CN218995142U - Device for optical measurement - Google Patents

Device for optical measurement Download PDF

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CN218995142U
CN218995142U CN202223106061.5U CN202223106061U CN218995142U CN 218995142 U CN218995142 U CN 218995142U CN 202223106061 U CN202223106061 U CN 202223106061U CN 218995142 U CN218995142 U CN 218995142U
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assembly
display
sample
measured
reference material
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C·塞卡拉
K·S·摩根
R·黑根
D·韦德曼
Z·朱
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Corning Inc
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Corning Inc
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Abstract

The utility model relates to an apparatus for optical measurement, comprising: a base assembly; a frame assembly mounted on the base assembly for securing a flat panel illumination source on which a sample to be measured is placed; and the sample adjusting assembly is arranged on the frame assembly and is used for adjusting the sample to be measured so as to control the position of the sample to be measured. The variability of the measurement can be significantly reduced by mounting it on existing measurement systems for "scintillation" and reflectance distribution measurements.

Description

Device for optical measurement
Technical Field
The present utility model relates to measurement devices, and more particularly to devices for optical measurements.
Background
The use of high performance displays has been expanding over the past few years to various fields including being deployed in areas of high traffic, such as in automotive dashboards, or in architectural features such as built-in mirrors, doors and cabinets, and in collaborative office environments. With the growing demand for such high performance displays, there is a need for surfaces that can improve the performance of the display. For example, under various lighting conditions, surface reflection can occur on a smooth, glossy display, which is extremely detrimental to the display because surface reflection can affect the visibility of the screen. One common solution employed in the prior art is to use an anti-glare (AG) surface that allows specular reflection to be redistributed over a wide range of angles, causing the reflected light to be diffusely reflected.
However, the use of AG surfaces can produce unwanted results— "flicker" on emissive pixellated displays. "flicker" is related to random scattering of pixel emissions, some of which are directed toward the human eye and some of which leave the human eye. This is caused by AG surface features acting as lenslets, which can create a non-uniform appearance on the pixel size scale. Several display properties affecting the order of "flicker" include pixel size, pixel pitch, and distance between the pixel layer and the AG surface. Given that displays are evolving towards smaller and smaller pixels, thinner thicknesses, and higher resolutions, there is a continuing need for environments in which displays are used (e.g., in automotive applications), and there is a great deal of interest in developing new AG surfaces and processes that reduce glare while still minimizing the "sparkling" effect. In particular, it is increasingly desirable to be able to use low "flicker" surfaces on high resolution displays, and thus to be able to measure and quantify the "flicker" of different AG material surfaces on the display. However, some "scintillation" measurement devices have been developed that do not meet the repeatability criteria. It is desirable to improve the "scintillation" measurement technique to minimize variability in the measurement values that is not attributable to differences in the sample to be measured.
In addition, the AG surface is also expected to be able to quantify its ability to redistribute specular reflection, but the existing measurement devices also have the problem of high variability of measurement values.
Disclosure of Invention
The present utility model is directed to overcoming the above and/or other problems in the art. The device for optical measurement is arranged on the existing 'scintillation' measurement system to measure 'scintillation', so that the variability of measurement can be remarkably reduced, and the efficiency and accuracy of quantifying 'scintillation' are greatly improved. In addition, the device for optical measurement is arranged on the existing reflection distribution measuring device to measure the distribution change of AG surface to specular reflection, so that the variability of measured values can be greatly reduced.
According to the present utility model there is provided an apparatus for optical measurement comprising: a base assembly; a frame assembly mounted on the base assembly for securing a flat panel illumination source on which a sample to be measured is placed; and the sample adjusting assembly is arranged on the frame assembly and is used for adjusting the sample to be measured so as to control the position of the sample to be measured.
The above design allows mechanical control of the positioning and movement of the flat panel illumination source and the sample to be measured, which is critical to achieving accurate and precise "scintillation" measurements, which is not considered by any of the existing measuring devices. The device for optical measurement of the utility model can be used as custom hardware for 'scintillation' measurement, and can be installed on the existing measurement workbench to remarkably reduce the variability of measurement results.
Preferably, the flat panel illumination source described above may be provided as a display.
Preferably, the display device may further comprise a display assembly in which the display device is mounted, and the frame assembly is configured as a display mounting assembly. Thus, the display carrying assembly is mounted on the base assembly and fixes the display assembly, and the sample to be measured is placed on the display assembly and the position of the sample to be measured can be adjusted by the sample adjusting assembly.
Preferably, the apparatus for optical measurement according to the present utility model may further comprise: a camera mount for securing a camera for capturing an image of the sample to be tested. In "scintillation" measurements it is necessary to capture an image of the sample to be measured, but the camera mount on existing measurement platforms is the most unstable hardware, which affects the repeatability of the measurement. By installing the optical measuring device of the present utility model, the camera can be firmly positioned by using the camera mount provided on the device.
Preferably, the apparatus for optical measurement according to the present utility model may further comprise: a motion stage mounted above the base assembly for controlling the distance between the surface of the display and the sample to be measured. Thus, the "flicker" can be measured as a function of the distance between the display pixel layer and the AG sample surface, so that the effect of AG sample structure on the "flicker" can be advantageously grasped.
Preferably, the flat panel illumination source or display may be fixed with a tool fitting dedicated to the flat panel illumination source or display, and parameters of the tool fitting are kept unchanged during the service life of the flat panel illumination source or display. These tool accessories may help to more accurately measure "flicker". Moreover, while the parameters of these tool accessories remain unchanged for each individual flat panel illumination source or display to achieve a generally precise interface of the flat panel illumination source or display with the system operating platform in which the present utility model is installed, the parameters of the tool accessories may still be flexibly designed for different types and sizes of flat panel illumination sources or displays.
Preferably, the display and its corresponding frame are assembled together throughout the life of the display, which may help maintain datum positioning.
Preferably, the display assembly may be docked to the display mounting assembly by docking a tool ball mounted to the bottom of the display assembly with a V-block on the display mounting assembly. This novel design can provide repeatable positioning of the display so that it can be reused without complex re-referencing or alignment.
Preferably, the sample adjustment assembly may be disposed over the display assembly and the sample to be measured may be placed over a display surface in the display assembly and positioned by a slider of the sample adjustment assembly.
Preferably, a V-block is also mounted on the base assembly for interfacing with a tool ball mounted at the bottom of the display assembly to fixedly position the display in the display assembly, whereby micron-scale repeatability measurements can be achieved at the same location on the display.
Preferably, a ball transfer roller may also be mounted on the base assembly to allow the display in the display assembly to be positioned "floatingly" so that any portion of the display may be positioned and measurements made.
Preferably, the display may be provided as a mask assembly, which may comprise a pixel mask on which the sample to be measured is placed, and a rear projection light source. The mask assembly corresponds to a dummy model of a display that can be used to measure "flicker" instead of a truly complete display, while still maintaining low variability of the measured values.
Preferably, the above mask assembly may further include a transparent substrate having an opaque matrix on a surface thereof, wherein the pixel mask is disposed on the transparent substrate. The transparent substrate and the opaque matrix on its surface can simulate the effect of a sub-pixel pattern.
Preferably, the above mask assembly may further comprise a carrier base mounted to the display mounting assembly and a mask carrier fixed to the carrier base, wherein the rear projection light source is mounted under the carrier base, the pixel mask and the transparent substrate are located in the mask carrier, and the sample conditioning assembly is located on top of the mask carrier.
Preferably, the mask carrier is securable to the carrier base by three magneto-kinematic mounts, so that the mask carrier can be securely mounted to the carrier base.
Preferably, the mask carrier may include pockets on two different planes, respectively, for positioning the pixel mask and the transparent substrate, respectively.
Preferably, the mask carrier described above may further comprise a flexing element and a clamping surface, wherein the pocket, the flexing element and the clamping surface are machined directly into the mask carrier. The pocket for positioning the transparent substrate and the pixel mask may be sized and toleranced to provide suitable length and width clearances so that variations in part tolerances may be achieved, which provides for ease of insertion or removal of the transparent substrate and the pixel mask while minimizing clamping surface movement.
Preferably, the above mask carrier may include a cavity in which the pixel mask, the transparent substrate, and the sample to be measured may be stacked.
Preferably, a notch may be further provided at one corner of the cavity as an opening area and a measurement area of the rear projection light source, and the pixel mask, the transparent substrate, and the sample to be measured are adapted to the notched corner and fixed in the cavity. This design allows for more flexibility in the size of the pixel mask and other components since the measurement area remains in one corner.
Preferably, the display assembly may be replaced with a reflective dispensing assembly. The reflective distribution assembly may comprise: a base plate mounted on the display mounting assembly or directly on the base assembly; a support plate disposed on the base plate and aligned with an optical axis of the camera; and a reference material sheet fixed in the support plate. The sample to be measured is located on the sheet of reference material and the sample adjustment assembly is positioned such that a center edge of the sample to be measured is located at a center of an optical axis of the camera.
The above design allows for another measurement than the "scintillation" measurement to be performed on the same operating platform—the distribution measurement of specular reflection by the AG surface, i.e. the reflection distribution measurement, and also allows for low variability of the measured values.
Preferably, the reflective distribution assembly may further comprise an angle adjuster for adjusting the angle of the support plate relative to the base plate.
Preferably, the reference material sheet is held by vacuum suction and is made flat with respect to the sample to be measured.
Preferably, the reference material sheet may further have a vacuum hole for flattening the sample to be measured and hanging from the edge of the support plate. This design is particularly useful for larger sized samples to be measured, which can be suspended from the edges of the support plate without causing deformation of the large sized sample portions.
Preferably, the reflective dispensing assembly may further comprise a plurality of separate vacuum plenums for vacuum controlling at least one of the sheet of reference material and the sample to be measured. The vacuum plenum may allow for flexible vacuum control to better grip the sample to be measured.
Preferably, a magnet may also be embedded in at least one of the reference material sheet and the base plate, so that at least one of the sample to be measured and the reference material sheet may be effectively fixed.
Preferably, when the display assembly is replaced with a reflective dispensing assembly, the reflective dispensing assembly may further comprise: a base plate mounted on the display mounting assembly or directly on the base assembly; a support plate disposed on the base plate and aligned with an optical axis of the camera; a reference sheet of material; and a reference material holder having rails at both ends, the reference material sheet being on the reference material holder. Wherein the sample to be measured is positioned on the support plate such that a center edge of the sample to be measured is located at a center of an optical axis of the camera, and the reference material sheet slides along the rail over a surface of the sample to be measured.
The design is also to use the same operation platform to perform reflection distribution measurement on the AG surface, and is particularly suitable for measuring large polygonal to-be-measured samples with ink boundaries. The shape and design of such a sample does not allow dicing the sample nor placing a piece of reference material on top of the sample, whereas by employing the above described design of the reflective dispensing assembly the piece of reference material does not contact the surface of the sample to be measured but is able to move around the sample to be measured, so that measurements can be made at multiple locations across the sample.
Preferably, the above reference material piece may have a leg-shaped connecting member, the end of which is provided with a roller that slides along the rail such that the reference material piece moves over the sample to be measured but does not contact the sample to be measured. When the reference material sheet reaches above the measuring position, the leg-shaped connection locks the reference material sheet in the measuring position.
Other features and aspects of the present utility model will become apparent from the following detailed description, taken in conjunction with the accompanying drawings.
Drawings
The utility model may be better understood by describing exemplary embodiments thereof in conjunction with the accompanying drawings, in which:
Fig. 1 shows a schematic view of an apparatus for optical measurement according to the utility model;
FIG. 2 shows a schematic diagram of an extended embodiment of an apparatus for optical measurement according to the present utility model;
FIG. 3 illustrates a schematic diagram of the display assembly of the extended embodiment of FIG. 2;
FIG. 4 illustrates a display assembly suitable for use with a variety of different displays;
FIG. 5 is a schematic diagram showing the structure of the display mounting assembly in the extended embodiment shown in FIG. 2;
FIG. 6 illustrates a schematic structural view of the control datum tool assembly in the extended embodiment of FIG. 2;
FIGS. 7 (a) and 7 (b) are a perspective view and a front view, respectively, of the extended embodiment of FIG. 2 after the display assembly is mounted to the display mounting assembly;
FIGS. 7 (c) and 7 (d) are a perspective view and a front view, respectively, of the extended embodiment of FIG. 2 after the display mounting assembly has been mounted with the display assembly and the control datum tool assembly;
FIG. 8 illustrates a schematic structural view of the base assembly of the extended embodiment of FIG. 2;
fig. 9 (a) to 9 (c) show graphs of test data corresponding to three samples;
FIG. 10 shows a schematic view of the structure of the camera support in the extended embodiment shown in FIG. 2;
FIG. 11 shows a schematic view of the structure of the motion stage in the extended embodiment shown in FIG. 2;
FIG. 12 shows a schematic diagram of an example of the extended embodiment of FIG. 2;
FIGS. 13 (a) -13 (c) are schematic structural views showing an extended embodiment of the display assembly of the embodiment shown in FIG. 2;
FIGS. 14 and 15 are a top view and a perspective view, respectively, of an example of the extended embodiment shown in FIG. 13 (a);
FIG. 16 is a block diagram showing an example of a mask carrier in the extended embodiment shown in FIG. 13 (a);
FIG. 17 is a block diagram showing another example of the mask carrier in the extended embodiment shown in FIG. 13 (a);
FIG. 18 shows measurement results of "flicker" measurement using the mask assembly of the present utility model;
FIGS. 19 and 20 are top and perspective views, respectively, of another extended embodiment of the display assembly of the embodiment of FIG. 2;
FIG. 21 compares the reflectance distribution measurements for two identical panels;
FIG. 22 illustrates a perspective view of yet another expanded embodiment of the display assembly of the embodiment of FIG. 2;
FIGS. 23 and 24 are a perspective view and a side view, respectively, of an example of the extended embodiment shown in FIG. 22;
FIG. 25 is a rear view of the example shown in FIG. 23; and
fig. 26 is a schematic diagram of another example of the extended embodiment shown in fig. 22.
Detailed Description
The present utility model will be further described with reference to specific embodiments and drawings, in which more details are set forth in the following description in order to provide a thorough understanding of the present utility model, it will be apparent that the present utility model can be embodied in many other forms than described herein, and that those skilled in the art may make similar generalizations and deductions depending on the actual application without departing from the spirit of the present utility model, and therefore should not be taken as limiting the scope of the present utility model in terms of the contents of this specific embodiment.
Unless defined otherwise, technical or scientific terms used in the claims and specification should be given the ordinary meaning as understood by one of ordinary skill in the art to which this utility model belongs. The terms "first," "second," and the like in the description and in the claims, are not used for any order, quantity, or importance, but are used for distinguishing between different elements. The terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, is intended to mean that elements or items that are immediately preceding the word "comprising" or "comprising", are included in the word "comprising" or "comprising", and equivalents thereof, without excluding other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, nor to direct or indirect connections.
According to an embodiment of the present utility model, an apparatus for optical measurement is provided.
Referring to fig. 1, there is shown an apparatus 100 for optical measurement according to the present utility model. The apparatus 100 includes a base assembly 110, a frame assembly 120, and a sample adjustment assembly 150.
As shown in fig. 1, the base assembly 110 may be, for example, a backplane and the frame assembly 120 may be, for example, a display frame. The frame assembly 120 is mounted above the base assembly 110 for securing the flat panel illumination source 180. The sample to be measured may be placed on a flat panel illumination source 180. A sample adjustment assembly 150 is mounted to the frame assembly 120 and is operable to adjust the sample to be measured to control the position at which the sample to be measured is subjected to the measurement.
The flat panel illumination source 180 may, for example, be a display that provides a uniform pixel distribution. The display screen of the notebook computer may be used as the display, and since the screen of the notebook computer is lighter in weight than the keyboard portion, the base plate may be mounted on an existing "flicker" measurement system console, and the display frame is mounted on the base plate for fixing the display screen of the notebook computer in place. The sample adjustment assembly 150 is mounted on the left and right sides of the sample to be measured, can align the sample, and can allow the sample to be presented to a repeatable and reproducible sample measurement location.
In recent years, it has become increasingly desirable to be able to use low "flicker" (e.g., 2% or less Pixel Power Distribution (PPD) values) surfaces on high resolution displays (e.g., retinal screens). However, despite the increasing awareness of the importance of "flicker" in the display industry, few techniques have been able to model, measure and quantify "flicker" of different AG material surfaces. The existing 'scintillation' measurement system is suitable for high 'scintillation' (6-10%) samples, and cannot meet the requirement of repeatability standards. And, as the trend of lower "flicker" becomes more and more evident, the variations in the measurement that are not the sample differences or the fundamental limits of the measurement system, however, bring more and more trouble to the feedback of the workflow and the manufacturing process, the need for measurement repeatability becomes more and more urgent. However, existing "scintillation" measurement systems, which have variability in measurement of ±2% "scintillation" to ±40% "scintillation" or more, are not acceptable for measuring samples with low "scintillation" (< 2% "scintillation" or less) and also limit the perception of the user when conducting the test, as the inherent noise level exceeds the difference being probed. This is also undesirable for quality control in a production environment. It is desirable to be able to reduce the repeatability error to meet the measurement of low "flicker" samples.
The inventors of the present utility model have made extensive tests and studies and found that using hardware to fix the pixel source and control the sample measurement position can significantly reduce variability in measurement. Custom hardware is therefore innovatively employed in the device for optical measurement according to the utility model to control the mechanical positioning of the display and the AG sample to be measured, which has never been considered in any prior art, but is crucial for achieving accurate and precise measurements. The device of the present utility model allows for high precision mechanical control (about + -5 μm) of the positioning and movement of the display for measurement, so that even if the display pixel pitch continues to decrease in the future (e.g., a 450PPI (pixel/inch) display has a 56 μm pixel pitch), the positioning variability can be kept completely low by installing the optical measurement device of the present utility model. The device of the utility model also allows for a high precision mechanical control (about + -10 μm) of the positioning and movement of the sample to be measured during the measurement, so that accurate measurements can be made at different locations on a given sample, and local variations that contribute to "flicker" on the sample surface can be known in time. At the same time, the apparatus of the present utility model also provides a flexible sample-holding design for samples to be measured so that samples of various sizes (e.g., from a size of preferably Hui Quan or less to the size of the display) can be measured reproducibly.
The optical measuring device of the present utility model can position the sample to be measured on most of the currently available display surfaces, and take measurements with strain on the display's position. In particular, the present utility model may take measurements using the display of a 17.3 inch screen notebook computer, whereby any portion of the display can be used for measurements.
Alternatively, a lancet can be attached to the surface of the flat illumination source 180 where the sample to be measured is placed. Also taking the display screen of a notebook computer as the flat illumination source 180 as an example, the tape-adhered lancet glass (e.g., 150-200 μm thick) can prevent scratches from being generated on the screen surface of the notebook computer due to sample translation during measurement.
By using the optical measuring apparatus of the present utility model, it is possible to significantly reduce the variability of measurement, greatly improve the repeatability of measurement, and at the same time, it is also possible to reduce the measurement noise, and to obtain greater flexibility while maintaining excellent performance suitable for the manufacturing environment.
Table 1 below shows the repeatability performance metrics obtained after installation of the apparatus of the present utility model (including a notebook computer, display frame and sample adjustment assembly in this example) on three "scintillation" measurement system consoles in the industry. As can be seen from table 1, the variability index associated with the "scintillation" measurement was well maintained below 1% in all cases, except for AG measurements with AG-facing down on SMS-1 installed on CPT; however, the repeatability error index in "scintillation" units is very low in all cases, even though the AG-face down AG measurement by SMS-1 mounted on CPT described above is only 0.16 scintillation units.
Figure SMS_1
TABLE 1
The "flicker" repeatability of the measurements of these several system consoles with the inventive apparatus is improved by approximately five times compared to the existing "flicker" measurement system consoles without the inventive apparatus.
Referring to fig. 2, there is shown an apparatus 300 for optical measurement according to the present utility model, which is an extended embodiment of the apparatus 100 for optical measurement described above. In contrast to the device 100, the flat panel illumination source 180 is directly configured as a display 384, and the device 300 further comprises a display assembly 380 in which the display 384 is mounted, and the frame assembly 120 is directly configured as a display mounting assembly 320. As shown in fig. 2, the display mounting assembly 320 is mounted over the base assembly 310 and secures the display assembly 380 such that a sample to be measured can be placed on the display assembly 380 and its position to be measured can be adjusted by the sample adjustment assembly 350.
Commercially available displays are designed to be relatively lightweight and have a collapsible exterior structure, as they are intended to meet ergonomic and aesthetic requirements without any mechanical means or features suitable for repeatable positional purposes. The apparatus 300 for optical measurement described above may provide the necessary mechanical features for the display in each display assembly 380 that match the process accuracy requirements. For example, the mechanical features may be in the form of tool attachments that are specific to the display (or the flat panel illumination source 180) in the display assembly 380 and that are secured to the display (or the flat panel illumination source 180) throughout the lifetime of the display (or the flat panel illumination source 180). The parameters of the display (or flat panel illumination source 180) tool assembly may be flexibly designed with variations in the type and size of the display (or flat panel illumination source 180), but once the display (or flat panel illumination source 180) is selected, the parameters of the tool assembly remain unchanged over the lifetime of the display (or flat panel illumination source 180), thereby enabling generally precise interfacing of the display (or flat panel illumination source 180) with the system operating platform on which the apparatus 300 (or 100) is installed.
Alternatively, the display frame in display assembly 380 has a set of identical feature assemblies, such as tool balls, in specific locations that allow the display frame to mate with adjacent tool assemblies. Fig. 3 illustrates various components of a display assembly 380, including a display frame 382 and a display 384. The opening in display frame 382 is unique to each display 384. A clamping plate may be used to secure the display 384 to its corresponding frame 382. The display 384 and its corresponding frame 382 are assembled together throughout the life of the display 384 to maintain the datum orientation. Fig. 4 shows a display assembly suitable for use with a variety of different displays.
Alternatively, display assembly 380 may be docked onto display mount assembly 320 by means of a tool ball mounted to the bottom of display assembly 380. Specifically, a V-shaped block may be provided on the display mounting assembly 320, and the V-shaped block may be docked with the tool ball mounted at the bottom of the display assembly 380, thereby enabling docking between the display assembly 380 and the display mounting assembly 320. The term "V-block" in this application refers to a V-shaped clamp that achieves positioning repeatability and self-centering when coupled with a ball. The novel design described above provides a common set of repeatable positioning features that are not used in any existing display, which can provide repeatable positioning for the display so that it can be reused without complex re-referencing or alignment.
Alternatively, the display assembly 380 may have 3 tool balls that are permanently affixed to the display assembly 380 during the lifetime, and the display mount assembly 320 may have 3 permanently affixed V-shaped blocks.
The docking of the tool ball with the V-block described above allows the display 384 to be installed, removed, and reinstalled multiple times and installed in the device 300 each time with extremely high positional accuracy. Such kinematic systems can use standard but less costly components to construct an ergonomically sound constraint. This design implements the new concept of a "travel frame" (the display frame in the display assembly to which the display is fastened) which provides great convenience and flexibility for the measurement.
It should be noted in particular that the above-mentioned "travel frame" may also be realized by using other positioning elements (such as pins) and/or simple positioning surfaces, or by using different ergonomic arrangements (such as cones).
Alternatively, the sample adjustment assembly 350 described above may be designed as a control reference tool assembly. Once the display assembly 380 is positioned onto the display mount assembly 320, a control datum tool assembly may be placed on the display assembly 380 and a sample (e.g., sample glass) to be measured may be placed on the surface of the display 384 and positioned by features on the sliding subassembly of the control datum tool assembly described above. As shown in fig. 5, the display mounting assembly 320 has side bars 322 for positioning the control reference tool assembly 350 described above. As shown in fig. 6, the control reference tool assembly 350 has a sample adjuster 352 by which the sample to be measured can be positioned by the sample adjuster 352. Fig. 7 (a) and 7 (b) show a perspective view and a front view, respectively, of the display mount assembly 320 after the display assembly 380 is mounted, and fig. 7 (c) and 7 (d) show a perspective view and a front view, respectively, of the display mount assembly 320 after the display assembly 380 and the control reference tool assembly 350 are mounted.
The base assembly 310 can provide both a fixed positioning of the display and a "floating" positioning of the display. For example, a V-block may also be mounted on the base assembly 310 for interfacing with a tool ball mounted at the bottom of the display assembly 380, such that the display 384 in the display assembly 380 may be fixedly positioned, i.e., micrometers-scale repeatability measurements may be made at the same location on the display 384. Alternatively, as shown in FIG. 8, a ball transfer roller, such as a pneumatically arranged/telescoping ball transfer roller, may also be mounted on the base assembly 310 so that the display assembly 380 may be positioned "floatingly" to "floatingly" position any portion of the display 384 via the ball transfer roller. By this arrangement/telescoping ball transfer unit using compressed air, the display 384 can be moved into place, which provides the operator with greater flexibility and ergonomics.
After the optical measurement device 300 including the base assembly 310, the display mount assembly 320, the display assembly 380, and the control reference tool assembly 350 described above is installed on SMS-1, it can be used to test for "flicker".
Fig. 9 (a) to 9 (c) show test data of three samples obtained after the optical measurement device 300 is mounted on SMS-1. Table 2 below further compares the influence of each component on the repeatability performance after the above-described optical measurement apparatus 300 and the above-described optical measurement apparatus 100 are mounted on SMS-1.
Figure SMS_2
TABLE 2
From the results shown in fig. 9 and the above table 2, it can be seen that after the above optical measurement apparatus 300 is mounted on SMS-1, the 2σ variability of each of the components is less than 0.075, and it can be said that moving any hardware component does not significantly affect the measurement repeatability. Moreover, as an extended embodiment of the above-described optical measurement apparatus 100, the apparatus 300 can further reduce noise by 4 times on the basis of the apparatus 100, that is, can further improve reproducibility by 4 times.
After the optical measurement device 300 is installed on SMS-1, moving any given hardware component will only minimally affect the mean and standard deviation of the measurement values. Moving the overall (1σ) repeatability of all hardware components to 0.08% "flicker" or less may better meet the requirement for a repeatability index of 1σ+.0.1% "flicker" to better accommodate the measurement of low "flicker" (< 2% flicker) samples. The repeatability of the measurement system console with the optical measurement device 300 described above is improved by a factor of 20 compared to existing measurement system consoles without custom hardware.
Optionally, the optical measuring device 300 according to the present utility model may further comprise a camera mount 360. Fig. 10 shows a schematic perspective view of the camera mount, with the camera 362 fixed as shown. The camera mount 360 may also have a digital display positioned in the X-Z direction that tracks the position of the detection camera through an embedded encoder to provide motion control for the camera.
In "scintillation" measurements it is necessary to capture an image of the sample to be measured, but the rayleigh optics (video) camera used by existing measurement platforms is not a system dedicated to "scintillation" measurements, which does not provide any hardware other than the camera itself, and therefore a stand is required to fix the camera. However, the mount for the stationary camera becomes the most unstable hardware in existing measurement platforms. By installing the optical measuring device of the present utility model, the camera support hardware on the original measuring platform can be replaced by an improved, firmer and more rigid camera support, which can not only eliminate noise sources, but also significantly reduce the variability of measurement, for example, the variability of measurement can be reduced to below 0.1%. In addition, if a camera mount design with a digital display as shown in fig. 10 is used, fine tuning of the focal length of the camera can also be achieved, which allows a wider range of motion and greater flexibility of the measurement platform, facilitating adaptation to a wider variety of measurement devices.
Optionally, the optical measurement device 300 according to the present utility model may further comprise a motion stage 390, as shown in fig. 11, which may be mounted on the base assembly 310 for controlling the distance between the surface of the display 384 and the sample to be measured.
Existing measurement system consoles simply do not have the ability to measure "flicker" by straining the distance between the display pixel layer and the AG sample surface. Measurement system consoles developed over the past few years use different algorithms and hardware to make measurements, which means that it is difficult to achieve a direct comparison between "flicker" measurements, any differences between "flicker" measurements being likely to be interpreted as being caused by differences between measurement system consoles. By the hardware design of the motion stage 390 in the above described apparatus 300 of the present utility model, which can move in the Y-Z direction shown in fig. 11, the measurement of the distance from the display pixel layer to the AG sample surface on the existing measurement system console can be accomplished, which greatly improves the ability to track the distance from the display pixel layer to the AG sample surface over conventional display measurements, since the same algorithm and basic hardware will be used for all measurement system consoles. Accordingly, the hardware differences and algorithm differences of the operation platforms of the measuring systems can not influence the measuring differences. The ability to measure the distance between the display pixel layer and the AG sample surface and then strain the distance to measure "flicker" described above provides a unique competitive advantage to the present utility model, allowing a user to strain the distance between the display pixel layer and the AG sample surface to understand the effect of the sample structure on "flicker" (flicker' has a strong dependence on this distance), thus better understanding the underlying cause of "flicker" and helping developers to design AG surfaces that can work over a range of display thicknesses. Moreover, the above-described ability to measure the distance between the display pixel layer and the AG sample surface can also be widely used to estimate the pixel pitch for various display devices without requiring testing of the devices in the field.
The optical measurement device 300 shown in fig. 12 includes the base assembly 310, the display mount assembly 320, the display assembly 380, the control reference tool assembly 350, the camera mount 360, and the motion stage 390 as previously described. For clarity of illustration, the optical measurement device 300 in the left view does not include the motion stage 390, but the mounted position of the motion stage 390 is shown in the right view (the display assembly 380 and the control reference tool assembly 350 are omitted from the right view to prevent them from covering the motion stage 390), but those skilled in the art will appreciate that in the present embodiment, these components are included in the optical measurement device 300. The optical measurement device can reproducibly position a test display and a glass sample for optical inspection, and is suitable for various display devices and screen sizes. At the same time, the optical measurement device is also capable of achieving positioning repeatability of less than 1 pixel (in practice reaching approximately 1/10 pixel) and of being able to be deployed on the manufacturing site while achieving "calibration standard" performance.
Alternatively, the display 384 described above may also be provided as a mask assembly. Fig. 13 (a) illustrates the mask assembly 1600, which may include a pixel mask 1610 and a rear projection light source 1620. The structured sample 340 to be measured is placed on a pixel mask 1610.
The above design employs "flicker" measurements on a dummy model of the display-rather than the complete display-while still maintaining low variability as described previously. Custom pixel shapes and sizes can be tested using a simulation model of the display. Moreover, not only can measurement work be performed without being affected by other display components (components other than the mask assembly), but other display components can be added as needed to test their effects. Furthermore, because a dummy model of the display is used, the measurement no longer depends on the display being difficult to replace, and the dummy can also be made and verified with a high degree of certainty. In addition, the effect of the distance between the structured surface of the sample and the pixel layer can be easily tested using a dummy model of the display.
Optionally, the mask assembly 1600 may further include a transparent substrate having an opaque matrix on a surface thereof, on which the pixel mask 1610 is disposed. The transparent substrate and the opaque matrix on its surface can simulate the effect of a sub-pixel pattern.
Alternatively, the mask assembly 1600 may also include additional transparent material (e.g., glass) or air to serve as a space between the AG surface and the pixel layer, as shown in fig. 13 (b) and 13 (c), respectively. In fig. 13 (b), a transparent space 1630 is provided between the sample 340 to be measured and the pixel mask 1610. In fig. 13 (c), an air gap 1640 is provided between the sample 340 to be measured and the pixel mask 1610 and between the pixel mask 1610 and the rear projection light source 1620, respectively.
Optionally, the mask assembly 1600 may also include other display stack components (e.g., polarizers, capacitive touch layers, etc.) or combinations thereof.
Optionally, the mask assembly 1600 may further include a carrier base 1650 and a mask carrier 1660. Fig. 14 and 15 show a top view and a perspective view, respectively, of the mask assembly 1600 when installed in the optical measurement device 300 of the present utility model. The carrier base 1650 is mounted to the display mount assembly 320, for example, a tool ball may also be mounted to the bottom of the carrier base 1650, which interfaces with a tool assembly (V-block) on the display mount assembly 320, thereby docking the carrier base 1650 to the display mount assembly 320. The mask carrier 1660 is secured to the carrier base 1650, for example, the mask carrier 1660 may be securely mounted to the carrier base 1650 by three magneto-kinematic mounts (e.g., thorLABS KBS 98). The rear projection light source 1620 is mounted below the carrier base 1650, for example, can be bolted to the underside of the carrier base 1650, and if desired, the rear projection light source 1620 can be rotated 90 degrees to move closer to the mask carrier 1660. A pixel mask 1610 and a transparent substrate 1670 are positioned within the mask carrier 1660. The sample conditioning assembly 350 described above may be provided as a mask carrier sample conditioning assembly 16350 and positioned over the top of the mask carrier 1660, for example, may be held in place by pins.
Alternatively, the mask carrier 1660 may include pockets. The pockets may, for example, be disposed in two different planes and designed with suitable dimensions and tolerances for positioning the pixel mask 1610 and the transparent substrate 1670, respectively.
Optionally, the mask carrier 1660 may further comprise a flexure element and a clamp. The pixel mask 1610 and transparent substrate 1670 are integrally fixed in place with the flexure and clamp, and in fact also integrally fixed in place with the mask carrier 1660. Also shown in fig. 14 and 15 are flexure mounts 1685 corresponding to the flexure elements that can secure the pixel mask 1610 and the transparent substrate 1670, respectively.
Alternatively, the clamping member may be provided as a clamping surface, as shown in fig. 16. The pockets for positioning, flex elements 1662, and clamping surfaces 1663 may be machined directly into the mask carrier 1660. The design may be achieved by, for example, milling processes and wire EDM (electrical discharge machining) processes, or may be achieved by using other manufacturing techniques or as an assembly of multiple components.
As shown in fig. 16, the above-described machining provides pockets in the surface of the mask carrier 1660 that lie in two different planes for positioning the transparent substrate 1670 and the pixel mask 1610, respectively. Each pocket has a portion 1665, one side wall of the portion 1665 being uncoupled from the coupled transparent substrate 1670 or pixel mask 1610 in the direction indicated by the arrow in fig. 16, and the portion 1665 being constrained by the parallel movement of the flexure 1662. The preloaded spring mechanism 1664 can provide a force of a few newtons to push against the edge of the portion 1665 (i.e., the other fixed pocket wall of the portion 1665 opposite the aforementioned side wall), securing the portion 1665 in place by pressure against the other fixed pocket wall.
The dimensions and tolerances for the pockets described above for positioning the transparent substrate and pixel mask may be designed to provide suitable length and width clearances so that variations in part tolerances may be achieved, which provides for ease of insertion or removal of the transparent substrate and pixel mask while minimizing clamping surface movement (not exceeding 0.3 mm).
It should be noted in particular that, while in the above figures the mask carrier may be limited to specific dimensions (for the pixel mask, transparent substrate and sample to be measured), one skilled in the art will appreciate that the design of the present utility model may itself be adapted to any combination of dimensions.
Alternatively, the mask carrier described above may also be of stacked design, i.e. the pixel mask, the transparent substrate and the sample to be measured are stacked in pockets of suitable dimensions and tolerances, which are held solely by friction, without the use of clamping members.
Alternatively, the above-described stacked design of mask carriers may also use pockets that are oversized (e.g., oversized over the pixel mask, transparent substrate, or sample to be measured). Specifically, a notch may be provided in one corner of the oversized cavity, the notch being both the open area and the measurement area of the rear-projection light source. Fig. 17 shows a top view of this design, where the transparent substrate and the sample to be measured have not yet been stacked on the pixel mask. The pixel mask 1610 is adapted to the notched corner, for example, the pixel mask 1610 may be secured within the oversized cavity by a flexure 1666 or other means for securing the pixel mask 1610 as shown. The "flexure" portion may also be a simple spacer or L-shaped bracket/insert adapted for different sizes. The transparent substrate and the sample to be measured may also be fitted in the same manner in their respective oversized pockets, stacked on top of the pixel mask 1610. The above design allows for more flexibility in the size of the pixel mask and other components since the measurement area is held in one corner.
The chart shown in fig. 18 is a measurement result of measuring "flicker" after the mask assembly of the present utility model is mounted on the conventional measuring system console, in which four different plates (plate 1, plate 2, plate 3 and plate 4) are tested. 37 samples were used for evaluation, which samples had a "flicker" ranging from 0.8% to 9%; for each plate, three samples were randomly loaded, 5 measurements were collected per loading, and the measurements were completed by one operator.
From the results of the above graphs, the average 1σ standard deviation of the "scintillation" measurements obtained with the mask assembly of the present utility model was 0.052% (n=1110) for plates 1 and 3, and 0.062% (n=1110) for plates 2 and 4. The mask assembly described above (i.e., a phantom of a display) was chosen as the display assembly in the present utility model to make "flicker" measurements in a manufacturing environment, as well as achieving low variability (1 sigma) below 0.1%. This performance improves 13-fold over the mask measurements on existing SMS system consoles without custom hardware.
Alternatively, the display assembly 380 described above may be replaced with a reflective distribution assembly.
Fig. 19 and 20 are a top view and a perspective view, respectively, of one embodiment of the reflective distribution assembly 2300. As shown, reflective dispensing assembly 2300 may include a base plate 2310, a support plate 2320, and a sheet of reference material 2330. Base 2310 may be mounted on display mount assembly 320 or directly on base assembly 310, and support plate 2320 is disposed on base 2310 and aligned with the optical axis of the camera. The reference material sheet 2330 is fixed in the support plate 2320. The sample to be measured may be located on the reference material sheet 2330. The sample adjustment assembly 350 described above may be configured as a plate sample adjustment assembly 23350 and the plate sample adjustment assembly 23350 positioned such that the center edge of the sample to be measured is centered on the optical axis of the camera.
The design of the reflective dispensing assembly described above allows for another measurement to be performed on the same operating platform, other than a "scintillation" measurement, which also achieves the repeatability and reproducibility advantages of the optical measurement device 300. The function of the AG surface is to redirect specular reflection into multiple angles, which reduces the brightness and sharpness of the reflected image. The reflectance distribution measurements may capture the variation in distribution of reflectance angles around the specular angle of + -10 deg. across the AG surface relative to the unstructured reference surface. However, existing devices for making reflectance distribution measurements also suffer from the same problems caused by variations in sample placement and alignment as "scintillation" measurements. The design of the reflective distribution assembly of the present utility model solves these problems well.
The reflection assignment assembly of the present utility model may hold the AG sample and the reference sample at an angle such that light reflected from the two samples is directed to the center of the field of view (FOV) of the camera. The AG sample may be located on a reference material (e.g., a glossy black reference material, typically polymethyl methacrylate (PMMA, plexiglas) or glass). Positioning the AG sample such that the center edge of the sample is centered on the camera optical axis can cause reflections from both the AG sample and the reference material to be imaged in one field of view. By the above-described custom hardware of the present utility model, variability (1σ) of less than 1% in making reflectance distribution measurements can be effectively ensured.
Optionally, the reflective dispensing assembly 2300 described above may further include an angle adjuster 2350 for adjusting the angle of the support plate 2320 relative to the base 2310. The angle may be adjustable, for example, in the range of about 5 deg. +/-3 deg..
A tool ball may also be mounted to the bottom of the bottom plate 2310, and the bottom plate 2310 may be docked to the display mounting assembly 320 in the optical measurement device 300 by docking the tool ball with a tool assembly (V-block) on the display mounting assembly 320. The support plate 2320 may be bolted to the base 2310 such that the support plate 2320 is aligned with the optical axis of the camera. The support plate 2320 may be connected by a hinge, and the angle of the support plate 2320 relative to the bottom plate 2310 may be varied as desired by an angle adjuster 2350. This angle is currently around 5 degrees in fig. 20. The reference material sheet 2330 is located in the support plate 2320 and may be secured by two clamps in the upper left and upper right corners. A plate sample adjustment assembly 23350 (configured, for example, as an L-shape) can be bolted to the top of the reference material sheet 2330 and the plate sample adjustment assembly 23350 can be positioned such that the center edge of the sample to be measured is centered on the camera optical axis. A plurality of threaded holes may also be provided which allow for adjustment of the position of most components.
Table 3 below shows the measurement results obtained using the above-described reflective dispensing assembly 2300 for reflective dispensing measurements.
Figure SMS_3
TABLE 3 Table 3
In the above measurement, 13 samples were used for evaluation, and these samples had a reflectance distribution ranging from 0 to 100%; three samples were randomly loaded, 5 measurements were collected per load, and the measurements were completed by three operators. After plotting and analyzing the data in table 3 above for standard R & R (repeatability & reproducibility) evaluation, the mean 1σ standard deviation of the reflectance distribution measurements made using the reflectance distribution assembly 2300 described above was found to be 0.84% (n=1944).
The above-described samples to be measured were random in design and size, and the inventors of the present utility model made further measurements to compare two sample plates to be measured (plate 1 and plate 2), in which 25 samples were used for evaluation, respectively; three samples were randomly loaded, 5 measurements were collected per load, and the measurements were completed by one operator. Fig. 21 shows the measurement results: the measurement results for both plates showed a significant improvement in 1σ standard deviation (average 1σ for plate 1=0.024% (n=375), an increase of approximately 36 times over the above 0.84%, and average 1σ for plate 2=0.051% (n=375), an increase of approximately 17 times over the above 0.84%).
In general, if the sample plates to be measured are all of the same design, it is unlikely that differences will be made to the measured performance, except for operator variability and differences that may be introduced by the training operator. However, the inventors have studied to find that if a sample curls, the curl also causes a change in the reflectance distribution. The sample curl increased the change by 10% relative to the same portion where no curl had occurred. The amount of curl that can cause adverse reflection distribution measurements is about 50 μm, whereas typical AG display components have a curl specification of hundreds of microns. In addition, the structuring process may cause the sample to become "cup" shaped, i.e., the edge of the AG side of the sample is raised relative to the center. Thus, to avoid affecting the accuracy of the reflectance distribution measurement as much as possible due to curling of the components, alternatively, the sheet of reference material 2330 may be held by vacuum suction and made flat relative to the sample 340 to be measured, as shown in FIG. 22, which shows a schematic view of the reflectance distribution assembly 2300 of this design docked to the optical measurement device 300. The design can not only solve the above problems due to sample curl, but also can be adapted to larger sized samples.
Alternatively, as shown in fig. 23 and 24, the reference material sheet 2330 may have a vacuum hole 2332 for flattening the sample 340 to be measured and hanging from the edge of the support plate 2320. The reflective dispensing assembly 2300 shown in the drawings carries a large-sized sample 340 to be measured (transparent rectangular shape), but can be suspended from the edge of the support plate 2320 without causing deformation of the large-sized sample 340 to be measured by the strong vacuum suction force provided by the vacuum holes 2332.
Optionally, the reflective dispensing assembly 2300 may further include a plurality of separate vacuum plenums 2360, as shown in FIG. 25, wherein a rear view of the reflective dispensing assembly 2300 is shown. The provision of the plurality of separate vacuum plenums may allow for flexible vacuum control of at least one of the reference material sheet and the sample to be measured.
Alternatively, a larger piece of reference material (which may be 410 x 305 x 6.25mm, for example) may be used to provide support for a large-sized sample, and the piece of reference material may also be slightly taller than its holding frame. Such a design allows a larger sample than the frame to be suspended from the support plate.
Alternatively, a magnet may be embedded in at least one of the reference material sheet 2330 and the bottom plate 2310, so that at least one of the sample 340 to be measured and the reference material sheet 2330 can be effectively fixed.
Alternatively, the reflective dispensing assembly 2300 described above may also be provided with movable positioners, such as glass positioner 2372 in fig. 23 and kinematic positioner 2374 in fig. 24. These movable positioners facilitate positioning the sample according to its size.
By the design of the utility model, the influence of sample curl and reference material curl on measurement variability can be effectively solved. This can further improve the accuracy of measuring the curled sample on the one hand, and can also make the user more confident to measure the curled sample and use the curled reference material for measurement on the other hand, which effectively improves the material utilization and reduces the cost. Furthermore, the above design of the present utility model also allows for a large-sized (up to a size of 400mm diagonal) sample to be measured with similar performance as the measurement of a smaller-sized sample.
When performing reflectance distribution measurements on large polygonal samples with ink boundaries to be measured, it is noted that the shape and design of such samples does not allow dicing the sample nor placing a piece of reference material on top of the structured sample, both of which are undesirable. Thus, alternatively, another form of reflective dispensing assembly may be employed in performing reflective dispensing measurements on such samples, as shown in FIG. 26.
Fig. 26 schematically shows how a reflection dispense measurement is performed on a large polygon with ink boundaries, wherein the reflection dispense assembly 3100 shown differs from the reflection dispense assembly 2300 shown in fig. 19 and 20 in that a reference material holder 3120 is specifically designed with rails 3122 at both ends, the reference material sheet 2330 being on this reference material holder 3120, the sample 340 to be measured being positioned on the support plate 2320 such that the central edge of the sample 340 to be measured is located at the center of the optical axis of the camera. The reference material sheet 2330 is not fixed in the support plate 2320, but slides along the rails 3122 over the surface of the sample 340 to be measured. The reference material sheet 2330 does not contact the surface of the sample to be measured 340 but is capable of moving around the sample to be measured 340 so that the measurement can be performed at a plurality of positions over the entire sample to be measured. With the above design, it is possible to measure all positions of the sample to be measured without damaging the sample to be measured and without dicing it.
The reference material sheet 2330 may be, for example, PMMA reference material, and may optionally have a metal support 2336. The reference material holder 3120 may be a vacuum chuck, which may be made of a black material (shown gray for illustration purposes), or other structure that may be used to hold a sample to be measured. The sample 340 to be measured may be held in place by vacuum suction or a scaffold structure.
In addition, in order to slide the reference material sheet 2330 along the rails 3122 over the surface of the sample 340 to be measured, various ways may be employed, for example, the reference material sheet 2330 may be provided with leg-shaped connectors 2332 as shown in fig. 26. The end of the leg link 2332 is provided with a roller 2334, which roller 2334 slides along the track 3122 such that the reference material sheet 2330 moves around the sample 340 to be measured (moves over the sample 340 to be measured) while being close to the sample 340 to be measured, but does not contact the sample 340 to be measured. Once the reference material sheet 2330 reaches above the measurement location, the leg connector 2332 locks the reference material sheet 2330 in the measurement location. The sheet of reference material 2330 in this active mode, like a "crab" climbing along track 3122, is "sitting" on track 3122 above the sample 340 to be measured (while physically near the sample 340 but not in contact with the sample 340 to be measured), and can be locked in place in any reflectometry measurement position.
Various aspects of the utility model are described above by way of some example embodiments. Nevertheless, it will be understood that various modifications may be made to the exemplary embodiments described above without departing from the spirit and scope of the utility model. For example, if the described techniques are performed in a different order and/or if components in the described systems, architectures, devices or circuits are combined in a different manner and/or replaced or supplemented by additional components or equivalents thereof, suitable results may also be achieved, and accordingly, such other embodiments as modified fall within the scope of the claims.

Claims (29)

1. An apparatus for optical measurement, the apparatus comprising:
a base assembly;
a frame assembly mounted on the base assembly for securing a flat panel illumination source on which a sample to be measured is placed; and
and the sample adjusting assembly is arranged on the frame assembly and is used for adjusting the sample to be measured so as to control the position of the sample to be measured.
2. The apparatus of claim 1, wherein the flat panel illumination source is a display.
3. The apparatus of claim 2, further comprising a display assembly in which the display is mounted, and wherein the frame assembly is a display-mounted assembly.
4. The apparatus of claim 3, wherein the apparatus further comprises:
a camera mount for securing a camera for capturing an image of the sample to be tested.
5. The apparatus of claim 4, wherein the apparatus further comprises:
a motion stage mounted above the base assembly for controlling the distance between the surface of the display and the sample to be measured.
6. The apparatus of any of claims 2-5, wherein the flat panel illumination source or the display is secured with a tool fitting specific to the flat panel illumination source or display, the parameters of the tool fitting remaining unchanged over the lifetime of the flat panel illumination source or display.
7. The apparatus of claim 6, wherein the display and its corresponding frame are assembled together throughout the lifetime of the display.
8. The apparatus of any of claims 3-5, wherein the display assembly is docked to the display mounting assembly by docking a tool ball mounted at a bottom of the display assembly with a V-block on the display mounting assembly.
9. The apparatus of any of claims 3-5, wherein the sample conditioning assembly is disposed over the display assembly and the sample to be measured is placed over a display surface in the display assembly and positioned by a slider of the sample conditioning assembly.
10. The apparatus of any one of claims 3-5, wherein the base assembly has mounted thereon a V-block for interfacing with a tool ball mounted to the bottom of the display assembly to fixedly position a display in the display assembly for measurement at the same location on the display.
11. The apparatus of any one of claims 3-5, wherein the base assembly has mounted thereon a ball conveyor roller to allow floatingly positioning a display in the display assembly for measurements at different locations on the display.
12. The apparatus of any of claims 2-5, wherein the display is a mask assembly comprising:
a pixel mask; and
a rear projection light source is provided,
wherein the sample to be measured is placed on the pixel mask.
13. The apparatus of claim 12, wherein the mask assembly further comprises:
a transparent substrate having an opaque matrix on a surface thereof,
wherein the pixel mask is disposed on the transparent substrate.
14. The apparatus of claim 13, wherein the mask assembly further comprises:
a carrier base mounted to the display mounting assembly; and
a mask carrier fixed on the carrier base,
wherein the rear projection light source is mounted below the carrier base, the pixel mask and the transparent substrate are located within the mask carrier, and the sample conditioning assembly is located on top of the mask carrier.
15. The apparatus of claim 14, wherein the mask carrier is secured to the carrier base by three magneto-kinematic mounts.
16. The apparatus of claim 14, wherein the mask carrier includes pockets on two different planes, respectively, for positioning the pixel mask and the transparent substrate, respectively.
17. The apparatus of claim 16, wherein the mask carrier further comprises a flex element and a clamping surface, wherein the pocket, the flex element, and the clamping surface are machined directly into the mask carrier.
18. The apparatus of claim 14, wherein the mask carrier comprises a well in which the pixel mask, the transparent substrate, and the sample to be measured are stacked.
19. The apparatus of claim 18, wherein a notch is provided in one corner of the cavity as an opening area and a measurement area of the rear projection light source, and the pixel mask, the transparent substrate, and the sample to be measured are fitted to the notched corner and fixed in the cavity.
20. The apparatus of claim 4 or 5, wherein the display assembly is replaced by a reflective dispensing assembly comprising:
A base plate mounted on the display mounting assembly or directly on the base assembly;
a support plate disposed on the base plate and aligned with an optical axis of the camera; and
a reference material sheet fixed in the support plate,
wherein the sample to be measured is located on the reference material sheet, and
wherein the sample adjustment assembly is positioned such that a center edge of the sample to be measured is located at a center of an optical axis of the camera.
21. The apparatus of claim 20, wherein the sheet of reference material is held and flattened against the sample to be measured by vacuum suction.
22. The apparatus of claim 20, wherein magnets are embedded in at least one of the sheet of reference material and the base plate.
23. The apparatus of claim 20, wherein the reflective distribution assembly further comprises an angle adjustment member for adjusting the angle of the support plate relative to the base plate.
24. The apparatus of claim 23, wherein the sheet of reference material is held and flattened against the sample to be measured by vacuum suction.
25. The apparatus of claim 24, wherein the sheet of reference material has vacuum holes for flattening the sample to be measured and hanging from the edge of the support plate.
26. The apparatus of claim 25, wherein the reflective dispensing assembly further comprises a plurality of separate vacuum plenums for vacuum controlling at least one of the sheet of reference material and the sample to be measured.
27. The apparatus of claim 23, wherein magnets are embedded in at least one of the sheet of reference material and the base plate.
28. The apparatus of claim 4 or 5, wherein the display assembly is replaced by a reflective dispensing assembly comprising:
a base plate mounted on the display mounting assembly or directly on the base assembly;
a support plate disposed on the base plate and aligned with an optical axis of the camera;
a reference sheet of material; and
a reference material holder having rails at both ends, wherein the reference material sheet is on the reference material holder,
wherein the sample to be measured is positioned on the support plate such that a center edge of the sample to be measured is located at a center of an optical axis of the camera, and
Wherein the sheet of reference material slides along the track over the surface of the sample to be measured.
29. The apparatus according to claim 28, wherein the reference material sheet has a leg-shaped connecting member, the end of which is provided with a roller which slides along the track such that the reference material sheet moves over the sample to be measured but does not contact the sample to be measured,
wherein the leg connector locks the reference material piece in a measuring position when the reference material piece reaches above the measuring position.
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