CN219053221U - Angle adjusting mechanism and processing equipment - Google Patents

Abstract

Embodiments of the present utility model provide an angle adjustment mechanism and a machining apparatus. The angle adjusting mechanism comprises a fixed seat, a mounting seat, an adjusted piece and a locking piece, and a concave part is arranged on the fixed seat; the mounting seat comprises a first end and a second end which are opposite along a preset axis, and the first end is rotatably accommodated in the concave part around the preset axis; the locking piece drives the adjusted piece and the mounting seat to rotate around a preset axis, the adjusted piece is positioned between the mounting seat and the locking piece, and the locking piece compresses the adjusted piece and is connected to the second end portion. In this angle adjustment mechanism, first end is rotatably held in the depressed part around predetermined axis, and the structure of angle adjustment mechanism can be made more compact by the setting of depressed part to can save installation space, in addition the depressed part can play better guide effect in the adjustment process. And the part of the fixed seat, which is not the concave part, can have better mechanical strength, thereby providing enough connection strength for the angle adjusting mechanism.

Description

Angle adjusting mechanism and processing equipment

Technical Field

The utility model relates to the technical field of material processing, in particular to an angle adjusting mechanism and processing equipment.

Background

In the field of material processing, such as semiconductor devices (e.g., wafers), a dicing process for semiconductor devices is an important process. There are generally two cutting modes: one is knife wheel cutting and the other is laser cutting. Taking laser cutting (also known in the industry as invisible cutting, abbreviated as invisible cutting) as an example, a laser beam is focused inside a material to be processed to form a blast point. Micro-cracks are formed in the material by precisely controlling the distance between the focusing objective lens and the surface of the material, and then grains adjacent to each other are separated by a chopper or vacuum splinter.

Wave plates of conventional laser processing equipment are often used in processing facilities. The wave plate is a transparent plate with a specific birefringence. By rotating the wave plate, the polarization state of the light beam can be controlled. Accordingly, an angle adjustment mechanism is provided. The angle adjusting mechanism comprises an installation body, a locking ring and a wave plate. Two screws (or two small bosses) are arranged on the locking ring, so that the two screws serve as stress points for tightening the locking ring. However, this structure is generally large in thickness of the installation body due to consideration of mechanical strength, resulting in a large size of the angle adjusting mechanism, which requires a high installation space.

Disclosure of Invention

In order to at least partially solve the problems of the prior art, according to one aspect of the present utility model, an angle adjustment mechanism is provided. The angle adjustment mechanism includes: the fixing seat is provided with a concave part; a mount including first and second ends opposite along a predetermined axis, the first end being rotatably received within the recess about the predetermined axis; an adjusted member; and a locking member driving the regulated member and the mounting seat to rotate around the preset axis, wherein the regulated member is positioned between the mounting seat and the locking member, and the locking member compresses the regulated member and is connected to the second end part.

Illustratively, the recess extends to a side of the mount in a first lateral direction perpendicular to the predetermined axis.

Illustratively, the fixing base is provided with a jack extending along the predetermined axis, the jack penetrates through to the bottom wall of the concave portion, and the first end portion is inserted into the jack.

Illustratively, the mounting base includes a base portion and a first annular projection projecting from the base portion toward the fixing base in the predetermined axial direction, an end of the first annular projection forming the first end, the first annular projection being inserted into the insertion hole.

The mounting seat may include a second annular protrusion protruding from the base portion in the predetermined axial direction to a side away from the fixing seat, an end of the second annular protrusion forming the second end, the second annular protrusion surrounding the regulated member, and the locking member pressing the regulated member and being connected to the second annular protrusion.

Illustratively, the retaining member is threadably coupled to the second annular projection.

Illustratively, the fixing base is provided with a fixing hole communicated to the jack along a second lateral direction perpendicular to the preset axis, and the angle adjusting mechanism further comprises a fixing piece connected to the fixing hole and abutting against the first end portion.

Illustratively, a threaded hole is formed in the bottom wall of the recess, an arc-shaped limiting groove around the preset axis is formed in the mounting seat, the angle adjusting mechanism further comprises a threaded connecting piece, the threaded connecting piece penetrates through the arc-shaped limiting groove and is connected to the threaded hole in a threaded mode between an adjusting position and a locking position, the threaded connecting piece is located at the adjusting position, the locking piece drives the adjusted piece and the mounting seat to rotate around the preset axis, and the threaded connecting piece is located at the locking position and locks the mounting seat.

Illustratively, the end surface of the locking member facing away from the member to be adjusted is provided with a notch perpendicular to and intersecting the predetermined axis.

Illustratively, the angle adjustment mechanism further includes an operating tab detachably insertable into the notch.

The utility model further provides processing equipment. The processing equipment comprises an optical device, the optical device comprises the angle adjusting mechanism, and the adjusted piece is a wave plate.

According to the angle adjusting mechanism provided by the embodiment of the utility model, when the adjusted piece is required to be adjusted, the locking piece can be rotated, so that the adjusted piece and the mounting seat can be driven to rotate around the preset axis, and the operation is concise. In this scheme, first tip is rotationally held in the depressed part around predetermined axis, and the structure of angle adjustment mechanism can be made to the setting of depressed part more small and exquisite to can save installation space, in addition the depressed part can play better guide effect in the adjustment process. And the part of the fixed seat, which is not the concave part, can have better mechanical strength, thereby providing enough connection strength for the angle adjusting mechanism. And when the angle adjusting mechanism provided by the embodiment of the utility model is used for adjusting the adjusted piece, the adjusted piece can not change the position after the locking piece rotates in place, so that the angle can be prevented from changing. Therefore, the angle adjusting mechanism has better use effect.

In the summary, a series of concepts in a simplified form are introduced, which will be further described in detail in the detailed description section. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

Advantages and features of the utility model are described in detail below with reference to the accompanying drawings.

Drawings

The following drawings are included to provide an understanding of the utility model and are incorporated in and constitute a part of this specification. Embodiments of the present utility model and their description are shown in the drawings to explain the principles of the utility model. In the drawings of which there are shown,

FIG. 1 is a perspective view of an angle adjustment mechanism according to an exemplary embodiment of the present utility model;

FIG. 2 is an exploded view of the angle adjustment mechanism shown in FIG. 1;

FIG. 3 is a front view of the angle adjustment mechanism shown in FIG. 1;

fig. 4 is a cross-sectional view A-A in fig. 3.

Wherein the above figures include the following reference numerals:

100. a fixing seat; 110. a recessed portion; 111. a bottom wall; 120. a jack; 130. a fixing hole; 140. a connection hole; 150. a threaded hole; 200. a mounting base; 201. a first end; 202. a second end; 210. a first annular projection; 220. a second annular projection; 230. a base; 240. an arc-shaped limit groove; 300. an adjusted member; 400. a locking member; 410. grooving; 500. an operation piece.

Detailed Description

In the following description, numerous details are provided to provide a thorough understanding of the utility model. However, it will be understood by those skilled in the art that the following description illustrates preferred embodiments of the utility model by way of example only and that the utility model may be practiced without one or more of these details. Furthermore, some technical features that are known in the art have not been described in detail in order to avoid obscuring the utility model.

According to one aspect of the present utility model, an angle adjustment mechanism is provided. The angle adjustment mechanism may be applied to any suitable equipment including, but not limited to, machining equipment or inspection equipment. Thus, according to another aspect of the present utility model, there is also provided a processing apparatus. Machining equipment includes, but is not limited to, laser machining equipment. The processing equipment can feed and discharge materials such as wafers, process the materials and perform other treatments. The angle adjusting mechanism and the processing apparatus according to the embodiment of the present utility model are described in detail below in connection with specific embodiments.

As shown in fig. 1 to 4, the angle adjusting mechanism may include a fixing base 100, a mounting base 200, an adjusted member 300, and a locking member 400.

The fixing base 100 may play a role of fixing. Specifically, the holder 100 may be attached to a bracket, base, or any other suitable component of the device to which it is applied by any suitable means, such as welding, adhesive, or a connector connection. In the embodiment shown in the figures, the holder 100 may be provided with one or more connection holes 140. The angle adjustment mechanism may also include rivets, screws, or any other suitable connection. The connection member may pass through the connection hole 140 to fix the fixing base 100 to other components. The fixing base 100 may be provided with a recess 110. The recess 110 may include a bottom wall 111 and a side wall 112 extending from an edge of the bottom wall 111.

Mount 200 may include a first end 201 and a second end 202. The first end 201 and the second end 202 may be disposed opposite each other along a predetermined axis P-P (as shown in fig. 1 and 4). The first end 201 is rotatably received within the recess 110 about a predetermined axis P-P. The first end 201 may be in direct contact with the recess 110 or may be in indirect contact with the recess 110 through a bearing or the like, as long as the first end 201 is accommodated rotatably in the recess 110 about the predetermined axis P-P.

The member 300 may be any suitable member such as a wind deflector or a wave plate. By adjusting the member 300 to be adjusted, the direction of wind or the direction of the light beam can be changed, thereby satisfying the use demands of operators.

The locking member 400 may rotate the member 300 and the mounting base 200 about a predetermined axis P-P. The member 300 to be adjusted may be positioned between the mounting base 200 and the locking member 400. Retaining member 400 may compress member 300. Accordingly, the mount 200 and the locking member 400 can clamp the regulated member 300. Retaining member 400 may be attached to second end 202 by welding, adhesive, or a connector connection, among other suitable means. Mount 200, member 300, and locking member 400 may be pre-assembled and then coupled together to mount 200. This is because the space of the application scene of the angle adjusting mechanism is generally small, and the assembling difficulty can be reduced and the assembling efficiency can be improved by pre-assembling the mounting seat 200, the adjusted member 300 and the locking member 400.

According to the angle adjusting mechanism provided by the embodiment of the utility model, when the adjusted piece 300 needs to be adjusted, the locking piece 400 can be rotated, so that the adjusted piece 300 and the mounting seat 200 can be driven to rotate around the preset axis P-P, and the operation is concise. In this embodiment, the first end 201 is rotatably accommodated in the recess 110 around the predetermined axis P-P, and the recess 110 is provided to make the structure of the angle adjusting mechanism smaller, so that the installation space can be saved, and the recess 110 can perform a better guiding function in the adjusting process. And the non-concave portion of the fixing base 100 may have a superior mechanical strength, thereby providing a sufficient coupling strength for the angle adjusting mechanism. And, in the angle adjusting mechanism provided by the embodiment of the utility model, when the adjusted member 300 is adjusted, the adjusted member 300 does not change position after the locking member 400 rotates in place, so that the angle can be prevented from changing. Therefore, the angle adjusting mechanism has better use effect.

In some embodiments, the processing apparatus may include a loading and unloading device, a handling device, an anti-drop device, a positioning device, a pick-and-place device, and a processing device. The loading and unloading device can be used for storing materials. The material may comprise material to be processed and/or processed material. The handling device can handle the material between the loading and unloading device and the target position. The anti-drop device may be disposed between the loading and unloading device and the target location. Handling device is at the in-process of transport material, and anti falling device can be used for bearing material to prevent that the material from dropping. After the carrying device carries the material to be processed to the target position, the positioning device can adjust the posture of the material to be processed and carries the material to be processed to the waiting position. The material taking and placing device can pick up the material to be processed on the waiting position and then carry the material to the processing device. The processing device may process the material to be processed to form a processed material. After the processing is finished, the material taking and placing device can pick up processed materials on the processing device and then carry the processed materials to a waiting position. The positioning device may then carry the processed material in the waiting position to the target location. The conveying device conveys the processed material at the target position to the loading and unloading device. The processing equipment may cycle through the operations described above to process more material.

Illustratively, the processing apparatus may include a carrier and a processing mechanism. The carrier may be used to carry the material. When the carrying platform is at the initial position, the material taking and placing device can convey the material to be processed to the upper part of the carrying platform, so that the material to be processed is placed on the carrying platform. Then, the carrier can adsorb the material to be processed on the glass sucker of the carrier in a vacuum adsorption mode and the like, and the material to be processed is moved to a processing mechanism. The processing mechanism can process the material to be processed on the carrier to form processed material. In particular, the machining mechanism may include an angle adjustment mechanism. The member 300 to be adjusted may include a wave plate. In the processing process, the wave plate is required to be rotated, so that the direction of the light beam is regulated, and the accurate processing of the material to be processed is realized.

For example, as shown in fig. 1-4, the recess 110 may extend to a side of the holder 100 in a first lateral direction. The first lateral direction may be perpendicular to the direction of the predetermined axis P-P. So configured, the recess 110 may have a notch in a first lateral direction. In other words, the side wall 112 of the recess 110 no longer has an annular structure, but has an arc-shaped structure. The arcuate sidewall 112 may define the above-described gap. Thus, the operator can receive the mounting seat 200 in the recess 110 of the fixing seat 100 along the first lateral direction through the opening. Thus, the angle adjusting mechanism is convenient to install and detach.

It will be appreciated that there may be numerous directions perpendicular to the direction of the predetermined axis P-P and, therefore, numerous first lateral directions. Further, the notch and the connecting hole 140 of the fixing base 100 may be located at two opposite sides of the first lateral direction. Since one side of the connection hole 140 is generally closer to the inside of the processing apparatus, one side of the above-mentioned notch is generally closer to the outside of the processing apparatus. The operation space near one side of the opening is increased more, thereby facilitating the installation and removal of the mount 200.

For example, as shown in fig. 1-2 and 4, the holder 100 may be provided with a receptacle 120 extending along a predetermined axis P-P. The centerline of the receptacle 120 may be a predetermined axis P-P. The insertion hole 120 may penetrate to the bottom wall 111 of the recess 110. The first end 201 may be plugged into the receptacle 120. The structure of the insertion hole 120 may be various, for example, a through hole or a blind hole. That is, the insertion hole 120 may or may not penetrate the fixing base 100 from the bottom wall 111 of the recess 110 along the predetermined axis P-P. The insertion hole 120 may function as a location so that the mount 200 may be accurately coupled to the fixing base 100.

1-2 and 4, the mount 200 may include a base 230 and a first annular protrusion 210. The first annular protrusion 210 may protrude from the base 230 toward the holder 100 along a predetermined axis P-P direction. The end of the first annular protrusion 210 may form a first end 201. The first annular protrusion 210 may be inserted into the receptacle 120. Thus, the mounting seat 200 has a simple structure and low manufacturing cost. When the locking member 400 drives the mounting base 200 to rotate around the predetermined axis P-P, the first annular protrusion 210 may correspond to a protruding shaft, and the insertion hole 120 may correspond to a shaft hole. Illustratively, the outer diameter of the base 230 may be greater than the outer diameter of the first annular projection 210. So configured, when the first annular protrusion 210 is inserted into the receptacle 120, the base 230 may abut against the bottom wall 111 of the recess 110. In this way, the base 230 may act as a stop.

1-4, the mount 200 may also include a second annular protrusion 220. The second annular protrusion 220 may protrude from the base 230 to a side away from the holder 100 in a direction of a predetermined axis P-P. Accordingly, the first annular protrusion 210 and the first annular protrusion 210 may be located at both sides of the base 230 in the direction of the predetermined axis P-P. The end of the second annular protrusion 220 may form the second end 202. The outer diameter of the base 230 may be greater than the outer diameter of the second annular protrusion 220. The outer diameter of the second annular protrusion 220 may be the same as or different from the outer diameter of the first annular protrusion 210.

The second annular protrusion 220 may surround the regulated member 300. It is understood that the member 300 may be positioned in the inner sidewall of the second annular protrusion 220. So arranged, the second annular protrusion 220 can protect the regulated piece 300 from being damaged due to the exposed regulated piece 300. Particularly, when the member 300 is a wave plate or an optical sensor, the protection effect of the second annular protrusion 220 is more important than that of a relatively fragile member with a relatively high dust-proof requirement.

Retaining member 400 may compress member 300. Retaining member 400 may be attached to second annular projection 220 by welding, adhesive, or by a connector connection, among other suitable means. In some embodiments, retaining member 400 may be threadably coupled to second annular protrusion 220. Specifically, the outer sidewall of the locking member 400 may be provided with external threads. The second annular protrusion 220 may be provided with an internal thread on an inner sidewall thereof. The external and internal threads may be threadedly coupled such that the locking member 400 is threadedly coupled with the second annular protrusion 220. So set up, retaining member 400 is simpler with the connection of second annular protrusion 220, and the dismouting is more convenient.

Illustratively, when the member 300 is a wave plate, the fixing base 100, the mounting base 200, and the member 300 may be penetrated along a predetermined axis P-P for facilitating the passage of the light beam. The regulated member 300 may be disposed in the through hole. Thus, the light beam can pass through the through hole. The wave plate may adjust the direction of the light beam.

For example, as shown in fig. 1-2 and 4, the fixing base 100 may be provided with a fixing hole 130. The fixing hole 130 may communicate to the insertion hole 120 in a second lateral direction perpendicular to the predetermined axis P-P. The second lateral direction may be the same as or different from the first lateral direction. The angle adjustment mechanism may also include a mount (not shown). The fasteners include, but are not limited to, any suitable fasteners such as screws or rivets. The fixing member may be coupled to the fixing hole 130 and abut against the first end 201. So configured, when the member 300 is rotated into position, the operator can connect the securing member to the securing aperture 130 in the second lateral direction until the distal end of the securing member can abut the first end 201. In this way, the fixing member can firmly connect the first end 201 to the fixing base 100, thereby realizing the connection of the mount 200 with the fixing base 100. In this way, the member 300 to be adjusted is fixed firmly, and thus does not rotate again due to vibration or the like.

In some embodiments, the fixing hole 130 and the connection hole 140 of the fixing base 100 may be located at opposite sides of the second lateral direction. Thus, one side of the fixing hole 130 is generally closer to the outside of the processing apparatus. The operation space near one side of the fixing hole 130 is increased more, thereby facilitating the installation and removal of the fixing member.

For example, as shown in fig. 1-3, a threaded hole 150 may be provided in the bottom wall 111 of the recess 110. An arc-shaped limit groove 240 can be arranged on the mounting seat 200. The arcuate limit groove 240 may extend about a predetermined axis P-P. The arcuate limit grooves 240 may be one or more. In embodiments where the arcuate limit grooves 240 are multiple, the arcuate limit grooves 240 may be spaced apart from one another. The arc lengths of the plurality of arc-shaped limiting grooves 240 may be the same or different. In the embodiment shown in the figures, two arcuate limit grooves 240 may be provided on the mount 200. The two arcuate limit grooves 240 are symmetrically disposed with respect to the predetermined axis P-P. The threaded holes 150 may be in one-to-one correspondence with the arcuate limit grooves 240.

The angle adjustment mechanism may also include a threaded connection (not shown). The threaded connection may pass through the arcuate limit slot 240 and be threadably connected to the threaded bore 150 between an adjustment position and a locking position. When it is desired to rotate the member 300, the threaded connection may be unscrewed to the adjustment position. Thus, the adjustable member 300 and the mounting base 200 can be rotated about the predetermined axis P-P by rotating the locking member 400. During rotation, the threaded connection may slide within the corresponding arcuate limit groove 240. Thus, the arc-shaped limiting groove 240 may perform a limiting and guiding function. After the member 300 is rotated into place, the threaded connection can be tightened to a locked position. Thus, the screw coupling member can fix the fixing base 100 and the mounting base 200 relatively, thereby fixing the regulated member 300, and thus preventing the regulated member 300 from rotating again due to vibration or the like.

Illustratively, as shown in FIG. 2, retaining member 400 may be provided with notches 410. The configuration of the notch 410 may be varied, including but not limited to a straight notch, a cross-shaped notch, a notch that fits the end of a finger or other rotary drive. The number of notches 410 may be one or more. When the number of the notches 410 is plural, the plurality of notches 410 may be symmetrical with respect to the predetermined axis P-P. The notch 410 may be located on the end facing away from the member 300 to be adjusted. That is, the score groove 410 may be located on the outer end surface of the second end 202. Score groove 410 may be perpendicular to and intersect predetermined axis P-P. Thus, the notch 410 can be used as a force application point of the rotary locking member 400, so that force application can be facilitated, and slipping phenomenon during force application can be avoided. Therefore, the use experience of the operator is better. Moreover, since the notch 410 is perpendicular to the predetermined axis P-P and intersects the predetermined axis P-P, the notch 410 is biased, and the force applied to the locking member 400 is more uniform, so that the service life can be improved.

For example, as shown in fig. 1-4, the angle adjustment mechanism may also include an operating tab 500. The structure of the operation piece 500 may be various as long as the operation piece 500 can be detachably inserted into the notch 410. In practical applications, the operation piece 500 may be inserted into the notch 410 when the member 300 is required to be rotated. Thus, the operator can rotate the operation piece 500 to thereby drive the rotation of the regulated member 300. After rotating in place, the operator can detach the tab 500 from the notch 410. In this way, the space occupied by the angle adjustment mechanism can be reduced. Further, the operation piece 500 can be prevented from affecting the passage of the light beam or the like. The lever 500 includes, but is not limited to, a key, a paddle, or any other suitable structure. The side of the operation piece 500 facing away from the locking member 400 may have an operation portion. Thus, the operator can rotate the operation piece 500 by holding the operation portion, and the feeling of operation can be improved.

The utility model further provides processing equipment. The processing apparatus may comprise an optical device, which may comprise an angle adjustment mechanism of any of the preceding claims. The member 300 to be adjusted may be a wave plate. Because the angle adjusting mechanism has the technical effects, the processing equipment comprising the angle adjusting mechanism also has the technical effects, and the description is omitted here.

For ease of description, regional relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein to describe regional positional relationships of one or more components or features to other components or features illustrated in the figures. It will be understood that the relative terms of regions include not only the orientation of the components illustrated in the figures, but also different orientations in use or operation. For example, if the element in the figures is turned over entirely, elements "over" or "on" other elements or features would then be included in cases where the element is "under" or "beneath" the other elements or features. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". Moreover, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and all such cases are intended to be encompassed herein.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, components, assemblies, and/or combinations thereof.

It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or described herein.

The present utility model has been illustrated by the above-described embodiments, but it should be understood that the above-described embodiments are for purposes of illustration and description only and are not intended to limit the utility model to the embodiments described. In addition, it will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that many variations and modifications are possible in light of the teachings of the utility model, which variations and modifications are within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (11)

1. An angle adjustment mechanism, comprising:

the fixing seat is provided with a concave part;

a mount including first and second ends opposite along a predetermined axis, the first end being rotatably received within the recess about the predetermined axis;

an adjusted member; and

the adjusting piece and the locking piece which can rotate around the preset axis are driven, the adjusting piece is located between the installing seat and the locking piece, and the locking piece compresses the adjusting piece and is connected to the second end portion.

2. The angle adjustment mechanism of claim 1, wherein the recess extends to a side of the mount in a first lateral direction perpendicular to the predetermined axis.

3. The angle adjustment mechanism of claim 1, wherein the holder is provided with a receptacle extending along the predetermined axis, the receptacle extending through to a bottom wall of the recess, the first end portion being inserted into the receptacle.

4. The angle adjustment mechanism of claim 3, wherein the mount includes a base and a first annular projection projecting from the base toward the mount in the predetermined axial direction, an end of the first annular projection forming the first end, the first annular projection being inserted into the receptacle.

5. The angle adjustment mechanism of claim 4, wherein the mount includes a second annular projection projecting in the predetermined axial direction from the base toward a side away from the fixed seat, an end of the second annular projection forming the second end, the second annular projection surrounding the regulated member, and the lock member pressing the regulated member and being connected to the second annular projection.

6. The angle adjustment mechanism of claim 5, wherein the locking member is threadably coupled to the second annular projection.

7. The angle adjustment mechanism of claim 3, wherein the fixing base is provided with a fixing hole communicating to the insertion hole in a second lateral direction perpendicular to the predetermined axis, and further comprising a fixing member connected to the fixing hole and abutting the first end portion.

8. The angle adjustment mechanism of claim 1, wherein a threaded hole is provided in a bottom wall of the recess, an arcuate limit slot is provided in the mount about the predetermined axis, and the angle adjustment mechanism further comprises a threaded connector passing through the arcuate limit slot and threadably coupled to the threaded hole between an adjustment position and a locking position, the threaded connector being rotatable about the predetermined axis with the locking member driving the member and mount when in the adjustment position, the threaded connector being locked in the locking position.

9. The angle adjustment mechanism of claim 1, wherein an end surface of the lock member facing away from the member to be adjusted is provided with a notch perpendicular to and intersecting the predetermined axis.

10. The angle adjustment mechanism of claim 9, further comprising an operating tab removably insertable into the notch.

11. A processing apparatus comprising an optical device comprising an angle adjustment mechanism according to any one of claims 1 to 10, the member to be adjusted being a wave plate.

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