CN218996656U

CN218996656U - Positioning mechanism for probe station

Info

Publication number: CN218996656U
Application number: CN202222536042.XU
Authority: CN
Inventors: 陈福云
Original assignee: Wuhan Xinnuo Mengda Technology Co ltd
Current assignee: Wuhan Xinnuo Mengda Technology Co ltd
Priority date: 2022-09-23
Filing date: 2022-09-23
Publication date: 2023-05-09
Anticipated expiration: 2032-09-23

Abstract

The utility model relates to the technical field of probe platforms and discloses a positioning mechanism for a probe platform, which comprises a bench and a placing disc, wherein the placing disc is fixedly connected to the top of the bench through an air cylinder, a sliding groove is formed in the top of the bench, when a probe card is placed on the placing disc, the height of the probe card is adjusted through the air cylinder, the distance between a first movable box and a second movable box can be respectively adjusted through sliding of two threaded blocks, and through rotating a rocker, four pushing plates can respectively drive the two sliding blocks on one side of the second movable box to synchronously adjust the distance, at the moment, a spring between the two sliding blocks on one side of the second movable box can shrink and generate elastic force, the stability of the two sliding blocks on one side of the second movable box is improved, and through the distance between four sliding columns can be synchronously adjusted, so that the probe card is clamped and positioned by utilizing the four sliding columns, the problem that a contact point between a wafer and the probe card is shifted, and the wafer detection is influenced is avoided.

Description

Positioning mechanism for probe station

Technical Field

The utility model relates to the technical field of probe stations, in particular to a positioning mechanism for a probe station.

Background

The probe station is a device for testing a wafer in the semiconductor production process, and mainly achieves the functions of reliable contact between a probe card and the wafer, fixed step movement of the wafer, signal connection between the probe station and a tester and the like in the wafer test. A probe card is a component used to make electrical connections between a tester and a wafer.

However, when the existing probe card is placed on the placing tray, the existing probe card is not provided with a fixing device, so that the probe card is easy to be unstable in placing, and when the probe and the wafer are subjected to contact detection, if the probe card is not provided with a device for positioning, the problem that the contact point of the probe card and the wafer cannot be accurately contacted easily occurs.

Accordingly, based on the above-mentioned technical problems, it is necessary for those skilled in the art to develop a positioning mechanism for a probe station.

Disclosure of Invention

The present utility model is directed to a positioning mechanism for a probe station, so as to solve the above-mentioned problems in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: including rack and placing the dish, place the dish and pass through the cylinder rigid coupling in the top of rack, the sliding tray has been seted up at the top of rack, the inside slip of sliding tray is provided with two screw blocks, two the top of screw block is the rigid coupling respectively has first removal box and second to remove the box, the inside of first removal box and second removal box is all provided with two sliding blocks in the slip, four the top of sliding block is all the rigid coupling has the slip post, and two on one side of the rocker the inside common screw thread grafting of sliding block has a screw rod, the one end rigid coupling of screw rod has the rocker, and two on one side of the second removes the box rigid coupling has the spring between the sliding block, two on one side of rocker the one side of sliding block all the rigid coupling has two push plates, four the push plate slides and sets up in the inside of first removal box and second removal box.

Preferably, the outer surfaces of the two racks are fixedly connected with motors, output shafts of the motors are fixedly connected with bidirectional threaded rods, and two ends of each bidirectional threaded rod are respectively in threaded connection with the inside of the two threaded blocks, so that the distance between the first movable box and the second movable box is convenient to adjust.

Preferably, the first moving box is provided with sliding openings on one side of the second moving box and on two sides of the outer surface of the rocker, four pushing plates are arranged in the sliding openings in a sliding manner, and the four pushing plates can be used for synchronously adjusting the distance between two sliding blocks on one side of the second moving box.

Preferably, the tops of the four sliding columns are fixedly connected with rubber pads, so that the probe card is prevented from being damaged by hard objects when the rubber pads are contacted with the probe card.

Preferably, the top of first removal box and second removal box has all been seted up and has been worn the mouth, four the one end of sliding block slides respectively and sets up in the inside of two mouthfuls, is convenient for through the setting of wearing the mouth for the interval between four sliding blocks is adjustable.

Preferably, the number of the springs is two, the two springs are fixedly connected between the two sliding blocks in the second moving box, and the elasticity of the springs is utilized to improve the stability of the two sliding blocks in the second moving box.

Compared with the prior art, the utility model has the beneficial effects that:

(1) Through the structural design of the first moving box and the second moving box, when the probe card is placed on the placing disc, the height of the probe card is adjusted through the air cylinder, the distance between the first moving box and the second moving box can be adjusted respectively through sliding of the two threaded blocks, the distance between the two sliding blocks can be adjusted by rotating the rocker through threaded matching between the screw rod and the two sliding blocks, meanwhile, the four pushing plates can respectively drive the two sliding blocks on one side of the second moving box to synchronously adjust the distance, at the moment, the spring between the two sliding blocks on one side of the second moving box can shrink and generate elastic force, the stability of the two sliding blocks on one side of the second moving box is improved, and through the fact that the distance between the four sliding blocks can be synchronously adjusted, the probe card is clamped and positioned through the four sliding blocks, and the problem that the wafer and the probe card are displaced and the contact point of the probe card are displaced is avoided, and therefore the wafer detection is affected is solved.

(2) Through the structural design of the motor and the bidirectional threaded rod, the two threaded blocks can be driven to move in opposite directions or in opposite directions by utilizing the rotation of the bidirectional threaded rod, so that the distance between the first movable box and the second movable box can be conveniently adjusted.

(3) Through the structural design of the spring, when the distance between the two sliding blocks at one side of the second moving box is adjusted, the stability of the two sliding blocks in the second moving box is improved by utilizing the elasticity of the spring.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is an enlarged schematic view of the structure of FIG. 2A;

FIG. 3 is a schematic plan view of the present utility model;

FIG. 4 is a schematic view of a cross-sectional structure in the A-A direction according to the present utility model.

In the reference numerals: 1. a stand; 2. a rocker; 3. a sliding block; 4. a sliding column; 5. a rubber pad; 6. a push plate; 7. a first moving case; 8. a second moving case; 9. a motor; 10. a sliding groove; 11. a screw block; 12. a spring; 14. a screw; 16. a bi-directional threaded rod.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the present utility model is not limited to the specific embodiments of the disclosure that follow.

Examples

Referring to fig. 1-4, the present utility model provides a positioning mechanism for a probe station, which comprises: including rack 1 and placing the dish, place the dish and pass through the cylinder rigid coupling in the top of rack 1, slide groove 10 has been seted up at the top of rack 1, slide groove 10's inside slip is provided with two screw thread pieces 11, two the top of screw thread piece 11 is the rigid coupling respectively has first removal box 7 and second removal box 8, the inside of first removal box 7 and second removal box 8 is all provided with two sliding blocks 3 in the slip, four the top of sliding block 3 is all rigid coupling has slide column 4, and two on one side of rocker 2 the inside common screw thread grafting of sliding block 3 has a screw rod 14, the one end rigid coupling of screw rod 14 has rocker 2, and two on one side of second removal box 8 the rigid coupling has spring 12 between the sliding block 3, and two on one side of sliding block 3 all rigid coupling has two push plates 6, four push plate 6 slide the setting in the inside of first removal box 7 and second removal box 8.

In this embodiment, when the probe card is placed on the placing tray, the height of the probe card is adjusted by the air cylinder, and the distance between the first moving box 7 and the second moving box 8 can be adjusted by sliding the two threaded blocks 11, and by rotating the rocker 2, the distance between the two sliding columns 4 on one side of the first moving box 7 can be adjusted by using the threaded fit between the screw 14 and the two sliding blocks 3, and simultaneously, the four pushing plates 6 can respectively drive the two sliding blocks 3 on one side of the second moving box 8 to synchronously adjust the distance, at this time, the springs 12 between the two sliding blocks 3 on one side of the second moving box 8 can shrink and generate elastic force, so that the stability of the two sliding blocks 3 on one side of the second moving box 8 is improved.

Further, the outer surfaces of the two racks 1 are fixedly connected with motors 9, output shafts of the motors 9 are fixedly connected with bidirectional threaded rods 16, and two ends of each bidirectional threaded rod 16 are respectively in threaded connection with the inside of the two threaded blocks 11.

In this embodiment, the motor 9 is conveniently turned on, and the two threaded blocks 11 are driven to move in opposite directions or in opposite directions by using the rotation of the bidirectional threaded rod 16, so that the distance between the first moving box 7 and the second moving box 8 is conveniently adjusted.

Further, the first moving box 7 is provided with sliding openings on one side of the second moving box 8 and two sides of the outer surface of the rocker 2, and the four pushing plates 6 are slidably arranged in the sliding openings.

In this embodiment, the four pushing plates 6 are conveniently arranged, so that when the space between the two sliding blocks 3 at the side of the first moving box 7 is adjusted, the space between the two sliding blocks 3 at the side of the second moving box 8 can be synchronously adjusted by using the four pushing plates 6.

Further, rubber pads 5 are fixedly connected to the tops of the four sliding columns 4.

In this embodiment, the arrangement of four rubber pads 5 is convenient, so that when the rubber pads 5 are contacted with the probe card, the probe card is prevented from being damaged by the contact of hard objects.

Further, the top of the first moving box 7 and the top of the second moving box 8 are respectively provided with a through hole, and one ends of the four sliding blocks 3 are respectively arranged in the two through holes in a sliding manner.

In the embodiment, the arrangement of the through holes is convenient, so that the spacing between the four sliding blocks 3 can be adjusted.

Further, the number of the springs 12 is two, and the two springs 12 are fixedly connected between the two sliding blocks 3 inside the second moving box 8.

In the present embodiment, it is convenient to improve the stability of the two sliding blocks 3 inside the second moving case 8 by the elasticity of the springs 12 when the pitch of the two sliding blocks 3 on the side of the second moving case 8 is adjusted by the arrangement of the two springs 12.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

In the description of the present utility model, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "another end," "upper," "one side," "top," "inner," "front," "center," "two ends," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "configured," "connected," "secured," "screwed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other, unless explicitly defined otherwise, the meaning of the terms described above in this application will be understood by those of ordinary skill in the art in view of the specific circumstances.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a positioning mechanism that probe platform was used, includes rack (1) and places the dish, its characterized in that, place the dish and pass through the cylinder rigid coupling in the top of rack (1), sliding tray (10) have been seted up at the top of rack (1), the inside slip of sliding tray (10) is provided with two screw thread pieces (11), two the top of screw thread piece (11) rigid coupling has first removal box (7) and second removal box (8) respectively, the inside of first removal box (7) and second removal box (8) is all provided with two sliding blocks (3) in the slip, four the top of sliding block (3) is all rigid coupling has sliding column (4), and two in rocker (2) one side the inside common screw grafting of sliding block (3) has a screw rod (14), the one end rigid coupling of screw rod (14) has rocker (2), two in second removal box (8) one side rigid coupling has spring (12) between sliding block (3), two in rocker (2) one side of sliding block (3) has two push pedal (6) and four in the inside of removal box (6).

2. A positioning mechanism for a probe station as recited in claim 1, wherein: the two rack (1) outer surface rigid coupling has motor (9), the output shaft rigid coupling of motor (9) has two-way threaded rod (16), the both ends of two-way threaded rod (16) are pegged graft in the inside of two screw thread pieces (11) respectively.

3. A positioning mechanism for a probe station as recited in claim 1, wherein: the first moving box (7) is provided with sliding ports on one side of the second moving box (8) and on two sides of the outer surface of the rocker (2), and the four pushing plates (6) are arranged in the sliding ports in a sliding mode.

4. A positioning mechanism for a probe station as recited in claim 1, wherein: rubber pads (5) are fixedly connected to the tops of the four sliding columns (4).

5. A positioning mechanism for a probe station as recited in claim 1, wherein: the tops of the first moving box (7) and the second moving box (8) are respectively provided with a penetrating opening, and one ends of the four sliding blocks (3) are respectively arranged in the two penetrating openings in a sliding mode.

6. A positioning mechanism for a probe station as recited in claim 1, wherein: the number of the springs (12) is two, and the two springs (12) are fixedly connected between the two sliding blocks (3) in the second moving box (8).