CN219017915U - Terahertz regulation and control super surface based on graphene - Google Patents

Abstract

The utility model provides a terahertz regulation and control super-surface based on graphene, which comprises the following components: a first subsurface and a second subsurface; the first super surface comprises a first electric control structure and a plurality of first micro-nano structures; the second super surface comprises a second electric control structure and a plurality of second micro-nano structures; the first electronic control structure comprises a first graphene layer, a first electrode and a second electrode; the first electrode and the second electrode are respectively positioned at two sides of the first graphene layer and are used for providing a first voltage for the first graphene layer; the second electronic control structure comprises a second graphene layer, a third electrode and a fourth electrode; the third electrode and the fourth electrode are positioned at two sides of the second graphene layer and are used for providing a second voltage for the second graphene layer. The application provides a voltage adjustable characteristic of graphene in a terahertz wave band, which is used as a selection switch for selecting a micro-nano structure in a super surface, so that the terahertz wave can be regulated and controlled under different voltage regulation and control, for example, the propagation direction of the terahertz wave can be regulated and controlled, and the adjustability of the super surface is enhanced.

Description

Terahertz regulation and control super surface based on graphene

Technical Field

The utility model relates to the technical field of optical devices, in particular to a terahertz regulation and control super-surface based on graphene.

Background

The super surface is used as a sub-wavelength structure arranged on a two-dimensional surface, and the surface of the super surface is provided with a plurality of micro-nano structures. The super-surface technology has been rapidly developed in recent years because of the special function of locally changing the amplitude, polarization and phase of the incident beam, and has attracted much attention.

Terahertz waves generally refer to electromagnetic waves having a frequency in the range of 0.1 to 10THz (wavelength of 0.03 to 3 mm), and are a transition region between electronics and photonics, between microwave millimeter waves and infrared rays. Terahertz waves have excellent performance and important research values and application prospects in basic research subjects such as physics, chemistry, life and the like, and application subjects such as medical imaging, safety inspection, product detection, space communication, weapon guidance and the like. The conventional material is difficult to realize electromagnetic response in a terahertz wave band, the blank is made up by the existence of the super surface, a terahertz device with excellent performance can be constructed, and the detection and effective manipulation of terahertz waves are realized.

After the existing super-surface is manufactured, the phase gradient change direction of the micro-nano structure is fixed, the effect of terahertz incident waves passing through the super-surface is fixed under the condition that the placement mode of the super-surface is not changed, for example, the deflection direction of terahertz waves is fixed, the micro-nano structure cannot be changed, and the flexibility is lacking.

Disclosure of Invention

In view of this, the application proposes to utilize the voltage adjustable characteristic of graphene in terahertz wave band, use graphene as the selector switch of the micro-nano structure of selecting different deflection effects in the super surface, realize the regulation and control of terahertz wave propagation direction under the voltage regulation and control.

A graphene-based terahertz regulation and control super-surface, comprising: a first and a second coplanar supersurface;

the first super surface comprises a first electric control structure and a plurality of first micro-nano structures, and the plurality of first micro-nano structures are periodically arranged on one side of the first electric control structure;

the second super surface comprises a second electric control structure and a plurality of second micro-nano structures, and the second micro-nano structures are periodically arranged on one side of the second electric control structure;

the phase distribution of the first micro-nano structures and the second micro-nano structures is different;

the first electronic control structure comprises a first graphene layer, a first electrode and a second electrode; the first electrode and the second electrode are respectively positioned at two sides of the first graphene layer and are used for providing a first voltage for the first graphene layer;

the second electronic control structure comprises a second graphene layer, a third electrode and a fourth electrode; the third electrode and the fourth electrode are respectively positioned at two sides of the second graphene layer and are used for providing a second voltage for the second graphene layer.

Optionally, the phase change directions of the plurality of first micro-nano structures and the plurality of second micro-nano structures are different.

Optionally, multiple layers of the first electric control structures are stacked and arranged, and a gap is formed between the first electric control structures of two adjacent layers;

the second supersurface comprises a plurality of layers of the second electronically controlled structure; the second electric control structures are stacked and arranged in multiple layers, and gaps are reserved between the second electric control structures of two adjacent layers.

Optionally, the conditioning supersurface further comprises a substrate; the first electric control structure is embedded in the substrate; the second electrical control structure is embedded in the substrate.

Optionally, the material of the substrate includes, but is not limited to, quartz glass, crown glass, flint glass.

Optionally, the first electrode and the second electrode are both located at edges of the first graphene layer and are located at two opposite ends of the first graphene layer respectively;

the third electrode and the fourth electrode are both positioned at the edge of the second graphene layer and are respectively positioned at two opposite ends of the second graphene layer.

Optionally, the second electrode and the fourth electrode are grounded.

Optionally, the first electrode, the second electrode, the third electrode and the fourth electrode are all in strip structures.

Optionally, the length directions of the first electrode, the second electrode, the third electrode and the fourth electrode are all perpendicular to the dividing line between the first super surface and the second super surface.

Optionally, the first electrode and the second electrode are positioned at two ends of the first graphene layer along the dividing line; the third electrode and the fourth electrode are positioned at two ends of the second graphene layer along the dividing line.

Optionally, in the case that the first electrical control structure is coplanar with the second electrical control structure, one of the first electrode and the second electrode is coplanar with one of the third electrode and the fourth electrode, and is electrically connected.

Optionally, the first micro-nanostructure is coplanar with the second micro-nanostructure.

Optionally, the number of the first metasurface and the second metasurface is plural.

Optionally, the materials of the first electrode, the second electrode, the third electrode, and the fourth electrode each comprise gold.

Optionally, the first voltage is different from the second voltage.

Compared with the prior art, the embodiment of the utility model has the following beneficial effects:

the utility model combines the voltage adjustable characteristic of graphene in the terahertz wave band, is used as a selection switch for selecting the micro-nano structure in the super surface, can realize the adjustment and control of terahertz waves under different voltage adjustment and control, for example, can adjust and control the propagation direction of the terahertz waves, and enhances the adjustability of the super surface. The graphene has a high voltage response speed, so that the input terahertz waves can be quickly regulated.

In order to make the above objects, features and advantages of the present utility model more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a schematic diagram of a conditioning subsurface structure in accordance with an embodiment of the present utility model;

FIG. 2 shows a schematic diagram of the connection between a first electrically controlled structure, a second electrically controlled structure and a substrate provided by an embodiment of the present utility model;

fig. 3 is a schematic diagram showing a state of a first electric control structure according to an embodiment of the present utility model;

fig. 4 is a schematic diagram showing a second electric control structure according to an embodiment of the present utility model;

FIG. 5 shows a graph of voltage versus terahertz transmittance provided by an embodiment of the utility model;

fig. 6 is a schematic diagram showing a structure in which both the first electronic control structure and the second electronic control structure are opaque;

fig. 7 is a schematic diagram showing a structure in which a first electrically controlled structure is transparent and a second electrically controlled structure is opaque;

fig. 8 is a schematic diagram showing a structure in which a second electrically controlled structure is transparent and a first electrically controlled structure is opaque;

fig. 9 shows a schematic diagram of a first micro-nano structure and a second micro-nano structure arranged at intervals according to an embodiment of the present utility model;

FIG. 10 is a schematic diagram of a different micro-nano structure provided by an embodiment of the present utility model;

fig. 11 shows a schematic dimensional diagram of a micro-nano structure provided by an embodiment of the utility model when the micro-nano structure is a cross column.

Reference numerals illustrate:

110. a first supersurface; 111. a second supersurface; 112. a first micro-nano structure; 113. a second micro-nano structure; 114. a first graphene layer; 115. a first electrode; 116. a second electrode; 117. a second graphene layer; 118. a third electrode; 119. a fourth electrode; 210. a first electrical control structure; 211. a second electrical control structure; 212. a substrate.

Detailed Description

In order to better understand the above technical solutions, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The embodiment of the utility model provides a terahertz regulation and control super-surface based on graphene, which is shown in fig. 1, and comprises a first super-surface 110 and a second super-surface 111, wherein the two super-surfaces are coplanar. The first supersurface 110 comprises a first electronically controlled structure 210 and a first micro-nano structure 112; the second supersurface 111 comprises a second electronically controlled structure 211 and a second micro-nano structure 113. The plurality of first micro-nano structures 112 and the plurality of second micro-nano structures 113 have different phase distributions. For example, the phase change directions of the two are different, so that the terahertz waves have different deflection directions when passing through the first electric control structure and the second electric control structure. The control of the terahertz wave direction can be controlled by switching the first electric control structure and the second electric control structure.

Also, referring to fig. 1, the first electronic control structure 210 includes a first graphene layer 114, a first electrode 115, and a second electrode 116 (not visible in fig. 1); the first electrode 115 and the second electrode 116 are respectively located at two sides of the first graphene layer 114, and are used for providing a first voltage to the first graphene layer 114; the second electronic control structure 211 includes a second graphene layer 117, a third electrode 118, and a fourth electrode 119; the third electrode 118 and the fourth electrode 119 are respectively located at two sides of the second graphene layer 117 and are used for providing a second voltage to the second graphene layer 117. In fig. 1, the first electrode 115 and the second electrode 116 are respectively located on the upper and lower sides of the first graphene layer 114, the third electrode 118 and the fourth electrode 119 are respectively located on the upper and lower sides of the second graphene layer 117, and the second electrode 116 is not shown in fig. 1 due to the presence of shielding. Optionally, the materials of the first electrode 115, the second electrode 116, the third electrode 118, and the fourth electrode 119 each include gold.

The micro-nano structure may be directly located on the electrical control structure, for example, the first micro-nano structure 112 is directly located on the first electrical control structure 210.

Optionally, referring to fig. 2, the conditioning supersurface further comprises a substrate 212; the first and second electronic control structures 210 and 211 are embedded in the substrate 212 such that the micro-nano structure (including the first and second micro-nano structures) may be disposed on the substrate 212. For example, the material of the substrate 212 includes, but is not limited to, quartz glass, crown glass, flint glass, and the like. Micro-nano structure selectable materials include silicon nitride, fused quartz, gallium nitride, amorphous silicon, crystalline silicon, hydrogenated amorphous silicon and the like.

In addition, the first electronic control structure 210 and the second electronic control structure 211 may be multiple layers in the embodiment of the present utility model. For example, referring to fig. 3 and 4, in the embodiment of the present utility model, the number of layers of the first electric control structure 210 is two, and the number of layers of the second electric control structure 211 is two.

Referring to fig. 3 and 4, in the embodiment of the present utility model, the first electric control structure 210 with two layers and the second electric control structure 211 with two layers are stacked. Because of the excellent conductivity of graphene, gaps are required between the stacked first electrical control structures and between the stacked second electrical control structures in order to avoid the mutual adhesion of the first graphene layers 114 and the second graphene layers 117. For example, a transparent and insulating dielectric layer is arranged between two adjacent first electric control structures, and a transparent and insulating dielectric layer is also arranged between two adjacent second electric control structures.

Referring to fig. 5, in the embodiment of the present utility model, there are two stages between the transmittance of graphene and the applied voltage:

the first stage: when the voltage value is negative, the larger the value of the voltage is, the higher the transmittance of the graphene is, and the transmittance reaches the maximum value when the voltage reaches the zero crossing point. The voltage at this stage has a positive correlation with the transmittance of graphene.

And a second stage: after the value of the voltage is larger than the zero crossing point, the transmissivity of the graphene starts to gradually decrease along with the increase of the voltage until the voltage reaches 4V, and most of light rays can be isolated by the graphene. At this time, the transmittance of the graphene reaches the minimum value (when the voltage value is-4V, the transmittance of the graphene can also reach the minimum value), and a negative correlation is formed between the voltage and the transmittance; as shown in fig. 5, the zero point of the voltage is the peak of the curve in the graph, and the corresponding voltage takes on zero value. When the voltage value is in the range from-4V to 0V, the transmittance of the graphene is in an ascending state.

As shown in fig. 5, under the regulation and control of the voltage 0V and the higher voltage (for example, 4V), the transmittance of the graphene to the terahertz wave can be changed, so that the transmittance of the first and second super surfaces 110 and 111 can be changed, the functions of changing the two super surfaces can be realized, and the terahertz wave can have different effects after passing through the terahertz regulation and control super surfaces.

Taking the case that the terahertz regulation and control super-surface includes two layers of electric control structures as an example, referring to fig. 6, terahertz waves are emitted from above, the terahertz waves pass through the substrate 212 to reach the first graphene layer 114 of the first electric control structure and the second graphene layer 117 of the second electric control structure, and the transmittance of the two graphene layers can be controlled by controlling the voltages applied to the two graphene layers (i.e., the first voltage and the second voltage described above), so that whether the terahertz waves are allowed to pass through can be controlled. For example, if the first voltage and the second voltage are both higher voltages, for example, both are 4V, based on fig. 5, it can be seen that the transmittance of the first graphene layer 114 and the second graphene layer 117 is about 0.2, and the controlled super surface is in an off state, i.e., an opaque state, and the terahertz wave cannot pass through.

In addition, in the embodiment of the present utility model, the two electrical control structures are independently controlled, that is, the first voltage is independently provided to the first graphene layer 114 and the second voltage is provided to the second graphene layer 117, which are not mutually affected. Because the phase distributions of the first and second super-surfaces 110 and 111 are different, the terahertz regulation super-surface can have different functions by independently controlling the two graphene layers.

In an embodiment of the utility model, the first voltage and the second voltage are different. Taking the example that the phase change directions of the first micro-nano structures 112 and the second micro-nano structures 113 are different. In the embodiment of the present utility model, the first voltage applied to the first graphene layer 114 is 0 (for example, the potentials of the first electrode 115 and the second electrode 116 are both 0), and the second voltage applied to the second graphene layer 117 is 4V (for example, the potential of the third electrode 118 is 4V, and the potential of the fourth electrode 119 is 0V). Referring to fig. 7, at this time, the first graphene layer 114 in the first electric control structure 210 of the upper and lower double layers exhibits a larger transmittance for the terahertz wave, and the incident wave of the terahertz wave will reach the first micro-nano structure 112 through the first graphene layer 114 of the double layers and deflect to the left under the phase regulation of the first micro-nano structure 112. Since the second graphene layer 117 in the upper and lower double-layer second electric control structure 211 still applies the forward voltage, the incident wave of the terahertz wave will not transmit, and the second micro-nano structure 113 does not function at this time, so that the control of the terahertz wave to the left by the ultra-surface switch is realized.

Similarly, referring to fig. 8, in the embodiment of the present utility model, the first voltage applied to the first graphene layer 114 is 4V (for example, the potential of the first electrode 115 is 4V, the potential of the second electrode 116 is 0), the second voltage applied to the second graphene layer 117 is 0V (for example, the potentials of the third electrode 118 and the fourth electrode 119 are 0V), and the terahertz incident wave passes through the second graphene layer 117 of the second electric control structure 211 to reach the second micro-nano structure 113, and is deflected rightward under the phase regulation of the second micro-nano structure 113, so that the control of the terahertz wave by the subsurface switch is implemented to deflect rightward.

In the embodiment of the utility model, the terahertz regulation and control super-surface combines the voltage adjustable characteristic of graphene in the terahertz wave band, and the first graphene layer 114 and the second graphene layer 117 are used as the selection switches for selecting the micro-nano structure in the terahertz wave band, so that the regulation and control of terahertz waves under different voltage regulation and control can be realized, for example, the propagation direction of the terahertz waves can be regulated and controlled, and the adjustability of the super-surface is enhanced. The graphene has a high voltage response speed, so that the input terahertz waves can be quickly regulated. And, through applying different first voltage, second voltage to two kinds of graphite alkene layers, can select the micro-nano structure that plays different modulation effect, and then can realize the regulation and control of terahertz wave in two kinds of propagation directions.

In addition, as shown in fig. 5, the transmittance adjustment range of the single graphene layer to the terahertz wave is small, and the ratio of the maximum transmittance to the minimum transmittance is 1:0.2. The embodiment of the utility model can improve the ratio of maximum transmittance to minimum transmittance by utilizing the multi-layer electric control structure. For example, the electrical control structure can be a double layer, the ratio of the maximum transmittance to the minimum transmittance of the electrical control structure adopting two layers is 1:0.04, and the ratio of the maximum transmittance to the minimum transmittance of the electrical control structure of the double layer is greatly improved compared with that of the electrical control structure of a single layer.

Alternatively, as shown in fig. 1, the first micro-nano structure 112 and the second micro-nano structure 113 are coplanar, i.e. the two micro-nano structures may be located on the same side, for example, on the upper side of the substrate 212, so as to facilitate processing.

Alternatively, as shown in fig. 1-4, the first electrode 115 and the second electrode 116 are located at edges of the first graphene layer 114, and are located at two opposite ends of the first graphene layer 114 respectively; the third electrode 118 and the fourth electrode 119 are located at edges of the second graphene layer 117, and are located at two opposite ends of the second graphene layer 117 respectively. Through setting up two electrodes at the opposite end edge on graphene layer, can provide even voltage to whole graphene layer, conveniently realize whole regulation and control.

Alternatively, in this embodiment, for two coplanar electronic control structures (i.e., the first and second coplanar electronic control structures 210 and 211), two coplanar electrodes may be connected, i.e., one of the first and second electrodes 115 and 116 is electrically connected to one of the third and fourth electrodes 118 and 119, and the two coplanar electrodes have the same electric potential, so only the voltages applied to the other two electrodes need to be controlled. For example, as shown, the second electrode 116 and the fourth electrode 119 are coplanar and electrically connected, and may be in a unitary structure, i.e., they are one electrode; at this time, the first electrode 115 is controlled to control the first voltage, and the third electrode 118 is controlled to control the second voltage. Optionally, the second electrode 116 and the fourth electrode 119 are grounded, so that the control circuit can be further simplified.

Optionally, in the embodiment of the present utility model, the first electrode 115, the second electrode 116, the third electrode 118 and the fourth electrode 119 are all in strip structures, and the length directions of the first electrode 115 to the fourth electrode 119 are all perpendicular to the dividing line between the first super surface 110 and the second super surface 111. As shown in fig. 1, there is a boundary between the first front surface 110 on the left side and the second front surface 111 on the right side, and the electrodes in this embodiment are arranged with reference to the boundary. For example, the first electrode 115 and the second electrode 116 are located at two ends of the first graphene layer 114 along the dividing line; the third electrode 118 and the fourth electrode 119 are positioned at both ends of the second graphene layer 117 along the dividing line.

Further alternatively, as shown in fig. 9, the number of the first and second super surfaces 110 and 111 is plural, and the first and second super surfaces 110 and 111 are staggered in a direction perpendicular to a boundary line between the first and second super surfaces 110 and 111. Fig. 9 shows two first metasurfaces 110 and two second metasurfaces 111. Through setting up a plurality of super surfaces, can make terahertz wave more evenly permeate this terahertz regulation and control super surface.

Referring to fig. 10, the micro-nano structure may be a polarization-dependent structure or a polarization-independent structure, and when the micro-nano structure is a structure such as a cylinder, a square column, a cross column, etc., the micro-nano structure is a polarization-independent structure, and such a structure applies a propagation phase to incident light; when the micro-nano structure is an elliptic cylinder and other structures, the micro-nano structure is a polarization-related structure, and the structure applies a geometric phase to terahertz incident waves with specific polarization.

Further, referring to fig. 11, in the embodiment of the present utility model, the micro-nano structures on the first and second super surfaces are nano cross pillars; the substrate of the regulating super surface is a quartz glass layer of 20um (the refractive index of quartz glass is 1.45); the height h of the cross column is 120um, the arm length of the cross column is a, the arm width of the cross column is b, the material of the cross column is silicon (refractive index is 3.64), the period P of the cross column is 100um, and the cross column is distributed in a regular hexagon shape; the following table shows the phase change conditions of the cross pillars with different arm lengths a and arm widths b when the cross pillars form the regulating and controlling super surface, 1THz input waves are incident from the surface of the substrate and transmitted out of the cross pillars, so that phase coverage from-126.8 degrees to 178.8 degrees is realized, and meanwhile, the transmittance is higher.

The foregoing is merely a specific implementation of the embodiment of the present utility model, but the protection scope of the embodiment of the present utility model is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the embodiment of the present utility model, and the changes or substitutions are covered by the protection scope of the embodiment of the present utility model. Therefore, the protection scope of the embodiments of the present utility model shall be subject to the protection scope of the claims.

Claims (15)

1. Terahertz regulation and control super surface based on graphite alkene, characterized by, include: a first (110) and a second (111) coplanar supersurfaces;

the first super surface (110) comprises a first electric control structure (210) and a plurality of first micro-nano structures (112), and the plurality of first micro-nano structures (112) are periodically arranged on one side of the first electric control structure (210);

the second super surface (111) comprises a second electric control structure (211) and a plurality of second micro-nano structures (113), and the plurality of second micro-nano structures (113) are periodically arranged on one side of the second electric control structure (211);

-a plurality of said first micro-nano structures (112) and a plurality of said second micro-nano structures (113) having different phase distributions;

the first electrical control structure (210) comprises a first graphene layer (114), a first electrode (115) and a second electrode (116); the first electrode (115) and the second electrode (116) are respectively positioned at two sides of the first graphene layer (114) and are used for providing a first voltage for the first graphene layer (114);

the second electronic control structure (211) comprises a second graphene layer (117), a third electrode (118) and a fourth electrode (119); the third electrode (118) and the fourth electrode (119) are respectively located at two sides of the second graphene layer (117) and are used for providing a second voltage for the second graphene layer (117).

2. The graphene-based terahertz regulation super-surface according to claim 1, wherein the plurality of first micro-nano structures (112) and the plurality of second micro-nano structures (113) differ in the direction of phase change.

3. The graphene-based terahertz regulation and control super surface of claim 1, wherein the first super surface (110) comprises multiple layers of the first electrical control structure (210); multiple layers of the first electric control structures (210) are stacked and arranged, and gaps are reserved between the first electric control structures (210) of two adjacent layers;

-said second supersurface (111) comprises a plurality of layers of said second electronically controlled structure (211); the second electric control structures (211) are stacked and arranged in multiple layers, and gaps are reserved between the second electric control structures (211) of two adjacent layers.

4. The graphene-based terahertz regulation super surface of claim 3, further comprising a substrate (212);

the first electrical control structure (210) is embedded in a substrate (212);

the second electrical control structure (211) is embedded in the substrate (212).

5. The graphene-based terahertz modulating super-surface according to claim 4, wherein the material of the substrate (212) includes, but is not limited to, quartz glass, crown glass, flint glass.

6. The graphene-based terahertz regulation and control super-surface according to claim 1, wherein the first electrode (115) and the second electrode (116) are both located at edges of the first graphene layer (114) and are respectively located at two opposite ends of the first graphene layer (114);

the third electrode (118) and the fourth electrode (119) are both located at the edge of the second graphene layer (117), and are located at two opposite ends of the second graphene layer (117) respectively.

7. The graphene-based terahertz regulation and control super-surface of claim 6, wherein the second electrode (116) and the fourth electrode (119) are both grounded.

8. The graphene-based terahertz regulation and control super-surface of claim 6, wherein the first electrode (115), the second electrode (116), the third electrode (118) and the fourth electrode (119) are all in a strip-like structure.

9. The graphene-based terahertz regulation super-surface of claim 8, wherein the length directions of the first electrode (115), the second electrode (116), the third electrode (118), and the fourth electrode (119) are all perpendicular to a dividing line between the first super-surface (110) and the second super-surface (111).

10. The graphene-based terahertz regulation and control super-surface according to claim 9, wherein the first electrode (115) and the second electrode (116) are located at both ends of the first graphene layer (114) along the dividing line; the third electrode (118) and the fourth electrode (119) are positioned at two ends of the second graphene layer (117) along the dividing line.

11. The graphene-based terahertz regulation and control super-surface according to claim 1, wherein one of the first electrode (115) and the second electrode (116) is coplanar with one of the third electrode (118) and the fourth electrode (119) and electrically connected with the first electrical control structure (210) and the second electrical control structure (211) being coplanar.

12. The graphene-based terahertz regulation super-surface of claim 1, wherein the first micro-nano structure (112) is coplanar with the second micro-nano structure (113).

13. The graphene-based terahertz regulation and control super-surface according to claim 1, wherein the number of the first and second super-surfaces (110, 111) is plural.

14. The graphene-based terahertz regulation super-surface of claim 1, wherein the materials of the first electrode (115), the second electrode (116), the third electrode (118), and the fourth electrode (119) each comprise gold.

15. The graphene-based terahertz regulation subsurface of claim 1, wherein the first voltage and the second voltage are different.

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