CN219010525U - Self-cooling electrode rod and crystal growth furnace - Google Patents
Self-cooling electrode rod and crystal growth furnace Download PDFInfo
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- CN219010525U CN219010525U CN202223411730.XU CN202223411730U CN219010525U CN 219010525 U CN219010525 U CN 219010525U CN 202223411730 U CN202223411730 U CN 202223411730U CN 219010525 U CN219010525 U CN 219010525U
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Abstract
The utility model provides a self-cooling electrode rod and a crystal growth furnace, and relates to the technical field of crystal growth equipment. The self-cooling electrode rod comprises an electrode rod main body and a cooling pipe, wherein the electrode rod main body is of a hollow structure; the cooling tube is inserted into the electrode rod main body, one end of the cooling tube, which extends out of the electrode rod main body, is an inlet, one end of the cooling tube, which is inserted into the electrode rod main body, is an outlet, and a cooling loop is formed between the outer surface of the cooling tube and the inner surface of the electrode rod main body, so that the contact area between the cooling liquid and the electrode rod main body is maximized, the cooling liquid flows into the electrode rod main body through the cooling tube and flows out of the electrode rod main body through the cooling loop, the electrode rod main body is cooled, overheating of the electrode rod main body in the use process is avoided, the performance of the electrode rod main body is ensured, and the service life is prolonged.
Description
Technical Field
The utility model relates to the technical field of crystal growth equipment, in particular to a self-cooling electrode rod and a crystal growth furnace.
Background
The existing resistance type silicon carbide crystal growth furnace adopts a graphite heater for heating, and adopts an electrode rod to penetrate through the side wall of the crystal growth furnace and be connected to the graphite heater to provide electric energy for the graphite heater.
However, with the development of a crystal growth furnace, the power and current requirements of graphite heaters are increasing, for example, a 150KW power supply is required to supply 1000A of current. This causes overheating of the electrode rod, reducing the service life and performance of the electrode rod.
Disclosure of Invention
The utility model aims to solve the technical problems that: the electrode rod is overheated, and the service life and the performance of the electrode rod are reduced.
In order to solve the above technical problems, in a first aspect, the present utility model provides a self-cooling electrode rod, which is applied to a crystal growth furnace, and the self-cooling electrode rod includes:
the electrode rod main body is of a hollow structure;
and the cooling pipe is inserted into the electrode rod main body, one end of the cooling pipe extending out of the electrode rod main body is an inlet, one end of the cooling pipe inserted into the electrode rod main body is an outlet, a cooling loop is formed between the outer surface of the cooling pipe and the inner surface of the electrode rod main body, and cooling liquid flows into the electrode rod main body through the cooling pipe and flows out of the electrode rod main body through the cooling loop, so that the electrode rod main body is cooled.
The self-cooling electrode rod provided by the utility model has the beneficial effects that:
1. the electrode rod main body is designed into a hollow structure, and a cooling pipe is inserted into the hollow structure, so that the electrode rod main body can be cooled at any time, the electrode rod main body is prevented from being overheated in the using process, the performance of the electrode rod main body is ensured, and the service life is prolonged;
2. the outer surface of the cooling pipe and the inner surface of the electrode rod main body are utilized to form a cooling loop, so that the contact area between the cooling liquid and the electrode rod main body is maximized, and the cooling efficiency of the electrode rod main body is higher;
3. the self-cooling electrode rod has simple structure and wide application range, and is applicable to all crystal growth furnaces needing high-current heating.
In an alternative embodiment, the electrode rod body includes:
the bottom plate is provided with a mounting hole, and the cooling pipe is matched with the mounting hole;
and the column body is vertically connected to the bottom plate, and the cooling pipe is inserted into the column body, wherein the mounting hole and the column body are coaxially arranged.
Therefore, the assembly form of the electrode rod main body and the cooling pipe is simple, the design of a cooling liquid channel is simple, and the cooling efficiency of the electrode rod main body is high.
In an alternative embodiment, the bottom plate is provided with a plurality of discharge channels, the cooling pipes are perpendicular to the discharge channels, and the discharge channels are communicated with the cooling circuit.
Therefore, the plurality of discharge channels can accelerate the flow velocity of the cooling liquid in the cooling loop, accelerate the circulation speed of the cooling liquid in the self-cooling electrode rod and improve the self-cooling efficiency of the self-cooling electrode rod.
In an alternative embodiment, the cooling tube has an inner diameter r and the electrode rod body has an inner diameter r
。
Therefore, the flow area of the cooling loop is not smaller than that of the cooling pipe, so that the cooling liquid in the cooling pipe can smoothly flow into the cooling loop, and the material waste caused by overlarge inner diameter of the electrode rod main body is avoided.
In an alternative embodiment, the distance L between the outlet of the cooling tube and the inner end wall of the electrode rod body is r to 1.5r.
Therefore, the cooling liquid flowing out of the outlet of the cooling pipe can collide with the inner end wall of the electrode rod main body and then spread to the periphery, and then enter the cooling circuit, and the distance L is in the range, so that the flowing resistance of the cooling liquid is reduced, and the electrode rod main body is not overlong.
In an alternative embodiment, the electrode rod main body further comprises a rib, the rib is arranged on the outer surface of the column body, the self-cooling electrode rod further comprises a power connection plate and a first nut, the power connection plate is sleeved on the column body, the power connection plate is clamped between the rib and the first nut, and a power connection hole is formed in the power connection plate.
Therefore, the power supply connecting plate can be firmly arranged on the electrode rod main body, the power supply connecting plate can be replaced conveniently, and the self-cooling electrode rod is connected with a power supply stably.
In an alternative embodiment, the self-cooling electrode rod further comprises an insulating sleeve and a second nut, wherein the insulating sleeve is sleeved on the cylinder, the insulating sleeve is clamped between the second nut and the convex rib, and the outer surface of the insulating sleeve is used for being matched with the connecting hole on the furnace body.
Thus, the insulating sleeve is favorable for being firmly arranged on the electrode rod main body, the self-cooling electrode rod is favorable for being firmly arranged on the side wall of the furnace body, and meanwhile, the insulation between the self-cooling electrode rod and the side wall of the furnace body is realized.
In an alternative embodiment, the insulating sleeve comprises an adapter flange and a ceramic flange, the ceramic flange is sleeved on the column, the adapter flange is sleeved on the ceramic flange, and the adapter flange is connected with the ceramic flange through bolts.
Therefore, the insulating sleeve adopts a split structure, so that the consumption of insulating materials (ceramics) can be reduced, and the cost is reduced.
In an alternative embodiment, the self-cooling electrode rod further comprises a first sealing ring and a second sealing ring, wherein the first sealing ring is clamped between the adapter flange and the ceramic flange, and the second sealing ring is clamped between the ceramic flange and the bead.
Thus, the sealing performance of the self-cooling electrode rod is guaranteed, and the sealing performance of the furnace body is not damaged after the self-cooling electrode rod is arranged on the side wall of the furnace body.
In a second aspect, the present utility model provides a crystal growth furnace comprising:
the side wall of the furnace body is provided with a connecting hole;
the graphite heater is arranged in the furnace body;
the self-cooling electrode rod of the foregoing embodiment is inserted into the connection hole and connected to the graphite heater.
The crystal growth furnace provided by the utility model adopts the self-cooling electrode rod, so that the overheating of the electrode rod can be avoided, and the service life and performance of the electrode rod are improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of an application scenario of a self-cooling electrode rod according to an embodiment of the present utility model.
Icon: 100-self-cooling electrode rod; 2-an electrode rod body; 21-a bottom plate; 211-discharge channel; 22-column; 23-convex edges; 3-cooling pipes; 4-a cooling circuit; 5-a power supply connection plate; 51-a power supply connection hole; 6-a first nut; 7-an adapter flange; 8-ceramic flanges; 9-a second nut; 10-a first sealing ring; 11-a second sealing ring; 12-bolts; 200-furnace body.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1, arrows in fig. 1 indicate a flow direction of a cooling liquid, and the present embodiment provides a self-cooling electrode rod 100, wherein the self-cooling electrode rod 100 includes an electrode rod main body 2, a cooling tube 3, a power connection plate 5, a first nut 6, an insulating sleeve, and a second nut 9.
Specifically, the electrode rod main body 2 is of a hollow structure, the electrode rod main body 2 comprises a bottom plate 21 and a column 22, wherein the bottom plate 21 is provided with a mounting hole, and the cooling pipe 3 is matched in the mounting hole; the column 22 is vertically connected to the bottom plate 21, and the cooling pipe 3 is inserted into the column 22, wherein the mounting hole is coaxially provided with the column 22. In this way, the assembly form of the electrode rod body 2 and the cooling tube 3 is simple.
The end of the cooling tube 3 extending out of the electrode rod main body 2 is an inlet, the end of the cooling tube 3 inserted into the electrode rod main body 2 is an outlet, and a cooling loop 4 is formed between the outer surface of the cooling tube 3 and the inner surface of the electrode rod main body 2, so that the contact area between the cooling liquid and the electrode rod main body 2 is maximized. Wherein, the cooling liquid can be water.
The bottom plate 21 is provided with a plurality of discharge channels 211, the cooling pipe 3 is perpendicular to the discharge channels 211, and the discharge channels 211 are communicated with the cooling circuit 4. In this way, the plurality of discharge channels 211 can increase the flow rate of the cooling liquid in the cooling circuit 4, increase the circulation speed of the cooling liquid in the self-cooling electrode rod 100, and increase the self-cooling efficiency of the self-cooling electrode rod 100.
The cooling liquid flows into the electrode rod main body 2 through the cooling pipe 3 and flows out of the electrode rod main body 2 through the cooling loop 4, so that the electrode rod main body 2 is cooled, overheating of the electrode rod main body 2 in the use process is avoided, the performance of the electrode rod main body 2 is ensured, and the service life is prolonged. And the cooling liquid channel is simple in design, and the cooling efficiency of the electrode rod main body 2 is high.
The electrode rod main body 2 further comprises a rib 23, the rib 23 is arranged on the outer surface of the column 22, the power supply connecting plate 5 and the first nut 6 are sleeved on the column 22, the power supply connecting plate 5 is clamped between the rib 23 and the first nut 6, and the power supply connecting plate 5 is provided with a power supply connecting hole 51. In this way, the power connection plate 5 can be firmly installed on the electrode rod main body 2, and the power connection plate 5 can be replaced conveniently, so that the self-cooling electrode rod 100 can be connected with a power supply stably.
The insulating sleeve and the second nut 9 are sleeved on the column 22, the insulating sleeve is clamped between the second nut 9 and the convex rib 23, and the outer surface of the insulating sleeve is used for being matched with the connecting hole on the furnace body 200. In this way, the insulating sleeve is advantageously firmly mounted on the electrode rod body 2, the self-cooling electrode rod 100 is advantageously firmly mounted on the side wall of the furnace body 200, and at the same time, insulation between the self-cooling electrode rod 100 and the side wall of the furnace body 200 is achieved.
The insulating sleeve comprises an adapter flange 7 and a ceramic flange 8, the ceramic flange 8 is sleeved on the column 22, the adapter flange 7 is sleeved on the ceramic flange 8, and the adapter flange 7 is connected with the ceramic flange 8 through bolts 12. Therefore, the insulating sleeve adopts a split structure, so that the consumption of insulating materials (ceramics) can be reduced, and the cost is reduced.
The self-cooling electrode rod 100 further comprises a first sealing ring 10 and a second sealing ring 11, wherein the first sealing ring 10 is clamped between the adapter flange 7 and the ceramic flange 8, and the second sealing ring 11 is clamped between the ceramic flange 8 and the convex edge 23. Thus, it is advantageous to ensure the sealability of the self-cooling electrode rod 100 without deteriorating the sealability of the furnace body 200 after being mounted on the sidewall of the furnace body 200.
In terms of the design of the size, the inner diameter of the cooling tube 3 is r, and the inner diameter of the electrode rod main body 2 is
. Thus, the inner circle area of the electrode rod main body 2 is 2-4 times of the inner circle area of the cooling pipe 3, the cross section of the cooling circuit 4 is a circular ring, and the area of the circular ring is about 1-3 times of the inner circle area of the cooling pipe 3, so that the flow area of the cooling circuit 4 is not smaller than the flow area of the cooling pipe 3, the smooth flow of the cooling liquid in the cooling pipe 3 into the cooling circuit 4 is facilitated, and the inner diameter of the electrode rod main body 2 is not too large, and the waste of materials is avoided.
The distance L between the outlet of the cooling tube 3 and the inner end wall of the electrode rod main body 2 is r-1.5 r. In this way, the cooling liquid flowing out from the outlet of the cooling pipe 3 can strike the inner end wall of the electrode rod main body 2 and then spread to the periphery, and then enter the cooling circuit 4, and the distance L is in the range, so that the flowing resistance of the cooling liquid is reduced, and the electrode rod main body 2 is not too long.
The embodiment also provides a crystal growth furnace which is mainly used for silicon carbide crystal growth, and comprises a furnace body 200, a graphite heater and a self-cooling electrode rod 100, wherein a connecting hole is formed in the side wall of the furnace body 200; a graphite heater installed inside the furnace body 200; the self-cooling electrode rod 100 is inserted into the connection hole and connected to the graphite heater. The crystal growth furnace provided by the embodiment adopts the self-cooling electrode rod 100, so that overheating of the electrode rod can be avoided, and the service life and performance of the electrode rod can be improved.
The self-cooling electrode rod 100 and the crystal growth furnace provided by the utility model have the beneficial effects that:
1. the electrode rod main body 2 is designed into a hollow structure, and the cooling pipe 3 is inserted into the hollow structure, so that the electrode rod main body 2 can be cooled at any time, the electrode rod main body 2 is prevented from being overheated in the using process, the performance of the electrode rod main body 2 is ensured, and the service life is prolonged;
2. the outer surface of the cooling pipe 3 and the inner surface of the electrode rod main body 2 are utilized to form a cooling loop 4, so that the contact area between the cooling liquid and the electrode rod main body 2 is maximized, and the cooling efficiency of the electrode rod main body 2 is higher;
3. the self-cooling electrode rod 100 has simple structure and wide application range, and is applicable to all crystal growth furnaces needing high-current heating.
The above is only a preferred embodiment of the present utility model, and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. A self-cooled electrode rod for use in a crystal growth furnace, the self-cooled electrode rod comprising:
the electrode rod main body (2) is of a hollow structure;
the cooling tube (3) is inserted into the electrode rod main body (2), one end of the electrode rod main body (2) is extended out of the cooling tube (3) to serve as an inlet, one end of the electrode rod main body (2) is inserted into the cooling tube (3) to serve as an outlet, a cooling loop (4) is formed between the outer surface of the cooling tube (3) and the inner surface of the electrode rod main body (2), and cooling liquid flows into the electrode rod main body (2) through the cooling tube (3) and flows out of the electrode rod main body (2) through the cooling loop (4) to finish cooling of the electrode rod main body (2).
2. Self-cooling electrode rod according to claim 1, characterized in that the electrode rod body (2) comprises:
a bottom plate (21) provided with a mounting hole, wherein the cooling pipe (3) is matched with the mounting hole;
and the column body (22) is vertically connected to the bottom plate (21), and the cooling pipe (3) is inserted into the column body (22), wherein the mounting hole and the column body (22) are coaxially arranged.
3. Self-cooling electrode rod according to claim 2, characterized in that the bottom plate (21) is provided with a plurality of discharge channels (211), the cooling tube (3) being perpendicular to the discharge channels (211), the discharge channels (211) being in communication with the cooling circuit (4).
4. Self-cooling electrode rod according to claim 1, characterized in that the cooling tube (3) has an inner diameter r and the electrode rod body (2) has an inner diameter r
5. Self-cooling electrode rod according to claim 4, characterized in that the distance L between the outlet of the cooling tube (3) and the inner end wall of the electrode rod body (2) is r-1.5 r.
6. The self-cooling electrode rod according to claim 2, wherein the electrode rod main body (2) further comprises a rib (23), the rib (23) is arranged on the outer surface of the column body (22), the self-cooling electrode rod further comprises a power connection plate (5) and a first nut (6) which are sleeved on the column body (22), the power connection plate (5) is clamped between the rib (23) and the first nut (6), and a power connection hole (51) is formed in the power connection plate (5).
7. Self-cooling electrode rod according to claim 6, characterized in that it further comprises an insulating sleeve and a second nut (9) fitted over the cylinder (22), the insulating sleeve being clamped between the second nut (9) and the ribs (23), the outer surface of the insulating sleeve being intended to cooperate with a connecting hole in the furnace body (200).
8. The self-cooling electrode rod according to claim 7, wherein the insulating sleeve comprises an adapter flange (7) and a ceramic flange (8), the ceramic flange (8) is sleeved on the column (22), the adapter flange (7) is sleeved on the ceramic flange (8), and the adapter flange (7) is connected with the ceramic flange (8) by bolts (12).
9. Self-cooling electrode rod according to claim 8, characterized in that it further comprises a first sealing ring (10) and a second sealing ring (11), the first sealing ring (10) being clamped between the adapter flange (7) and the ceramic flange (8), the second sealing ring (11) being clamped between the ceramic flange (8) and the bead (23).
10. A crystal growth furnace, characterized in that the crystal growth furnace comprises:
the furnace comprises a furnace body (200), wherein a connecting hole is formed in the side wall of the furnace body (200);
a graphite heater installed inside the furnace body (200);
the self-cooling electrode rod of claim 1 inserted into the connection hole and connected to the graphite heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223411730.XU CN219010525U (en) | 2022-12-19 | 2022-12-19 | Self-cooling electrode rod and crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223411730.XU CN219010525U (en) | 2022-12-19 | 2022-12-19 | Self-cooling electrode rod and crystal growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219010525U true CN219010525U (en) | 2023-05-12 |
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ID=86247735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223411730.XU Active CN219010525U (en) | 2022-12-19 | 2022-12-19 | Self-cooling electrode rod and crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219010525U (en) |
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2022
- 2022-12-19 CN CN202223411730.XU patent/CN219010525U/en active Active
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