CN219040400U - Composite ion beam detector - Google Patents
Composite ion beam detector Download PDFInfo
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- CN219040400U CN219040400U CN202222379571.3U CN202222379571U CN219040400U CN 219040400 U CN219040400 U CN 219040400U CN 202222379571 U CN202222379571 U CN 202222379571U CN 219040400 U CN219040400 U CN 219040400U
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Abstract
The utility model belongs to the technical field of mass spectrum detection devices, and particularly relates to a composite ion beam detector. The ion source generates stable ion beam current, and positive charge particles pass through the slit along an X axis; the ion beam detector is characterized in that a secondary electron multiplier and an ion scintillation multiplication detector are arranged on the flight path of the ion beam, a Faraday cup is arranged at the terminal of the flight path of the ion beam, the Faraday cup is connected with a signal amplifier, and the signal amplifier is used for carrying out operational amplification processing on collected ion flow signals. The utility model can reasonably select the corresponding detector according to the size of the ion intensity and the characteristics of particles, is convenient to detect, can effectively improve the whole service life of the detector of the mass spectrometer, avoids the tedious operation caused by frequent replacement of the detector, and is convenient for the stable operation and operation maintenance of equipment.
Description
Technical Field
The utility model belongs to the technical field of mass spectrum detection devices, and particularly relates to a composite ion beam detector.
Background
Common ion intensity detectors are faraday cups, ion scintillation multipliers, secondary electron multipliers, and the like. In development or installation and debugging of devices with ion beam current such as mass spectrometers, real-time monitoring of the ion beam is generally required to improve the working efficiency.
Faraday cups have good peak shape and stability and are commonly used for isotope detection. Meanwhile, the Faraday cup detector has simple structure and relatively low price. But has a relatively low sensitivity and is suitable for measuring 10 -15 To 10 -10 Ion signals in the a range.
Ion scintillation multipliers are used to measure weak ion beams. The detector system is typically operated at a temperature of less than 200 ten thousand cps (3 x10 - 13 A) Operates at the signal strength of (a). Since the photomultiplier tube is located outside the vacuum system, the gain is not affected by pressure fluctuations, which increase the long-term stability of the detector. The scintillation photomultiplier has a higher gain, a larger dynamic range, better linearity and superior peak shape than conventional electron multipliers.
The secondary electron multiplier can obtain 10 relative to Faraday cup 5 -10 8 And has a faster response speed, as well as disadvantages including mass discrimination, poor peak shape, and dead time of the detector.
Therefore, in order to meet the practical application requirements of detecting linear range, sensitivity, positive and negative ion detection and the like of the ion beam intensity in the ion beam intensity debugging process, it is necessary to provide a composite ion beam detector.
Disclosure of Invention
The utility model solves the technical problem by providing the composite ion beam detector, which can reasonably select a corresponding detector according to the size of the ion intensity and the characteristics of particles, is convenient to detect, can effectively prolong the whole service life of the mass spectrometer detector, avoids tedious operations caused by frequent replacement of the detector, and is convenient for stable operation and operation maintenance of equipment.
The utility model adopts the technical scheme that:
a composite ion beam detector comprises a vacuum cavity, wherein one end in the vacuum cavity is provided with an ion source, the front end of the ion source is provided with a slit, the ion source generates stable ion beam, and positive charge particles pass through the slit along an X axis; the ion beam detector is characterized in that a secondary electron multiplier and an ion scintillation multiplication detector are arranged on the flight path of the ion beam, a Faraday cup is arranged at the terminal of the flight path of the ion beam, the Faraday cup is connected with a signal amplifier, and the signal amplifier is used for carrying out operational amplification processing on collected ion flow signals.
The vacuum cavity is processed by 316L type stainless steel, and the connecting part is sealed in a knife edge flange mode.
The secondary electron multiplier comprises an electron multiplier deflection electrode, an electron multiplier and an electron multiplier, wherein the electron multiplier deflection electrode and the electron multiplier are respectively arranged on two sides of a flight path of the ion beam, and the electron multiplier is connected with the electron multiplier.
The electron multiplier electrode material is copper beryllium alloy.
The ion scintillation multiplication detector comprises a scintillator, a quartz window and a photomultiplier, wherein a scintillator detector dynode and a scintillator are respectively arranged on two sides of a flight path of the ion beam, the photomultiplier is arranged on the outer side of the scintillator, the photomultiplier is positioned outside the vacuum cavity and protected by an optical darkroom, the quartz window is arranged between the photomultiplier and the scintillator, and the photomultiplier and the scintillator are optically coupled through the quartz window.
The scintillator adopts a plastic scintillator or an inorganic scintillator, and the surface of the electronic receiving end of the scintillator is plated with high-purity aluminum; the scintillator detector dynode is fabricated from a stainless steel material with a coating thereon.
The Faraday cup is designed into a cup shape by adopting stainless steel metal, and is used for measuring the incident intensity of charged particles.
The Faraday cup is composed of a double-layer stainless steel cavity, and an inner layer and an outer layer are supported by insulating ceramic columns.
The system also comprises a computer system, a data processing unit and a data processing unit, wherein the computer system is used for recording and outputting measurement results; the power supply module is used for providing needed power for each component; and the signal acquisition module is used for respectively carrying out signal acquisition on the secondary electron multiplier, the ion scintillation multiplication detector and the Faraday cup.
Compared with the prior art, the utility model has the beneficial effects that:
(1) The composite ion beam detector provided by the utility model can reasonably select the corresponding detector according to the size of the ion intensity and the characteristics of particles, is convenient to detect, can effectively prolong the whole service life of the detector of the mass spectrometer, avoids tedious operations caused by frequent replacement of the detector, and is convenient for stable operation and operation maintenance of equipment;
(2) The composite ion beam detector provided by the utility model has wide detection linear range;
(3) According to the composite ion beam detector provided by the utility model, the frequency of unloading vacuum replacement devices by a user can be reduced by prolonging the service life of the detector;
(4) The utility model provides a composite ion beam detector, wherein a user flexibly selects the detector according to different ion intensities, and selects the detector corresponding to the detector according to ion characteristics;
drawings
FIG. 1 is a schematic diagram of a composite ion beam detector according to the present utility model;
in the figure: 1-electron multiplier deflection electrode, 2-electron multiplier, 3-scintillator detector dynode, 4-scintillator, 5-quartz window, 6-photomultiplier, 7-Faraday cup, 8-signal amplifier, 9-ion source, 10-slit, 11-computer system.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1, the composite ion beam detector provided by the utility model comprises a vacuum cavity, wherein the vacuum cavity is made of 316L stainless steel, and a connecting part is sealed in a knife edge flange mode and is used for providing a vacuum environment meeting free flight of charged particles; an ion source 9 is arranged at one end inside the vacuum cavity, a slit 10 is arranged at the front end of the ion source 9, the ion source 9 is started to generate stable ion beam current, and positive charge particles pass through the slit 10 along the X axis and migrate along the dotted line direction in fig. 1; the two sides of the flight path of the ion beam flow are respectively provided with an electron multiplier deflection electrode 1 and an electron multiplier, the electron multiplier is connected with an electron multiplier 2, the electron multiplier deflection electrode 1, the electron multiplier and the electron multiplier 2 form a secondary electron multiplier, and the electron multiplier is made of copper beryllium alloy;
the ion beam detector dynode 3 and the scintillator 4 are respectively arranged at two sides of the flight path of the ion beam, the photomultiplier 6 is arranged at the outer side of the scintillator 4, the photomultiplier 6 is positioned at the outer part of the vacuum cavity and is protected by an optical darkroom, a quartz window 5 is arranged between the photomultiplier 6 and the scintillator 4, and the photomultiplier 6 and the scintillator 4 are optically coupled through the quartz window 5; the scintillator 4, the quartz window 5 and the photomultiplier 6 form an ion scintillation multiplication detector; the scintillator 4 is a plastic scintillator or an inorganic scintillator, and the surface of the electronic end of the scintillator 4 is plated with high-purity aluminum; the dynode 3 of the scintillator detector is made of stainless steel materials, and is coated with a coating, wherein the coating can be high-purity aluminum or beryllium-copper alloy for improving the efficiency of electron generation;
the terminal of the flying path of the ion beam is provided with a Faraday cup 7, the Faraday cup 7 is made of stainless steel metal and is designed into a cup shape and is used for measuring the incident intensity of charged particles, the Faraday cup 7 is composed of a double-layer stainless steel cavity, an inner layer and an outer layer are supported by insulating ceramic columns, and when the charged particles enter the cup through one or more inhibition grids, current is generated, and the current is amplified and recorded after being converted into voltage; the Faraday cup 7 is arranged along the incidence direction of the particles, and the cup opening of the Faraday cup 7 is opposite to the incidence direction of the particles, so that the particles can effectively enter the Faraday cup 7;
the Faraday cup 7 is connected with a signal amplifier 8, and the signal amplifier 8 is used for carrying out operational amplification processing on the collected ion current signals; a computer system 11 is further included, and the computer system 11 is used for recording and outputting measurement results; the power supply module is used for providing needed power for each component; and the signal acquisition module is used for respectively acquiring signals of the secondary electron multiplier, the ion scintillation multiplication detector and the Faraday cup 7.
Example 1:
1. an integrated detector arrangement is shown in figure 1. All devices except the photomultiplier tube were placed in a vacuum chamber. The photomultiplier is positioned outside the vacuum cavity and is optically coupled with the scintillator through a quartz light window positioned between the photomultiplier and the scintillator;
2. the vacuum degree of the cavity is kept at 10 -4 Pa or less;
3. starting an ion source 9, keeping the current of the ion source at 2.8A, setting HV4 = +4kV, enabling the ion source to continuously generate stable ion beam current, enabling positive charge particles to pass through a slit 10 along an X axis and migrate along the direction of a dotted line in FIG. 1;
4. the electron multiplier deflection electrode 1 of the secondary electron multiplication detector is arranged with high voltage HV1 = +5kV, the scintillator detector dynode 3 with high voltage HV3 = 1.5kV,
5. ion scintillation multiplication detector 2hv2=0v; the intensity of the ion beam current is measured by a secondary electron multiplication detector; and recorded and output by a computer.
Example 2:
1. an integrated detector arrangement is shown in figure 1. All devices except the photomultiplier tube were placed in a vacuum chamber. The photomultiplier is positioned outside the vacuum cavity and is optically coupled with the scintillator through a quartz light window positioned between the photomultiplier and the scintillator;
2. the vacuum degree of the cavity is kept at 10 -4 Pa or less;
3. starting an ion source 9, keeping the current of the ion source at 3.2A, setting HV4 = +8kV, enabling the ion source to continuously generate stable ion beam current, enabling positive charge particles to pass through a slit 10 along an X axis and migrate along the direction of a dotted line in FIG. 1;
4. the electron multiplier deflection electrode 1 of the secondary electron multiplication detector is arranged with high voltage HV 1=0 kV, the scintillator detector dynode 3 with high voltage HV 3=0 kV,
5. the high voltage HV2 of the ion scintillation multiplication detector is minus 25kV, and the surface voltage of the scintillator 4 is +200V; the intensity of the ion beam current is measured by an ion scintillation multiplication detector;
6. the intensity of the ion beam current is obtained by collecting the electric signals of the photomultiplier, and is recorded and output by a computer.
Example 3:
1. an integrated detector arrangement is shown in figure 1. All devices except the photomultiplier tube were placed in a vacuum chamber. The photomultiplier is positioned outside the vacuum cavity and is optically coupled with the scintillator through a quartz light window positioned between the photomultiplier and the scintillator;
2. the vacuum degree of the cavity is kept at 10 -4 Pa or less;
3. starting an ion source 9, keeping the current of the ion source at 3.5A, setting HV4 = +8kV, enabling the ion source to continuously generate stable ion beam current, enabling positive charge particles to pass through a slit 10 along an X axis and migrate along the direction of a dotted line in FIG. 1;
4. setting high voltage HV 1=0 kV of an electron multiplier deflection electrode 1 of a secondary electron multiplication detector, and setting high voltage HV 3=0 kV of a dynode 3 of a scintillator detector;
5. high voltage of the ion scintillation multiplication detector HV 2=0kV, and surface voltage +0V of the scintillator 4 is set;
6. the signal amplifying circuit 8 of the Faraday cup detector 7 is started, the intensity of the ion beam current is obtained by measuring the voltage signal of the amplifier, and the intensity is recorded and output by a computer.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (9)
1. The composite ion beam detector is characterized by comprising a vacuum cavity, wherein one end in the vacuum cavity is provided with an ion source (9), the front end of the ion source (9) is provided with a slit (10), the ion source (9) generates stable ion beam current, and positive charge particles pass through the slit (10) along an X axis; be equipped with secondary electron multiplier and ion scintillation multiplication detector on the flight path of ion beam, the terminal of the flight path of ion beam is equipped with faraday cup (7), faraday cup (7) are connected with signal amplifier (8), signal amplifier (8) are used for carrying out operational amplification to the ion flow signal of gathering.
2. The composite ion beam detector of claim 1, wherein the vacuum chamber is fabricated from 316L stainless steel, and the connection is sealed with a knife edge flange.
3. The composite ion beam detector according to claim 1, wherein the secondary electron multiplier comprises an electron multiplier deflection electrode (1), an electron multiplier and an electron multiplier (2), and both sides of the flight path of the ion beam stream are respectively provided with the electron multiplier deflection electrode (1) and the electron multiplier, and the electron multiplier is connected with the electron multiplier (2).
4. A composite ion beam detector according to claim 3, wherein the electron dynode material is copper beryllium.
5. The composite ion beam detector according to claim 1, wherein the ion scintillation multiplication detector comprises a scintillator (4), a quartz window (5) and a photomultiplier (6), wherein a scintillator detector dynode (3) and the scintillator (4) are respectively arranged on two sides of a flight path of the ion beam, the photomultiplier (6) is arranged on the outer side of the scintillator (4), the photomultiplier (6) is positioned outside the vacuum cavity and protected by an optical darkroom, the quartz window (5) is arranged between the photomultiplier (6) and the scintillator (4), and the photomultiplier (6) and the scintillator (4) are optically coupled through the quartz window (5).
6. The composite ion beam detector of claim 5, wherein the scintillator (4) is a plastic scintillator or an inorganic scintillator, and the surface of the scintillator (4) receiving the electron end is plated with high purity aluminum; the dynode (3) of the scintillator detector is made of stainless steel materials, and is coated with a coating.
7. The composite ion beam detector of claim 1, wherein the faraday cup (7) is cup-shaped of stainless steel metal for measuring charged particle incident intensity.
8. The composite ion beam detector of claim 7, wherein the faraday cup (7) is formed of a double-layered stainless steel cavity, with inner and outer layers being supported by insulating ceramic posts.
9. The composite ion beam detector of claim 1, further comprising a computer system (11), the computer system (11) for recording and outputting measurements; the power supply module is used for providing needed power for each component; and the signal acquisition module is used for respectively carrying out signal acquisition on the secondary electron multiplier, the ion scintillation multiplication detector and the Faraday cup (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222379571.3U CN219040400U (en) | 2022-09-08 | 2022-09-08 | Composite ion beam detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222379571.3U CN219040400U (en) | 2022-09-08 | 2022-09-08 | Composite ion beam detector |
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| Publication Number | Publication Date |
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| CN219040400U true CN219040400U (en) | 2023-05-16 |
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| CN202222379571.3U Active CN219040400U (en) | 2022-09-08 | 2022-09-08 | Composite ion beam detector |
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