CN218973793U

CN218973793U - Laser damage threshold detection device

Info

Publication number: CN218973793U
Application number: CN202221437062.5U
Authority: CN
Inventors: 吴李宗; 陈轩
Original assignee: YANGZHOU LAIDA PHOTOELECTRIC TECHNOLOGY CO LTD
Current assignee: YANGZHOU LAIDA PHOTOELECTRIC TECHNOLOGY CO LTD
Priority date: 2022-06-10
Filing date: 2022-06-10
Publication date: 2023-05-05
Anticipated expiration: 2032-06-10

Abstract

The utility model relates to the field of detection devices, in particular to a laser damage threshold detection device, wherein a laser generator is arranged on the inner wall of the left side of a device shell, a cube prism is arranged on the right side of the laser generator, a light blocking plate, a converging lens, a diverging lens, an attenuator, a first beam splitter, a movable converging lens, a second beam splitter and a sample component are sequentially arranged on the right side of the cube prism, a photoelectric detection component is arranged between the second beam splitter and the sample component, an energy meter is arranged below the first beam splitter, a beam analyzer is fixed below the second beam splitter, and a computer is arranged on the left side of the energy meter.

Description

Laser damage threshold detection device

Technical Field

The utility model relates to the technical field of detection devices, in particular to a laser damage threshold detection device.

Background

In high power high energy laser systems, there are a large number of optical elements whose surfaces often need to be coated with a thin film to achieve specific optical properties. Studies have shown that the destruction of optical components under intense laser light is entirely determined by the resistance of the thin film on the surface of the component to laser light. Therefore, the laser damage threshold has become an indispensable performance index for optical elements and thin film devices. Efficient measurement of thin film laser damage threshold is also an important technical problem to be solved.

At present, a multi-light coaxial optical system is difficult to use because of chromatic dispersion of an optical element and different focal lengths and image plane positions of different laser beams, so that the coaxial optical system is difficult to ensure the collimation of the multiple beams and the same beam waist position, thereby causing serious measurement errors.

Disclosure of Invention

The utility model aims to solve the defects in the prior art and provides a laser damage threshold detection device.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

the utility model provides a laser damage threshold value detection device, includes device shell, laser generator, convergent lens and sample part, install on the inner wall of the left side upper end of device shell and be provided with laser generator, laser generator's right side interval is provided with the cube prism, cube prism right side main optical axis is last to be provided with the light barrier, convergent lens, divergent lens, attenuator, first beam splitter, removal convergent lens, second beam splitter and sample part in proper order, the right side installation of sample part is fixed on the right side inner wall of device shell, install between second beam splitter and the sample part and be provided with photoelectric detection part, the below installation of first beam splitter is fixed with the energy meter, the below of second beam splitter is fixed and is provided with beam analyzer, the left side of energy meter is provided with the computer, computer and energy meter, beam analyzer, photoelectric detection part wire are connected.

As a further improvement of the utility model, the lower ends of the cube prism, the light barrier, the converging lens and the attenuator are fixed on the mounting seat, the lower end of the mounting seat is welded and fixed on the mounting transverse plate, the left side and the right side of the mounting transverse plate are welded and fixed on the inner wall of the device shell, and a shock pad is glued and fixed between the cube prism and the mounting seat.

As a further improvement of the utility model, the lower ends of the divergent lens and the movable convergent lens are fixedly arranged on the movable mounting seat, the movable mounting seat comprises a driving motor, a fixed seat, a sliding groove and a transmission rod, the driving motor is fixedly arranged at one end of the movable mounting seat and is mechanically connected with the transmission rod in the movable mounting seat, the transmission rod is fixedly arranged in the sliding groove, auxiliary sliding grooves are symmetrically arranged at the left side and the right side of the sliding groove, a guide rod is fixedly arranged in the auxiliary sliding grooves, and a sliding ring is sleeved on the guide rod.

As a further improvement of the utility model, an oscilloscope is fixedly arranged at the lower end inside the photoelectric detection part, an optical fiber spectrometer is fixedly arranged at the right side inside the upper end of the photoelectric detection part, and a charge coupling element is arranged at the left side of the optical fiber spectrometer.

As a further improvement of the utility model, the mounting cross plate is provided with a light transmission through hole above the energy meter and the beam analyzer.

As a further improvement of the utility model, the laser generator is a power-adjustable laser generator, and the charge coupled device is an MV color CCD camera.

The beneficial effects of the utility model are as follows:

in the utility model, the power of the laser generator is regulated by the computer, other beam expanding, attenuating and focusing components do not need to be replaced and regulated, the measuring speed is improved, the degree of automation of the testing system is high, manual intervention is not needed, the damage judgment is carried out by adopting an image method and a plasma spectrometry during detection, the sensitivity is high, and the repeatability is good

Drawings

Fig. 1 is a schematic structural diagram of a laser damage threshold detection device according to the present utility model;

fig. 2 is a schematic diagram of an internal structure of a photoelectric detection component of the laser damage threshold detection device according to the present utility model;

fig. 3 is a schematic diagram of a mobile mounting seat of the laser damage threshold detection device provided by the utility model.

In the figure: 1 is a device housing, 2 is a laser generator, 3 is a cube prism, 4 is a light barrier, 5 is a converging lens, 6 is a diverging lens, 7 is an attenuator, 8 is a first beam splitter, 9 is a moving converging lens, 10 is a second beam splitter, 11 is a sample component, 12 is a photodetection component, 13 is a beam analyzer, 14 is a moving mount, 15 is an energy meter, 16 is a mount, 17 is a computer, 18 is a mounting cross plate, 19 is a charge coupled device, 20 is a fiber optic spectrometer, 21 is an oscilloscope, 22 is a drive motor, 23 is a fixed mount, 24 is a drive rod, 25 is a sliding groove, 26 is a guide rod, 27 is a sliding ring, 28 is an auxiliary sliding groove, and 29 is a shock pad.

Detailed Description

The present utility model will be described in detail below with reference to the embodiments shown in the drawings, but it should be understood that the embodiments are not limited to the present utility model, and functional, method, or structural equivalents and alternatives according to the embodiments are within the scope of protection of the present utility model by those skilled in the art.

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may include one or more of the feature, either explicitly or implicitly. In the description of the utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application can be understood by those of ordinary skill in the art in a specific context.

In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. The drawings illustrate preferred embodiments of the utility model. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Please refer to fig. 1 to 3 for a high embodiment of the present utility model.

Referring to fig. 1-3, a laser damage threshold detection device comprises a device housing 1, a laser generator 2, a converging lens 5 and a sample component 11, wherein the laser generator 2 is installed on the inner wall of the upper end of the left side of the device housing 1, a cubic prism 3 is arranged on the right side of the laser generator 2 at intervals, a light blocking plate 4, the converging lens 5, the diverging lens 6, an attenuator 7, a first beam splitter 8, a movable converging lens 9, a second beam splitter 10 and the sample component 11 are sequentially arranged on the right main optical axis of the cubic prism 3 at intervals, the right side of the sample component 11 is installed and fixed on the right inner wall of the device housing 1, a photoelectric detection component 12 is installed between the second beam splitter 10 and the sample component 11, an energy meter 15 is installed and fixed below the first beam splitter 8, a beam analyzer 13 is fixedly arranged below the second beam splitter 10, a computer 17 is arranged on the left side of the energy meter 15, the computer 17 is connected with the energy meter 15, the beam analyzer 16 and the photoelectric detection component 12 through wires, the cubic prism 3 is formed by bonding a pair of right angle prisms, a bonding block 2 of bonding blocks is used for bonding the bonding blocks, and a right angle prism is used for controlling the right angle prism and a high-angle reflection film is used on the light blocking plate 106is arranged on each right angle prism.

The lower ends of the cube prism 3, the light barrier 4, the converging lens 5 and the attenuator 7 are fixed on the mounting seat 16, the lower end of the mounting seat 16 is welded and fixed on the mounting transverse plate 18, the left side and the right side of the mounting transverse plate 18 are welded and fixed on the inner wall of the device shell 1, a shock pad 29 is glued and fixed between the cube prism 3 and the mounting seat 16, the stability of the cube prism 3 is improved to a certain extent due to the arrangement of the shock pad 29, the shaking of the cube prism 3 is reduced, and the detection accuracy is improved.

The divergent lens 6 and the movable convergent lens 9 are fixedly arranged on the movable mounting seat 14 at the lower end, the movable mounting seat 14 comprises a driving motor 22, a fixed seat 23, a sliding groove 25 and a transmission rod 24, the driving motor 22 is fixedly arranged at one end of the movable mounting seat 14, the driving motor 22 is mechanically connected with the transmission rod 24 in the movable mounting seat 14, the transmission rod 24 is fixedly arranged in the sliding groove 25, auxiliary sliding grooves 28 are symmetrically arranged on the left side and the right side of the sliding groove 25, guide rods 26 are fixedly arranged in the auxiliary sliding grooves 28, sliding rings 27 are sleeved on the guide rods 26, a beam expanding system is formed by adopting a Galileo telescopic system consisting of a pair of variable-spacing convergent lenses 5 and divergent lenses 6, the movable convergent lenses 9 are arranged on the movable mounting seat 14 and can move along the optical axis direction to compensate focal length difference caused by different wavelengths, and laser irradiated on the test surface of the sample component 11 is ensured to have the same defocus and spot size.

Further, an oscilloscope 21 is fixedly arranged at the lower end inside the photoelectric detection part 12, an optical fiber spectrometer 20 is fixedly arranged at the right side inside the upper end of the photoelectric detection part 12, a charge coupled device 19 is arranged at the left side of the optical fiber spectrometer 20, a light transmission through hole is formed above the energy meter 15 and the light beam analyzer 13 by a transverse plate 18, the laser generator 2 is a power-adjustable laser generator, the charge coupled device 19 is an MV color CCD camera, signals of two sensors are required to be collected simultaneously when a sample is tested, the judging method adopts an AND logic relationship, namely, one method judges that damage occurs, namely, the film is considered to be damaged, whether the film is damaged under strong laser or not is judged, and the two damage judging modes are adopted, namely, a plasma spectrum method adopts a plasma flashing phenomenon generated when the film damage is measured by the optical fiber spectrometer 20, and whether the film is damaged or not is judged according to spectrum peak positions; and secondly, an image method is adopted, high-resolution MV color CCD cameras are adopted to detect the surfaces of the elements before and after laser irradiation, pictures shot by the MV color CCD cameras are transmitted to a computer, the results are subjected to image processing and analysis, and whether the film is damaged is judged according to the changes of the surface morphology before and after the laser action. If any one of the two signals judges that the film is damaged, the sample is considered to be damaged.

In this embodiment, the position of each optical element in the optical system during transmission of each corresponding laser is determined according to the wavelength data of the corresponding laser, and stored by the computer 17, then the tested sample is mounted on the sample component 11, the test surface is guaranteed to face the light source direction, and is fixed on the inner wall of the device housing 1, the computer 17 sends instructions to the laser generator 2, the user selects the detection wavelength of the laser damage threshold, the computer 17 resets the test system, moves the divergent lens 6 to a preset position along the optical axis direction, adjusts the distance between the convergent lens 5 and the divergent lens 6 at the selected laser wavelength, simultaneously controls the movable convergent lens 9, drives the lens along the optical axis direction by moving the mounting seat 14, places the movable convergent lens 9 at the preset position, adopts the pump lamp of the laser generator 2 to control the laser pulse output, the color CCD camera collects the image information of the sample surface before the laser irradiation, then uses the pulse laser to irradiate the sample, and simultaneously uses the optical fiber spectrometer 20 to collect the plasma spectrum information, after the irradiation, the image information of the sample surface is collected again, and the computer 17 judges whether the sample surface is damaged in real time.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. The utility model provides a laser damage threshold value detection device, includes device housing, laser generator, convergent lens and sample part, its characterized in that: the device comprises a device shell, and is characterized in that a laser generator is arranged on the inner wall of the upper end of the left side of the device shell, a cube prism is arranged on the right side of the laser generator at intervals, a light barrier, a converging lens, a diverging lens, an attenuator, a first beam splitter, a movable converging lens, a second beam splitter and a sample component are sequentially arranged on the right main optical axis of the cube prism at intervals, the right side of the sample component is fixedly arranged on the right inner wall of the device shell, a photoelectric detection component is arranged between the second beam splitter and the sample component, an energy meter is fixedly arranged below the first beam splitter, a beam analyzer is fixedly arranged below the second beam splitter, and a computer is arranged on the left side of the energy meter and is connected with the energy meter, the beam analyzer and the photoelectric detection component through wires.

2. The laser damage threshold detection device according to claim 1, wherein lower ends of the cube prism, the light barrier, the converging lens and the attenuator are fixed on a mounting seat, lower ends of the mounting seat are welded and fixed on a mounting cross plate, left and right sides of the mounting cross plate are welded and fixed on inner walls of a device shell, and a shock pad is glued and fixed between the cube prism and the mounting seat.

3. The laser damage threshold detection device according to claim 1, wherein the lower ends of the divergent lens and the movable convergent lens are fixedly arranged on the movable mounting seat, the movable mounting seat comprises a driving motor, a fixing seat, a sliding groove and a transmission rod, the driving motor is fixedly arranged at one end of the movable mounting seat, the driving motor is mechanically connected with the transmission rod inside the movable mounting seat, the transmission rod is fixedly arranged in the sliding groove, auxiliary sliding grooves are symmetrically formed in the left side and the right side of the sliding groove, a guide rod is fixedly arranged in the auxiliary sliding grooves, and a sliding ring is sleeved on the guide rod.

4. The laser damage threshold detection device according to claim 1, wherein an oscilloscope is fixedly arranged at the lower end inside the photoelectric detection part, an optical fiber spectrometer is fixedly arranged on the right side inside the upper end of the photoelectric detection part, and a charge coupled element is arranged on the left side of the optical fiber spectrometer.

5. The laser damage threshold detection device according to claim 2, wherein the mounting cross plate is provided with a light-transmitting through hole above the energy meter and the beam analyzer.

6. The laser damage threshold detection device of claim 1, wherein the laser generator is a power-adjustable laser generator.

7. The laser damage threshold detection device of claim 4, wherein the charge coupled device is an MV color CCD camera.