CN219121365U

CN219121365U - Large-scale longmen high-speed motion platform

Info

Publication number: CN219121365U
Application number: CN202222897692.7U
Authority: CN
Inventors: 文杰; 贾静
Original assignee: Sanying Motioncontrol Instruments Ltd
Current assignee: Sanying Motioncontrol Instruments Ltd
Priority date: 2022-11-01
Filing date: 2022-11-01
Publication date: 2023-06-02
Anticipated expiration: 2032-11-01

Abstract

The utility model discloses a large gantry high-speed motion platform, which comprises a marble Dan Hengliang X shaft, wherein the marble Dan Hengliang X shaft is fixed above a beam support through a first bolt; the marble Y-axis base is fixed at the bottom of the beam support through a second bolt, and a Y-bearing carrying table top is fixed above the marble Y-axis base through a third bolt; the air floatation vibration isolation system is fixed below the marble Y-axis base through a fourth bolt. The requirements on precise positioning of large-size samples are met, and the quality of nondestructive measurement and online measurement of a large-size display panel is guaranteed.

Description

Large-scale longmen high-speed motion platform

Technical Field

The utility model relates to the field of motion platforms, in particular to a large gantry high-speed motion platform.

Background

Electronic display manufacturing is a typical high-end industry that represents an advanced manufacturing level. The nanometer measurement of the novel display screen industry is mainly offline accurate measurement at present, which results in lag of process adjustment and low yield. Taking an OLED as an example, the key factors influencing the yield are uneven grain distribution and protruding arch of grain boundaries caused by polysilicon crystallization, which can cause the reduction of carrier density and the increase of leakage current, and the deterioration of indexes such as product energy consumption, reliability and the like, which need to be detected by nano three-dimensional morphology measuring equipment. The size (more than 1.5 m) of the detected panel is far beyond the bearing range of the existing nanometer measuring equipment, so that the offline detection can only be carried out after the sample is cut. The precondition for realizing the nondestructive online accurate measurement is to solve the problems of instrument architecture change, noise increase and the like caused by the sample size, so that the development of a motion platform for carrying a large-size sample for online detection, which meets the production line requirement, is very necessary.

Disclosure of Invention

In view of the above-mentioned drawbacks or shortcomings in the prior art, it is desirable to provide a large gantry high-speed motion platform, which meets the requirement for precise positioning of large-size samples, and provides a guarantee for nondestructive measurement and online measurement quality of large-size display panels.

According to the technical scheme provided by the embodiment of the utility model, the large gantry high-speed motion platform comprises a marble Dan Hengliang X shaft, wherein the marble Dan Hengliang X shaft is fixed above a beam support through a first bolt; the marble Y-axis base is fixed at the bottom of the beam support through a second bolt, and a Y-bearing carrying table top is fixed above the marble Y-axis base through a third bolt; the air floatation vibration isolation system is fixed below the marble Y-axis base through a fourth bolt. The marble Dan Hengliang X axle includes X axle crossbeam base, crossbeam X axle guiding system, crossbeam X axle driving system, crossbeam X axle feedback system, crossbeam X axle mesa, tow chain system and collision avoidance system, crossbeam X axle guiding system passes through fifth screw connection the front side of X axle crossbeam base, crossbeam X axle driving system passes through sixth screw connection the side of X axle crossbeam base, crossbeam X axle feedback system with crossbeam X axle mesa passes through seventh screw connection the front side of X axle crossbeam base, the tow chain system passes through eighth screw connection the rear side of X axle crossbeam base, collision avoidance system passes through ninth screw fixation the front side of X axle crossbeam base. The Y bearing carrying table top comprises a rotary pneumatic motor, a cam lifting mechanism, a sample correcting mechanism, a lifting ejector rod, a vacuum adsorption table top and a serial transmission mechanism, wherein the rotary pneumatic motor is fixed at the bottom of the sucker through a first screw, the cam lifting mechanism is fixed on a transmission shaft through a jackscrew for hole shaft matching, the lifting ejector rod is fixed on a lifting connecting rod through a second screw, and the sample correcting mechanism is fixed on the periphery of the vacuum adsorption table top through a third screw. The air floatation vibration isolation system comprises a steel structure support, a Butt inlet air floatation pad and a base mounting plate, wherein the steel structure support is formed by welding square pipes, the Butt inlet air floatation pad is fixed on the steel structure support through a fourth screw, and the base mounting plate is fixed on the Butt inlet air floatation pad through a center screw.

In summary, the utility model has the following beneficial effects: the requirements on precise positioning of large-size samples are met, and the quality of nondestructive measurement and online measurement of a large-size display panel is guaranteed.

Drawings

Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of a structure of a marble Dan Hengliang X axis of the present utility model;

FIG. 3 is a schematic plan view of a Y-bearing carrier surface of the present utility model;

FIG. 4 is a schematic view of the structure of a Y-bearing carrier surface of the present utility model;

fig. 5 is a schematic structural diagram of the air-floating vibration isolation system of the present utility model.

Reference numerals in the drawings: 1. the marble Dan Hengliang X axis; 2. a beam support; 3. a Y bearing carrying table surface; 4. a marble Y-axis base; 5. an air floatation vibration isolation system; 1.1, an X-axis beam base; 1.2, a beam X-axis guiding system; 1.3, a beam X-axis power system; 1.4, a beam X-axis feedback system; 1.5, a cross beam X-axis table top; 1.6, a drag chain system; 1.7, an anti-collision system; 3.1, rotating the pneumatic motor; 3.2, a cam lifting mechanism; 3.3, a sample correction mechanism; 3.4, lifting the ejector rod; 3.5, vacuum adsorbing the table top; 3.6, connecting the transmission mechanism in series; 5.1, a steel structure bracket; 5.2, a Butterz inlet air floatation pad; and 5.3, a base mounting plate.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.

As shown in fig. 1, 2, 3, 4 and 5, the large gantry high-speed motion platform comprises a marble Dan Hengliang X shaft 1, wherein the marble Dan Hengliang X shaft 1 is fixed above a beam support 2 through a first bolt; a marble Y-axis base 4, wherein the marble Y-axis base 4 is fixed at the bottom of the beam support 2 through a second bolt, and a Y-bearing carrying table 3 is fixed above the marble Y-axis base 4 through a third bolt; the air floatation vibration isolation system 5 is fixed below the marble Y-axis base 4 through a fourth bolt, and natural high-quality marble is adopted, so that the air floatation vibration isolation system 5 has the advantages of no deformation, high hardness, long service life, no scratch, no magnetization and the like.

As shown in fig. 1 and 2, the marble Dan Hengliang X-axis 1 includes an X-axis beam base 1.1, a beam X-axis guiding system 1.2, a beam X-axis power system 1.3, a beam X-axis feedback system 1.4, a beam X-axis table surface 1.5, a drag chain system 1.6 and a collision avoidance system 1.7, wherein the beam X-axis guiding system 1.2 is connected to the front side of the X-axis beam base 1.1 through a fifth screw, the beam X-axis power system 1.3 is connected to the side of the X-axis beam base 1.1 through a sixth screw, the beam X-axis feedback system 1.4 and the beam X-axis table surface 1.5 are connected to the front side of the X-axis beam base 1.1 through a seventh screw, the drag chain system 1.6 is connected to the rear side of the X-axis beam base 1.1 through a ninth screw, and the collision avoidance system 1.7 is fixed to the front side of the X-axis beam base 1.1.

As shown in fig. 1, fig. 3 and fig. 4, the Y bearing carrying platform 3 includes a rotary pneumatic motor 3.1, a cam lifting mechanism 3.2, a sample correction mechanism 3.3, a lifting ejector rod 3.4, a vacuum adsorption platform 3.5 and a serial transmission mechanism 3.6, the rotary pneumatic motor 3.1 is fixed at the bottom of the sucker through a first screw, the cam lifting mechanism 3.2 is fixed on a transmission shaft through a hole shaft in a matching manner by using a jackscrew, the cam drives a lifting connecting rod to realize lifting, the lifting ejector rod 3.4 is fixed on the lifting connecting rod through a second screw, so as to drive the lifting ejector rod to move up and down, further realize the action of lifting a sample, thereby facilitating the operation of loading and unloading a large sample, the sample correction mechanism 3.3 is fixed on the periphery of the vacuum adsorption platform 3.5 through a third screw, if the sample is placed on the platform by a manipulator beyond the range of the platform, the whole sample is placed in the range of the carrying platform through a motion instruction given by the PLC, and then the sample is fixed on the platform through negative pressure so as to perform better detection and scanning on the sample.

As shown in fig. 1 and 5, the air-floating vibration isolation system 5 includes a steel structure support 5.1, a air-floating pad 5.2 with a roots inlet and a base mounting plate 5.3, the steel structure support 5.1 is formed by welding square tubes to form a rigid whole, the air-floating pad 5.2 with a roots inlet is fixed on the steel structure support 5.1 through a fourth screw, the base mounting plate 5.3 is fixed on the air-floating pad 5.2 with a center screw, and the air-floating pad 5.2 with a platform is fixed through four holes around the base mounting plate 5.3, so that the whole system is stably fixed on the air-floating vibration isolation system 5.

The working flow is as follows: firstly, a cam lifting mechanism 3.2 is driven by a rotary pneumatic motor 3.1 to enable a lifting ejector rod 3.4 to rise to a certain position, then a sample is placed on a Y-bearing carrying table surface 3 through a mechanical arm for feeding the sample, then the sample is lowered onto a vacuum adsorption table surface 3.5 through the cam lifting mechanism 3.2 driven by the rotary pneumatic motor 3.1, the sample is placed on the Y-bearing carrying table surface 3 regularly through a sample correcting mechanism 3.3, then the sample is fixed through negative pressure, and a scanning head is driven to scan the whole sample area through executing a running track program of an XY motor.

The adoption of the inlet straight line by the beam X-axis guiding system 1.2 has the following advantages:

a. high positioning accuracy

When the linear slide rail is used as the linear guide, the friction mode of the linear slide rail is rolling friction, so that the friction coefficient is reduced to 1/50 of that of the sliding guide, and the difference between the dynamic friction force and the net friction force is small. Therefore, when the bed operates, no slipping phenomenon occurs, and the positioning accuracy of micron-level or even submicron can be achieved.

b. Less abrasion and long-time maintenance of precision

The traditional sliding guide can not avoid bad movement precision of the platform caused by the countercurrent action of an oil film, and the abrasion of the contact surface of the running track is caused by insufficient sliding in movement time, so that the precision is seriously influenced, and the abrasion of the rolling guide is very little. So the stage can maintain the precision for a long time.

c. High-speed motion is used, and driving horsepower required by a machine is greatly reduced

Because the friction force is very small when the linear slide rail moves, the bed can be moved only by small power, and especially when the working mode of the bed is regular round trip operation, the power consumption of the machine can be obviously reduced. And the heat generated by friction is small, so that the device is suitable for high-speed operation.

d. Can bear load in the up-down, left-right direction at the same time

Because of the special restraint structure design of the linear slide rail, the linear slide rail can bear loads in the up-down, left-right directions at the same time, unlike sliding guide, and the lateral load bearable in the direction parallel to the contact surface is lighter. The operation precision of the machine is easy to be poor.

The beam X-axis power system 1.3 adopts a high-thrust linear motor, and compared with a rotating motor, the linear motor has the following advantages:

a. the structure is simple, and the linear motor does not need an additional device for changing the rotary motion into the linear motion, so that the structure of the system is greatly simplified, and the weight and the volume are greatly reduced;

b. the positioning accuracy is high, and the linear motor can realize direct transmission at the place needing linear motion, so that various positioning errors caused by intermediate links can be eliminated, and if microcomputer control is adopted, the positioning accuracy of the whole system can be greatly improved;

c. the reaction speed is high, the sensitivity is high, and the follow-up property is good. The linear motor is easy to support the rotor by magnetic suspension, so that a certain air gap is kept between the rotor and the stator all the time without contact, the contact friction resistance between the stator and the rotor is eliminated, and the sensitivity, the rapidity and the follow-up performance of the system are greatly improved;

d. the working is safe and reliable, and the service life is long. The linear motor can realize non-contact transmission force, and the mechanical friction loss is almost zero, so that the linear motor has few faults and is maintenance-free, thereby being safe and reliable in work and long in service life.

The beam X-axis feedback system 1.4 adopts an imported high-resolution Renishew grating ruler, and the Renishew grating encoder not only has high precision, high integration, full series and low price, but also has the software management functions of small volume, light weight, high speed, quick installation, convenient adjustment, programmable interpolation amplification and strong.

The drag chain system 1.6 adopts an inlet IGUS inlet drag chain, and the IGUS adopts reinforced nylon materials, and has the advantages of tensile load, high elasticity, wear resistance, flame retardance and certain acid and alkali resistance. Mainly has the following advantages:

a. the noise is low when the low-noise high-speed operation is performed, and the noise is only 32db;

b. almost no friction exists between abrasion-resistant drag chains, and no abrasion can be applied to the clean environment of ISO class 3;

c. the modular design can be lengthened and shortened at any one location.

The anti-collision system 1.7 mainly adopts a hydraulic buffer and has the following advantages:

a. the corrosion resistance is good, the austenitic stainless steel material is adopted as the main parts, and the corrosion resistance is good;

b. the structure is compact, the symmetrical structure is adopted, the installation space is small, and the stress is more reasonable;

c. the damping force is large, and the dynamic response time is short;

d. the friction control resistance is small and is generally lower than 1% -2% of rated load;

e. special hydraulic oil and sealing medium are adopted, so that the performance is stable, and the sealing service life is long.

The above description is only illustrative of the preferred embodiments of the utility model and the technical principles employed. Meanwhile, the scope of the utility model is not limited to the technical scheme formed by the specific combination of the technical features, and other technical schemes formed by any combination of the technical features or the equivalent features thereof without departing from the inventive concept are also covered. Such as the above-mentioned features and the technical features disclosed in the present utility model (but not limited to) having similar functions are replaced with each other.

Claims

1. A large gantry high-speed motion platform is characterized in that: comprising the steps of (a) a step of,

a marble Dan Hengliang X axis (1), wherein the marble Dan Hengliang X axis (1) is fixed above the beam support (2) through a first bolt;

the marble Y-axis base (4), the marble Y-axis base (4) is fixed at the bottom of the beam support (2) through a second bolt, and a Y-bearing carrying table board (3) is fixed above the marble Y-axis base (4) through a third bolt;

the air floatation vibration isolation system (5) is fixed below the marble Y-axis base (4) through a fourth bolt.

2. The large gantry high-speed motion platform according to claim 1, wherein: the novel beam X-axis power system comprises a main body and is characterized in that the main body Dan Hengliang X-axis (1) comprises an X-axis beam base (1.1), a beam X-axis guiding system (1.2), a beam X-axis power system (1.3), a beam X-axis feedback system (1.4), a beam X-axis table top (1.5), a drag chain system (1.6) and an anti-collision system (1.7), wherein the beam X-axis guiding system (1.2) is connected to the front side of the X-axis beam base (1.1) through a fifth screw, the beam X-axis power system (1.3) is connected to the side of the X-axis beam base (1.1) through a sixth screw, the beam X-axis feedback system (1.4) and the beam X-axis table top (1.5) are connected to the front side of the X-axis beam base (1.1) through a seventh screw, the drag chain system (1.6) is connected to the rear side of the X-axis beam base (1.1) through an eighth screw, and the anti-collision system (1.7) is fixed to the front side of the beam base (1.1.1) through a ninth screw.

3. The large gantry high-speed motion platform according to claim 1, wherein: y bearing carries mesa (3) including rotatory pneumatic motor (3.1), cam elevating system (3.2), sample correction mechanism (3.3), lift ejector pin (3.4), vacuum adsorption mesa (3.5) and series connection drive mechanism (3.6), rotatory pneumatic motor (3.1) are fixed in the sucking disc bottom through first screw, cam elevating system (3.2) are fixed on the transmission shaft with the jackscrew through hole axle cooperation, lift ejector pin (3.4) are fixed on the lifting connecting rod through the second screw, sample correction mechanism (3.3) are fixed through the third screw around vacuum adsorption mesa (3.5).

4. The large gantry high-speed motion platform according to claim 1, wherein: the air floatation vibration isolation system (5) comprises a steel structure support (5.1), a Butt inlet air floatation cushion (5.2) and a base mounting plate (5.3), wherein the steel structure support (5.1) is formed by welding square pipes, the Butt inlet air floatation cushion (5.2) is fixed on the steel structure support (5.1) through fourth screws, and the base mounting plate (5.3) is fixed on the Butt inlet air floatation cushion (5.2) through central screws.