CN219053220U - Multi-beam laser processing system and device - Google Patents
Multi-beam laser processing system and device Download PDFInfo
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- CN219053220U CN219053220U CN202223543715.0U CN202223543715U CN219053220U CN 219053220 U CN219053220 U CN 219053220U CN 202223543715 U CN202223543715 U CN 202223543715U CN 219053220 U CN219053220 U CN 219053220U
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Abstract
The utility model belongs to the technical field of laser processing, and particularly relates to a multi-beam laser processing system and device. The system comprises: a beam generator for emitting at least a first beam and a second beam; the focusing lens is used for forming a first light spot and a second light spot on a processing surface after the first light beam and the second light beam pass through the focusing lensA light spot; and the distance between the focusing lens and the processing surface is L SI The distance from the conjugate point of the processing surface relative to the focusing lens is L SO The distance from the beam generator to the focusing lens is L SG The focal length of the focusing lens is f; wherein 1/L SO +1/L SI ＝1/f；f<L SI <2f；L SG >2f; the divergence angle of the first beam 31 and the second beam 32 is greater than 2mrad. The fixed state of the element in the light beam generator changes the incidence angle of the two light beams near the conjugate point of the light beam generator on the processing surface relative to the focusing lens, and the position change of the focus light spot on the processing surface is much smaller than that of the conventional system, so that the stability and consistency of the processing system are greatly improved.
Description
Technical Field
The utility model belongs to the technical field of laser processing, and particularly relates to a multi-beam laser processing system and device.
Background
In laser machining applications, it is often necessary to obtain a plurality of focal spots in the machining surface 4, which are defined in relation to each other, in order to achieve simultaneous multi-spot machining, for example: welding applications sometimes require the use of two focal spots in a specific positional relationship to achieve two-spot welding; drilling applications often require simultaneous multi-point drilling to improve machining efficiency; the laser annealing application needs to obtain flat top light with uniformly distributed energy, and two light spots or four light spot superposition can be used for respectively obtaining one-dimensional flat top light spots and two-dimensional flat top light spots. The application can be realized by using a diffraction optical element DOE, but the DOE is high in price, high in requirement on element quality, easy to damage and limited in application.
Therefore, the industry often uses multiple beams of light incident on the same focusing lens 2 to achieve multi-focus processing, where the processing surface 4 is located at the focal plane of the lens, but the focal spot position at the focal plane is very sensitive to the angle of incidence of the beam of light before entering the lens, and the relationship between them can be represented by the following formula (1):
δ＝ f*tan(θ) (1)
f is the focal length of the lens, θ is the change in angle of incidence of the beam before the lens, and δ is the displacement of the spot on the focal plane.
Therefore, if the fixed state of an element (e.g., mirror) in the optical path is changed, the incident angle of the light beam with respect to the lens is changed, which results in a change in the focal spot position on the processing surface 4. The positional relationship of each focal spot on the processing surface 4 becomes disordered, and the processing effect is affected.
For example, in laser processing application, a dual-beam co-incident lens is used to obtain a one-dimensional flat-topped long-strip light spot on a focal plane, as shown in fig. 1, two collimated beams with 4.4mm beam waist and 1064nm wavelength are commonly incident into a lens with 160mm focal length, respectively obtain focal spots with 50um diameter, and by adjusting the incident angle of the two beams, the one-dimensional flat-topped long-strip light spot can be superimposed on the focal plane. If the incidence angle of one beam of light deviates from 0.01 degree, the focal spot position of the beam passing through the lens deviates by 28um, and becomes two independent focal spots, thus destroying one-dimensional flat-top distribution.
Therefore, it is necessary to design a multi-beam laser processing system capable of forming a stable focal spot, so as to improve the anti-interference capability of the focal spot, that is, reduce the influence of the element fixing state change in the optical path on the focal spot.
Disclosure of Invention
The utility model aims to provide a multi-beam laser processing system and a device, which are used for solving the technical problems of unstable focal spot and weak interference resistance in the existing multi-beam laser processing system.
In order to solve the above technical problems, the present utility model provides a multi-beam laser processing system, including: a beam generator for emitting at least a first beam and a second beam; the focusing lens is used for forming a first light spot and a second light spot on a processing surface after the first light beam and the second light beam penetrate through the focusing lens; and the distance between the focusing lens and the processing surface is L SI The distance from the conjugate point of the processing surface relative to the focusing lens is L SO The distance from the beam generator to the focusing lens is L SG The focal length of the focusing lens is f; wherein 1/L SO +1/L SI ＝1/f；f<L SI <2f；L SG >2f; the divergence angle of the first and second beams is greater than 2mrad.
Further, the light beam generator includes: a laser for emitting laser light; a beam splitter for splitting laser light emitted from the laser into at least a first split beam and a second split beam; and the first optical path component and the second optical path component are used for respectively forming a first beam and a second beam which are split by the beam splitter.
Further, the first light path component comprises a first lens and a first reflector; the second light path component comprises a second lens, a second reflecting mirror and a third reflecting mirror; the first lens focuses the first beam, and then the first beam is reflected by the first reflector to form the first beam; the second reflector reflects the second split beam to the second lens for focusing, and then the second split beam is reflected by the third reflector to form the second beam; the focusing point of the first split beam passing through the first lens is A point, the focusing point of the second split beam passing through the second reflector is B point, and the distances from the A point and the B point to the focusing lens are L Sa The method comprises the steps of carrying out a first treatment on the surface of the Wherein L is Sa ＞2f。
Further, the L SG And L Sa The method meets the following conditions: 6f is less than or equal to L SG ≤10f，6f≤L Sa ≤10f。
Further, the first beam 31 and the second beam 32 are beams with a beam waist of less than 600 um.
Further, the diameters of the first light spot and the second light spot are smaller than 100um.
In still another aspect, the present utility model also provides a multi-beam laser processing apparatus, including: a housing, and a multi-beam laser processing system as described above located within the housing.
The beam generator of the multi-beam laser processing system can emit at least a first beam and a second beam, the first beam and the second beam respectively form a first light spot and a second light spot on a processing surface after respectively penetrating through the focusing lens, the beam generator is near the conjugate point of the processing surface relative to the focusing lens, the incidence angles of the two beams are changed due to the fixed state change of elements in the beam generator, the position change of the focus light spot on the processing surface is much smaller than that of the conventional system, and the stability and consistency of the processing system are greatly improved.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model will be realized and attained by the structure particularly pointed out in the written description and drawings.
In order to make the above objects, features and advantages of the present utility model more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the optical path of a conventional laser processing system;
FIG. 2 is a schematic diagram of the conjugate relationship of a focusing lens of the present utility model;
FIG. 3 is a schematic diagram of a multi-beam laser processing system of the present utility model;
fig. 4 is a schematic diagram of a beam generator of the multi-beam laser processing system of the present utility model.
In the figure:
the laser beam generator 1, the laser 11, the beam splitter 12, the first sub-beam 121, the second sub-beam 122, the first optical path component 13, the first lens 131, the first mirror 132, the second optical path component 14, the second lens 141, the second mirror 142, the third mirror 143, the focusing lens 2, the first beam 31, the second beam 32, and the working surface 4.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 2, according to the imaging principle of a thin lens, the positional relationship of an object point So and an image point Si is described by the following formula (2):
1/L SO + 1/L SI ＝ 1/f (2)
the distance from the focusing lens 2 to the processing surface 4 is L SI The distance from the conjugate point of the processing surface 4 to the focusing lens 2 with respect to the focusing lens 2 is L SO The distance from the beam generator 1 to the focusing lens 2 is L SG The focal length of the focusing lens 2 is f; the object point and the image point satisfying this formula are in a conjugate relationship with each other.
As shown in fig. 2, the light beam emitted from the object point is converged to the image point after passing through the lens. By utilizing the rule, the positions of main elements in the laser processing system can be arranged in the conjugate point attachment area of a processing surface (image point), the light beam deflection caused by the elements can be regarded as another light beam emitted by an object point, and the light beam deflection can be converged near the image point (processing surface) after passing through a lens, so that the element fixing state of the processing system becomes insensitive, and the influence of the light beam deflection on the position of a focus spot on the processing surface caused by element state change is small, thereby improving the system stability.
Examples
As shown in fig. 2 and 3, the present embodiment provides a multi-beam laser processing system, including: a light beam generator 1 for emitting at least a first light beam 31 and a second light beam 32; the focusing lens 2, the first light beam 31 and the second light beam 32 respectively form a first light spot and a second light spot on a processing surface 4 after passing through the focusing lens 2; and the distance from the focusing lens 2 to the processing surface 4 is L SI The distance from the conjugate point of the processing surface 4 to the focusing lens 2 with respect to the focusing lens 2 is L SO The distance from the beam generator 1 to the focusing lens 2 is L SG The focal length of the focusing lens 2 is f; wherein 1/L SO +1/L SI ＝1/f；f<L SI <2f；L SG >2f; the divergence angle of the first beam 31 and the second beam 32 is greater than 2mrad。
In the present embodiment, preferably, L SG >2f, the sensitivity of the light spots on the processing surface 4 can be reduced, and the system stability is improved; alternatively, L SG The stability of the system can be improved only by more than 2f, and L is the same as that of the system in practical application SG Can be between 2f and 20f and is selected according to actual engineering requirements.
In this embodiment, it is further preferred that the distance from the main element in the beam generator 1 to the focusing lens 2 is in the range of 6f to 10f, that is, the distance is near the conjugate point of the main element and the processing surface 4 with respect to the focusing lens 2, and the fixed state change of the element in the beam generator 1 causes the incident angle of the two beams to change, so that the focal spot position change on the processing surface is much smaller than that of the conventional system, and the stability and consistency of the processing system are greatly improved.
As shown in fig. 4, in this embodiment, as an alternative implementation of the light beam generator 1, the light beam generator 1 includes: a laser 11 for emitting laser light; a beam splitter 12 for splitting the laser light emitted from the laser 11 into at least a first split beam 121 and a second split beam 122; the first optical path component 13 and the second optical path component 14 are used for forming the first beam 31 and the second beam 32 by the first split beam 121 and the second split beam 122 respectively split by the beam splitter 12.
In this embodiment, optionally, the first optical path component 13 includes a first lens 131 and a first reflective mirror 132; the second light path assembly 14 includes a second lens 141, a second mirror 142, and a third mirror 143; wherein the first lens 131 focuses the first split beam 121 and then reflects the first split beam to form the first beam 31 through the first reflector 132; the second reflector 142 reflects the second split beam 122 to the second lens 141 for focusing, and then reflects the second split beam to form the second beam 32 through the third reflector 143; and the focusing point of the first beam 121 passing through the first lens 131 is point A, the focusing point of the second beam 122 passing through the second reflector 142 is point B, and the distances from the points A and B to the focusing lens 2 are L Sa The method comprises the steps of carrying out a first treatment on the surface of the Wherein L is Sa ＞2f。
In the present embodiment, optionally, L Sa Can be in the range of 2f to 10f.
In this embodiment, preferably, the L SG And L Sa The method meets the following conditions: 6f is less than or equal to L SG ≤10f，6f≤L Sa And when the temperature is less than or equal to 10f, the stability of the system is optimal.
In this embodiment, the first beam 31 and the second beam 32 are preferably beams with a beam waist of less than 600 um.
Further, for a common laser processing application scenario, the diameters of the first light spot and the second light spot are smaller than 100um. The incident facula that corresponds the requirement focusing lens is greater than 4mm, and common processing system uses the beam expander to expand the laser beam to more than 4mm, this patent first light beam and second light beam's divergence angle is greater than 2mrad, can propagate through the space like this, and natural divergence realizes expanding the beam to more than 4mm, does not need the beam expander.
In an alternative application scenario, the beam emitted by the laser 11 is split into two beams by the beam splitter 12, and the two beams are focused by the first lens 131 and the second lens 141 to obtain a beam with a specific divergence angle (the divergence angle is greater than 2 mrad), and the positions of the focused spots passing through the first lens 131 and the second lens 141 are a and B (see fig. 3). Then pass through a specific distance L Sa The light spot naturally diverges and expands, and an additional beam expanding system is not required. And finally, focusing on the processing surface by the focusing lenses 2 respectively. A and B are in conjugate relation with the machined surface behind the lens. The element positions in the beam generator 1 are located in the region 6f to 10f, i.e. all near the conjugate point of the working surface.
Even if the fixed state of the elements in the beam generator 1 changes to change the incident angle of the two beams, the position change of the focal spot on the processing surface is still much smaller than that of the conventional system, which greatly improves the stability and consistency of the processing system.
In the present embodiment, L Sa When =8f, i.e. a and B are located at the conjugate point of the working surface 4 with respect to the focusing lens 2, the system is most stable.
The multi-beam laser processing system of this embodiment needs to obtain a plurality of focal spots with definite positions on the processing surface, and the conventional optical path scheme has high requirements on the element fixing stability, and the focal spots on the processing surface are relatively sensitive and are easily changed in position due to the offset of the incident beam. According to the design parameters of the application scene, a plurality of focus light spots with stable positions or a plurality of light spots are synthesized to form a flat-top light spot with stable distribution on the processing surface.
As shown in fig. 3, in an alternative application scenario, simultaneous dual-hole precision cutting is implemented by using dual focuses, the wavelength of the laser 11 is 1064nm, the beam waist of the output beam is 1mm, the beam splitter 12 is used to split two beams with equal power, the beams with 200um beam waist are respectively focused by using the first lens 131 and the second lens 141 with 150mm focal lengths, the corresponding divergence full angle is 6.8mrad, and the positions of the focused beam waists are a and B. And a focusing lens 2 with a focal length of 160mm is arranged at a position after the 1280mm distance of the focused beam waist is transmitted, and two beams of light are simultaneously incident on the focusing lens 2.
L according to formula (2) SO 1280mm, f=160 mm, and L is obtained SI =183 mm, i.e. two focal spots are focused at 183mm on the rear side of the focusing lens 2. Magnification m=l according to imaging SI /L SO =1/7, the two focal spot sizes can be calculated to be 28um each. The working surface can be arranged at the position of the focus spot. By adjusting the spacing between the first beam 31 and the second beam 32 before entering the focusing lens 2, the bifocal spacing on the working surface can be controlled. The main components in the processing system can be arranged near the conjugate point of the processing surface, so if the incidence angle of the two light beams changes due to the change of the fixed state of the components, the position change of the focus light spot on the processing surface is much smaller than that of the conventional system, and the stability and consistency of the processing system are greatly improved.
The embodiment also provides a multi-beam laser processing device, which comprises: a housing, and a multi-beam laser processing system as described above located within the housing.
In summary, the main elements in the beam generator 1 of the multi-beam laser processing system and device are located near the conjugate point of the processing surface 4 and the focusing lens 2, and the fixed state of the elements in the beam generator 1 changes the incident angle of the two beams, so that the position change of the focal spot on the processing surface is much smaller than that of the conventional system, and the stability and consistency of the processing system are greatly improved.
The components (components not illustrating specific structures) selected in the application are all common standard components or components known to those skilled in the art, and the structures and principles of the components are all known to those skilled in the art through technical manuals or through routine experimental methods.
In the description of embodiments of the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present utility model may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
With the above-described preferred embodiments according to the present utility model as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present utility model. The technical scope of the present utility model is not limited to the description, but must be determined according to the scope of claims.
Claims (7)
1. A multi-beam laser processing system, comprising:
a light beam generator (1) for emitting at least a first light beam (31) and a second light beam (32);
the focusing lens (2), the first light beam (31) and the second light beam (32) respectively form a first light spot and a second light spot on a processing surface (4) after penetrating through the focusing lens (2); and
the distance from the focusing lens (2) to the processing surface (4) is L SI The distance from the conjugate point of the processing surface (4) relative to the focusing lens (2) is L SO The distance from the light beam generator (1) to the focusing lens (2) is L SG The focal length of the focusing lens (2) is f; wherein the method comprises the steps of
1/L SO +1/L SI ＝1/f；
f<L SI <2f；
L SG >2f；
The divergence angle of the first beam (31) and the second beam (32) is greater than 2mrad.
2. The multi-beam laser processing system of claim 1, wherein,
the light beam generator (1) comprises:
a laser (11) for emitting laser light;
a beam splitter (12) for splitting the laser light emitted from the laser (11) into at least a first split beam (121) and a second split beam (122);
a first optical path component (13) and a second optical path component (14) for forming a first split beam (121) and a second split beam (122) split by the beam splitter (12) into the first beam (31) and the second beam (32), respectively.
3. The multi-beam laser processing system of claim 2, wherein,
the first light path component (13) comprises a first lens (131) and a first reflecting mirror (132);
the second light path component (14) comprises a second lens (141), a second reflecting mirror (142) and a third reflecting mirror (143); wherein the method comprises the steps of
The first lens (131) focuses the first split beam (121) and then reflects the first split beam to form the first beam (31) through the first reflector (132);
the second reflector (142) reflects the second split beam (122) to the second lens (141) to focus, and then reflects the second split beam to form the second beam (32) through the third reflector (143); and
the focusing point of the first beam (121) passing through the first lens (131) is point A, the focusing point of the second beam (122) passing through the second reflector (142) is point B, and the distances from the point A and the point B to the focusing lens (2) are L Sa The method comprises the steps of carrying out a first treatment on the surface of the Wherein the method comprises the steps of
L Sa ＞2f。
4. A multi-beam laser processing system as set forth in claim 3 wherein,
the L is SG And L Sa The method meets the following conditions:
6f≤L SG ≤10f，6f≤L Sa ≤10f。
5. the multi-beam laser processing system of claim 1, wherein,
the first beam (31) and the second beam (32) are beams with a beam waist of less than 600 um.
6. The multi-beam laser processing system of claim 1, wherein,
the diameters of the first light spot and the second light spot are smaller than 100um.
7. A multi-beam laser processing apparatus, comprising:
a housing, and a multi-beam laser processing system as claimed in any one of claims 1 to 6 located within the housing.
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| CN202223543715.0U CN219053220U (en) | 2022-12-29 | 2022-12-29 | Multi-beam laser processing system and device |
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| CN202223543715.0U CN219053220U (en) | 2022-12-29 | 2022-12-29 | Multi-beam laser processing system and device |
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