CN218951482U - Sputtering coating substrate frame - Google Patents
Sputtering coating substrate frame Download PDFInfo
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- CN218951482U CN218951482U CN202223119162.6U CN202223119162U CN218951482U CN 218951482 U CN218951482 U CN 218951482U CN 202223119162 U CN202223119162 U CN 202223119162U CN 218951482 U CN218951482 U CN 218951482U
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- frame body
- substrate
- frame
- elastic
- clamping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a sputtering coating substrate frame, which comprises a frame body, an odd number of cross rod assemblies and an even number of elastic sheet clamping assemblies, wherein the frame body comprises a frame body and a frame lower plate, the frame lower plate is fixedly arranged at the bottom of the frame body, the frame body is of a rectangular structure, two sides of the frame body are provided with sliding grooves, the frame body is connected with the sliding groove cross rod assemblies in a sliding manner, and the adjacent cross rod assemblies are arranged up and down in parallel; each elastic sheet clamping assembly comprises an elastic sheet piece and a supporting piece which are oppositely arranged and is used for clamping and fixing the substrate. According to the utility model, the spring piece and the supporting piece in the spring piece clamping assembly are utilized, so that the loading and unloading efficiency of the substrate is improved, and the influence on the coating effect caused by shielding of the clamping assembly when the substrate is coated is avoided; on the other hand, the buffer effect is provided for slight shaking of the substrate in the vertical direction in the transferring process, so that the safety of substrate transferring is remarkably improved; and through adjusting the horizontal pole subassembly, can adapt to the centre gripping demand of different size substrates, expanded the range of application.
Description
Technical Field
The utility model relates to the field of sputtering coating devices, in particular to a sputtering coating substrate frame.
Background
At present, in order to save the occupied area and improve the working efficiency on a vertical vacuum sputtering coating production line, a substrate conveying assembly line and a coating assembly line are arranged in parallel, and a rotary platform is generally used as a substrate transfer mechanism between the conveying assembly line and the coating assembly line to connect the conveying assembly line and the coating assembly line for operation. The existing continuous vacuum coating device generally comprises a plurality of vacuum chambers which are connected in sequence, and a transmission device is arranged at the bottom of each vacuum chamber; a substrate frame for fixing the substrate is arranged on the transmission device, and clamping components for fixing the substrate are arranged on the substrate frame and are closely abutted with the edge of the substrate; however, in the practical application process, the clamping force of the clamping part is not easy to control, so that the edge of the substrate is damaged due to over-tight clamping in the process of conveying the substrate, and the traditional clamping part is not convenient enough when the substrate is assembled and disassembled. Therefore, a new substrate holder fixing device needs to be provided to solve the defects existing in the prior art.
Disclosure of Invention
The utility model aims to provide a sputtering coating substrate frame which is used for solving the problems that a clamping part on the substrate frame can damage the edge of a substrate and is not convenient to assemble and disassemble in the prior art.
In order to solve the technical problems, the utility model provides a sputtering coating substrate frame, which comprises a frame body, odd cross rod assemblies and even spring sheet clamping assemblies, wherein the frame body comprises a frame body and a frame lower plate, the frame lower plate is fixedly arranged at the bottom of the frame body, the frame body is of a rectangular structure, two sides of the frame body are provided with sliding grooves, the frame body is connected with the sliding groove cross rod assemblies in a sliding manner, and the adjacent cross rod assemblies are arranged in parallel up and down; each shell fragment clamping assembly all includes shell fragment spare and the bearing spare of relative setting, and in a pair of adjacent horizontal pole subassembly, the shell fragment spare sets up in the horizontal pole subassembly bottom that is located the top, and the bearing spare sets up in the horizontal pole subassembly top that is located the below, shell fragment spare and bearing spare respectively with the top and the bottom butt of substrate for the fixed substrate of centre gripping.
Preferably, each cross bar assembly is composed of a cross bar and locking pieces arranged at two ends of the cross bar, and the locking pieces are in threaded connection with the end parts of the cross bar and used for fixing the position of the cross bar.
Preferably, the elastic piece is composed of an assembling part, an elastic part and a clamping part which are sequentially connected, wherein the assembling part, the elastic part and the clamping part are of a vertically bent sheet structure, and the elastic part is inclined in a free state; the assembly part is provided with a plurality of through holes, and the assembly part is fixedly connected with the top of the cross rod through the through holes by bolts; when the substrate is clamped, the clamping part is abutted with the substrate, and the elastic part is in an elastic deformation state.
Preferably, the elastic portion is a metal sheet having elastic deformation characteristics.
Preferably, a plurality of screw holes are formed in the inner side of the top of the frame body, and the screw holes are correspondingly matched with the through holes of the elastic piece assembly part.
Preferably, the supporting member is a strip-shaped structure with a groove, and the groove of the supporting member is abutted with the bottom of the substrate.
Preferably, the sputtering coating substrate frame further comprises a magnetic strip, wherein the magnetic strip is in a strip-shaped structure, and the magnetic strip is fixedly arranged on the outer side of the top of the frame body and is used for being magnetically connected with a magnetic conduction mechanism in the coating system.
Preferably, the sputtering coating substrate frame further comprises a transmission rod, the bottom of the lower plate of the frame is fixedly connected with the transmission rod through bolts, and the transmission rod is arranged on a transmission wheel in the coating system.
The beneficial effects of the utility model are as follows: compared with the prior art, the utility model provides a sputtering coating substrate frame, which utilizes the elastic piece and the supporting piece in the elastic piece clamping assembly to realize clamping and fixing of the substrate, so that on one hand, the loading and unloading efficiency of the substrate is improved, and the influence on the coating effect caused by shielding of the clamping assembly when the substrate is coated is avoided; on the other hand, the flexible elastic sheet can provide a buffer effect for slight shaking of the substrate in the vertical direction in the transferring process, so that the transferring safety of the substrate is remarkably improved; and through adjusting the horizontal pole subassembly, can adapt to the centre gripping demand of different size substrates, expanded the range of application.
Drawings
FIG. 1 is a schematic view of a sputter coated substrate holder according to one embodiment of the present utility model;
FIG. 2 is a schematic structural view of a spring clip assembly according to one embodiment of the sputter coated substrate holder of the present utility model: a is a structural schematic diagram of the spring piece, b is a side view structural schematic diagram of the bearing piece;
in the figure: the device comprises a frame body 1, a frame body 11, a frame body 12, a frame lower plate 13, a chute 2, a cross bar assembly 21, a cross bar 22, a locking piece 3, a spring clamping assembly 31, a spring piece 311, an assembly part 312, an elastic part 313, a clamping part 32, a supporting piece 321, a groove 4, a magnetic stripe 5, a transmission rod 6, a transmission wheel 7, a substrate 8 and a bolt 8.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, are intended to fall within the scope of the present utility model.
Referring to fig. 1, the sputter-coated substrate frame of the present utility model includes a frame body 1, an odd number of cross bar assemblies 2, an even number of spring clip assemblies 3, a magnetic stripe 4 and a transmission rod 5, wherein the frame body 1 includes a frame body 11 and a frame lower plate 12, the frame lower plate 12 is fixedly arranged at the bottom of the frame body 11, the frame body 11 has a rectangular structure, two sides are provided with sliding grooves 13, the cross bar assemblies 2 are slidably connected with the frame body 11 through the sliding grooves 13, and the adjacent cross bar assemblies 2 are vertically arranged in parallel; each spring clip holding assembly 3 includes a spring clip member 31 and a supporting member 32 disposed opposite to each other, wherein in the pair of adjacent rail assemblies 2, the spring clip member 31 is disposed at the bottom of the rail assembly located above, the supporting member 32 is disposed at the top of the rail assembly located below, and the spring clip member 31 and the supporting member 32 are respectively abutted to the top and the bottom of the substrate 7 for clamping and fixing the substrate 7. The magnetic stripe 4 is fixedly arranged on the outer side of the top of the frame 11 and is used for being magnetically connected with a magnetic conduction mechanism in a film coating system, so that the substrate frame can horizontally move forward when in transverse transmission; the bottom of the lower plate 12 of the frame is fixedly connected with a transmission rod 5 through bolts, the transmission rod 5 is arranged on a transmission wheel in the coating system, and the transmission wheel drives the sputtering coating substrate frame to advance. The detailed structures of the rail assembly 2 and the dome clamp assembly 3 are described below.
Specifically, each cross bar assembly 2 is composed of a cross bar 21 and locking pieces 22 arranged at two ends of the cross bar 21, the locking pieces 22 are in threaded connection with the end parts of the cross bar 21, and the positions of the cross bars 21 can be fixed by screwing the locking pieces 22; because the cross bars 21 can slide up and down along the sliding grooves 13 on the side surfaces of the frame 11, the distance between the adjacent cross bar assemblies 2 can be adjusted through sliding, so that the clamping requirements of substrates with different sizes can be met. The number of the cross bar assemblies 2 is odd, and the specific number of the cross bar assemblies 2 and the length and width of the frame 11 can be adaptively selected according to the actual substrate loading and unloading requirements, which is not limited herein.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an elastic sheet clamping assembly in an embodiment of a sputter-coated substrate holder according to the present utility model, wherein a is a schematic structural diagram of an elastic sheet member, and b is a schematic side structural diagram of a supporting member. Each elastic piece clamping assembly 3 comprises an elastic piece 31 and a supporting piece 32, wherein the elastic piece 31 is composed of an assembling part 311, an elastic part 312 and a clamping part 313 which are sequentially connected, the assembling part 311, the elastic part 312 and the clamping part 313 are all of a vertically bent sheet-shaped structure, the elastic part 312 is inclined in a free state, and the elastic part 312 is preferably a metal sheet with elastic deformation characteristics; the assembly part 311 is provided with a plurality of through holes, and the assembly part 311 is fixedly connected with the top of the frame 11 through the through holes penetrated by bolts; when the substrate is clamped, the clamping portion 313 abuts against the substrate 7, and the elastic portion 312 is in an elastically deformed state. The top of the cross bar 21 is provided with a plurality of screw holes which are correspondingly matched with the through holes of the assembling part 311. The supporting member 32 has a strip structure with a groove 321, and the groove 321 of the supporting member is abutted with the bottom of the substrate.
According to the scheme, the elastic piece and the supporting piece which are oppositely arranged are only abutted against the upper edge and the lower edge of the substrate, so that the substrate is clamped, compared with a traditional transverse side clamping mode, the problem that the effect of the film coating is affected due to shielding of the clamping component when the substrate is coated can be effectively avoided, and the substrate can be quickly assembled and disassembled by utilizing the elastic abutting clamping mode, so that the assembling and disassembling efficiency is remarkably improved; in addition, the flexible shrapnel can provide the cushioning effect to slight rocking of substrate in vertical direction in the transportation process, further ensures the transportation safety of substrate. Specifically, the installation groove can be a single-strip-shaped communication type chute, and can also be formed by discontinuously arranging a plurality of chute strips, the inner diameter of each chute is adaptive to the screw rod part of the elastic sheet clamp, and the arrangement mode of the installation groove and the number of the elastic sheet clamping components can be adaptively adjusted according to actual requirements, so that the installation groove is not limited.
Compared with the prior art, the utility model provides a sputtering coating substrate frame, which utilizes the elastic piece and the supporting piece in the elastic piece clamping assembly to realize clamping and fixing of the substrate, so that on one hand, the loading and unloading efficiency of the substrate is improved, and the influence on the coating effect caused by shielding of the clamping assembly when the substrate is coated is avoided; on the other hand, the flexible elastic sheet can provide a buffer effect for slight shaking of the substrate in the vertical direction in the transferring process, so that the transferring safety of the substrate is remarkably improved; and through adjusting the horizontal pole subassembly, can adapt to the centre gripping demand of different size substrates, expanded the range of application.
The foregoing examples merely illustrate embodiments of the utility model and are described in more detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (8)
1. The sputtering coating substrate frame is characterized by comprising a frame body, an odd number of cross rod assemblies and an even number of elastic sheet clamping assemblies, wherein the frame body comprises a frame body and a frame lower plate, the frame lower plate is fixedly arranged at the bottom of the frame body, the frame body is of a rectangular structure, two sides of the frame body are provided with sliding grooves, the cross rod assemblies are in sliding connection with the frame body through the sliding grooves, and the adjacent cross rod assemblies are vertically arranged in parallel;
each shell fragment clamping assembly all includes shell fragment spare and the bearing spare of relative setting, in a pair of adjacent in the horizontal pole subassembly, the shell fragment spare sets up in the horizontal pole subassembly bottom that is located the top, the bearing spare sets up at the horizontal pole subassembly top that is located the below, shell fragment spare and bearing spare respectively with the top and the bottom butt of substrate for the fixed substrate of centre gripping.
2. The sputter coated substrate holder of claim 1, wherein each of the rail assemblies is formed of a rail and locking members disposed at both ends of the rail, the locking members being screw-coupled to ends of the rail for fixing the position of the rail.
3. The sputter-coated substrate holder according to claim 2, wherein the spring piece is composed of an assembling portion, an elastic portion and a holding portion which are sequentially connected, the assembling portion, the elastic portion and the holding portion are each of a vertically bent sheet-like structure, and the elastic portion is inclined in a free state;
the assembly part is provided with a plurality of through holes, and the assembly part is fixedly connected with the top of the cross rod through the through holes by bolts;
when the substrate is clamped, the clamping part is abutted with the substrate, and the elastic part is in an elastic deformation state.
4. A sputter coated substrate holder according to claim 3, wherein the resilient portion is a metal sheet having elastic deformation characteristics.
5. The sputter-coated substrate holder according to claim 3, wherein the top of the cross bar is provided with a plurality of screw holes, and the screw holes are correspondingly matched with the through holes of the elastic piece assembly part.
6. The sputter coated substrate holder of claim 1, wherein the support is a bar-like structure having a recess, the recess of the support abutting the bottom of the substrate.
7. The sputter-coated substrate holder of claim 1, further comprising a magnetic strip fixedly disposed on the top outside of the frame for magnetically coupling with a magnetically permeable mechanism in a coating system.
8. The sputter-coated substrate holder of claim 1, further comprising a transmission rod, wherein the bottom of the lower plate of the frame is fixedly connected to the transmission rod by a bolt, and wherein the transmission rod is disposed on a transmission wheel in the coating system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223119162.6U CN218951482U (en) | 2022-11-21 | 2022-11-21 | Sputtering coating substrate frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223119162.6U CN218951482U (en) | 2022-11-21 | 2022-11-21 | Sputtering coating substrate frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218951482U true CN218951482U (en) | 2023-05-02 |
Family
ID=86106419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223119162.6U Active CN218951482U (en) | 2022-11-21 | 2022-11-21 | Sputtering coating substrate frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218951482U (en) |
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2022
- 2022-11-21 CN CN202223119162.6U patent/CN218951482U/en active Active
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