CN219135305U

CN219135305U - Wafer box three-dimensional storage device

Info

Publication number: CN219135305U
Application number: CN202223423889.3U
Authority: CN
Inventors: 林嘉宏; 薛联金; 杨大鹏
Original assignee: Xiamen Pucheng Semiconductor Technology Co ltd
Current assignee: Xiamen Pucheng Semiconductor Technology Co ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-06-06
Anticipated expiration: 2032-12-20

Abstract

The utility model provides a wafer box three-dimensional storage device which comprises a manipulator and a storage rack, wherein the storage rack is arranged around the manipulator, and a plurality of storage positions are arranged on the storage rack and used for placing wafer boxes; an access window is formed in the side face of the storage frame, a transfer carrying platform is connected to the access window, the manipulator can rotate around the central axis of the storage frame, and the wafer box is taken from the transfer carrying platform to be placed in a corresponding storage position or is taken from the storage position to be placed on the transfer carrying platform. The annular three-dimensional storage rack is arranged, a plurality of storage positions are formed in the annular three-dimensional storage rack and used for placing the wafer storage boxes, automatic access of the annular storage rack is realized through the manipulator, the wafer storage boxes are manually placed on the transfer table, the limitation of the height of a human body is avoided, the storage rack can be designed to be higher, the storage quantity of the storage rack is increased, and the automatic storage improves the taking and placing efficiency of the wafer boxes.

Description

Wafer box three-dimensional storage device

Technical Field

The utility model relates to the technical field of wafer storage equipment, in particular to a wafer box three-dimensional storage device.

Background

In the manufacture of semiconductor integrated circuits, the manufacture of semiconductor wafers depends on multiple process steps of different processing equipment, and a factory is divided into a plurality of production areas according to factors such as a production process of a product, environmental requirements, factory requirements, and the like. The semifinished product must be moved across in different production areas in a cross-flow manner during the production process. In order to improve the production efficiency and the production stability, a process engineer usually places semi-finished products in each production area, and places a storage shelf for storing the semi-finished products in a buffer area of the produced materials, thereby ensuring the correct and rapid flow of the produced materials, and avoiding major accidents of production line material shortage and production pause caused by human factors, equipment or factory maintenance and other unexpected conditions. Then, the semi-finished product is automatically transferred from the production area of the previous section to the production area of the next section by a transfer means, and in order to protect the wafer during storage and transportation, the wafer is usually placed in a special wafer box (wafer chuck), which is a tool specially used for storing the wafer.

However, the existing wafer box storage shelves are used for storing and taking the wafer boxes manually, so that the height of the storage shelves cannot be too high, otherwise the storage shelves cannot cause the problems of falling and the like, the space utilization rate is low, the number of stored wafer boxes is small under the condition of occupying the same ground area, and the taking and putting efficiency is low.

Disclosure of Invention

In order to solve the problems, the utility model aims to provide the wafer box three-dimensional storage device, which is provided with the annular three-dimensional storage rack, so that the storage capacity is increased, the automatic access of the wafer boxes in the annular storage rack is realized through the manipulator, the wafer boxes are manually placed on the transfer table, the storage rack can be designed to be higher without the limitation of the height of a human body, the storage quantity of the storage rack is further increased, and the automatic storage improves the picking and placing efficiency of the wafer boxes.

The utility model is realized by the following steps: the three-dimensional wafer box storage device comprises a manipulator and a storage rack, wherein the storage rack is arranged around the manipulator, and a plurality of storage positions are arranged on the storage rack and used for placing wafer boxes; an access window is formed in the side face of the storage frame, a transfer carrying platform is connected to the access window, the manipulator can rotate around the central axis of the storage frame, and the wafer box is taken from the transfer carrying platform to be placed in a corresponding storage position or is taken from the storage position to be placed on the transfer carrying platform.

In an embodiment of the utility model, the manipulator comprises a rotating seat, a Z-axis moving assembly is arranged on the rotating seat, an X-axis moving assembly is arranged on the Z-axis moving assembly, and a picking and placing fork is arranged on the X-axis moving assembly and used for picking and placing the wafer box.

In an embodiment of the present utility model, a transfer platform is disposed at the access window, a turntable is disposed on the transfer platform, and a wafer cassette placing plate is disposed on the turntable, for placing a wafer cassette, and the turntable is driven by a first motor.

In an embodiment of the present utility model, two turntables are provided on the transfer platform, and each turntable is provided with the wafer cassette placement plate.

In an embodiment of the utility model, a positioning column is arranged on the wafer box placing plate, a corresponding positioning block is arranged on the lower surface of the wafer box, and the positioning column is matched with the positioning column to realize the positioning and placing of the wafer box on the wafer box placing plate.

In an embodiment of the present utility model, the wafer cassette placement plate is provided with an inductive switch.

In an embodiment of the utility model, the storage rack and the manipulator are mounted on a base, and an outer cover is arranged on the base and used for covering the storage rack and the manipulator, and the outer cover is opened at the opposite position of the transfer carrier, so that the wafer box can be conveniently put in or taken out.

In an embodiment of the present utility model, each storage bit is provided with a correlation photoelectric sensor for detecting whether a wafer cassette is placed in the storage bit.

The utility model has the beneficial effects that: compared with the prior art, the utility model has at least the following technical effects: set up annular three-dimensional storage frame to offer a plurality of storage bits above that and be used for placing the wafer storage box, realize the automatic access of annular storage frame through the manipulator, not receive the restriction of human height, can design into higher height with the storage frame, only need increase the longitudinal travel distance of frame manipulator can, showing the storage quantity that has increased the storage frame, the manual work only need place the wafer box on well transfer table, need not to run in different positions because the position of every turn wafer box storage is different, reduced artificial working strength, put into the storage box that the storage frame corresponds with the wafer box by the manipulator, improved the efficiency of production greatly. The sensor is arranged at the storage position of the storage rack, and the inductive switch is arranged on the wafer box placing plate and used for judging whether the wafer box is stored on the storage position or the wafer box placing plate, so that the wafer box can be accurately placed at a designated position by the manipulator.

Drawings

Fig. 1 is a schematic view of an internal structure of a wafer cassette stereoscopic storage device according to the present utility model.

FIG. 2 is a schematic view of the cross-sectional structure in the direction A-A in FIG. 1.

Fig. 3 is a schematic view of a wafer cassette handling robot for a wafer cassette stereo memory device according to the present utility model.

Fig. 4 is a schematic structural view of a storage rack of a wafer cassette stereoscopic storage device according to the present utility model.

Fig. 5 is a schematic view showing an external structure of a wafer cassette stereoscopic storage device according to the present utility model.

Fig. 6 is a schematic view of a transfer table mounting turntable, wafer placement plate.

Fig. 7 is a discrete schematic diagram of the turntable, wafer placement plate, and first motor.

Fig. 8 is a schematic view of a wafer cassette.

Reference numerals illustrate: the device comprises a 1-storage rack, 11-storage positions, 12-access windows, 2-manipulators, a 21-Z-axis moving assembly, a 22-X-axis moving assembly, 23-picking and placing forks, 24-rotating seats, 25-second motors, 3-wafer boxes, 31-positioning blocks, 4-transfer platforms, 41-rotating discs, 42-wafer box placing plates, 43-first motors, 44-positioning columns, 5-bases and 6-outer covers.

Detailed Description

The utility model will be further described with reference to the drawings and specific examples.

Referring to fig. 1 to 8, a wafer cassette three-dimensional storage device includes a manipulator 2 and a storage rack 1, wherein the storage rack 1 is arranged around the manipulator 2, and a plurality of storage bits 11 are arranged on the storage rack 1 and used for placing a wafer cassette 3; an access window 12 is formed in the side face of the storage rack 1, a transfer platform 4 is connected to the access window 12, the manipulator 2 can rotate around the central axis of the storage rack 1, and the wafer cassette 3 is taken from the transfer platform 4 to be placed in a corresponding storage position 11, or the wafer cassette 3 is taken from the storage position 11 to be placed on the transfer platform 4. The wafer box 3 which needs to be stored on the storage rack 1 is manually placed on the transfer platform 4, the manipulator 2 takes the wafer box 3 from the transfer platform 4 and then moves to the storage position 11 corresponding to the storage rack 1 to be placed in the wafer box 3, and then the storage of the wafer box 3 can be completed; otherwise, the manipulator 2 moves to the storage position 11 corresponding to the storage rack 1 to take the wafer box 3, and then moves to the access window 12 to place the taken wafer box 3 on the transfer platform 4, and waits for manual removal. The manual work only needs to go up the unloading in fixed position, deposits to specific position and accomplishes by manipulator 2, greatly reduced artificial working strength, also improved simultaneously and stored and got the efficiency of putting greatly. The storage frame 1 designed into the ring shape is beneficial to increasing the number of storage, reducing the occupied area, and the wafer box 3 is taken and placed by the manipulator 2, so that the height of the whole storage frame 1 can be increased, the height factors of people do not need to be considered, and the further increase of the storage capacity is facilitated. The array of memory bits 11 is arranged on the memory rack 1, avoiding the access window 12.

Referring to fig. 1 to 3, in an embodiment of the utility model, the manipulator 2 includes a rotating base 24, the rotating base 24 is driven to rotate by a second motor 25, a Z-axis moving assembly 21 is mounted on the rotating base 24, an X-axis moving assembly 22 is mounted on the Z-axis moving assembly 21, a pick-and-place fork 23 is mounted on the X-axis moving assembly 22 for forking and placing the wafer box 3, the rotating base 24 rotates to drive the manipulator to rotate to a designated angle, then the manipulator is lifted to a designated height by the Z-axis moving assembly 21, and then the X-axis moving assembly 22 drives the pick-and-place fork 23 to penetrate into a corresponding storage position 11 to insert and place the wafer box 3, or enters the middle transfer table 4 through the access window 12 to fork and place the wafer box 3. The displacement of the X-axis moving assembly and the Z-axis moving assembly is realized in a lead screw nut driving mode.

Referring to fig. 1 to 8, in an embodiment of the present utility model, a transfer table 4 is disposed at the access window 12, a turntable 41 is disposed on the transfer table 4, a wafer cassette placement plate 42 is disposed on the turntable 41 for placing the wafer cassette 3, and the turntable 41 is driven by a first motor 43. The wafer box placing plate 42 is provided with positioning columns 44, the lower surface of the wafer box 3 is provided with corresponding positioning blocks 31, the positioning columns are matched with the wafer box 3 to realize positioning and placing of the wafer box on the wafer box placing plate 42, three positioning positions are preferably arranged, and three-point positioning can be realized. The cassette loading plate 42 is provided with an induction switch (not shown). When the wafer cassette 3 is manually placed on the wafer cassette placing plate 42, the positioning column 44 is aligned with the positioning block 31, at this time, one side of the opening of the wafer cassette 3 faces towards the body of a person, after the induction switch is triggered, the first motor 43 drives the turntable 41 to rotate, so that the opening side of the wafer faces towards the axle center of the storage rack 1, and the manipulator 2 can fork the wafer. In this way, the manipulator 2 only needs to rotate to a designated position to accurately fork and take the wafer. The manual handling of the wafer cassette 3 requires the opening side to be directed to itself, so that the wafers stored therein are prevented from being removed. Two turntables 41 are provided on the intermediate transfer table 4, and each turntable 41 is provided with a wafer cassette placing plate 42. The manual feeding and the material taking of the mechanical arm 2 are conveniently realized, the wafer box 3 is manually placed on the wafer box placing plate 42 of one turntable 41 or the wafer box 3 is taken away, at this time, the mechanical arm 2 can fork or place the wafer box 3 on the wafer box placing plate 42 of the other turntable 41 in a back-and-forth alternating manner, so that the feeding and discharging efficiency is doubled.

Referring to fig. 1 to 3 and fig. 5, in an embodiment of the present utility model, the storage rack 1 and the manipulator 2 are mounted on a base 5, and an outer cover 6 is disposed on the base 5, for covering the storage rack 1 and the manipulator 2, and the outer cover 6 is open at a position opposite to the transfer platform 4, so that the wafer box 3 can be conveniently placed into or removed from the wafer box, and functions of protection and dust prevention are performed.

In an embodiment of the present utility model, a correlation photoelectric sensor (not shown) is disposed in each storage bit 11, for detecting whether the wafer cassette 3 is placed in the storage bit 11. The opposite-irradiation photoelectric sensor, the inductive switch, the first motor 43, the second motor 25 and the manipulator 2 are electrically connected with an upper computer (not shown), and the opposite-irradiation photoelectric sensor and the inductive switch collect whether the data of the wafer box 3 stored in the corresponding positions are transmitted to the upper positions, so that the first motor 43, the second motor 25 and the manipulator 2 can be conveniently controlled to accurately fork and place the wafer box 3. The two sides of the lower surface of the wafer box 3 are downwards protruded, so that a space is reserved for the taking and placing fork 23 to fork into the lower part of the wafer box 3, and the wafer box 3 is forked. The upper computer does not make specific protection requirements for the existing equipment.

The utility model has the following working principle:

the wafer box 3 which needs to be stored on the storage rack 1 is manually placed on the wafer box placing plate 42 of the transfer platform 4, the positioning column 44 is aligned with the positioning block 31, and the placement of the wafer box 3 can be completed, and the induction switch is triggered; then the first motor 43 drives the turntable 41 to rotate, so that the opening of the wafer box 3 faces the mechanical arm 2; the second motor 25 drives the rotating seat 24 to rotate, so as to drive the manipulator 2 to rotate, the manipulator 2 realizes horizontal and vertical movement, the two can realize the loading and unloading of the three-dimensional annular surface of the wafer box 3 in a matched manner, the two can rotate to the opposite position of the middle transfer table 4, the X-axis moving assembly 22 drives the taking and placing fork 23 to push out the space penetrating between the wafer box 3 and the wafer box placing plate 42 to take the wafer box 3 (after taking, a new wafer box 3 to be stored can be placed on the placing plate again), then the rotating seat 24 and the manipulator 2 are matched and operated to the corresponding storage position 11 of the storage rack 1 (when the opposite photoelectric sensor of the storage position 11 is shielded, the wafer box 3 is placed in the storage position 11, and the other storage position 11 needs to be placed in the next storage) and the wafer box 3 can be stored; otherwise, the manipulator 2 is moved to the storage position 11 corresponding to the storage rack 1 to take the wafer cassette 3, and then is moved to the access window 12 to place the taken wafer cassette 3 on the wafer placing plate of the transfer platform 4, and the first motor 43 drives the turntable 41 to reversely rotate to wait for manual removal, so that the process of storing the wafer cassette 3 is not described in detail.

The points to be described are: first, in the description of the present application, it should be noted that, unless otherwise specified and defined, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be mechanical or electrical, or may be a direct connection between two elements, and "upper," "lower," "left," "right," etc. are merely used to indicate relative positional relationships, which may be changed when the absolute position of the object being described is changed.

Secondly: in the drawings of the disclosed embodiments, only the structures related to the embodiments of the present disclosure are referred to, and other structures may refer to the general design, so that the same embodiment and different embodiments of the present disclosure may be combined with each other without conflict.

Finally, the above description is only a preferred embodiment of the present utility model, and the scope of the present utility model is not limited to the above examples, but all technical solutions belonging to the concept of the present utility model are within the scope of the present utility model.

It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be within the scope of the present utility model.

Claims

1. The utility model provides a three-dimensional storage device of wafer box which characterized in that: the wafer storage device comprises a manipulator and a storage rack, wherein the storage rack is arranged around the manipulator, and a plurality of storage positions are arranged on the storage rack and used for placing wafer boxes; an access window is formed in the side face of the storage frame, a transfer carrying platform is connected to the access window, the manipulator can rotate around the central axis of the storage frame, and the wafer box is taken from the transfer carrying platform to be placed in a corresponding storage position or is taken from the storage position to be placed on the transfer carrying platform.

2. The wafer cassette stereoscopic storage device according to claim 1, wherein: the manipulator comprises a rotating seat, a Z-axis moving assembly is arranged on the rotating seat, an X-axis moving assembly is arranged on the Z-axis moving assembly, and a taking and placing fork is arranged on the X-axis moving assembly and used for taking and placing a wafer box.

3. The wafer cassette stereoscopic storage device according to claim 1, wherein: the wafer box placing device is characterized in that a turntable is arranged on the transfer carrier, a wafer box placing plate is arranged on the turntable and used for placing the wafer box, and the turntable is driven by a first motor.

4. A wafer cassette stereoscopic storage device according to claim 3, wherein: the transfer carrier is provided with two turntables, and each turntable is provided with a wafer box placing plate.

5. A wafer cassette stereoscopic storage device according to claim 3, wherein: the wafer box placing plate is provided with a positioning column, and the lower surface of the wafer box is provided with a corresponding positioning block which is matched with the positioning column to realize the positioning and placing of the wafer box on the wafer box placing plate.

6. A wafer cassette stereoscopic storage device according to claim 3, wherein: an inductive switch is arranged on the wafer box placing plate.

7. The wafer cassette stereoscopic storage device according to claim 1, wherein: the storage rack and the manipulator are arranged on the base, an outer cover is arranged on the base and used for covering the storage rack and the manipulator, and the outer cover is opened at the opposite position of the transfer carrier, so that the wafer box can be conveniently placed into or taken out.

8. The wafer cassette stereoscopic storage device according to claim 1, wherein: and each storage bit is internally provided with a correlation photoelectric sensor for detecting whether a wafer box is placed in the storage bit.