CN219084107U

CN219084107U - Wafer detection jig

Info

Publication number: CN219084107U
Application number: CN202222876999.9U
Authority: CN
Inventors: 张涛涛
Original assignee: Enpu Qianrui Electronic Technology Suzhou Co ltd
Current assignee: Enpu Qianrui Electronic Technology Suzhou Co ltd
Priority date: 2022-10-31
Filing date: 2022-10-31
Publication date: 2023-05-26
Anticipated expiration: 2032-10-31

Abstract

The utility model discloses a wafer detection jig, which comprises a lower jig, wherein the top end of the lower jig is in sliding insertion connection with an upper jig, the upper jig comprises an adaptive chute, a movable slide block, a T-shaped clamping key, a piston rod, a cylinder, a first supporting frame and a reinforced connecting plate, the cylinder is symmetrically and fixedly arranged at one end of the top of the first supporting frame, the piston rod is arranged in the cylinder, the reinforced connecting plate is fixedly arranged at one end of the piston rod far away from the cylinder, the movable slide block is fixedly arranged at the bottom end of the reinforced connecting plate far away from the piston rod, the adaptive chute is equidistantly arranged at the inner part of the side end of the movable slide block far away from the piston rod, the T-shaped clamping key is fixedly arranged at two sides of the first supporting frame, and the lower jig comprises an L-shaped supporting plate, a vertical sliding key, a contact round rod, a guide chute and a second supporting frame. The utility model realizes the purpose of stably detecting the wafer through the arrangement of the upper jig and the lower jig.

Description

Wafer detection jig

Technical Field

The utility model relates to the technical field of wafer production, in particular to a wafer detection jig.

Background

The detection jig is a member capable of bearing the object to be detected and is provided with a part for limiting the object to be detected, so that the object to be detected can be prevented from sliding or shifting during detection, the stability of the object to be detected during detection is improved, when the conventional wafer detection jig is used, a small amount of direction deviation can occur during butt joint due to the fact that the detection jig lacks a limiting member in position inside the detection jig, and local errors can occur during wafer detection, and therefore, equipment is required to be improved for the problems.

Disclosure of Invention

The present utility model is directed to a wafer inspection jig, which solves the above-mentioned problems in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a wafer detects tool, includes the tool down, the top slip grafting of tool has last tool down, go up the tool and include adaptation chute, remove slider, T type draw-in key, piston rod, cylinder, first braced frame and reinforce the connecting plate, cylinder symmetry fixed mounting is in the top one end of first braced frame, the inside at the cylinder is installed to the piston rod, reinforce the connecting plate fixed mounting is kept away from on the one end of cylinder at the piston rod, remove slider fixed mounting and keep away from the bottom of piston rod at the reinforce connecting plate, the side that removes the slider deviates from the piston rod is inside to the adaptation chute equidistance, T type draw-in key fixed mounting is on the both sides of first braced frame.

Preferably, the lower jig comprises an L-shaped supporting plate, vertical sliding keys, a contact round rod, a guide sliding groove and a second supporting frame, wherein the L-shaped supporting plate is fixedly arranged on two sides of the top of the second supporting frame, the guide sliding grooves are formed in the opposite side ends of the L-shaped supporting plate at equal intervals, the vertical sliding keys are slidably inserted into the guide sliding grooves, and the contact round rod is rotatably arranged in the center of the side ends of the vertical sliding keys, which are away from the guide sliding grooves.

Preferably, the first support frame is slidably inserted into the top end of the second support frame.

Preferably, the bottom end of the adaptation chute is vertically aligned with the contact circular rod.

Preferably, the side end of the movable sliding block, which is away from the adapting chute, is provided with a movable groove adapted to the T-shaped clamping key, and the movable sliding block is movably sleeved on the T-shaped clamping key.

Preferably, the two ends of the reinforced connecting plate are fixedly provided with inclined brackets.

Compared with the prior art, the utility model has the following beneficial effects:

the wafer butt joint detection work can be carried out through the cooperation setting of the upper jig and the lower jig, and the guide device is fixedly installed in the upper jig, so that the cooperation butt joint device in the upper jig can be aligned and installed, and the self-adaptive guide work can be carried out in the cooperation butt joint device, so that the accuracy of the cooperation butt joint device in moving can be improved.

And secondly, through the internal fixed mounting of the lower jig has a movable fit device, and when the upper jig moves downwards to be matched with the lower jig, the fit butt joint device in the upper jig can be matched with the movable fit device in the lower jig, so that the connection accuracy between the upper jig and the lower jig can be improved, the phenomenon of shaking or sliding of the wafer between the upper jig and the lower jig is prevented, and the stability of the wafer during detection is improved.

Drawings

FIG. 1 is a schematic diagram of the main structure of the present utility model;

FIG. 2 is a schematic diagram of the structure of the upper jig of the present utility model;

FIG. 3 is a schematic diagram of a lower fixture disassembly structure according to the present utility model;

fig. 4 is a schematic diagram of a combined structure of the lower fixture of the present utility model.

In the figure: 1-upper jig, 2-lower jig, 3-adaptation chute, 4-removal slider, 5-T type draw key, 6-piston rod, 7-cylinder, 8-first braced frame, 9-reinforcing connection board, 10-L backup pad, 11-vertical sliding key, 12-contact round bar, 13-direction spout, 14-second braced frame.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-3, an embodiment of the present utility model is provided: the utility model provides a wafer detects tool, including lower tool 2, lower tool 2's top slip grafting has last tool 1, go up tool 1 and include adapter chute 3, remove slider 4, T type draw-in key 5, piston rod 6, cylinder 7, first braced frame 8 and reinforce connecting plate 9, cylinder 7 symmetry fixed mounting is in the top one end of first braced frame 8, piston rod 6 installs in the inside of cylinder 7, reinforce connecting plate 9 fixed mounting is on the one end that cylinder 7 was kept away from to piston rod 6, remove slider 4 fixed mounting is kept away from the bottom of piston rod 6 at reinforce connecting plate 9, the side that removes slider 4 and deviate from piston rod 6 is inside to the equidistance of adapter chute 3, T type draw-in key 5 fixed mounting is on the both sides of first braced frame 8.

The lower jig 2 comprises an L-shaped supporting plate 10, vertical sliding keys 11, a contact round bar 12, guide sliding grooves 13 and a second supporting frame 14, wherein the L-shaped supporting plate 10 is fixedly arranged on two sides of the top of the second supporting frame 14, the guide sliding grooves 13 are formed in the opposite side ends of the L-shaped supporting plate 10 at equal intervals, the vertical sliding keys 11 are slidably inserted into the guide sliding grooves 13, the contact round bar 12 is rotatably arranged in the center of the side ends of the vertical sliding keys 11, which are away from the guide sliding grooves 13, and the depth of the contact round bar 12 is consistent with that of the adapting chute 3, so that the wedging degree of the adapting chute 3 and the contact round bar 12 can be improved.

The first support frame 8 is slidably inserted into the top end of the second support frame 14, so that the first support frame 8 and the second support frame 14 are in butt joint.

The bottom end of the adapting chute 3 is vertically aligned with the contact circular rod 12, and the abutting accuracy of the adapting chute 3 and the contact circular rod 12 is improved.

The side end of the movable sliding block 4, which is away from the adapting chute 3, is provided with a movable groove adapted to the T-shaped clamping key 5, and the movable sliding block 4 is movably sleeved on the T-shaped clamping key 5, so that the movable sliding block 4 is ensured to reciprocate along a straight line.

Oblique brackets are fixedly arranged at two ends of the reinforced connecting plate 9, so that the connection stability between the reinforced connecting plate 9 and the movable sliding block 4 is improved.

Working principle: when in use, the first support frame 8 is connected with the frame of an external testing machine in an adapting way, the second support frame 14 is connected with the frame of an external exploratory hole platform, at the moment, a wafer to be detected is placed between the second support frame 14 and the exploratory hole platform, the testing machine is started, the first support frame 8 is driven to move downwards, when the cylinder 7 keeps normal state, the bottom end of the adapting chute 3 is vertically aligned with the contact round rod 12, so that the butting accuracy of the first support frame 8 and the second support frame 14 can be improved, the adapting chute 3 can be driven to be completely sleeved on the contact round rod 12 along with the continuous downward movement of the first support frame 8, at the moment, the first support frame 8 can be completely attached with the second support frame 14, the cylinder 7 is started, the piston rod 6 is driven to move outwards from the inside of the cylinder 7, the end of the piston rod 6, which is far away from the cylinder 7, is fixedly arranged at one end of the piston rod 6 through the strengthening connection plate 9, the movable slide block 4 is fixedly arranged at the bottom end of the reinforced connecting plate 9, when the piston rod 6 moves, the movable slide block 4 can be driven to move simultaneously, at the moment, a movable groove matched with the T-shaped clamping key 5 is formed at the side end of the movable slide block 4, which is away from the adapting chute 3, the movable slide block 4 slides on the T-shaped clamping key 5 through the movable groove, so that the movable slide block 4 can be ensured to move along a straight line, at the same time, when the movable slide block 4 moves, the movable slide block 4 can be driven to move along the inner bottom end of the adapting chute 3, the contact round bar 12 is slidably inserted into the guide chute 13 through the vertical sliding key 11, the inner bottom end of the adapting chute 3 is arranged at a 30-degree slope, so that the contact round bar 12 can drive the vertical sliding key 11 to move upwards in the guide chute 13, the movable slide block 4 is convenient to move forwards, at the moment, when the piston rod 6 extends outwards to a limit position, can drive the inside that adaptation chute 3 is close to cylinder 7 and contact round bar 12 complete buckle laminating for can be with first braced frame 8 and the complete lock of second braced frame 14 together, prevent that the crystal unit from appearing rocking or moving the phenomenon between first braced frame 8 and second braced frame 14, this device is when using, when the cooperation of first braced frame 8 and second braced frame 14, can start cylinder 7 and drive piston rod 6, reinforce connecting plate 9 and removal slider 4, make can drive adaptation chute 3 and drive contact round bar 12 vertical movement, until adaptation chute 3 is complete with contact round bar 12 buckle laminating, make can promote the laminating stability of first braced frame 8 and second braced frame 14, do benefit to the wafer and carry out stable detection.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Wafer detects tool, including lower tool (2), the top slip grafting of lower tool (2) has last tool (1), its characterized in that: go up tool (1) including adaptation chute (3), removal slider (4), T type draw-in key (5), piston rod (6), cylinder (7), first braced frame (8) and reinforce connecting plate (9), cylinder (7) symmetry fixed mounting is in the top one end of first braced frame (8), inside at cylinder (7) is installed to piston rod (6), reinforce connecting plate (9) fixed mounting is kept away from in piston rod (6) one end on cylinder (7), remove slider (4) fixed mounting keep away from the bottom of piston rod (6) at reinforce connecting plate (9), inside the side that moves slider (4) deviating from piston rod (6) is offered to adaptation chute (3) equidistance, T type draw-in key (5) fixed mounting is on the both sides of first braced frame (8).

2. The wafer inspection jig of claim 1, wherein: lower tool (2) include L type backup pad (10), vertical feather key (11), contact round bar (12), direction spout (13) and second braced frame (14), L type backup pad (10) fixed mounting is in the top both sides of second braced frame (14), inside L type backup pad (10) relative side is seted up to direction spout (13) equidistance, inside at direction spout (13) is pegged graft in the slip of vertical feather key (11), contact round bar (12) rotate and install at the side center that vertical feather key (11) deviates from direction spout (13).

3. The wafer inspection jig of claim 2, wherein: the first support frame (8) is slidably inserted into the top end of the second support frame (14).

4. A die inspection jig according to claim 3, wherein: the bottom end of the adapting chute (3) is vertically aligned with the contact round bar (12).

5. The wafer inspection jig of claim 4, wherein: the side end of the movable sliding block (4) deviating from the adapting chute (3) is provided with a movable groove adapted to the T-shaped clamping key (5), and the movable sliding block (4) is movably sleeved on the T-shaped clamping key (5).

6. The wafer inspection jig of claim 5, wherein: and two ends of the reinforced connecting plate (9) are fixedly provided with inclined brackets.