CN219064577U

CN219064577U - Anti-suck-back developing experimental device

Info

Publication number: CN219064577U
Application number: CN202223373006.2U
Authority: CN
Inventors: 李嘉利; 高家勇; 王勇军
Original assignee: Zhangzhou Simike New Material Co ltd
Current assignee: Zhangzhou Simike New Material Co ltd
Priority date: 2022-12-16
Filing date: 2022-12-16
Publication date: 2023-05-23
Anticipated expiration: 2032-12-16

Abstract

The utility model discloses a reverse suction prevention developing experimental device, which comprises a shell provided with an opening, a working box, a liquid thermos bottle, a motor, an air pump, a rotary tray, a box cover, an infusion pump and a liquid outlet nozzle, wherein the working box, the liquid thermos bottle, the motor, the air pump and the rotary tray are arranged in the shell; the utility model has the beneficial effects that: through the liquid level monitoring to the liquid in the buffer bottle, can prevent that electronic chemical from being drawn into the aspiration pump and damaging the aspiration pump, play the guard action to experimental apparatus.

Description

Anti-suck-back developing experimental device

Technical Field

The utility model relates to the field of experimental equipment, in particular to a reverse suction prevention developing experimental device.

Background

Functional instruments such as gluing and developing are separated from the existing small-sized devices in a semiconductor laboratory. The developing machine only comprises a vacuum rotary tray system and an infusion system, and the developing agent is pumped out of the liquid storage tank and is dripped above the center of the glass plate behind the wafer to carry out developing reaction while the wafer or the glass plate is rotated. The photoresist is dripped into the wafer or the glass plate by hands while the wafer or the glass plate is rotated by the photoresist coater, and the photoresist is uniformly coated on the rotating tray at a certain rotating speed.

However, when the wafer or glass plate is broken during the rotary vacuum operation, the wet electronic chemical is continuously output and pumped by the air pump, and the pumped wet electronic chemical reaches the buffer bottle and then enters the air pump to cause the damage of the air pump.

Disclosure of Invention

The utility model aims to provide a reverse suction prevention developing experimental device so as to solve the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a prevent development experimental apparatus of suck-back, is including being equipped with open-ended shell and setting up at the inside operation case of shell, liquid thermos, motor, aspiration pump and rotatory tray, the operation case still includes the case lid, sets up at the outside infusion pump of case lid and sets up the play liquid shower nozzle in the case lid is inside, the liquid thermos passes through the transfer line and is connected with the infusion pump, the inlet end of aspiration pump sets up breathing pipe and outlet duct respectively with the end of giving vent to anger, rotatory tray passes through the breathing pipe and is connected with the aspiration pump, and is equipped with the buffer bottle on the breathing pipe, the outlet duct is connected to the shell outside, rotatory tray sets up the inner chamber at the operation case to through motor drive, the bottom at the operation case is established to the motor.

Further, the outer wall of shell is provided with PLC operation screen, alarm lamp and emergency brake button, the PLC operation screen is used for the demonstration of parameter, including the temperature of liquid thermos, the use amount of wet electronic chemicals, emergency brake button is used for meetting emergency braking when the operation runs into the nonideal experimental condition, stops motor, aspiration pump and goes out the operation of liquid shower nozzle.

Further, be provided with liquid level detector on the buffer bottle, liquid level detector is arranged in detecting the variation signal of the liquid level in the buffer bottle, when reaching the threshold value, the warning light lights up, plays the effect of warning attention.

Further, the output end of the infusion pump is connected with the liquid outlet spray head, and the output end of the infusion pump is further provided with a flowmeter, and the flowmeter can monitor the metering of photoresist or developer or photoresist stripping solution or film etching solution extracted from the liquid thermos bottle by the infusion pump in real time.

Further, the surface of the rotary tray is provided with an adsorption hole communicated with the air suction pipe, the axis of the rotary tray is provided with a mounting hole for mounting the air suction pipe, and the rotary tray is in rotary sliding connection with the air suction pipe, so that the air suction pipe cannot rotate when the rotary tray rotates under the action of the motor.

Compared with the prior art, the utility model has the beneficial effects that: through the liquid level monitoring to the liquid in the buffer bottle, can prevent that electronic chemical from being drawn into the aspiration pump and damaging the aspiration pump, play the guard action to experimental apparatus.

Drawings

Fig. 1 is a schematic structural view of the present utility model.

In the figure: 1. a housing; 2. a working box; 3. a liquid thermos bottle; 4. a PLC operation screen; 5. a motor; 6. an air extracting pump; 7. a buffer bottle; 8. rotating the tray; 9. an infusion pump; 10. a liquid outlet nozzle; 11. an alarm lamp; 12. an emergency brake button; 13 level detector.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1, in an embodiment of the utility model, a developing experimental device capable of preventing suck-back comprises a casing 1 provided with an opening, a working box 2 arranged in the casing 1, a liquid thermos bottle 3, a motor 5, an air pump 6, and a rotary tray 8, wherein the working box 2 further comprises a box cover, a liquid outlet nozzle 10 arranged in the box cover, and an infusion pump 9 arranged outside the box cover, the rotary tray 8 is arranged in an inner cavity of the working box 2 and driven by the motor 5, the rotary tray 8 is further connected with the air pump 6 through a conduit, a buffer bottle 7 is arranged on the conduit, a liquid level detector 13 is arranged on the buffer bottle 7, the liquid thermos bottle 3 is connected with the infusion pump 9 through an infusion tube, the infusion pump 9 is communicated with the liquid outlet nozzle 10, and an adsorption hole communicated with the conduit is arranged on the surface of the rotary tray 8.

Examples:

the device is used for small experiments of laboratory wafers or glass plates, and comprises experimental operations of photoresist spin coating experiments, photoresist development experiments after exposure, photoresist stripping experiments, film etching experiments and the like, wherein the experimental operations need to quantitatively drop humidifying electronic chemicals under the rotating condition;

the shell 1 is a rectangular outer box with an opening at the top; the detachable liquid thermal insulation storage bottle 3 can be used for filling various wet electronic chemicals, including photoresist, developer, photoresist stripping solution and film etching solution, the filled wet electronic chemicals can be heated or insulated according to a set temperature, and the filled wet electronic chemicals can be sucked up by the flowmeter and the infusion pump 9 through the infusion tube and sprayed from the liquid outlet nozzle 10 for operation; the operation box 2 and the box cover 8 are made of transparent materials so as to observe the operation state of the device, and the operation can be performed by pulling down the box cover handle during the operation; the motor 5 drives the rotary tray 8 to rotate, and a supporting table for supporting the rotary tray 3 is also arranged in the working box 2; air between the rotary tray 8 and the wafer or glass plate is pumped out by the air suction pump 6; if the wafer or the glass plate is broken during the rotary vacuum operation, and the wet electronic chemical is continuously output and pumped by the air pump, the pumped wet electronic chemical firstly reaches the buffer bottle, at the moment, a sensor in the liquid level detector 13 in the buffer bottle generates a liquid level change signal, so that the alarm lamp 11 is lightened, the device automatically starts emergency braking, the operation of the air pump 6 and the liquid outlet nozzle 10 is stopped, and the air pump is prevented from continuously operating and pumping the wet electronic chemical to damage the air pump 6; the PLC operation screen 4 is used for programming the programming operation of the device and displaying various parameters of the device, including the temperature of the liquid thermos bottle 3 and the use amount of wet electronic chemicals; the emergency brake button 12 is used for emergency braking when an undesirable experimental condition is encountered during operation, and stops the operation of the motor 5, the suction pump 6 and the liquid outlet nozzle 18.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. Anti-suck-back developing experimental device is characterized in that: including being equipped with open-ended shell (1) to and set up in inside operation case (2) of shell (1), liquid thermos (3), motor (5), aspiration pump (6) and rotatory tray (8), operation case (2) still include case lid, set up in the inside play liquid shower nozzle (10) of case lid and set up in outside transfer pump (9) of case lid, rotatory tray (8) are located the inner chamber of operation case (2) and are driven through motor (5), rotatory tray (8) still are connected with aspiration pump (6) through the pipe, and are equipped with buffer bottle (7) on the pipe, be provided with liquid level detector (13) on buffer bottle (7), liquid thermos (3) are connected with transfer pump (9) through the transfer line, transfer pump (9) are connected with play liquid shower nozzle (10), the surface of rotatory tray (8) is provided with the absorption hole with the pipe intercommunication.

2. The anti-suck-back developing experimental device according to claim 1, wherein: the outer wall of the shell (1) is provided with a PLC operation screen (4), an alarm lamp (11) and an emergency brake button (12).

3. The anti-suck-back developing experimental device according to claim 1, wherein: the adsorption holes are distributed in an annular structure.

4. The anti-suck-back developing experimental device according to claim 1, wherein: the output end of the infusion pump (9) is connected with the liquid outlet nozzle (10), and the output end of the infusion pump (9) is also provided with a flowmeter.

5. The anti-suck-back developing experimental device according to claim 1, wherein: the axis of the rotary tray (8) is provided with a mounting hole for mounting the air suction pipe.