CN105092690B - Ionization absorption spectra detection device based on multi-channel electronic multiplier device - Google Patents
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Abstract
本发明提供一种基于多通道电子倍增器的电离吸收谱探测装置，包括用于使气体电离的电离腔室；设置在所述电离腔室中的金网，其设置为收集所述电离腔室中电离产生的离子；设置在所述电离腔室中的多通道电子倍增器，其位置与所述金网的位置相对，以在两者之间形成电场，并通过所述电场的作用接收所述金网收集的所述离子并输出相应的离子信号；连接至所述多通道电子倍增器的加压及信号采集电路，其设置为向所述多通道电子倍增器提供电压以及采集并输出所述离子信号；以及信号处理系统，其设置为接收所述离子信号并根据所述离子信号获取相应的电离吸收谱。本发明能够改善测量光束线能量分辨率的准确度，减小气体碰撞展宽对最终结果的影响。
The invention provides an ionization absorption spectrum detection device based on a multi-channel electron multiplier, comprising an ionization chamber for ionizing gas; a gold mesh arranged in the ionization chamber, which is arranged to collect the ionization chamber The ions generated by the ionization in the ionization chamber; the multi-channel electron multiplier arranged in the ionization chamber, its position is opposite to the position of the gold mesh, so as to form an electric field between the two, and receive the The ions collected by the gold net and output corresponding ion signals; the pressurization and signal acquisition circuit connected to the multi-channel electron multiplier, which is configured to provide voltage to the multi-channel electron multiplier and collect and output the the ion signal; and a signal processing system, which is configured to receive the ion signal and obtain a corresponding ionization absorption spectrum according to the ion signal. The invention can improve the accuracy of the energy resolution of the measuring beam line, and reduce the influence of gas collision broadening on the final result.
Description
技术领域technical field
本发明涉及电离吸收谱探测领域，尤其涉及一种基于多通道电子倍增器件的电离吸收谱探测装置。The invention relates to the field of ionization absorption spectrum detection, in particular to an ionization absorption spectrum detection device based on a multi-channel electron multiplier device.
背景技术Background technique
上海同步辐射光源(Shanghai Synchrotron Radiation Facility,简称SSRF)为先进的第三代同步辐射光源，其主要性能指标位居国际前列。SSRF可以产生从远红外到硬X射线的宽广波段，是生命科学、材料科学、环境科学、地球科学、物理学、化学、信息科学等众多科学研究中不可替代的先进手段和综合研究平台。Shanghai Synchrotron Radiation Facility (SSRF) is an advanced third-generation synchrotron radiation source, and its main performance indicators are among the top in the world. SSRF can generate a wide band from far infrared to hard X-rays, and is an irreplaceable advanced means and comprehensive research platform in many scientific researches such as life science, material science, environmental science, earth science, physics, chemistry, and information science.
梦之线是继首批建造的七条光束线站之后的又一条高性能线站，它在软X波段具有较宽的能区范围(20-2000eV)和超高能量分辨本领(大于10,000@1000eV)。梦之线有两个分支线站，一个是角分辨光电子能谱(angle-resolved photoemission spectroscopy，简称ARPES)站，可以直接探测电子能带结构，可用于研究复杂的系统，如高温超导体，自旋电子材料，拓扑绝缘体等。另一个是光电子显微仪(photoemission electron microscopy，简称PEEM)站，是一种非常有用的表面探测技术，可以为反应动力学提供重要的信息。Dreamline is another high-performance line station following the seven beamline stations built in the first batch. It has a wide energy range (20-2000eV) and ultra-high energy resolution (greater than 10,000@1000eV) in the soft X-band ). Dreamline has two branch stations, one is the angle-resolved photoemission spectroscopy (ARPES) station, which can directly detect the electronic band structure, and can be used to study complex systems, such as high-temperature superconductors, spin Electronic materials, topological insulators, etc. The other is a photoemission electron microscopy (PEEM) station, a very useful surface probing technique that can provide important information on reaction kinetics.
在线站的建设和调试过程中，检测光束线的能量分辨率是其中的一个核心问题。在软X射线能量范围内，评估光束线能量分辨能力普遍采用的一种方法是测量标准气体的电离吸收谱，通过分析测量所得谱线中吸收峰的展宽，来得到光束线的仪器展宽。在国际同步辐射装置中，常用的电离腔室有基于电极探针和多通道电子倍增器件两种。During the construction and commissioning of the online station, the energy resolution of the detection beamline is one of the core issues. In the energy range of soft X-rays, a commonly used method to evaluate the energy resolution capability of a beamline is to measure the ionization absorption spectrum of a standard gas, and to obtain the instrumental broadening of the beamline by analyzing the broadening of the absorption peak in the measured spectral line. In the International Synchrotron Radiation Facility, there are two commonly used ionization chambers based on electrode probes and multi-channel electron multiplier devices.
基于电极探针的电离腔室具有相对简单的结构与电子学设备，且收集极不易损坏，所以时至今日它仍然在世界范围内同步辐射束线上被广泛应用。电极探针式电离腔室的结构示意图如图1所示，其包括电离腔室100’，设置在电离腔室中的阳极1’、阴极2’和零极3’，以及设置在电离腔室外壁上的分子泵4’、电容薄膜规5’、皮安计6’和质量流量计7’。当X射线进入到电离腔室时，被气体吸收，使得气体原子外层电子电离产生电子离子对，电子和正离子会在阴、阳极之间的电场的作用下分别向阳极和阴极漂移，在外电路中形成电流，即为电离电流。而电离电流对不同能量的响应谱即为该气体的吸收谱。通过分析谱中出现的峰位以及半高宽，可对光束线的能量进行定标和对分辨率进行评估。The ionization chamber based on the electrode probe has a relatively simple structure and electronics, and the collection is extremely indestructible, so it is still widely used in synchrotron radiation beamlines around the world today. The structure diagram of the electrode probe type ionization chamber is shown in Figure 1, which includes an ionization chamber 100', an anode 1', a cathode 2' and a zero electrode 3' arranged in the ionization chamber, and an ionization chamber Molecular pump 4', capacitance film gauge 5', picoammeter 6' and mass flowmeter 7' on the outer wall. When X-rays enter the ionization chamber, they are absorbed by the gas, which makes the outer electrons of the gas atoms ionize to generate electron ion pairs. The electrons and positive ions will drift to the anode and cathode respectively under the action of the electric field between the cathode and the anode. A current is formed in it, which is the ionization current. The response spectrum of the ionization current to different energies is the absorption spectrum of the gas. The energy of the beamline can be calibrated and the resolution can be evaluated by analyzing the peak position and the full width at half maximum in the spectrum.
然而，为了保证采集的信号具有较好的信噪比，电离腔室内待测气体的压强较高(10-1～10-3torr)，这时增加的气体碰撞展宽对吸收谱峰宽有额外的贡献，降低了测量的准确度。However, in order to ensure that the collected signal has a good signal-to-noise ratio, the pressure of the gas to be measured in the ionization chamber is high (10 -1 ~ 10 -3 torr), and the increased gas collision broadening has an additional effect on the peak width of the absorption spectrum. contribution, reducing the accuracy of the measurement.
发明内容Contents of the invention
针对上述现有技术的不足，本发明提供一种基于多通道电子倍增器件的电离吸收谱探测装置，以改善测量束线能量分辨率的准确度，减小气体碰撞展宽对最终结果的影响。Aiming at the deficiencies of the above-mentioned prior art, the present invention provides an ionization absorption spectrum detection device based on a multi-channel electron multiplier device, so as to improve the accuracy of the energy resolution of the measurement beamline and reduce the impact of gas collision broadening on the final result.
为了实现上述目的，本发明采用如下技术方案：In order to achieve the above object, the present invention adopts the following technical solutions:
一种基于多通道电子倍增器的电离吸收谱探测装置，包括用于使气体电离的电离腔室，还包括：An ionization absorption spectrum detection device based on a multi-channel electron multiplier, comprising an ionization chamber for ionizing gas, and further comprising:
一设置在所述电离腔室中的金网，其设置为收集所述电离腔室中产生的离子；a gold mesh disposed in the ionization chamber, configured to collect ions produced in the ionization chamber;
一设置在所述电离腔室中的多通道电子倍增器，其位置与所述金网的位置相对，以在两者之间形成电场，并通过所述电场的作用接收所述金网收集的所述离子并输出相应的离子信号；A multi-channel electron multiplier arranged in the ionization chamber, its position is opposite to the position of the gold grid, to form an electric field between the two, and receive the electrons collected by the gold grid through the effect of the electric field the ion and output the corresponding ion signal;
一连接至所述多通道电子倍增器的加压及信号采集电路，其设置为向所述多通道电子倍增器提供电压以及采集并输出所述离子信号；以及a pressurization and signal acquisition circuit connected to the multi-channel electron multiplier, which is configured to provide voltage to the multi-channel electron multiplier and collect and output the ion signal; and
一连接至所述加压及信号采集电路的信号处理系统，其设置为接收所述离子信号并根据所述离子信号获取相应的电离吸收谱。A signal processing system connected to the pressurization and signal acquisition circuit, which is configured to receive the ion signal and obtain a corresponding ionization absorption spectrum according to the ion signal.
进一步地，所述多通道电子倍增器包括一阳极板以及相连的一前端微通道板和一后端微通道板，所述前端微通道板邻近所述金网设置，所述后端微通道板邻近所述阳极板设置。Further, the multi-channel electron multiplier includes an anode plate and a front-end micro-channel plate and a rear-end micro-channel plate connected to each other, the front-end micro-channel plate is arranged adjacent to the gold mesh, and the rear-end micro-channel plate disposed adjacent to the anode plate.
优选地，所述多通道电子倍增器还包括至少一块连接在所述前端微通道板与后端微通道板之间的中间微通道板。Preferably, the multi-channel electron multiplier further includes at least one middle micro-channel plate connected between the front-end micro-channel plate and the rear-end micro-channel plate.
进一步地，所述加压及信号采集电路包括：Further, the pressurization and signal acquisition circuit includes:
第一分压电阻，其连接在一负电压源与所述前端微通道板之间；A first voltage dividing resistor, which is connected between a negative voltage source and the front-end microchannel plate;
第二分压电阻，其连接在一正电压源与所述后端微通道板之间；A second voltage dividing resistor connected between a positive voltage source and the back-end microchannel plate;
第三分压电阻，其连接在所述第一分压电阻与第二分压电阻之间；a third voltage dividing resistor connected between the first voltage dividing resistor and the second voltage dividing resistor;
第一RC电路，其一端连接在所述第一分压电阻与第三分压电阻之间，另一端接地；A first RC circuit, one end of which is connected between the first voltage dividing resistor and the third voltage dividing resistor, and the other end is grounded;
第二RC电路，其一端连接在所述第二分压电阻与第三分压电阻之间，另一端接地；以及A second RC circuit, one end of which is connected between the second voltage dividing resistor and the third voltage dividing resistor, and the other end is grounded; and
第一电容，其一端连接至所述阳极板并连接在所述正电压源与所述第二分压电阻之间，另一端连接至所述信号处理系统。One end of the first capacitor is connected to the anode plate and between the positive voltage source and the second voltage dividing resistor, and the other end is connected to the signal processing system.
优选地，所述信号处理系统包括：Preferably, the signal processing system includes:
一连接至所述加压及信号采集电路的放大器，其设置为接收所述离子信号并对其进行放大后输出；An amplifier connected to the pressurization and signal acquisition circuit, which is configured to receive the ion signal and amplify it for output;
一连接至所述放大器的甄别器，其设置为将所述放大器输出的离子信号的电压幅度与预设阈值进行比较，并在所述电压幅度大于所述预设阈值时输出一计数信号；a discriminator connected to the amplifier, configured to compare the voltage amplitude of the ion signal output by the amplifier with a preset threshold, and output a count signal when the voltage amplitude is greater than the preset threshold;
一连接至所述甄别器的计数器，其设置为根据所述计数信号进行计数；以及a counter connected to the discriminator, configured to count according to the count signal; and
一连接至所述计数器的数据处理器，其设置为根据所述计数器的计数结果获取所述电离吸收谱。A data processor connected to the counter, configured to obtain the ionization absorption spectrum according to the counting result of the counter.
进一步地，所述基于多通道电子倍增器的电离吸收谱探测装置还包括一安装在所述电离腔室的外壁上并用于向所述电离腔室注入所述气体的注气系统。Further, the multi-channel electron multiplier-based ionization absorption spectrum detection device also includes a gas injection system installed on the outer wall of the ionization chamber and used for injecting the gas into the ionization chamber.
进一步地，所述基于多通道电子倍增器的电离吸收谱探测装置还包括一安装在所述电离腔室的外壁上并用于监测所述电离腔室内的气压的真空计。Further, the multi-channel electron multiplier-based ionization absorption spectrum detection device also includes a vacuum gauge installed on the outer wall of the ionization chamber and used for monitoring the air pressure in the ionization chamber.
进一步地，所述基于多通道电子倍增器的电离吸收谱探测装置还包括一安装在所述电离腔室的外壁上并用于为所述电离腔室提供真空条件的真空泵组。Further, the multi-channel electron multiplier-based ionization absorption spectrum detection device also includes a vacuum pump set installed on the outer wall of the ionization chamber and used to provide vacuum conditions for the ionization chamber.
优选地，所述放大器和甄别器集成在同一个电子学插件上。Preferably, said amplifier and discriminator are integrated on the same electronics package.
综上所述，由于相对于电极探针而言，基于多通道电子倍增器件的电离腔室具有先天的优势，即，MCP正常工作时的气压本身较低，一般小于10-6Torr，这就大大减小了碰撞展宽对能量分辨率测量的影响。In summary, compared with the electrode probe, the ionization chamber based on the multi-channel electron multiplier device has inherent advantages, that is, the gas pressure itself is low when the MCP works normally, generally less than 10 -6 Torr, which means The impact of collision broadening on energy resolution measurements is greatly reduced.
附图说明Description of drawings
图1为现有技术的基于电极探针的电离吸收谱探测装置的结构示意图；FIG. 1 is a schematic structural view of an electrode probe-based ionization absorption spectrum detection device in the prior art;
图2为本发明的基于多通道电子倍增器件的电离吸收谱探测装置的结构示意图；Fig. 2 is the structure schematic diagram of the ionization absorption spectrum detecting device based on the multi-channel electron multiplier device of the present invention;
图3为本发明的加压及信号采集电路以及信号处理系统的电路原理图；Fig. 3 is the circuit schematic diagram of pressurization and signal acquisition circuit and signal processing system of the present invention;
图4是本发明的多通道电子倍增器件的计数随电离腔室内气压的变化曲线图；Fig. 4 is the change graph of the count of the multi-channel electron multiplier device of the present invention with the change of the air pressure in the ionization chamber;
图5是利用本发明的装置测量的Ar的吸收谱；Fig. 5 is the absorption spectrum of Ar utilizing the device measurement of the present invention;
图6是利用本发明的装置测量的N2的吸收谱。Fig. 6 is the absorption spectrum of N2 measured by the device of the present invention.
具体实施方式Detailed ways
下面结合附图给出本发明的较佳实施例，并予以详细描述，使能更好地理解本发明的功能、特点。The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings, and described in detail, so that the functions and characteristics of the present invention can be better understood.
如图2所示，本发明的基于多通道电子倍增器(Multi-channel photomultiplier，简称MCP)的电离吸收谱探测装置包括一电离腔室100，安装在电离腔室100的外壁上的一注气系统1、一真空计2和一真空泵组，一设置在电离腔室100中的金网4，一设置在电离腔室100中的多通道电子倍增器5，一设置在电离腔室100外并通过接头连接至多通道电子倍增器5的加压及信号采集电路6，一设置在电离腔室100外并连接至加压及信号采集电路6的信号处理系统7；此外，还包括通过法兰安装在电离腔室100的前壁上的狭长差分窗口8、以及沿X光的光路方向设置在电离腔室100内的后端部分的光电二极管9。As shown in Fig. 2, the ionization absorption spectrum detecting device based on the multi-channel electron multiplier (Multi-channel photomultiplier, MCP for short) of the present invention comprises an ionization chamber 100, a gas injector installed on the outer wall of the ionization chamber 100 System 1, a vacuum gauge 2 and a vacuum pump group, a gold mesh 4 arranged in the ionization chamber 100, a multi-channel electron multiplier 5 arranged in the ionization chamber 100, a multi-channel electron multiplier 5 arranged outside the ionization chamber 100 and Connected to the pressurization and signal acquisition circuit 6 of the multi-channel electron multiplier 5 through a joint, a signal processing system 7 arranged outside the ionization chamber 100 and connected to the pressurization and signal acquisition circuit 6; in addition, it also includes installation through a flange The long and narrow differential window 8 on the front wall of the ionization chamber 100, and the photodiode 9 arranged at the rear end part of the ionization chamber 100 along the optical path direction of X-rays.
下面分别对各部件的作用进行详细描述：The function of each component is described in detail below:
注气系统1用来给电离腔室100注入靶气体，且流量由微漏阀控制以保证电离腔室100内的气体可以稳定在10-6torr的量级。The gas injection system 1 is used to inject target gas into the ionization chamber 100, and the flow rate is controlled by a micro-leakage valve to ensure that the gas in the ionization chamber 100 can be stabilized at the level of 10 −6 torr.
真空计2用于监控电离腔室100内的气压。The vacuum gauge 2 is used to monitor the air pressure in the ionization chamber 100 .
真空泵组包括离子泵31和分子泵组32，在测量气体吸收谱时，为了保证电离腔室100的气压恒定，此时只需开启抽速相对较慢的分子泵组32；吸收谱测量完毕后，为了使电离腔室100真空快速回到正常状态(好于10-9torr)，则需要同时启动抽速较快的离子泵31；待真空恢复正常状态后，可关闭分子泵组32的阀门。The vacuum pump group includes an ion pump 31 and a molecular pump group 32. When measuring the gas absorption spectrum, in order to ensure that the air pressure of the ionization chamber 100 is constant, it is only necessary to turn on the molecular pump group 32 with a relatively slow pumping speed; , in order to quickly return the vacuum of the ionization chamber 100 to a normal state (better than 10 -9 torr), it is necessary to start the ion pump 31 with a faster pumping speed at the same time; after the vacuum returns to a normal state, the valve of the molecular pump group 32 can be closed .
金网4施加有第一负电压-HV1，以使其可用于收集X光与靶气体在电离腔室100内碰撞后产生的离子。The gold mesh 4 is applied with a first negative voltage -HV1 , so that it can be used to collect ions generated after X-rays collide with target gas in the ionization chamber 100 .
多通道电子倍增器5与金网4相对设置，以在两者之间形成电场，从而使得金网4收集的离子能够通过该电场的作用传送至多通道电子倍增器5，多通道电子倍增器5每接收到一个离子后输出一个离子信号。The multi-channel electron multiplier 5 is arranged opposite to the gold grid 4 to form an electric field between the two, so that the ions collected by the gold grid 4 can be transmitted to the multi-channel electron multiplier 5 by the effect of the electric field, and the multi-channel electron multiplier 5 An ion signal is output every time an ion is received.
加压及信号采集电路6用于向多通道电子倍增器5提供电压，同时采集多通道电子倍增器5输出的离子信号，并将采集到的离子信号向外输出。The pressurization and signal acquisition circuit 6 is used to provide voltage to the multi-channel electron multiplier 5 , collect ion signals output by the multi-channel electron multiplier 5 , and output the collected ion signals to the outside.
信号处理系统7用于接收加压及信号采集电路6输出的离子信号并根据该离子信号获取相应的电离吸收谱。The signal processing system 7 is used to receive the ion signal output by the pressurization and signal acquisition circuit 6 and obtain the corresponding ionization absorption spectrum according to the ion signal.
本发明的关键部件——多通道电子倍增器5、加压及信号采集电路6和信号处理系统7如图3所示。多通道电子倍增器5包括一阳极板54、以及相连的一前端微通道板51和一后端微通道板52，且前端微通道板51邻近金网4设置，后端微通道板52邻近阳极板54设置。其中，微通道板51、52是一种二维平面的真空探测器，通常被用来探测带电粒子(如电子或离子)或光子，其具有非常高的空间分辨和时间分辨率，在此被用作快计数系统的探头。为了提高增益，本发明的多通道电子倍增器5还包括连接在前端微通道板51与后端微通道板52之间的中间微通道板53，且三个微通道板51、52、53呈Z形排布，这种排布方式为本领域技术人员熟知的方式。当一定能量的入射离子被前端微通道板51探测时，将在前端微通道板51的通道壁上打出几个次级电子；然后，通道中的电势梯度使得电子加速获得能量，再次轰击中间微通道板53的通道壁，产生更多的电子；而后，到达后端微通道板52，产生比中间微通道板53更多的电子。最后，经三个微通道板51、52、53倍增后的电子束被铜制的阳极板54收集。应该理解，根据需要，前端微通道板51与后端微通道板52之间还可以连接多个中间微通道板53。The key components of the present invention—a multi-channel electron multiplier 5 , a pressurization and signal acquisition circuit 6 and a signal processing system 7 are shown in FIG. 3 . The multi-channel electron multiplier 5 comprises an anode plate 54, and a front end microchannel plate 51 and a rear end microchannel plate 52 connected, and the front end microchannel plate 51 is adjacent to the gold mesh 4, and the rear end microchannel plate 52 is adjacent to the anode Plate 54 is provided. Among them, the microchannel plates 51 and 52 are two-dimensional planar vacuum detectors, which are usually used to detect charged particles (such as electrons or ions) or photons, which have very high spatial resolution and time resolution, and are referred to here as Used as a probe for fast counting systems. In order to improve the gain, the multi-channel electron multiplier 5 of the present invention also includes an intermediate micro-channel plate 53 connected between the front-end micro-channel plate 51 and the rear-end micro-channel plate 52, and three micro-channel plates 51, 52, 53 are in the form of Z-shaped arrangement, this arrangement is well known to those skilled in the art. When incident ions of a certain energy are detected by the front-end micro-channel plate 51, several secondary electrons will be ejected on the channel wall of the front-end micro-channel plate 51; The channel wall of the channel plate 53 generates more electrons; then, it reaches the rear micro-channel plate 52 and generates more electrons than the middle micro-channel plate 53 . Finally, the electron beams multiplied by the three microchannel plates 51 , 52 , 53 are collected by the anode plate 54 made of copper. It should be understood that, according to needs, a plurality of intermediate microchannel plates 53 may also be connected between the front end microchannel plate 51 and the rear end microchannel plate 52 .
为了提高信噪比，本发明设计了如图3所示的加压及信号采集电路6和信号处理系统7。加压及信号采集电路6包括：第一分压电阻R1，其连接在一负电压源-HV2(HV2>HV1)与前端微通道板51之间；第二分压电阻R2，其连接在一正电压源+HV与后端微通道板52之间；第三分压电阻R3，其连接在第一分压电阻R1与第二分压电阻R2之间；第一电容C1，其一端连接在正电压源与第二分压电阻R2之间，另一端连接至信号处理系统7；由R4、C2组成的第一RC电路，其一端连接在第一分压电阻R1与第三分压电阻R3之间，另一端接地；以及由R5、C3组成的第二RC电路，其一端连接在第二分压电阻R2与第三分压电阻R3之间，另一端接地；其中，阳极板54连接至正电压源与第二分压电阻R2之间。其中，第一、第二RC电路分别用于收集前、后端微通道板52的信号，而阳极板54的信号通过第一电容C1送入信号处理系统7。In order to improve the signal-to-noise ratio, the present invention designs a pressurization and signal acquisition circuit 6 and a signal processing system 7 as shown in FIG. 3 . The pressurization and signal acquisition circuit 6 includes: the first voltage dividing resistor R1, which is connected between a negative voltage source-HV2 (HV 2 >HV 1 ) and the front-end microchannel plate 51; the second voltage dividing resistor R2, which is connected Between a positive voltage source +HV and the back-end microchannel plate 52; the third voltage dividing resistor R3 is connected between the first voltage dividing resistor R1 and the second voltage dividing resistor R2; the first capacitor C1 has one end Connected between the positive voltage source and the second voltage dividing resistor R2, the other end is connected to the signal processing system 7; the first RC circuit composed of R4 and C2, one end of which is connected between the first voltage dividing resistor R1 and the third voltage dividing resistor Between the resistors R3, the other end is grounded; and the second RC circuit composed of R5 and C3, one end of which is connected between the second voltage dividing resistor R2 and the third voltage dividing resistor R3, and the other end is grounded; wherein, the anode plate 54 Connect between the positive voltage source and the second voltage divider resistor R2. Wherein, the first and second RC circuits are respectively used to collect the signals of the front and rear micro-channel plates 52, and the signals of the anode plate 54 are sent to the signal processing system 7 through the first capacitor C1.
信号处理系统7包括依次连接的放大器71、甄别器72、计数器73以及数据处理器74，其中，放大器71用于为接收离子信号并对其进行放大后输出；甄别器72用于将放大器71输出的离子信号的电压幅度与预设阈值进行比较，并在电压幅度大于预设阈值时输出一计数信号，以便后续的计数器73进行计数，同时去除噪声；计数器73用于根据计数信号进行计数；数据处理器74(例如可以是计算机)用于根据计数器73的计数结果获取电离吸收谱。在优选的实施例中，放大器71和甄别器72集成在同一个电子学插件上。The signal processing system 7 includes an amplifier 71, a discriminator 72, a counter 73 and a data processor 74 connected in sequence, wherein the amplifier 71 is used to receive the ion signal and amplify it for output; the discriminator 72 is used to output the amplifier 71 The voltage amplitude of the ion signal is compared with the preset threshold, and a count signal is output when the voltage amplitude is greater than the preset threshold, so that the subsequent counter 73 counts and removes noise; the counter 73 is used for counting according to the count signal; data The processor 74 (for example, it may be a computer) is used to obtain the ionization absorption spectrum according to the counting result of the counter 73 . In a preferred embodiment, amplifier 71 and discriminator 72 are integrated on the same electronics package.
本发明的工作原理如下：从单色光狭缝出射的X光进入电离腔室100，使得电离腔室100内的靶气体电离产生电子离子对，正离子在金网4的负电压-HV1的作用下，迅速和电子分离，并且在金网上的电压-HV1与前端微通道板51上的电压-HV2形成的电场(HV2-HV1)作用下继续作加速运动，最终被阳极板54收集。阳极板54的计数对单色光能量的响应即为气体电离吸收谱。这种基于多通道电子倍增器5的电离腔室100大大改善了对光束线能量分辨率的评估结果。The working principle of the present invention is as follows: the X-ray emitted from the monochromatic light slit enters the ionization chamber 100, so that the target gas in the ionization chamber 100 is ionized to generate electron ion pairs, and the positive ions are generated at the negative voltage of the gold grid 4 -HV1. Under the action, it is rapidly separated from the electrons, and continues to accelerate under the action of the electric field (HV2-HV1) formed by the voltage-HV1 on the gold grid and the voltage-HV2 on the front microchannel plate 51, and is finally collected by the anode plate 54. The response of the counts of the anode plate 54 to the monochromatic light energy is the gas ionization absorption spectrum. The ionization chamber 100 based on the multi-channel electron multiplier 5 greatly improves the evaluation results of the beamline energy resolution.
实例1Example 1
为了测量MCP的工作性能及获取其最佳工作状态，在不改变其他条件的情况下，测量了MCP的计数随电离腔室内气压的变化曲线(如图4所示)，图中实线是线性拟合的结果，可以看到MCP在气压为10-7torr范围之内(正常工作气压)的工作线性很好。In order to measure the working performance of MCP and obtain its best working state, under the condition of not changing other conditions, the change curve of the count of MCP with the pressure in the ionization chamber was measured (as shown in Figure 4), the solid line in the figure is linear From the fitting results, it can be seen that the working linearity of the MCP is very good within the range of air pressure of 10 -7 torr (normal working air pressure).
实例2Example 2
利用基于MCP探测器的电离腔室，分别对氩气和氮气等气体的吸收谱进行了测量，分别获得了梦之线在对应能区的能量分辨率。如图5和6分别为氩气和氮气的吸收谱，可见，能量分辨本领(E/E)分别达到了10382@243eV和18000@400eV。Using the ionization chamber based on the MCP detector, the absorption spectra of gases such as argon and nitrogen were measured respectively, and the energy resolution of the dream line in the corresponding energy range was obtained respectively. Figures 5 and 6 show the absorption spectra of argon and nitrogen respectively. It can be seen that the energy resolution (E/E) reaches 10382@243eV and 18000@400eV respectively.
以上所述的，仅为本发明的较佳实施例，并非用以限定本发明的范围，本发明的上述实施例还可以做出各种变化。即凡是依据本发明申请的权利要求书及说明书内容所作的简单、等效变化与修饰，皆落入本发明的权利要求保护范围。What is described above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Various changes can also be made to the above embodiments of the present invention. That is, all simple and equivalent changes and modifications made according to the claims and description of the application of the present invention fall within the protection scope of the claims of the present invention.
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