.05.
7. A surface inspection device for optical parts, characterized in that: the device comprises a bracket, a sample clamp, a first cross rod, an annular light source, a second cross rod, a camera and a lens; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is connected to the longitudinal support rod through a first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the lens is downward; an annular light source is located between the sample holder and the lens.
8. The surface inspection apparatus for optical parts as claimed in claim 7, wherein: the first cross rod and the second cross rod are of a length-adjustable structure, and the heights of the first cross rod and the second cross rod on the longitudinal support rod are adjustable; the camera is detachably connected to the second cross bar; the annular light source is detachably connected to the first cross bar.
9. A surface inspection apparatus for optical parts as claimed in claim 7 or 8, wherein: the annular light source, the camera and the lens work in ultraviolet bands, infrared bands or visible light bands, the annular light source is opaque to the part to be tested, and the annular light source, the camera and the lens work in the same band.
10. A surface inspection apparatus for optical parts as claimed in claim 7 or 8, wherein: the sample clamp is a groove which is arranged on the base and is matched with the shape of the optical part.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223354306.6U CN219142687U (en) | 2022-12-14 | 2022-12-14 | Surface detection device of optical part |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223354306.6U CN219142687U (en) | 2022-12-14 | 2022-12-14 | Surface detection device of optical part |
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