CN219038801U - Chip fixing device for back detection of light-emitting microscope - Google Patents
Chip fixing device for back detection of light-emitting microscope Download PDFInfo
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- CN219038801U CN219038801U CN202223422249.0U CN202223422249U CN219038801U CN 219038801 U CN219038801 U CN 219038801U CN 202223422249 U CN202223422249 U CN 202223422249U CN 219038801 U CN219038801 U CN 219038801U
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Abstract
The utility model discloses a chip fixing device for back detection of a light-emitting microscope, which is applied to the technical field of light-emitting microscopes and comprises a base, a stop block and a slide block; the base is an annular frame-shaped base, and the bottom surface of the base is hollowed out; the stop block and the sliding block are long and are erected on the same side surface of the base at intervals, and the sliding block is movably connected with the base so that the sliding block can slide towards the stop block on the surface of the base; the baffle block faces one side of the sliding block, and the clamping grooves corresponding to the chips to be tested are formed in one side of the sliding block, which faces the baffle block, so that when the sliding block slides towards the baffle block, the chips to be tested are clamped through the clamping grooves, and the back surfaces of the chips to be tested are exposed. The chip is fixed through the clamping groove, the back of the chip is completely exposed, the use of the adhesive tape and the hot melt adhesive is avoided, and the influence on the detection of the back of the light emitting microscope can be avoided while the chip is fixed.
Description
Technical Field
The utility model relates to the technical field of light emission microscopes, in particular to a chip fixing device for back detection of a light emission microscope.
Background
Light-emitting microscopy is a very sensitive tool for locating chip defects. When a hierarchical structure fault exists in the chip, electrons are trapped by electron hole pairs or traps to release photons, and the photons are detected by a light emission microscope, so that positioning is realized. When a fault of a metal interconnection level exists in the chip, the metal is heated by laser scanning to change the resistance of the metal, and the resistance change of a fault point is different from that of a normal place, so that positioning is realized. With the continuous progress of process development, the metal layers of the chip are increased, which can cause the photon emitted by the fault point to be blocked, thereby affecting the failure positioning, so that the back positioning becomes a wide application. For increasingly small chip sizes (a few square millimeters), how to fix the chip for backside positioning becomes critical to impact failure analysis. The prior art solution is to fix the microchip on the glass slide with tape/hot melt.
However, in the prior art, the chip area is too small, and the test pads and structures are easily blocked by using the adhesive tape; the chip area is too small, and gaps are easily generated between the chip and the glass slide when the chip is stuck by the adhesive tape, so that the chip is inclined, and the focusing of a microscope is influenced; if the hot melt adhesive is used, the chip is required to be immersed in acetone to remove residual hot melt adhesive after the chip is peeled off, and the acetone is toxic; in addition, the hot melt adhesive is easy to generate bubbles, and if the bubbles are just in a target area, the positioning result is influenced; and the use of slides can result in loss of the optical signal emitted by the sample. How to provide a chip fixture for back side detection of light emitting microscopes, the possibility of ensuring the positioning accuracy of the backside is a critical issue for the skilled man.
Disclosure of Invention
The utility model aims to provide a chip fixing device for detecting the back of a light-emitting microscope, which can prevent the back detection process of the light-emitting microscope from being influenced while fixing a chip.
In order to solve the technical problems, the utility model provides a chip fixing device for detecting the back of a light emitting microscope, which comprises a base, a stop block and a sliding block;
the base is an annular frame-shaped base, and the bottom surface of the base is hollowed out;
the stop block and the sliding block are both long and are arranged on the same side surface of the base at intervals, and the sliding block is movably connected with the base so that the sliding block can slide towards the stop block on the surface of the base;
the stop block faces one side of the sliding block, and the side of the sliding block, which faces the stop block, is provided with a clamping groove corresponding to the chip to be tested, so that when the sliding block slides towards the stop block, the chip to be tested is clamped through the clamping groove, and the back surface of the chip to be tested is exposed.
Optionally, a protrusion facing the sliding block is arranged at the bottom of the side, facing the sliding block, of the stop block, and the side wall, facing the sliding block, of the stop block forms the clamping groove;
the bottom of the side, facing the stop block, of the sliding block is provided with a protrusion facing the stop block, and the clamping groove is formed by the protrusion and the side wall, facing the stop block, of the sliding block.
Optionally, an included angle between the side wall of the slider facing the side of the stop block and the protrusion is smaller than 90 degrees; the included angle between the side wall of the stop block facing one side of the sliding block and the bulge is smaller than 90 degrees.
Optionally, the height of the slider and the height of the stopper are both greater than the thickness of the chip to be tested.
Optionally, the stop block is fixedly connected with the base.
Optionally, the base is a rectangular frame-shaped base, the stop block and the sliding block are both arranged between the two long sides of the base in an erected mode.
Optionally, the axis of the sliding block is parallel to the axis of the stop block.
Optionally, the stop block and the sliding block are parallel to the wide edge of the base.
Optionally, the slider is magnetically connected with the base.
Optionally, the dog is fixed in the base middle part, the opposite both sides of dog all are provided with the slider.
The utility model provides a chip fixing device for detecting the back of a light emitting microscope, which comprises a base, a stop block and a sliding block, wherein the stop block is arranged on the base; the base is an annular frame-shaped base, and the bottom surface of the base is hollowed out; the stop block and the sliding block are long and are erected on the same side surface of the base at intervals, and the sliding block is movably connected with the base so that the sliding block can slide towards the stop block on the surface of the base; the baffle block faces one side of the sliding block, and the clamping grooves corresponding to the chips to be tested are formed in one side of the sliding block, which faces the baffle block, so that when the sliding block slides towards the baffle block, the chips to be tested are clamped through the clamping grooves, and the back surfaces of the chips to be tested are exposed.
The chip is fixed through the clamping groove, the back of the chip is completely exposed, the use of the adhesive tape and the hot melt adhesive is avoided, and the influence on the detection of the back of the light emitting microscope can be avoided while the chip is fixed.
Drawings
For a clearer description of embodiments of the utility model or of the prior art, the drawings that are used in the description of the embodiments or of the prior art will be briefly described, it being apparent that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic top view of a chip fixing device for detecting the back of a light-emitting microscope according to an embodiment of the present utility model;
FIG. 2 is a schematic elevational view of the structure of FIG. 1;
FIG. 3 is a schematic top view of a chip fixing device for detecting the back of a light emitting microscope according to an embodiment of the present utility model;
FIG. 4 is a schematic elevational view of the structure of FIG. 3;
FIG. 5 is a schematic diagram of the structure of the chip to be tested after the chip to be tested is fixed in FIG. 3;
fig. 6 is a schematic elevational view of the structure of fig. 5.
In the figure: 1. base, 2, dog, 3, slider, 4 draw-in groove.
Detailed Description
The core of the utility model is to provide a chip fixing device for back detection of a light emitting microscope. In the prior art, the microchip is fixed on the glass slide by using adhesive tape/hot melt adhesive. However, in the prior art, the chip area is too small, and the test pads and structures are easily blocked by using the adhesive tape; the chip area is too small, and gaps are easily generated between the chip and the glass slide when the chip is stuck by the adhesive tape, so that the chip is inclined, and the focusing of a microscope is influenced; if the hot melt adhesive is used, the chip is required to be immersed in acetone to remove residual hot melt adhesive after the chip is peeled off, and the acetone is toxic; in addition, the hot melt adhesive is easy to generate bubbles, and if the bubbles are just in a target area, the positioning result is influenced; and the use of slides can result in loss of the optical signal emitted by the sample.
The utility model provides a chip fixing device for detecting the back of a light-emitting microscope, which comprises a base, a stop block and a slide block; the base is an annular frame-shaped base, and the bottom surface of the base is hollowed out; the stop block and the sliding block are long and are erected on the same side surface of the base at intervals, and the sliding block is movably connected with the base so that the sliding block can slide towards the stop block on the surface of the base; the baffle block faces one side of the sliding block, and the clamping grooves corresponding to the chips to be tested are formed in one side of the sliding block, which faces the baffle block, so that when the sliding block slides towards the baffle block, the chips to be tested are clamped through the clamping grooves, and the back surfaces of the chips to be tested are exposed.
The chip is fixed through the clamping groove, the back of the chip is completely exposed, the use of the adhesive tape and the hot melt adhesive is avoided, and the influence on the detection of the back of the light emitting microscope can be avoided while the chip is fixed.
In order to better understand the aspects of the present utility model, the present utility model will be described in further detail with reference to the accompanying drawings and detailed description. It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic top view of a chip fixing device for detecting the back of a light emitting microscope according to an embodiment of the present utility model; fig. 2 is a schematic front view of fig. 1.
Referring to fig. 1 and 2, in an embodiment of the present utility model, a chip fixing device for back detection of a light emission microscope includes a base 1, a stopper 2, and a slider 3; the base 1 is an annular frame-shaped base 1, and the bottom surface of the base 1 is hollowed out; the stop block 2 and the sliding block 3 are both long and are arranged on the same side surface of the base 1 at intervals, and the sliding block 3 is movably connected with the base 1 so that the sliding block 3 can slide towards the stop block 2 on the surface of the base 1; the stop block 2 faces one side of the slide block 3, and the side of the slide block 3 facing the stop block 2 is provided with a clamping groove 4 corresponding to a chip to be tested, so that when the slide block 3 slides towards the stop block 2, the chip to be tested is clamped through the clamping groove 4, and the back surface of the chip to be tested is exposed.
Above-mentioned base 1 wholly is a frame-like structure, and the bottom surface fretwork of this base 1, and the front and the back of this base 1 all can not be closed under the general circumstances to direct exposure awaits measuring the chip, guarantees measurement accuracy.
The block 2 and the slider 3 are elongated and are arranged on the same side surface of the base 1 at intervals. As the name implies, the slide 3 is movably connected with the base 1, so that the distance between the stop block 2 and the slide 3 can be changed when the slide 3 is moved. The stop block 2 and the slide block 3 are arranged on the same side surface of the base 1, so that the slide block 3 can clamp a chip to be measured for measurement. Specifically, the slider 3 may slide toward the stop block 2 on the surface of the base 1, so as to change the distance between the stop block 2 and the slider 3, thereby clamping the chip to be measured for measurement. In the embodiment of the present utility model, the number of the stoppers 2 and the sliders 3 is not particularly limited. When a plurality of stoppers 2 and sliders 3 are required to be arranged, the stoppers are required to be arranged at intervals.
Specifically, in the embodiment of the present utility model, the side of the block 2 facing the block 3 and the side of the block 3 facing the block 2 are both provided with the clamping groove 4 corresponding to the chip to be tested, so that when the block 3 slides toward the block 2, the chip to be tested is clamped by the clamping groove 4, and the back surface of the chip to be tested is exposed.
The depth of the clamping groove 4 is usually shallow, and when the chip to be tested is clamped through the clamping groove 4, only the edge of the chip to be tested is clamped, and the back of the chip to be tested is exposed, so that shielding can not be generated on the surface of the chip to be tested.
Specifically, in the embodiment of the present utility model, a protrusion facing the slider 3 is disposed at the bottom of the side of the stopper 2 facing the slider 3, and the clamping groove 4 is formed with the side wall of the side of the stopper 2 facing the slider 3; the bottom of the side, facing the stop block 2, of the sliding block 3 is provided with a protrusion facing the stop block 2, and the clamping groove 4 is formed with the side wall, facing the stop block 2, of the sliding block 3.
The clamping groove 4 is specifically a clamping groove 4 formed by a protrusion arranged at the bottom of the sliding block 3 or the stop block 2 and the side wall thereof. The bottom of the surface of the block 2 facing the slide block 3 is provided with a bulge facing the slide block 3, and a clamping groove 4 can be formed on the surface of the block 2 by combining the block 2 facing the side wall of the slide block 3; the bottom of the side surface of the corresponding sliding block 3 facing the stop block 2 is provided with a protrusion facing the stop block 2, and a clamping groove 4 can be formed on the surface of the sliding block 3 by combining the side wall of the sliding block 3 facing the stop block 2. The two clamping grooves 4 are matched with each other, so that a chip to be tested can be fixed.
Further, in the embodiment of the present utility model, in order to ensure that the card slot 4 can fix the chip to be tested relatively stably, an included angle between the side wall of the slider 3 facing the stop block 2 and the protrusion is smaller than 90 °; the included angle between the side wall of the stop block 2 facing the side of the sliding block 3 and the bulge is smaller than 90 degrees. The included angle between the side wall of the clamping groove 4 and the bulge is an acute angle, and the chip to be tested can be firmly fixed through the structure.
Further, the height of the slider 3 and the height of the stopper 2 are both greater than the thickness of the chip to be tested. On the basis of the structure of the clamping groove 4, the height of the sliding block 3 and the height of the stop block 2 are further set to be larger than the thickness of the chip to be tested, and the stop block 2 and the sliding block 3 with different heights are specifically set to the chips to be tested with different thicknesses, so that the height of the sliding block 3 and the height of the stop block 2 are both larger than the thickness of the chip to be tested, and the chip to be tested is fixed more firmly.
The chip fixing device for detecting the back of the light emitting microscope provided by the embodiment of the utility model comprises a base 1, a stop block 2 and a slide block 3; the base 1 is an annular frame-shaped base 1, and the bottom surface of the base 1 is hollowed out; the stop block 2 and the slide block 3 are long and are erected on the same side surface of the base 1 at intervals, and the slide block 3 is movably connected with the base 1 so that the slide block 3 can slide towards the stop block 2 on the surface of the base 1; the baffle block 2 faces one side of the sliding block 3, and the side of the sliding block 3 facing the baffle block 2 is provided with a clamping groove 4 corresponding to the chip to be tested, so that when the sliding block 3 slides towards the baffle block 2, the chip to be tested is clamped through the clamping groove 4, and the back surface of the chip to be tested is exposed.
The chip is fixed through the clamping groove 4, the back of the chip is completely exposed, the use of adhesive tapes and hot melt adhesives is avoided, and the influence on the detection of the back of the light emitting microscope can be avoided while the chip is fixed.
The specific details of the chip fixing device for back detection of light-emitting microscope according to the present utility model will be described in the following embodiments of the utility model.
Referring to fig. 3 to 6, fig. 3 is a schematic top view of a chip fixing device for detecting the back of a light emitting microscope according to an embodiment of the present utility model; FIG. 4 is a schematic elevational view of the structure of FIG. 3; FIG. 5 is a schematic diagram of the structure of the chip to be tested after the chip to be tested is fixed in FIG. 3; fig. 6 is a schematic elevational view of the structure of fig. 5.
The embodiment of the present utility model is different from the embodiment of the present utility model, and further defines a chip fixing device for detecting the back of the light emitting microscope based on the embodiment of the present utility model, and the rest of the contents are described in detail in the embodiment of the present utility model, which is not repeated here.
Referring to fig. 3 and 4, in the embodiment of the present utility model, the stopper 2 is fixedly connected to the base 1. In order to facilitate the operation, the above-mentioned block 2 specifically needs the fixed connection of the base 1, only set up the movable connection of the slide block 3 and base 1, can be convenient for fix the chip to be measured. Furthermore, the base 1 is a rectangular frame-shaped base 1, and the stop block 2 and the sliding block 3 are respectively arranged between two long sides of the base 1.
The base 1 is specifically in a rectangular frame structure, and is matched with the strip-shaped stop block 2 and the sliding block 3, so that the stop block 2 and the sliding block 3 are conveniently erected on the surface of the base 1. Specifically, the stop block 2 and the slide block 3 are all erected between two long sides of the base 1, and at this time, the slide block 3 can specifically slide along the direction of the extension line of the long side of the base 1, so as to change the distance between the slide block 3 and the stop block 2. In order to facilitate the fixing of the chip to be tested by the block 2 and the slider 3, the axis of the slider 3 may be parallel to the axis of the block 2. Accordingly, in order to increase the movement range of the slider 3, the stopper 2 and the slider 3 may be both parallel to the wide side of the base 1.
Specifically, in the embodiment of the present utility model, the slider 3 is magnetically connected to the base 1. That is, the materials of the base 1 and the slider 3 may be specifically a permanent magnetic material and a metal material, and the slider 3 is specifically magnetically connected to the base 1, so that the slider 3 may slide on the surface of the base 1. In general, the base 1 is made of permanent magnetic material, and the sliding block 3 which adsorbs the metal material is slidably connected.
Preferably, in the embodiment of the present utility model, the stop block 2 is fixed at the middle of the base 1, and the sliding blocks 3 are disposed on two opposite sides of the stop block 2. At this time, the whole fixing device comprises two sliding blocks 3 which are respectively positioned at the left side and the right side of the stop block 2. At this time, the two sides of the stop block 2 are required to be provided with the clamping grooves 4, and the two side sliding blocks 3 are provided with the clamping grooves 4 towards one side of the stop block 2, so that the chip to be measured can be fixed at the left and right sides of the stop block 2 for measurement, and a plurality of chips to be measured can be measured simultaneously. In general, the height of the corresponding block 2 is identical to the height of the slider 3, and the inclination angles of the opposite side walls of the block 2 and the slider 3 are generally the same.
Referring to fig. 5 and 6, in use, the chip fixing device for back detection of the light emission microscope is first placed into the sample groove formed by the clamping groove 4 between the stopper 2 and the slider 3 with tweezers. The number of the chips to be tested may be plural, and is not particularly limited herein.
One side of the back of the chip to be tested is tightly attached to the side angle of the stop block 2, then the slide block 3 is pushed to slowly slide towards the stop block 2, and finally the other side of the chip to be tested is tightly attached to the side angle of the slide block 3 and is fixed in the sample groove; when the chip to be tested needs to be fixed on two sides of the stop block 2, one side of the back of the chip to be tested is clung to the other side angle of the stop block 2, then the slide block 3 is pushed to slowly slide towards the stop block 2, and finally the other side of the chip to be tested is clung to the side angle of the slide block 3 and is fixed in the sample groove.
Finally, the sliding block 3 is continuously slid, no gap is formed between the side angle and the chip to be tested, the sample can be gently pushed by using forceps, and the sample is confirmed to be well fixed, so that the fixing procedure of the sample is completed.
The chip fixing device for detecting the back of the light emitting microscope provided by the embodiment of the utility model horizontally fixes the chip to be detected with small size, and ensures the integrity and the accuracy of a back failure positioning image; all structures can be exposed when the chip to be tested is fixed, so that omission of failure points is prevented; the back of the chip to be tested is directly exposed under the lens, so that the loss of the optical signal at the failure point is reduced; multiple chips to be tested can be fixed simultaneously, and failure positioning efficiency is improved; the method is free from toxic chemicals, safe and pollution-free.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, so that the same or similar parts between the embodiments are referred to each other.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The above description is made in detail of a chip fixing device for back detection of a light emitting microscope. The principles and embodiments of the present utility model have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present utility model and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the utility model can be made without departing from the principles of the utility model and these modifications and adaptations are intended to be within the scope of the utility model as defined in the following claims.
Claims (10)
1. The chip fixing device for detecting the back of the light emitting microscope is characterized by comprising a base, a stop block and a sliding block;
the base is an annular frame-shaped base, and the bottom surface of the base is hollowed out;
the stop block and the sliding block are both long and are arranged on the same side surface of the base at intervals, and the sliding block is movably connected with the base so that the sliding block can slide towards the stop block on the surface of the base;
the stop block faces one side of the sliding block, and the side of the sliding block, which faces the stop block, is provided with a clamping groove corresponding to the chip to be tested, so that when the sliding block slides towards the stop block, the chip to be tested is clamped through the clamping groove, and the back surface of the chip to be tested is exposed.
2. The chip fixing device for back surface detection of light emitting microscope according to claim 1, wherein a protrusion facing the slider is provided at a bottom of the side of the stopper facing the slider, and the card slot is formed with a side wall of the side of the stopper facing the slider;
the bottom of the side, facing the stop block, of the sliding block is provided with a protrusion facing the stop block, and the clamping groove is formed by the protrusion and the side wall, facing the stop block, of the sliding block.
3. The chip fixing apparatus for back surface detection of light emitting microscope according to claim 2, wherein an angle between a side wall of the slider facing the stopper and the projection is smaller than 90 °; the included angle between the side wall of the stop block facing one side of the sliding block and the bulge is smaller than 90 degrees.
4. The chip holder for light-emitting microscope back side inspection according to claim 3, wherein the height of the slider and the height of the stopper are both larger than the thickness of the chip to be inspected.
5. The chip holder for back side detection of light emitting microscope according to claim 1, wherein the stopper is fixedly connected to the base.
6. The device of claim 5, wherein the base is a rectangular frame-shaped base, and the stopper and the slider are both disposed between two long sides of the base.
7. The chip holder for back side detection of light-emitting microscope according to claim 6, wherein an axis of the slider and an axis of the stopper are parallel to each other.
8. The chip holder for back side detection of light emitting microscope of claim 7, wherein the stopper and the slider are both parallel to a broad side of the base.
9. The chip holder for back side detection of light emitting microscope as set forth in claim 1, wherein said slider is magnetically attached to said base.
10. The chip holder for back side detection of light-emitting microscope according to any one of claims 1 to 9, wherein the stopper is fixed to a central portion of the base, and the slider is provided on opposite sides of the stopper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223422249.0U CN219038801U (en) | 2022-12-20 | 2022-12-20 | Chip fixing device for back detection of light-emitting microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223422249.0U CN219038801U (en) | 2022-12-20 | 2022-12-20 | Chip fixing device for back detection of light-emitting microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219038801U true CN219038801U (en) | 2023-05-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223422249.0U Active CN219038801U (en) | 2022-12-20 | 2022-12-20 | Chip fixing device for back detection of light-emitting microscope |
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| Country | Link |
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| CN (1) | CN219038801U (en) |
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- 2022-12-20 CN CN202223422249.0U patent/CN219038801U/en active Active
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