CN218957695U - Wafer clamping plug box carrier positioning mechanism - Google Patents
Wafer clamping plug box carrier positioning mechanism Download PDFInfo
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- CN218957695U CN218957695U CN202223365930.6U CN202223365930U CN218957695U CN 218957695 U CN218957695 U CN 218957695U CN 202223365930 U CN202223365930 U CN 202223365930U CN 218957695 U CN218957695 U CN 218957695U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to the technical field of wafer processing, in particular to a wafer clamping box carrier positioning mechanism. According to the utility model, the top of the clamping plug box is positioned through the positioning assembly, the clamping plug box is pressed on the positioning assembly through the pressing assembly, so that the positioning of the clamping plug box in the circumferential direction and the vertical direction is completed, the stability of the clamping plug box when the clamping plug box is used for taking and placing wafers is ensured, the wafer on the clamping plug box is stably supported by the supporting groove on the supporting plate and the fixing groove synchronously, the movement of the wafer is effectively prevented, the edge of the wafer is prevented from being worn, and the safety of the wafer in the transportation, taking and placing processes can be ensured.
Description
Technical Field
The utility model relates to the technical field of wafer processing, in particular to a wafer clamping box carrier positioning mechanism.
Background
A wafer is a silicon chip used for manufacturing a silicon semiconductor integrated circuit, is the most commonly used semiconductor material, and is called a wafer because of its circular shape, and is a carrier used for producing an integrated circuit. The wafer needs to be placed in the carrying box, and the wafer needs to be taken out of the carrying box through the mechanical arm for use during production.
When the wafer box is placed and positioned, an operator manually aligns according to experience during each adjustment, so that the alignment is difficult to achieve at one time, time and labor are wasted, the requirement on the operator is high, and the position of the wafer box facing to the material taking and placing position is difficult to ensure after the wafer box with one specification is positioned each time, so that the positioning precision is low; meanwhile, the existing wafer box generally only supports two ends of a wafer and the middle of the wafer is suspended, so that the wafer is damaged due to shaking in the transportation process of the wafer, and the production cost is increased.
Disclosure of Invention
The utility model aims to solve the technical problem of providing the wafer clamping box carrier positioning mechanism which can finish the positioning of the clamping box in the circumferential direction and the vertical direction, ensure the stability of the clamping box when the wafer is taken and placed, effectively prevent the movement of the wafer and avoid the abrasion of the edge of the wafer.
In order to solve the technical problems, the technical scheme adopted by the utility model for solving the technical problems is as follows:
a wafer chuck carrier positioning mechanism comprising:
a base plate on which a positioning station is provided;
the positioning assembly is arranged on the positioning station;
the clamping plug box is arranged on the positioning assembly, an accommodating space for loading wafers is formed in the clamping plug box, and a discharge hole is formed in the accommodating space and used for taking and placing the wafers in the accommodating space;
the material pressing assembly is arranged on the substrate and used for pressing the clamping plug box on the positioning assembly
The two inner side walls of the accommodating space are uniformly divided into a plurality of fixing grooves by the supporting blocks, the two sides of the clamping plug box are provided with supporting plates, the supporting plates are provided with supporting grooves communicated with the fixing grooves, and the fixing grooves are in one-to-one correspondence with the supporting grooves.
In one embodiment of the utility model, the positioning assembly comprises a plurality of fixing blocks, the plurality of fixing blocks are arranged on the base plate in a surrounding mode, and positioning grooves matched with the clamping plug boxes are formed in the fixing blocks.
In one embodiment of the utility model, a fixing plate is arranged at the bottom of the plug box, a limiting protrusion is arranged on the fixing plate, two fixing blocks are arranged on the base plate, fixing gaps matched with the limiting protrusion are arranged on the two fixing blocks, and the limiting protrusion is arranged on the fixing gaps in a penetrating mode.
In one embodiment of the utility model, the substrate is provided with a fixing groove, two fixing blocks are respectively arranged at two sides of the fixing groove, the substrate is provided with a detection frame, and the detection frame is provided with a detection sensor for detecting the position condition that the fixing protrusion passes through the fixing gap.
In one embodiment of the utility model, the pressing assembly comprises a supporting frame, the supporting frame is arranged on the base plate, a rotating seat is arranged on the supporting frame and hinged with one end of a pressing block, a handle is arranged on the pressing block, and the pressing block is driven to rotate by pulling the handle by taking the rotating seat as a center until the pressing block is pressed on the plug box.
In one embodiment of the utility model, the support frame is provided with a mounting block, the mounting block is provided with a first magnet, the pressing block is provided with a mounting hole, the mounting hole is provided with a second magnet, and when the pressing block is pressed on the clamping plug box, the first magnet and the second magnet are attracted together in a ferromagnetic mode.
In one embodiment of the utility model, a support is arranged on the support frame, a support rod is arranged on the support frame, a support hole matched with the support rod is arranged on the pressing block, a third magnet is arranged on the support hole, and the free end of the support rod is magnetically connected with the third magnet.
In one embodiment of the utility model, the pressing block comprises a turnover plate, one end of the turnover plate is hinged with the rotating seat, the other end of the turnover plate is connected with the pressing block, the handle is arranged on the pressing block, a waist-shaped groove is arranged on the pressing block, a connecting hole is arranged on the turnover plate, a bolt is arranged on the waist-shaped groove, and the bolt penetrates through the waist-shaped groove and is connected with the connecting hole to fix the pressing block and the turnover plate.
In one embodiment of the utility model, the supporting plates are obliquely arranged on the clamping plug box, the supporting plates and the side wall of the clamping plug box are arranged at an obtuse angle, the free ends of the two supporting plates are mutually close to each other to form a splayed structure, and the wafers in the accommodating space are supported through the fixing grooves and the supporting grooves on the supporting plates.
In one embodiment of the utility model, the device further comprises a connecting plate, wherein the connecting plate is connected with the free end of the supporting plate, the connecting plate is arranged in parallel with the side wall of the clamping plug box, a plurality of guide grooves are formed in the connecting plate, the guide grooves, the fixing grooves and the supporting grooves are communicated together, and the length of the guide grooves is smaller than the thickness of the connecting plate.
The utility model has the beneficial effects that:
according to the utility model, the top of the clamping plug box is positioned through the positioning assembly, the clamping plug box is pressed on the positioning assembly through the pressing assembly, so that the positioning of the clamping plug box in the circumferential direction and the vertical direction is completed, the stability of the clamping plug box when the clamping plug box is used for taking and placing wafers is ensured, the wafer on the clamping plug box is stably supported by the supporting groove on the supporting plate and the fixing groove synchronously, the movement of the wafer is effectively prevented, the edge of the wafer is prevented from being worn, and the safety of the wafer in the transportation, taking and placing processes can be ensured.
Drawings
FIG. 1 is a schematic view of a wafer cassette carrier positioning mechanism according to the present utility model.
Fig. 2 is a schematic view of a press assembly according to the present utility model.
Fig. 3 is a schematic view of a cartridge of the present utility model.
Fig. 4 is a schematic view of a cartridge of the present utility model.
The reference numerals in the figures illustrate: 1. a substrate; 11. positioning a station; 2. a cartridge; 21. a support block; 22. a fixing groove; 23. a discharge port; 24. a support plate; 25. a support groove; 26. a connecting plate; 27. a guide groove; 3. a positioning block; 31. a positioning groove; 4. a support frame; 41. a rotating seat; 5. briquetting; 51. a turnover plate; 52. pressing a material block; 53. a handle; 54. a waist-shaped groove; 55. a first magnet; 56. a second magnet; 57. a mounting block; 6. a bracket; 61. a support rod; 62. a third magnet; 7. a fixing plate; 71. a limit protrusion; 72. a fixed block; 73. fixing the gap; 74. a detection frame; 75. and detecting the sensor.
Detailed Description
The present utility model will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the utility model and practice it.
Referring to fig. 1-4, a wafer cassette carrier positioning mechanism, comprising:
a base plate 1 on which a positioning station 11 is provided;
the positioning assembly is arranged on the positioning station 11;
the clamping plug box 2 is arranged on the positioning assembly, an accommodating space for loading wafers is formed in the clamping plug box 2, and a discharge hole 23 is formed in the accommodating space and used for taking and placing the wafers in the accommodating space;
the material pressing assembly is arranged on the base plate 1 and is used for pressing the clamping plug box 2 on the positioning assembly
Wherein, be provided with a plurality of supporting shoe 21 on accommodation space's the two inside walls, the supporting shoe 21 is with accommodation space side inside wall equal division into a plurality of fixed recess 22, the card stopper box 2 both sides are provided with backup pad 24, be provided with on the backup pad 24 with the supporting groove 25 that fixed recess 22 is linked together, just fixed recess 22 with supporting groove 25 one-to-one sets up.
According to the utility model, the top of the clamping box 2 is positioned through the positioning assembly, the clamping box 2 is pressed on the positioning assembly through the pressing assembly, so that the positioning of the clamping box 2 in the circumferential direction and the vertical direction is completed, the stability of the clamping box 2 in taking and placing wafers is ensured, the wafer on the clamping box 2 is stably supported by the supporting grooves 25 on the supporting plate 24 and the fixing grooves 22 synchronously, the movement of the wafer is effectively prevented, the edge of the wafer is prevented from being worn, and the safety of the wafer in the transportation, taking and placing processes can be ensured.
In one embodiment of the present utility model, the positioning assembly includes a plurality of fixing blocks 72, the plurality of fixing blocks 72 are enclosed on the base plate 1, and the fixing blocks 72 are provided with positioning slots 31 matched with the cartridge 2.
Specifically, the position of the positioning block 3 on the substrate 1 is adjusted, so that the positioning groove 31 is opposite to the corner of the wafer plug box 2, the plug box 2 is placed on the positioning component, the positioning step of the wafer plug box 2 can be simplified, the positioning is standard, the time consumption is less, and the efficiency and quality requirements of batch production are met.
In one embodiment of the present utility model, a fixing plate 7 is disposed at the bottom of the cartridge 2, a limiting protrusion 71 is disposed on the fixing plate 7, two fixing blocks 72 are disposed on the base plate 1, a fixing gap 73 matched with the limiting protrusion 71 is disposed on the two fixing blocks 72, and the limiting protrusion 71 is disposed on the fixing gap 73 in a penetrating manner.
Specifically, the limiting protrusion 71 is disposed on the fixing gap 73 in a penetrating manner, so that the wafer chuck 2 is accurately and firmly fixed at the set position, thereby playing a role in positioning and improving the applicability of the device.
In one embodiment of the present utility model, the base plate 1 is provided with a fixing groove, and two fixing blocks 72 are respectively disposed at two sides of the fixing groove, the base plate 1 is provided with a detection frame 74, the detection frame 74 is provided with a detection sensor 75, and the detection sensor 75 is used for detecting the situation that the fixing protrusion passes through the fixing gap 73.
Specifically, place the stopper box 2 on locating component for fixed protruding the establishing of stopper box 2 bottom is worn to establish fixed clearance 73, and detection sensor 75 detects fixed protruding position and confirms that stopper box 2 is placed correctly, can guarantee that stopper box 2 places steadily, guarantees to get the stability of putting the wafer.
In one embodiment of the present utility model, the pressing assembly includes a support frame 4, the support frame 4 is disposed on the base plate 1, a rotating seat 41 is disposed on the support frame 4, the rotating seat 41 is hinged to one end of the pressing block 5, a handle 53 is disposed on the pressing block 5, and the pressing block 5 is driven to rotate around the rotating seat 41 by pulling the handle 53 until the pressing block 5 is pressed on the plug box 2.
Specifically, the handle 53 is pulled to drive the pressing block 5 to rotate by taking the rotary seat 41 as a center, so that the pressing block 5 is pressed on the clamping plug box 2, the vertical positioning of the wafer clamping plug box 2 is completed, the pressing process is simple, the time consumption is short, the positioning accuracy is high, and the processing efficiency can be effectively improved.
In one embodiment of the present utility model, the support frame 4 is provided with a mounting block 57, the mounting block 57 is provided with a first magnet 55, the pressing block 5 is provided with a mounting hole, the mounting hole is provided with a second magnet 56, and when the pressing block 5 is pressed on the cartridge 2, the first magnet 55 and the second magnet 56 are magnetically attracted together.
Specifically, the pressing block 52 is tightly pressed on the top of the clamping box 2, and the first magnet 55 and the second magnet 56 are magnetically attracted together, so that the pressing block 52 can be guaranteed to be tightly pressed on the clamping box 2 all the time, the positioning effect of the clamping box 2 is guaranteed, the stability of taking and placing wafers by the clamping box 2 is avoided, the traditional manual clamping box 2 mode can be reduced, the hand-changing frequency is reduced, the processing efficiency and the production efficiency are improved, and the automatic production is facilitated.
In one embodiment of the present utility model, the support frame 4 is provided with a support frame 6, the support frame 6 is provided with a support rod 61, the pressing block 5 is provided with a support hole matched with the support rod 61, the support hole is provided with a third magnet 62, and the free end of the support rod 61 is magnetically connected with the third magnet 62.
Specifically, when the pressing block 5 is at the initial position, the supporting rod 61 on the bracket 6 and the third magnet 62 on the turnover plate 51 are magnetically attracted together, so that the pressing block 5 is conveniently fixed in position, and the damage caused by the turnover of the pressing block 5 is avoided.
In one embodiment of the present utility model, the pressing block 5 includes a turnover plate 51, one end of the turnover plate 51 is hinged to the rotating seat 41, the other end is connected to a pressing block 52, the handle 53 is disposed on the pressing block 52, a waist-shaped groove 54 is disposed on the pressing block 52, a connection hole is disposed on the turnover plate 51, and a bolt is disposed on the waist-shaped groove 54, and is connected to the connection hole through the waist-shaped groove 54 to fix the pressing block 52 and the turnover plate 51.
Specifically, pulling handle 53 makes turnover plate 51 rotate with roating seat 41 as the center, presses the material piece 52 to compress tightly at card stopper box 2 top for compress tightly wafer card stopper box 2 on base plate 1, can guarantee that card stopper box 2 is evenly compressed tightly, improves positioning efficiency, through setting up waist type groove 54, the bolt is worn waist type groove 54 with the connecting hole is connected and is used for fixed material piece 52 and turnover plate 51, can realize compressing tightly the wafer card stopper box 2 of different specifications, realizes floating and compresses tightly the function.
In one embodiment of the present utility model, the supporting plates 24 are obliquely disposed on the cartridge 2, the supporting plates 24 are disposed at an obtuse angle with respect to the side wall of the cartridge 2, the free ends of the two supporting plates 24 are adjacent to each other in a splayed structure, and the wafers in the accommodating space are supported by the fixing grooves 22 and the supporting grooves 25 on the supporting plates 24.
Specifically, the free ends of the two support plates 24 are close to each other in a splayed structure, so that the support area for the wafer is enlarged, and the loading stability of the wafer can be improved.
In one embodiment of the present utility model, the connector plate 26 is connected to the free end of the support plate 24, the connector plate 26 is disposed parallel to the side wall of the cartridge 2, a plurality of guide grooves 27 are disposed on the connector plate 26, the guide grooves 27, the fixing groove 22 and the support groove 25 are communicated together, and the length of the guide grooves 27 is smaller than the thickness of the connector plate 26.
Specifically, the connecting plate 26 is connected with the free end of the supporting plate 24, and the connecting plate 26 is arranged in parallel with the side wall of the clamping box 2, so that a V-shaped structure can be formed at the joint of the connecting plate 26 and the supporting plate 24 to form another supporting point for a wafer, and three-point support is formed with two supporting points of the supporting block 21, so that stable support is easy to carry out according to the principle that a plane is determined by the three points, and the inclination of the edge of the wafer during movement is effectively prevented, and the whole wafer is inclined to cause fragments.
The using process comprises the following steps:
the position of the positioning block 3 on the base plate 1 is adjusted, the positioning groove 31 is opposite to the corner of the plug box 2, the plug box 2 is placed on the positioning assembly, the fixing protrusion at the bottom of the plug box 2 penetrates through the fixing gap 73, after the detection sensor 75 detects the fixing protrusion to confirm that the plug box 2 is placed correctly, the pressing block 5 is at the initial position, the supporting rod 61 on the support 6 is magnetically attracted with the third magnet 62 on the turnover plate 51, the handle 53 is pulled to enable the turnover plate 51 to rotate around the rotary seat 41, the pressing block 52 is pressed on the top of the plug box 2, and the first magnet 55 and the second magnet 56 are magnetically attracted together, so that the positioning of the wafer plug box 2 is completed.
The above-described embodiments are merely preferred embodiments for fully explaining the present utility model, and the scope of the present utility model is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present utility model, and are intended to be within the scope of the present utility model. The protection scope of the utility model is subject to the claims.
Claims (10)
1. The utility model provides a wafer card stopper box carrier positioning mechanism which characterized in that includes:
a base plate on which a positioning station is provided;
the positioning assembly is arranged on the positioning station;
the clamping plug box is arranged on the positioning assembly, an accommodating space for loading wafers is formed in the clamping plug box, and a discharge hole is formed in the accommodating space and used for taking and placing the wafers in the accommodating space;
the material pressing assembly is arranged on the base plate and used for pressing the clamping plug box on the positioning assembly;
the two inner side walls of the accommodating space are uniformly divided into a plurality of fixing grooves by the supporting blocks, the two sides of the clamping plug box are provided with supporting plates, the supporting plates are provided with supporting grooves communicated with the fixing grooves, and the fixing grooves are in one-to-one correspondence with the supporting grooves.
2. The wafer cassette carrier positioning mechanism of claim 1, wherein the positioning assembly comprises a plurality of fixed blocks, the plurality of fixed blocks are enclosed on the substrate, and the fixed blocks are provided with positioning grooves matched with the cassette.
3. The wafer cassette carrier positioning mechanism of claim 1, wherein a fixing plate is arranged at the bottom of the cassette, a limiting protrusion is arranged on the fixing plate, two fixing blocks are arranged on the substrate, fixing gaps matched with the limiting protrusion are arranged on the two fixing blocks, and the limiting protrusion penetrates through the fixing gaps.
4. The wafer cassette carrier positioning mechanism of claim 3, wherein a fixing groove is formed in the substrate, two fixing blocks are respectively arranged on two sides of the fixing groove, a detection frame is arranged on the substrate, and a detection sensor is arranged on the detection frame and is used for detecting the position condition that the fixing protrusion penetrates through the fixing gap.
5. The wafer chuck carrier positioning mechanism according to claim 1, wherein the pressing assembly comprises a supporting frame, the supporting frame is arranged on the base plate, a rotating seat is arranged on the supporting frame and is hinged with one end of a pressing block, a handle is arranged on the pressing block, and the pressing block is driven to rotate by pulling the handle by taking the rotating seat as a center until the pressing block is pressed on the chuck.
6. The wafer cassette carrier positioning mechanism of claim 5, wherein the support frame is provided with a mounting block, the mounting block is provided with a first magnet, the press block is provided with a mounting hole, the mounting hole is provided with a second magnet, and when the press block is pressed on the cassette, the first magnet and the second magnet are attracted together.
7. The wafer cassette carrier positioning mechanism of claim 5, wherein a bracket is provided on the support frame, a support bar is provided on the bracket, a support hole matched with the support bar is provided on the pressing block, a third magnet is provided on the support hole, and a free end of the support bar is magnetically connected with the third magnet.
8. The wafer cassette carrier positioning mechanism of claim 5, wherein the press block comprises a turnover plate, one end of the turnover plate is hinged to the rotary seat, the other end of the turnover plate is connected with a pressing block, the handle is arranged on the pressing block, a waist-shaped groove is formed in the pressing block, a connecting hole is formed in the turnover plate, a bolt is arranged on the waist-shaped groove, and the bolt penetrates through the waist-shaped groove and is connected with the connecting hole to fix the pressing block and the turnover plate.
9. The wafer cassette carrier positioning mechanism of claim 1, wherein the support plate is disposed obliquely on the cassette, the support plate is disposed at an obtuse angle to the sidewall of the cassette, the free ends of the two support plates are adjacent to each other in a splayed configuration, and the wafer in the receiving space is supported by the fixing groove and the support groove in the support plate.
10. The wafer cassette carrier positioning mechanism of claim 1, further comprising a link plate, the link plate being connected to the free end of the support plate and parallel to the cassette side wall, the link plate being provided with a plurality of guide slots, the fixing grooves, and the support slots being in communication with the guide slots for a length less than the thickness of the link plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202223365930.6U CN218957695U (en) | 2022-12-15 | 2022-12-15 | Wafer clamping plug box carrier positioning mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202223365930.6U CN218957695U (en) | 2022-12-15 | 2022-12-15 | Wafer clamping plug box carrier positioning mechanism |
Publications (1)
Publication Number | Publication Date |
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CN218957695U true CN218957695U (en) | 2023-05-02 |
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ID=86110353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202223365930.6U Active CN218957695U (en) | 2022-12-15 | 2022-12-15 | Wafer clamping plug box carrier positioning mechanism |
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CN (1) | CN218957695U (en) |
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2022
- 2022-12-15 CN CN202223365930.6U patent/CN218957695U/en active Active
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