CN115980084A - Surface detection method of optical part - Google Patents
Surface detection method of optical part Download PDFInfo
- Publication number
- CN115980084A CN115980084A CN202211607376.XA CN202211607376A CN115980084A CN 115980084 A CN115980084 A CN 115980084A CN 202211607376 A CN202211607376 A CN 202211607376A CN 115980084 A CN115980084 A CN 115980084A
- Authority
- CN
- China
- Prior art keywords
- light source
- camera
- lens
- optical part
- cross rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a surface detection method of an optical part, which utilizes a light source which is not transparent to the optical part to carry out dark field illumination on the surface to be detected of the optical part, and a lens and a camera which work in the same wave band as the used light source are matched to obtain a dark field photo, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection. The surface detection method of the optical part effectively solves the technical problem that the surface of the optical part is influenced by the lower surface during surface detection, and utilizes the opaque wave band of the material to isolate the scattering influence of the lower surface, so that the surface defect detection is obviously simplified, and the test is accurate and efficient; furthermore, for optical parts without opaque light, the lower surface of the detected sample is soaked in liquid with similar refractive index, so that strong scattering of the lower surface is inhibited, interference of scattering of the lower surface on detection of the upper surface is reduced, and illumination and shooting can be completed by using a conventional visible light wave band.
Description
Technical Field
The invention relates to a surface detection method of an optical part, and belongs to the technical field of surface detection of optical parts.
Background
The surface defect of the optical part is an important evaluation index of the surface quality of the optical part, and can cause scattering and energy loss to light beams incident to the surface of the optical part, if the size of the defect is small, a more serious diffraction phenomenon can be generated, phenomena such as film layer damage, diffraction stripes, energy absorption, defect distortion and the like can be generated, and the service efficiency and the service life of the optical part are influenced.
The detection of surface defects of optical parts is a long-standing but not well solved practical engineering problem, and the complexity thereof is derived from many aspects, such as the depth of scratches, the directionality of the side edges of scratches, the roughness of the side edges of defects, and the like; the difficulty in detecting surface defects of another type of parts is caused by the surface state of the parts themselves, such as a complicated surface shape like a prism, a polished state of the lower surface, and the like.
The detection of surface defects of the existing optical parts is seriously influenced by the lower surface, such as a laser cavity mirror with a frosted surface on the lower surface, a spherical mirror with large curvature and the like.
Disclosure of Invention
The invention provides a surface detection method of an optical part, which aims to solve the technical problem that the detection of surface defects of the optical part with a frosted surface and the like on the lower surface is seriously influenced by the lower surface.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a dark field illumination is carried out on the surface to be detected of the optical part by utilizing a light source which is not transparent to the optical part, a dark field photo is obtained by matching a lens and a camera which work in the same wave band with the used light source, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection.
For example, if the photograph has bright spots or stripes with a brightness significantly higher than that of the background, the bright spots or stripes are pits or scratches on the surface to be detected.
The dark field illumination is carried out on the surface to be tested of the optical part by utilizing the light source which is not transparent to the optical part, the illumination can be limited on the surface directly irradiated by the light, the light can not penetrate into the material and can not reach the lower surface of the optical part, the interference of possible light reflection, refraction and scattering from the light directly irradiated surface is eliminated, the surface defect detection is obviously simplified, and the test is accurate and efficient.
The method can be used for detecting the following optical parts: 1) Transparent in the visible and near infrared bands, but opaque in the ultraviolet, such as common crown optical glass parts; 2) Visible light, ultraviolet light and near infrared bands are transparent, but middle infrared and far infrared bands are opaque, such as quartz glass optical parts; 3) Infrared transparent, but opaque in the visible and ultraviolet bands, such as infrared glass parts, infrared glass is another very important class of glass materials, such as various types of chalcogenide glass.
For optical parts which are not transparent to ultraviolet light, an ultraviolet light source is used for lighting, and a lens and a camera which work in an ultraviolet wave band are matched for imaging and detecting the defects on the upper surface of the glass; since the material itself is opaque to ultraviolet light, ultraviolet light impinging on the upper surface of the glass article will not penetrate the glass material to reach the lower surface of the glass article and thus there will be no scattering interference from the lower surface; therefore, the interference of the lower surface of the glass product can be eliminated, and the detection of the upper surface of the glass can be focused.
The method comprises the following steps that (1) medium-infrared and far-infrared band opaque optical parts are illuminated by a medium-infrared or far-infrared light source and matched with a lens and a camera which work in the medium-infrared or far-infrared band to perform imaging detection on defects on the upper surface of glass; similarly, since the material itself is opaque to mid-infrared or far-infrared light, the mid-infrared or far-infrared light irradiated to the upper surface of the glass article will not penetrate the glass material to reach the lower surface of the glass article, and thus there is no scattering interference from the lower surface; therefore, the interference of the lower surface of the glass product can be eliminated, and the detection of the upper surface of the glass can be focused.
For optical parts which are not transparent in visible light and ultraviolet light wave bands, a visible light or ultraviolet light source is used for lighting, and a lens and a camera which work in cooperation with the visible light or ultraviolet light wave bands are used for imaging and detecting defects on the upper surface of the glass; similarly, because the material itself is opaque to ultraviolet or visible light, ultraviolet and/or visible light impinging on the upper surface of the glass article will not penetrate through the glass material to reach the lower surface of the glass article, and thus there will be no scattering interference from the lower surface; therefore, the interference of the lower surface of the glass product can be eliminated, and the detection of the upper surface of the glass can be focused.
The cost is high relative to the detection of the visible light wave band by utilizing the detection of the ultraviolet light wave band and the infrared light wave band.
A detection device for realizing the detection method comprises the following steps: the device comprises a support, a sample clamp, a first cross bar, an annular light source, a second cross bar, a camera and a lens; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is connected to the longitudinal support rod through the first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through the second cross rod, and the lens faces downwards; the annular light source is located between the sample holder and the lens.
In order to conveniently adjust the transverse positions and the longitudinal positions of the annular light source, the camera and the lens, the first cross rod and the second cross rod are both of length-telescopic structures, and the heights of the first cross rod and the second cross rod on the longitudinal supporting rod are both adjustable.
This application length extending structure, height all adjustable, all directly adopt current have the structure of correlation function can, if can be utilize the bolt to carry out relatively fixed double-deck sleeve structure etc. can also adopt current automatic control structure etc. this application contrast does not have special improvement, consequently no longer gives unnecessary details.
For convenient replacement, the camera is detachably connected to the second cross bar; the annular light source is detachably connected to the first cross rod. The specific detachable structure can be an existing plug-in type structure, a threaded connection structure or a clamping hoop structure and the like.
During detection, the surface to be detected of the optical part is upwards fixed on the sample clamp, the annular light source irradiates the surface to be detected at an angle of 30-75 degrees to perform dark field illumination, namely, the illumination light source cannot be directly reflected on the surface of the sample to enter a camera lens.
The ring light source, the camera and the lens all work in a wave band which is not transparent to the optical part, such as an ultraviolet wave band, an infrared wave band or a visible light wave band, and the ring light source, the camera and the lens work in the same wave band.
For the optical part without opaque light, one surface opposite to the surface to be detected is soaked in liquid with the refractive index difference value within +/-0.05 with the optical part, dark field illumination is carried out on the surface to be detected by utilizing a light source in a visible light wave band, a dark field photo is obtained by matching a lens and a camera which work in the visible light wave band, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection.
Therefore, strong scattering of the opposite surface of the surface to be detected can be inhibited, and the interference of the opposite surface of the surface to be detected on the detection of the surface to be detected is reduced; and the light source, the camera, the lens and other equipment can still work in a conventional visible light wave band, and under the illumination of dark field light, the defect detection of the upper surface of the part is shot on a picture to realize imaging detection.
Of course, the method can be used for the optical parts with opaque light in the mode of soaking in the liquid, and is simple, easy to operate and low in cost.
If the optical part is single-side polished, the upper surface of the optical part is a polished surface, the lower surface of the optical part is a frosted surface, the frosted surface is soaked in liquid with the refractive index difference value of the optical part within +/-0.05, scattering of the lower surface is inhibited, interference of scattering of the lower surface on detection of the upper surface is reduced, dark field illumination is carried out on the surface to be detected by utilizing a light source of a visible light wave band, a dark field photo is obtained by matching a lens and a camera working at the visible light wave band, and defects of the surface to be detected are shot on the dark field photo to realize imaging detection.
The difficulty of surface defect detection of the optical part with a polished single surface is that the scattering of an illumination light source on a frosted surface is very strong, so that the background intensity of an image is greatly increased, the extraction and interpretation of a defect signal of the optical surface are influenced, and the defect detection is difficult.
The frosted lower surface is soaked in the liquid with basically consistent refractive index, so that the scattering inhibition of the frosted surface is realized, the scattering background is reduced, the relative signal-to-noise ratio of a target signal is improved, and the defect detection on the polished surface is obviously simplified.
A detection device for realizing the detection method comprises a support, a liquid containing disc, support legs, a sample clamp, a third cross bar, an annular light source, a first cross bar, a camera, a lens and a second cross bar; the bracket comprises a base and a longitudinal support rod vertically arranged on the base; the liquid containing disc is arranged on the base through a foot rest; the sample clamp is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through the first cross rod, the camera is connected to the camera, the camera is connected to the longitudinal support rod through the second cross rod, and the camera faces downwards; an annular light source is located between the sample holder and the lens.
The bottom of the liquid containing disc is made of the same material as the optical part to be detected; the side wall of the liquid containing disc takes the condition of not influencing light scattering as the standard, and if the diameter of the liquid containing disc is large enough and does not influence measurement, the material of the side wall is not required.
In order to facilitate the adjustment of the transverse position and the longitudinal position of the optical part, the annular light source, the camera and the lens, the first cross rod, the second cross rod and the third cross rod are all of length-telescopic structures, and the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal supporting rod are all adjustable.
The annular light source, the camera and the lens all work in a visible light wave band.
During detection, liquid with the difference value of the refractive index of +/-0.05 between the refractive index of the optical part and the refractive index of the optical part is contained in the liquid containing disc, the surface to be detected of the optical part is upwards fixed on the sample clamp, the lower surface of the optical part is completely soaked in the liquid, the liquid is completely exposed out of the surface to be detected (the upper surface), the annular light source irradiates the surface to be detected at an angle of 30-75 degrees to perform dark field illumination, namely, the illumination light source cannot be directly reflected on the surface of the sample to enter a camera lens.
The refractive index of the original liquid adopted for preparing the soaking liquid can refer to the website: https: // www.engineeringtoolbox.com/removable-index-d 1264.Html.
The prior art is referred to in the art for techniques not mentioned in the present invention.
The surface detection method of the optical part effectively solves the technical problem that the surface of the optical part is influenced by the lower surface during surface detection, and utilizes the opaque wave band of the material to isolate the scattering influence of the lower surface, so that the surface defect detection is obviously simplified, and the test is accurate and efficient; furthermore, for optical parts without opaque light, the lower surface of the detected sample is soaked in liquid with similar refractive index, so that strong scattering of the lower surface is inhibited, interference of scattering of the lower surface on detection of the upper surface is reduced, and illumination and shooting can be completed by using a conventional visible light wave band.
Drawings
FIG. 1 is a schematic view of crown optical glass parts transparent to various light rays;
FIG. 2 is a diagram showing the transparency of a quartz-type glass part to different light rays;
FIG. 3 is a diagram illustrating the transparency of an infrared glass part to different light rays;
FIG. 4 is a schematic view of a detecting device using opaque light;
FIG. 5 is a schematic view showing a structure of a detecting unit using a liquid;
FIG. 6 is a dark field photograph of example 1;
FIG. 7 is a dark field photograph in example 2;
FIG. 8 is a dark field photograph in example 3;
in the figure, 1 is an optical part, 2 is a base, 3 is a longitudinal support rod, 4 is a sample clamp, 5 is a first cross rod, 6 is an annular light source, 7 is a second cross rod, 8 is a camera, 9 is a lens, 10 is a third cross rod, 11 is a liquid containing disc, and 12 is a support leg; a is ultraviolet light, b is visible light or infrared light, c is mid-infrared light or far-infrared light, d is ultraviolet light or visible light, and e is infrared light.
Detailed Description
In order to better understand the present invention, the following examples are further provided to illustrate the present invention, but the present invention is not limited to the following examples.
The terms "longitudinal", "transverse", "upper", "lower", "top", "bottom", and the like in this application are all relative orientations or positional relationships based on the drawings, and should not be construed as an absolute limitation of the present application.
Example 1
As shown in fig. 1, the optical component to be inspected is a general crown optical glass component which is transparent to visible light and near infrared band, but opaque to ultraviolet light, and has a single-side polished surface with a polished upper surface and a frosted lower surface.
As shown in fig. 4, the apparatus for detection, such as the apparatus comprising a support, a sample holder, a first cross-bar, a ring light source, a second cross-bar, a camera and a lens; the bracket comprises a base and a longitudinal support rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is detachably connected to the longitudinal supporting rod through the first cross rod, and the annular light source meeting the requirements can be replaced as required; the camera is detachably connected to the longitudinal supporting rod through the second cross rod, the lens faces downwards, and the camera and the lens which meet the requirements can be replaced according to the requirements; the annular light source is positioned between the sample clamp and the lens; the first cross rod and the second cross rod are both of length-telescopic structures, and the heights of the first cross rod and the second cross rod on the longitudinal supporting rod are adjustable, so that the transverse positions and the longitudinal positions of the annular light source, the camera and the lens can be adjusted as required.
The crown optical glass part is opaque in an ultraviolet band shorter than 310nm, in the embodiment, a 275nm UVC _ LED is selected to manufacture a ring-shaped light source, a polished surface (surface to be measured) of the optical part is upwards fixed on a sample clamp, the sample clamp in the embodiment is a groove which is arranged on a base and is adaptive to the shape of the optical part, the depth of the groove is smaller than the thickness of the optical part, during detection, the side surface of the optical part to be measured is upwards arranged in the groove, the structure is simple, the operation is convenient, the stability is good, and then dark field illumination is carried out on the surface to be measured by adopting an illumination angle of 60 degrees (which can be 30 degrees, 45 degrees, 75 degrees and the like through practice), namely the illumination light source can not be directly reflected on the surface of the sample to enter a camera lens. Because the light emitted by the annular light source can not pass through the optical part, the illuminating light can not reach the lower surface and can not be influenced by the scattering of the roughness of the lower surface. The camera and the lens adopt a Sony XC-EU500 ultraviolet camera and a Pinterest UV1628CM quartz lens which work in ultraviolet wave bands, defects such as pits and scratches on the surface to be detected can scatter irradiated UVC light to the whole space, the UVC light enters the lens, imaging is carried out in the camera, and a dark field photo of the surface defects is formed, as shown in figure 6, bright spots with brightness obviously higher than that of the background and bright stripes are pits and scratches on the surface to be detected, the accuracy completely meeting the national standard requirements is 5um, and the precision is 0.1um.
Example 2
As shown in fig. 2, the optical component to be detected is a quartz glass optical component, which is transparent to visible light, ultraviolet light and near infrared bands, but opaque to middle infrared and far infrared bands, and has a single-side polished surface, a polished upper surface and a frosted lower surface. The detection device used was the same as in example 1;
the quartz glass article is opaque in the infrared band above 4.5um, in this case a medium wave LED source with a wavelength longer than 4.5um is chosen: quantum cascade LED, manufactured as a ring light source, then performs dark field illumination on the measured sample with an illumination angle of 45 degrees (practically, 30 degrees, 60 degrees, 75 degrees, etc.), that is, the illumination light source will not be directly reflected on the sample surface and enter the camera lens. Because the light emitted by the light source can not pass through the optical part, the illuminating light can not reach the lower surface and can not be influenced by the scattering of the roughness of the lower surface. The camera in this example can be selected from large constant image MER2-502-79U3M POL camera and the four models of Tigris 640InSb, tigris 640InSb BB, tigris 640MCT and Tigris 640MCT BB working in the middle infrared band of LTS-TC08110-5MP lens Xenics company, and the lens can be selected from three models of Changchun Rui RS-L305/40MW, RS-L305/55MW, RS-L460IR and the like. Certainly, the selection of the camera and the lens is not limited by the above models, and many other types can be matched according to the cost performance requirement. Defects such as pits, scratches and the like on the surface to be detected scatter the irradiated infrared light to the whole space, enter the lens, and form an image in the camera to form a dark field picture of the surface defect, fig. 7 is a picture taken by the camera Tigris 640InSb and the lens RS-L305/40MW, bright spots and bright stripes with brightness obviously higher than that of the background in the picture are pits and scratches on the surface to be detected, the accuracy completely meeting the national standard requirements is 5um, and the accuracy is 0.1um.
Example 3
The optical parts to be detected are made of fused quartz, the refractive index is 1.46, the optical parts are single-side polished, the upper surface is a polished surface, and the lower surface is a frosted surface.
As shown in fig. 5, the device for detection comprises a bracket, a liquid containing tray, a support leg, a sample clamp, a third cross bar, an annular light source, a first cross bar, a camera, a lens and a second cross bar; the bracket comprises a base and a longitudinal supporting rod vertically arranged on the base; the liquid containing disc is arranged on the base through the foot support, namely the liquid containing disc is supported by the support legs, and the support legs can be directly arranged on the periphery of the bottom of the liquid containing disc to enable the bottom of the liquid containing disc to be far away from the base so as to eliminate the interference of light scattering from the base; the bottom of the liquid containing disc is made of fused quartz, the inner diameter of the liquid containing disc is more than 1.5 times of that of the optical part to be detected, during detection, the optical part to be detected is soaked in the central position of the liquid containing disc, and the side wall of the liquid containing disc cannot influence the scattering of light; the sample clamp is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the camera is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the camera faces downwards; the annular light source is positioned between the sample clamp and the lens; the first cross rod, the second cross rod and the third cross rod are all length-telescopic structures, and the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal supporting rod are all adjustable, so that the transverse positions and the longitudinal positions of the optical part, the annular light source, the camera and the lens can be adjusted as required. The annular light source, the camera and the lens all work in a visible light wave band, in the example, a Leye LTS-2HPR250-R/GBW annular light source, a large constant image MER2-502-79U3M POL camera and a Leye LTS-TC08110-5MP lens are specifically adopted.
As shown in fig. 5, the polished surface and the frosted surface of the optical component are clamped on a sample clamp, in this case, the sample clamp is a clamp capable of stably clamping the side surface of the optical component, the structure is similar to that of a test tube clamp, only the diameter capable of clamping is larger than that of the test tube clamp and is adapted to the optical component, or a clamp structure is adopted, the sample clamp is thin and smaller than 1/6 of the thickness of the optical component, and the soaking of the lower surface and the testing of the upper surface are not influenced; carbon tetrachloride (CCl) with the depth of about 10mm is filled in the liquid containing disc 4 Refractive index 1.46), the frosted surface of the optical part was immersed in carbon tetrachloride (CCl) 4 ) The depth of 2-5 mm in the liquid, the polished surface (upper surface) of the optical part is completely exposed to the liquid due to carbon tetrachloride (CCl) 4 ) The liquid has a refractive index substantially corresponding to that of the fused silica optical component, and the frosted surface (lower surface) immersed in the liquid is substantially invisibleI.e. substantially no light is scattered from the frosted surface (lower surface). At this time, the part to be inspected, carbon tetrachloride (CCl 4) liquid and the bottom of the container can be treated as one sample. The annular light source irradiates the surface to be detected at an angle of 60 degrees (which can be 30 degrees, 45 degrees, 75 degrees and the like through practice) for dark field illumination, the defect detection of the upper surface of the part is shot on a dark field picture, as shown in fig. 8, bright points and bright stripes with brightness obviously higher than that of the background in the picture are pits and scratches on the detected surface, the standard degree completely meeting the national standard requirements is 5um, and the precision is 0.1um.
Claims (10)
1. A surface detection method of an optical component is characterized in that: dark field illumination is carried out on the surface to be detected of the optical part by utilizing a light source which is not transparent to the optical part, a dark field photo is obtained by matching a lens and a camera which work in the same wave band with the used light source, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection.
2. The surface inspection method for an optical component according to claim 1, wherein: optical parts include, but are not limited to, the following three: 1) The visible light and the near infrared wave band are transparent, but the ultraviolet light is not transparent; 2) The visible light, ultraviolet light and near infrared wave bands are transparent, but the middle infrared wave band and the far infrared wave band are not transparent; 3) Infrared is transparent, but the visible and ultraviolet bands are opaque.
3. The surface inspection method of an optical component as set forth in claim 1 or 2, characterized in that: for optical parts which are not transparent to ultraviolet light, an ultraviolet light source is used for lighting, and a lens and a camera which work in an ultraviolet wave band are matched for imaging and detecting the defects on the upper surface of the glass; the method comprises the following steps that (1) medium-infrared and far-infrared band opaque optical parts are illuminated by a medium-infrared or far-infrared light source and matched with a lens and a camera which work in the medium-infrared or far-infrared band to perform imaging detection on defects on the upper surface of glass; for optical parts which are not transparent in visible light and ultraviolet light wave bands, a visible light or ultraviolet light source is used for lighting, and a lens and a camera which work in the visible light or ultraviolet light wave bands are matched to perform imaging detection on defects on the upper surface of the glass.
4. The surface inspection method of an optical component as set forth in claim 1 or 2, characterized in that: the detection device comprises: the device comprises a support, a sample clamp, a first cross bar, an annular light source, a second cross bar, a camera and a lens; the bracket comprises a base and a longitudinal support rod vertically arranged on the base; the sample clamp is arranged on the base; the annular light source is connected to the longitudinal support rod through the first cross rod, the lens is connected to the camera, the camera is connected to the longitudinal support rod through the second cross rod, and the lens faces downwards; the annular light source is located between the sample holder and the lens.
5. The surface inspection method of an optical component as set forth in claim 4, wherein: the first cross rod and the second cross rod are both in length-telescopic structures, and the heights of the first cross rod and the second cross rod on the longitudinal supporting rod are adjustable; the camera is detachably connected to the second cross bar; the annular light source is detachably connected to the first cross rod.
6. The surface inspection method of an optical component as set forth in claim 4, wherein: fixing the surface to be measured of the optical part on a sample clamp upwards, and irradiating the surface to be measured by an annular light source at an angle of 30-75 degrees to carry out dark field illumination; the ring light source, the camera and the lens work in an ultraviolet band, an infrared band or a visible light band, and the ring light source, the camera and the lens work in the same band.
7. The method for inspecting the surface of an optical component as defined in claim 1, wherein: for the optical part without opaque light, one surface opposite to the surface to be detected is soaked in liquid with the refractive index difference value within +/-0.05 with the optical part, dark field illumination is carried out on the surface to be detected by utilizing a light source in a visible light wave band, a dark field photo is obtained by matching a lens and a camera which work in the visible light wave band, and the defect of the surface to be detected is shot on the dark field photo to realize imaging detection.
8. The surface inspection method for an optical component as set forth in claim 7, wherein: the optical part is polished on a single side, the upper surface of the optical part is a polished surface, the lower surface of the optical part is a frosted surface, the frosted surface is soaked in liquid with the refractive index difference value of the optical part within +/-0.05, scattering of the lower surface is inhibited, interference of scattering of the lower surface on detection of the upper surface is reduced, dark field illumination is carried out on the surface to be detected by utilizing a light source of a visible light wave band, a dark field photo is obtained by matching a lens and a camera working at the visible light wave band, and defects on the surface to be detected are shot on the dark field photo to realize imaging detection.
9. The surface inspection method of an optical component as set forth in claim 7 or 8, characterized in that: the detection device comprises a bracket, a liquid containing disc, a support leg, a sample clamp, a third cross bar, an annular light source, a first cross bar, a camera, a lens and a second cross bar; the bracket comprises a base and a longitudinal support rod vertically arranged on the base; the liquid containing disc is arranged on the base through a supporting foot; the sample clamp is connected to the longitudinal support rod through a third cross rod, the annular light source is connected to the longitudinal support rod through a first cross rod, the camera is connected to the camera, the camera is connected to the longitudinal support rod through a second cross rod, and the camera faces downwards; the annular light source is located between the sample holder and the lens.
10. The surface inspection method for an optical component as set forth in claim 9, wherein: the bottom of the liquid containing disc is made of the same material as the optical part to be detected; the first cross rod, the second cross rod and the third cross rod are all of length-telescopic structures, and the heights of the first cross rod, the second cross rod and the third cross rod on the longitudinal supporting rod are all adjustable; the annular light source, the camera and the lens all work in a visible light wave band; liquid with the difference value of the refractive index and the refractive index of the optical part within +/-0.05 is contained in the liquid containing disc, the surface to be measured of the optical part is upwards fixed on the sample clamp, the lower surface of the optical part is completely soaked in the liquid, the surface to be measured (the upper surface) is completely exposed out of the liquid, and the annular light source irradiates the surface to be measured at an angle of 30-75 degrees to perform dark field illumination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211607376.XA CN115980084A (en) | 2022-12-14 | 2022-12-14 | Surface detection method of optical part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211607376.XA CN115980084A (en) | 2022-12-14 | 2022-12-14 | Surface detection method of optical part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115980084A true CN115980084A (en) | 2023-04-18 |
Family
ID=85957337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211607376.XA Pending CN115980084A (en) | 2022-12-14 | 2022-12-14 | Surface detection method of optical part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115980084A (en) |
-
2022
- 2022-12-14 CN CN202211607376.XA patent/CN115980084A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111208064A (en) | Rapid detection device and detection method for subsurface defects of optical element | |
| US3867032A (en) | Arrangement for objectively evaluating characteristics of gems, particularly diamonds | |
| US5633504A (en) | Inspection of optical components | |
| KR100202215B1 (en) | Process and apparatus for examining optical components, especially optical components for the eye and device for illuminating clear-transparent test objects | |
| CN110389021B (en) | Lens image generating system, diopter power and thickness determining and defect detecting method | |
| CN108717062A (en) | A kind of the details in a play not acted out on stage, but told through dialogues defect detecting device and its measurement method of heavy caliber ultra-precision surface | |
| EP3264033B1 (en) | System and method to measure the thickness of ophthalmic lenses | |
| CN107796819B (en) | Dome light source diamond measuring instrument and diamond measuring method | |
| CN208833665U (en) | A kind of CCD target surface calibrating apparatus for fixing based on compromising emanation imaging | |
| KR100532238B1 (en) | Thin film inspection method, apparatus and inspection system used therein | |
| CN108956571A (en) | It is a kind of that ccd target surface is imaged on based on compromising emanation and the calibration method and device of positioning surface angle error are installed | |
| CN219142687U (en) | Surface detection device of optical part | |
| CN115980084A (en) | Surface detection method of optical part | |
| CN111610197A (en) | Defect detection device and defect detection method | |
| CN212059867U (en) | Optical element subsurface defect rapid detection device | |
| CN208672536U (en) | A kind of dark field defect detecting device of heavy caliber ultra-precision surface | |
| CN113252603A (en) | Optimal refractive index measurement method of multilayer transparent ball bed | |
| WO1999064845A1 (en) | Defect detecting unit | |
| JP2821460B2 (en) | Inspection device for transparent substrate | |
| RU2746674C1 (en) | Method for visual-optical surface control | |
| SU408200A1 (en) | DEVICE FOR DEFECTIC TRANSPARENTS | |
| JPS55101002A (en) | Inspecting method for mirror face body | |
| CN210401255U (en) | Machine vision high-resolution coaxial light illumination inspection device | |
| CN214201178U (en) | Liquid refractive index measuring device based on line laser | |
| CN217195181U (en) | Stainless steel inspection light table is used in processing of photoelectronic spare |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |