CN219066798U - Wafer boat box bearing mechanism with vibration reduction and energy absorption effects - Google Patents
Wafer boat box bearing mechanism with vibration reduction and energy absorption effects Download PDFInfo
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- CN219066798U CN219066798U CN202223060273.4U CN202223060273U CN219066798U CN 219066798 U CN219066798 U CN 219066798U CN 202223060273 U CN202223060273 U CN 202223060273U CN 219066798 U CN219066798 U CN 219066798U
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- 230000000694 effects Effects 0.000 title claims abstract description 33
- 230000007246 mechanism Effects 0.000 title claims abstract description 33
- 230000009467 reduction Effects 0.000 title claims description 27
- 238000010521 absorption reaction Methods 0.000 title claims description 22
- 238000013016 damping Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 19
- 235000012431 wafers Nutrition 0.000 description 52
- 239000002184 metal Substances 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a wafer boat box bearing mechanism with damping energy-absorbing effect, the loading surface is a plurality of that the height is different, and the wafer boat box all can be placed to every loading surface, has improved wafer boat box and has born quantity, simultaneously, the loading surface staggers arrangement, and when the wafer boat box was put into on the loading surface, part was surrounded by left surface and right flank and the loading surface or the top surface of top, simultaneously, the opening of front end also can provide the space of stepping down for the putting into or taking out of wafer boat box, all set up the blotter on every loading surface simultaneously, can protect the wafer boat box, prevent that the wafer boat box from taking place the vibration.
Description
Technical Field
The application belongs to the technical field of auxiliary equipment for wafer production, and particularly relates to a wafer cassette bearing mechanism with a vibration reduction and energy absorption effect.
Background
The wafer cassette (Wafer Cassette BOX) is used for loading a plurality of wafers together, and a clamping groove matched with the wafers is formed in the wafer cassette, so that the clamping groove can fix the positions of the wafers on one hand, and the connected wafers are prevented from being collided on the other hand, and therefore the wafers can be protected from being damaged in the transportation and transfer process. When the cassette is transported at each station, a transport vehicle is required for the transport. Chinese patent document CN216185199U discloses a transport cart for transporting wafer-loaded cassettes, comprising: the storage device comprises a first supporting surface and a second supporting surface which are oppositely arranged, wherein the inner end of the first supporting surface is connected with the inner end of the second supporting surface, the first supporting surface and the second supporting surface are obliquely arranged upwards from inside to outside, the inclination degree of the first supporting surface is larger than that of the second supporting surface, and a storage space is formed between the first supporting surface and the second supporting surface; when the wafer cassette is placed in the storage space, the bottom surface of the wafer cassette is attached to the second supporting surface, and one side surface of the wafer cassette is in contact with the first supporting surface, so that the center of gravity of the wafers stored in the wafer cassette is biased toward the first supporting surface.
Another chinese patent publication CN204155913U discloses a metal cassette fixing device and a cassette cart, the metal cassette fixing device comprising: the base, the base of bottom surface fixed on the bottom plate and end to end form square guardrail of fixing in the bottom plate top, wherein, be predetermined contained angle between base top surface and the horizontal plane. The metal wafer cassette fixing device is internally provided with a certain inclination angle on the top surface, and is fixed on the wafer cassette cart, when the metal wafer cassette is placed in the metal wafer cassette fixing device, the wafer in the metal wafer cassette also tends to one side and clings to one side of the clamping groove, so that the wafer is prevented from shaking violently in the clamping groove when the metal wafer cassette is conveyed.
However, the transport cart can transport only one wafer cassette at a time, and the transport efficiency is low.
Disclosure of Invention
The utility model aims to solve the technical problems that: in order to solve the defects in the prior art, the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects can accommodate a plurality of wafer cassettes simultaneously.
The technical scheme adopted for solving the technical problems is as follows:
wafer cassette bearing mechanism with damping energy-absorbing effect is ladder structure, includes:
sequentially forming a plurality of bearing surfaces which are parallel to each other from high to low, wherein the topmost surface is a top surface, the bearing surfaces are respectively provided with a left side surface and a right side surface, the front end is an opening, the back is a completely sealed backboard, the width of the left side surface on each bearing surface is the same as the width of the bearing surface above the bearing surface, the width of the left side surface on the uppermost bearing surface is the same as the width of the top surface, and the width of the right side surface on each bearing surface is the same as the width of the bearing surface;
each bearing surface is provided with a buffer cushion; the projection of each bearing surface on the horizontal plane in the top view is not blocked by the last bearing surface so as to expose part of the buffer pad.
Preferably, the bearing surfaces of the cassette bearing mechanism with the vibration reduction and energy absorption effects are 3, namely a first bearing surface, a second bearing surface and a third bearing surface, wherein the width of the left side surface of the first bearing surface is the width of the top surface, and the width of the right side surface is the width of the first bearing surface; the width of the left side surface of the second bearing surface is the width of the first bearing surface, and the width of the right side surface is the width of the second bearing surface; the width of the left side surface of the third bearing surface is the width of the second bearing surface, and the width of the right side surface is the width of the third bearing surface.
Preferably, the bearing mechanism of the wafer cassette with the vibration reduction and energy absorption effects has 5 cushion pads on each bearing surface, and is arranged in a shape of Chinese character 'ji'.
Preferably, in the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects, the cushion pad positioned at the middle is partially exposed on the horizontal projection, and the cushion pad positioned at the outer side is exposed on the horizontal projection.
Preferably, the bearing mechanism of the wafer cassette with the vibration reduction and energy absorption effects is provided with the buffer column on the bottom surface of the bearing surface at the lowest end.
Preferably, the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects comprises four buffer columns which are arranged in a rectangular shape.
Preferably, the bearing mechanism of the wafer cassette with the vibration reduction and energy absorption effects is provided with the limiting bulge on the left side surface of the bearing surface at the lowest end.
Preferably, the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects is provided with two limiting protrusions.
Preferably, in the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects, a plurality of material reduction holes are formed in the bearing surface, and the area of the material reduction holes in the bearing surface with lower height is larger than that of the material reduction holes in the bearing surface with higher height.
Preferably, the wafer cassette bearing mechanism with the vibration reduction and energy absorption effects is characterized in that the cushion pad is made of flexible materials, is rectangular and is composed of a plurality of square protrusions which are arrayed together.
The beneficial effects of the utility model are as follows:
the utility model provides a wafer boat box bearing mechanism with damping energy-absorbing effect, the loading surface is a plurality of that the height is different, and the wafer boat box all can be placed to every loading surface, has improved wafer boat box and has born quantity, simultaneously, the loading surface staggers arrangement, and when the wafer boat box was put into on the loading surface, part was surrounded by left surface and right flank and the loading surface or the top surface of top, simultaneously, the opening of front end also can provide the space of stepping down for the putting into or taking out of wafer boat box, all sets up the blotter on every loading surface simultaneously, can protect the wafer boat box, prevents that the wafer boat box from taking place the vibration.
Drawings
The technical scheme of the application is further described below with reference to the accompanying drawings and examples.
FIG. 1 is a schematic structural view of a cassette loading mechanism with vibration damping and energy absorbing effects in one direction according to an embodiment of the present application;
FIG. 2 is a schematic view of another direction of a cassette loading mechanism with vibration damping and energy absorbing effects according to an embodiment of the present disclosure;
FIG. 3 is a top view of a cassette loading mechanism with vibration damping and energy absorbing effects according to an embodiment of the present disclosure;
FIG. 4 is a bottom view of a cassette loading mechanism with vibration damping and energy absorbing effects according to an embodiment of the present application;
FIG. 5 is a schematic view of the structure of a cushion according to an embodiment of the present application;
the reference numerals in the figures are:
10. a top surface;
11. a first bearing surface;
12. a second bearing surface;
13. a third bearing surface;
21. a first right side;
22. a second right side;
23. a third right side;
31. a first left side surface;
32. a second left side surface;
33. a third left side surface;
17. a first material reduction hole;
18. a second material reduction hole;
4. a cushion pad;
5. a back plate;
6. a buffer column;
7. a limit protrusion;
8. square protrusions.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.
In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application can be understood by those of ordinary skill in the art in a specific context.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in combination with embodiments.
Examples
The embodiment provides a wafer cassette bearing mechanism with vibration reduction and energy absorption effects, which has a ladder structure, as shown in fig. 1 and 2, and comprises:
the top is the top surface 10, and the bearing surface has left side and right side respectively, and the front end is the opening, and the back is the backplate 5 of complete seal, and the width of left side is the same with the width of the bearing surface of its top on every bearing surface, and the width of left side is the same with the width of top surface 10 on the bearing surface of top, and the width of right side is the same with the width of this bearing surface (i.e. the bearing surface is the staggered arrangement).
The wafer boat box bearing mechanism with vibration reduction and energy absorption effects of the embodiment has the advantages that the bearing surfaces are a plurality of different heights, the wafer boat boxes can be placed on each bearing surface, the bearing quantity of the wafer boat boxes is improved, meanwhile, the bearing surfaces are arranged in a staggered mode, when the wafer boat boxes are placed on the bearing surfaces, the bearing surfaces or the top surfaces 10 (when the bearing surfaces are the highest), which are arranged on the left side surface and the right side surface, are partially surrounded, meanwhile, the opening at the front end can also provide a yielding space for placing or taking out the wafer boat boxes, and meanwhile, buffer cushions are arranged on each bearing surface, so that the wafer boat boxes can be protected, and vibration of the wafer boat boxes is prevented.
Each bearing surface is provided with a buffer cushion 4; the projection of each bearing surface onto the horizontal plane in the top view is not blocked by the last bearing surface so that part of the cushion pad 4 is exposed.
As shown in fig. 1, the number of the bearing surfaces is 3, namely a first bearing surface 11, a second bearing surface 12 and a third bearing surface 13, the width of the left side surface of the first bearing surface 11 is the width of the top surface 10, and the width of the right side surface is the width of the first bearing surface 11; the width of the left side surface of the second bearing surface 12 is the width of the first bearing surface 11, and the width of the right side surface is the width of the second bearing surface 12; the width of the left side surface of the third bearing surface 13 is the width of the second bearing surface 12, and the width of the right side surface is the width of the third bearing surface 13; the right side surfaces are a first right side surface 21, a second right side surface 22 and a third right side surface 23 respectively; the left side surfaces are a first left side surface 31, a second left side surface 32 and a third left side surface 33 respectively;
further, the number of the cushion pads 4 on each bearing surface is 5, and the cushion pads are arranged in a shape of a Chinese character 'ji', namely, 5 cushion pads are arranged on each bearing surface, one cushion pad is arranged in the middle of each bearing surface, and one cushion pad is arranged at each of four corners of the middle cushion pad.
Further, the buffer cushion positioned at the middle is partially exposed on the horizontal projection, and the buffer cushion positioned at the outer side is exposed on the horizontal projection.
Further, a buffer column 6 is provided on the bottom surface of the lowest bearing surface.
Further, the buffer columns 6 are four in a rectangular arrangement to provide more stable buffer support.
Further, a limit protrusion 7 is also arranged on the left side surface of the bearing surface at the lowest end. The number of the limiting protrusions 7 is preferably two, and the position of the whole wafer cassette bearing mechanism with the vibration reduction and energy absorption effects in the length direction can be limited through the matching of the limiting protrusions 7.
Further, a plurality of material reducing holes are formed in the bearing surface, and the area of the material reducing holes in the bearing surface with lower height is larger than that of the material reducing holes in the bearing surface with higher height. By providing the material reducing hole, the weight can be prevented from being excessively deviated to one side. As shown in fig. 2, the first bearing surface 11 has no material reducing holes, the second bearing surface 12 has two first material reducing holes 17, and the third bearing surface 13 has four second material reducing holes 18. On the horizontal projection, the material reducing holes on each bearing surface are blocked by the last bearing surface.
Further, as shown in fig. 5, the cushion pad 4 is made of flexible material, is rectangular, and is formed by a plurality of square protrusions 8 arranged together. In fig. 5, each square protrusion 8 is formed by 8 rows and 8 columns of square protrusions 8, and each square protrusion 8 can be deformed downwards to a certain extent when being extruded so as to buffer left and right.
With the above-described preferred embodiments according to the present application as a teaching, the related workers can make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.
Claims (10)
1. The utility model provides a wafer boat box bearing mechanism with damping energy-absorbing effect, is ladder structure, its characterized in that includes:
a plurality of bearing surfaces which are parallel to each other are sequentially formed from high to low, the topmost part is a top surface (10), the bearing surfaces are respectively provided with a left side surface and a right side surface, the front end is an opening, the back is a fully sealed backboard (5), the width of the left side surface on each bearing surface is the same as the width of the bearing surface above the bearing surface, the width of the left side surface on the topmost bearing surface is the same as the width of the top surface (10), and the width of the right side surface on each bearing surface is the same as the width of the bearing surface;
each bearing surface is provided with a buffer cushion (4); the projection of each bearing surface on the horizontal plane in the top view is not blocked by the last bearing surface, so that part of the buffer pad (4) is exposed.
2. The wafer cassette carrier mechanism with the vibration reduction and energy absorption effects according to claim 1, wherein the number of the carrier surfaces is 3, namely a first carrier surface (11), a second carrier surface (12) and a third carrier surface (13), the width of the left side surface of the first carrier surface (11) is the width of the top surface (10), and the width of the right side surface is the width of the first carrier surface (11); the width of the left side surface of the second bearing surface (12) is the width of the first bearing surface (11), and the width of the right side surface is the width of the second bearing surface (12); the width of the left side surface of the third bearing surface (13) is the width of the second bearing surface (12), and the width of the right side surface is the width of the third bearing surface (13).
3. The wafer cassette loading mechanism with the vibration reduction and energy absorption effects according to claim 1, wherein 5 cushion pads (4) are arranged on each loading surface in a shape of a Chinese character 'zhi'.
4. The cassette loading mechanism with vibration absorbing and energy absorbing effects according to claim 3, wherein the cushion pad positioned at the middle is partially exposed in the horizontal projection, and the cushion pad positioned at the outer side is exposed in the horizontal projection.
5. The wafer cassette loading mechanism with the vibration reduction and energy absorption effects according to claim 1, wherein a buffer column (6) is arranged on the bottom surface of the lowest loading surface.
6. The wafer cassette loading mechanism with the vibration reduction and energy absorption effects according to claim 5, wherein the buffer columns (6) are four in rectangular arrangement.
7. The wafer cassette loading mechanism with the vibration reduction and energy absorption effects according to claim 1, wherein a limiting protrusion (7) is further arranged on the left side surface of the lowest loading surface.
8. The wafer cassette loading mechanism with the vibration reduction and energy absorption effects according to claim 7, wherein the number of the limiting protrusions (7) is two.
9. The wafer cassette loading mechanism with vibration damping and energy absorbing effects according to claim 1, wherein a plurality of material reducing holes are formed in the loading surface, and the area of the material reducing holes in the loading surface with lower height is larger than that of the material reducing holes in the loading surface with higher height.
10. The wafer cassette carrier mechanism with vibration damping and energy absorbing effects according to claim 9, wherein the cushion pad (4) is made of flexible material, is rectangular, and is composed of a plurality of square protrusions (8) arranged together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223060273.4U CN219066798U (en) | 2022-11-17 | 2022-11-17 | Wafer boat box bearing mechanism with vibration reduction and energy absorption effects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223060273.4U CN219066798U (en) | 2022-11-17 | 2022-11-17 | Wafer boat box bearing mechanism with vibration reduction and energy absorption effects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219066798U true CN219066798U (en) | 2023-05-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223060273.4U Active CN219066798U (en) | 2022-11-17 | 2022-11-17 | Wafer boat box bearing mechanism with vibration reduction and energy absorption effects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219066798U (en) |
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2022
- 2022-11-17 CN CN202223060273.4U patent/CN219066798U/en active Active
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