CN218973430U - High-precision surface type measuring system - Google Patents
High-precision surface type measuring system Download PDFInfo
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- CN218973430U CN218973430U CN202120616957.4U CN202120616957U CN218973430U CN 218973430 U CN218973430 U CN 218973430U CN 202120616957 U CN202120616957 U CN 202120616957U CN 218973430 U CN218973430 U CN 218973430U
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Abstract
The utility model discloses a high-precision surface type measuring system, which belongs to the technical field of high-precision surface type measuring instruments and solves the problem that the surface type measuring system in the prior art is difficult to realize nano-scale surface type precision measurement on irregular curved surfaces such as spherical surfaces, aspheric surfaces and free curved surfaces. The utility model is used for high-precision surface type measurement of workpieces, and has small measurement error and small environmental influence.
Description
Technical Field
The utility model belongs to the technical field of high-precision surface type measuring instruments, and particularly relates to a high-precision surface type measuring system.
Background
The high-precision surface measuring instrument is an electronic measuring instrument used in the fields of information science and system science and mechanics.
In production and scientific practice, it is often necessary to measure the surface topography of many objects, i.e. to measure the microstructure of the surface. In many cases, it is particularly difficult and important to know the three-dimensional structure of a surface, especially a fine three-dimensional structure. The most common area measurement method in the prior art is to shoot the surface of an object and acquire an image of the object from a direction perpendicular to the surface. However, it is obvious that no matter how high the accuracy of the photographing apparatus is, the obtained image is only two-dimensional structural information of the object surface, and the third-dimensional information can only be estimated by the brightness of illumination. On smoother surfaces, i.e. on surfaces with less pronounced irregularities, it is difficult to obtain correct facial data.
In order to obtain the measurement data of the third dimension, i.e. the height, of the surface at the same time, a contact type measurement method is adopted in the prior art, i.e. the height of the surface is directly detected by using a detection head, and the three-dimensional structure information is obtained by combining the two-dimensional measurement data. However, this method has some problems:
one is that fine and complex surfaces cannot be measured. Because the measuring head is a mechanical device, microscopic surface type measurement cannot be carried out on a fine surface, surface type information can be obtained only through fitting of characteristic surfaces after measurement with larger spacing, and thus data with large errors are obtained, and a measuring result becomes meaningless;
secondly, only hard surfaces can be measured. Because the soft surface can deform after the measuring probe touches, incorrect surface information is obtained;
thirdly, it is difficult to measure substances that cannot be directly contacted. Many objects to be measured are toxic and harmful substances, such as radioactive substances, corrosive chemical substances and the like, and cannot be in direct contact, and the objects to be measured need to be separated from a measurer and a measuring instrument so as to ensure safety.
The laser measuring method overcomes the defects of the two measuring methods, and can obtain the structural information of an object through non-contact measurement, but the measuring method in the prior art is a mode of indirectly obtaining the information of the measured object through the movement of a measuring sensor and the rest of a workpiece, and is easy to be influenced by temperature, humidity and wind speed, so that larger errors can be generated in the measuring process, and the method can not normally measure accurate data for measuring irregular curved surfaces such as spherical surfaces, aspherical surfaces, free curved surfaces and the like.
The 3D measuring technique can also use a three-coordinate measuring instrument, a three-dimensional coordinate detection lattice is formed by taking points on a measuring surface, and the measuring instrument is finally matched with the measuring instrument of the surface, but the measuring precision is limited to only 0.0001mm, and the measuring error can be increased due to the fact that the minimum diameter of a three-coordinate measuring probe is 2mm, and the measuring of the nano-level surface type precision can not be realized.
Disclosure of Invention
The utility model aims at:
the surface type measuring system with high precision is provided for solving the problem that the surface type measuring system in the prior art is difficult to realize nano-scale surface type precision measurement on irregular curved surfaces such as spherical surfaces, aspherical surfaces, free curved surfaces and the like.
The technical scheme adopted by the utility model is as follows:
the utility model provides a high accuracy face type measurement system, includes real-time feedback system, motion scanning system, real-time positioning laser system, rotary table and braced frame, rotary table, real-time feedback system and motion scanning system are all installed on braced frame, real-time positioning laser system installs on motion scanning system, and real-time positioning laser system includes the rotation axis, install the confocal gauge head of spectrum on the rotation axis, motion scanning system includes X to the kinematic pair, install Z to the kinematic pair on the X to the kinematic pair, the rotation axis passes through the installing support and installs on Z to the kinematic pair, install laser displacement sensor on the installing support.
Further, the rotary workbench comprises a rotary mechanism arranged on the supporting frame, a workpiece fixing seat is arranged on the rotary mechanism, the rotary mechanism and the motion scanning system are both connected with a motion host, and the motion host is arranged inside the supporting frame.
Further, an air floatation system is arranged in the slewing mechanism, and the air floatation system comprises an air floatation turntable and a vibration reduction air bag.
Further, the real-time feedback system comprises a positioning reference frame and a plurality of plane reflectors, wherein the positioning reference frame is arranged above the rotary workbench, the plane reflectors are arranged on the positioning reference frame, and each plane reflector consists of an X-direction reflector and a Z-direction reflector.
Further, the laser displacement sensor comprises a double-frequency laser light source component, a sensor reflector, a beam splitter and a measuring head.
Further, a whole machine protective cover is arranged above the supporting frame and is arranged outside the real-time feedback system, the motion scanning system, the real-time positioning laser system and the rotary workbench.
The air floatation system compensates vibration generated by motion of each axis of the system, the temperature and the humidity are measured through the environment compensation unit of the laser sensor, the system is subjected to integral compensation, the environment compensation comprises temperature, humidity and pressure measurement, and the whole machine protective cover can isolate wind speed generated by air flow.
The spectrum confocal measuring head is a measuring tool for detecting surface type data of a workpiece, and the principle is that a beam of broad spectrum complex light is utilized to generate spectrum dispersion through a dispersion lens to form monochromatic light with different wavelengths, the measuring light irradiates the surface of a measured object to reflect back, only the monochromatic light meeting confocal conditions can be sensed by a spectrometer through a small hole, the wavelength of the sensing monochromatic light is calculated and sensed, a distance value is obtained through conversion, the wavelength of the monochromatic light is different, then the surface type parameters of the workpiece can be calculated by the wavelength of the monochromatic light, the measurement of the measuring head tracking normal line in a zooming mode only along a set track parameter is realized, and the longitudinal measurement resolution can reach the nano level.
In summary, due to the adoption of the technical scheme, the beneficial effects of the utility model are as follows:
1. according to the utility model, the surface type of the workpiece is normally tracked through the X-direction kinematic pair, the Z-direction kinematic pair and the rotating shaft in the motion scanning system, and then the workpiece is driven to rotate through the rotary workbench, so that the scanning of the workpiece in a three-dimensional space is realized.
2. According to the utility model, the workpiece to be measured is fixed on the rotating mechanism through the workpiece fixing seat, and the motion host controls the motion scanning system and the rotating mechanism to perform surface scanning on the workpiece through the parameters which are already set by the system, so that the workpiece is rotated more stably, the stability of the measuring process is ensured, and the error is further reduced.
3. The air floatation system can establish air conditions in a fixed range around the workpiece to be measured, reduces the influence of vibration on measurement in the whole system during the measurement process, and prevents larger errors.
4. The real-time feedback system transmits laser to the plane reflecting mirror through the laser displacement sensor, so that the laser is vertically reflected back, and thus, light signals are received, the intersection point of the two laser reflections is the rotation center of the rotating shaft, thus, the real-time compensation of plane position recording and running distance is realized, the feedback is rapid, and the data recording and updating speed is high.
Drawings
FIG. 1 is an internal block diagram of the present utility model;
FIG. 2 is an overall block diagram of the present utility model;
FIG. 3 is a front view of FIG. 2;
FIG. 4 is a schematic diagram of an optical path of the real-time feedback system of the present utility model;
FIG. 5 is a block diagram of a motion scanning system of the present utility model;
fig. 6 is a block diagram of a real-time positioning laser system.
The marks in the figure: the device comprises a 1-motion scanning system, a 2-real-time positioning laser system, a 3-rotary workbench, a 4-support frame, a 5-X direction kinematic pair, a 6-Z direction kinematic pair, a 7-rotary shaft, an 8-rotary mechanism, a 9-workpiece fixing seat, a 10-motion host, a 11-positioning reference frame, a 12-X direction reflecting mirror, a 13-Z direction reflecting mirror, a 14-spectrum confocal measuring head and a 15-workpiece to be measured.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Example 1
The utility model provides a high accuracy face type measurement system, as shown in FIG. 1, including real-time feedback system, motion scanning system 1, real-time location laser system 2, rotary table 3 and braced frame 4, rotary table 3, real-time feedback system and motion scanning system 1 all install on braced frame 4, real-time location laser system 2 installs on motion scanning system 1, real-time location laser system 2 includes rotation axis 7, install spectral confocal gauge head 14 on the rotation axis 7, motion scanning system 1 includes X to kinematic pair 5, install Z to kinematic pair 6 on the X to kinematic pair 5, rotation axis 7 passes through the installing support and installs on Z to kinematic pair 6, install laser displacement sensor on the installing support.
As shown in fig. 5, in order to realize normal tracking of the spectral confocal measuring head 14 along the surface of the workpiece, the X-direction kinematic pair 5 and the Z-direction kinematic pair 6 need to scan in the XZ plane, the rotating shaft 7 also needs to do rotary motion along the Y axis, and the three-dimensional stereo scanning of the workpiece surface shape and accurate measurement of surface shape parameters are realized in cooperation with the rotary table 3.
An X-direction sliding block is arranged between the X-direction kinematic pair 5 and the Z-direction kinematic pair 6, the sliding block can slide on the X-direction kinematic pair 5, a Z-direction sliding block is also arranged between the Z-direction kinematic pair 6 and the rotating shaft 7, and the mounting bracket is mounted on the Z-direction sliding block.
Example 2
On the basis of embodiment 1, as shown in fig. 2, the rotary table 3 comprises a rotary mechanism 8 mounted on the support frame 4, a workpiece fixing seat 9 is mounted on the rotary mechanism 8, the rotary mechanism 8 and the motion scanning system 1 are both connected with a motion host 10, and the motion host 10 is mounted inside the support frame 4.
Preferably, an air floatation system is arranged below the slewing mechanism 8. The air floatation system can establish air conditions in a fixed range around the workpiece 15 to be measured, so that the influence of temperature, humidity and wind speed on a measurement structure in the whole system measurement process is reduced, and larger errors caused by air condition differences are prevented.
Example 3
On the basis of embodiment 1, as shown in fig. 3-4, the real-time feedback system comprises a positioning reference frame 11 and a plurality of plane reflectors, wherein the positioning reference frame 11 is arranged above the rotary table 3, the plane reflectors are all arranged on the positioning reference frame 11, and each plane reflector consists of an X-direction reflector 12 and a Z-direction reflector 13.
Example 4
On the basis of embodiment 1, the laser displacement sensor includes a dual-frequency laser light source part, a sensor mirror, a beam splitter, and a gauge head. The laser displacement sensor uses double-frequency laser as a measuring light source, emits two infrared lasers with similar frequencies, reflects the two infrared lasers through a reflector, splits the two infrared lasers through a beam splitter, splits the two infrared lasers into X, Z directions, irradiates Z-direction lasers to a Z-direction reflector 13 through a measuring head, returns the Z-direction measuring head, calculates the change of an optical path between the measuring head and the Z-direction reflector 13 by utilizing an optical path difference, and calculates a Z-direction distance value, thereby performing Z coordinate compensation. The X-direction laser is reflected twice, passes through the other measuring head, irradiates the X-direction reflecting mirror 12, returns to the X-direction measuring head, calculates the change of the optical path between the measuring head and the X-direction reflecting mirror 12 by using the optical path difference, calculates the value of the X-direction distance, and performs the X-coordinate compensation. The principle light path is shown in fig. 4.
Preferably, the dual-frequency laser light source adopts LH3000 type.
Example 5
On the basis of the embodiment 1, a whole machine protection cover is arranged above the supporting frame 4, and the whole machine protection cover is arranged outside the real-time feedback system, the motion scanning system 1, the real-time positioning laser system 2 and the rotary table 3.
The measuring system of the utility model can also be matched with measuring data processing software, the measuring data processing software can process the data such as POWER, PV, RMS describing the surface deflection degree, zerNICKE coefficient and the like into required file types by recording the measuring data of the scanning system, synthesizing inclination and deflection compensation, directly displaying the three-dimensional image and the section view of an error map through a best fitting algorithm, and outputting the files.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (6)
1. The utility model provides a high accuracy face type measurement system, its characterized in that, including real-time feedback system, motion scanning system (1), real-time location laser system (2), rotary table (3) and braced frame (4), rotary table (3), real-time feedback system and motion scanning system (1) are all installed on braced frame (4), real-time location laser system (2) are installed on motion scanning system (1), and real-time location laser system (2) include rotation axis (7), install spectral confocal gauge head (14) on rotation axis (7), motion scanning system (1) include X to kinematic pair (5), install Z to kinematic pair (6) on X to kinematic pair (5), rotation axis (7) are installed on Z to kinematic pair (6) through the installing support, install laser displacement sensor on the installing support.
2. The high-precision surface type measuring system according to claim 1, wherein the rotary workbench (3) comprises a rotary mechanism (8) mounted on the supporting frame (4), a workpiece fixing seat (9) is mounted on the rotary mechanism (8), the rotary mechanism (8) and the motion scanning system (1) are connected with a motion host machine (10), and the motion host machine (10) is mounted inside the supporting frame (4).
3. A high precision surface type measuring system according to claim 2, characterized in that the swing mechanism (8) is internally provided with an air-floating system comprising an air-floating turntable and a vibration damping air-bag.
4. The high-precision surface type measuring system according to claim 1, wherein the real-time feedback system comprises a positioning reference frame (11) and a plurality of plane reflectors, the positioning reference frame (11) is arranged above the rotary table (3), the plane reflectors are arranged on the positioning reference frame (11), and the plane reflectors consist of an X-direction reflector (12) and a Z-direction reflector (13).
5. The high precision surface type measuring system according to claim 1, wherein the laser displacement sensor comprises a dual-frequency laser light source component, a sensor reflector, a beam splitter and a measuring head.
6. The high-precision surface type measuring system according to claim 1, wherein a whole machine protection cover is arranged above the supporting frame (4), and the whole machine protection cover is arranged outside the real-time feedback system, the motion scanning system (1), the real-time positioning laser system (2) and the rotary workbench (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120616957.4U CN218973430U (en) | 2021-03-26 | 2021-03-26 | High-precision surface type measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120616957.4U CN218973430U (en) | 2021-03-26 | 2021-03-26 | High-precision surface type measuring system |
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| Publication Number | Publication Date |
|---|---|
| CN218973430U true CN218973430U (en) | 2023-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120616957.4U Active CN218973430U (en) | 2021-03-26 | 2021-03-26 | High-precision surface type measuring system |
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| CN (1) | CN218973430U (en) |
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2021
- 2021-03-26 CN CN202120616957.4U patent/CN218973430U/en active Active
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