CN218864406U

CN218864406U - Mobile micro-pollution removing device

Info

Publication number: CN218864406U
Application number: CN202223043009.XU
Authority: CN
Inventors: 郑石治; 扶亚民; 赖世明
Original assignee: Shanghai Huamao Environmental Protection Energy Saving Equipment Co ltd; Desiccant Technology Corp
Current assignee: Shanghai Huamao Environmental Protection Energy Saving Equipment Co ltd; Desiccant Technology Corp
Priority date: 2022-09-12
Filing date: 2022-11-16
Publication date: 2023-04-14
Anticipated expiration: 2032-11-16
Also published as: TWM636493U

Abstract

The utility model discloses a mobile micro-pollution removing device, it is main including a box, an at least first absorption tubular module, an at least second adsorbs the integrated design of tubular module, an at least moving body is installed to this box in the bottom, in order to let this box physical stamina remove indoor through the moving body, and adsorb tubular module through first absorption tubular module in this box and second and will handle after adsorbing indoor volatile organic chemical gaseous state material and send back indoorly again, the messenger has the efficiency of carrying out the micro-pollution elimination to the local space, in order to reach the clean room air and reduce the effect of product defective rate.

Description

Mobile micro-pollution removing device

Technical Field

The present invention relates to a mobile micro-pollution removing device, and more particularly to a mobile micro-pollution removing device capable of removing micro-pollution in a local space to clean indoor air and reduce defective rate of products, and suitable for clean rooms, clean rooms and similar indoor spaces in semiconductor industry, photoelectric industry or chemical industry.

Background

In a semiconductor manufacturing process, there is a process of photolithography (lithography) mainly determining a pattern (pattern), a dimension (dimension) and a circuit wiring (routing), and the process is easy to expose by using a photosensitizer and works in a yellow light illumination area, which is called a yellow light area dust-free clean room, so that the temperature and humidity maintenance of the yellow light area dust-free clean room is higher than that of other processes.

The chemicals used in the above-mentioned lithography process include development solution, photoresist solution, and photoresist removal solution, etc., and the solution contains VOC chemicals including IPA, PGMEA, PGME 8230, etc., so that the treatment of clean indoor gas in the yellow region must be carefully controlled, and the gas cannot overflow to cause pollution, so as to avoid affecting the qualified rate of chip production.

The semiconductor technology is more and more precise, and is developed to below 10nm, 7nm, 5nm and 3nm, so the requirement of a dust-free cleaning room in a yellow light area is more and more strict, and especially AMC (air Molecular Contamination) organic micro-pollutants need to be controlled at ppb level. Although the FFU and chemical filter screen of the central air conditioning system can control the average value of the micro-contamination of the whole clean room to reach the required level, the micro-contamination at local positions may still be high.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned shortcomings, the present applicant has desired a mobile micro-contamination removing device with a function of removing micro-contamination from a local space, which is easy to operate and assemble by a user, and which is designed and assembled with great attention so as to provide convenience for the user.

The utility model discloses a main objective, aim at provides a removal device pollutes a little, it is main including a box, an at least first adsorption tubular module, the integrated design of an at least second adsorption tubular module, an at least moving body is installed to this box in the bottom, in order to let this box physical stamina remove indoor through the moving body, and adsorb tubular module and second through first adsorption tubular module in this box and send back the clean air after handling behind the indoor volatile organic chemical gaseous state material again, it is indoor to make to have the efficiency of carrying out the little pollution elimination to the local space, in order to reach the effect of clean room air and reducing the product defective rate, and then increase holistic practicality.

The utility model discloses a next time an object, lie in providing a removal type micro-pollution remove device, this box is equipped with an intake pipe, an outlet duct, a first space, a second space and a gyration room, this gyration room and this first space and this second space intercommunication, and this intake pipe and this first space coupling, and this first absorption tubular module is established in first space, this outlet duct and this second space coupling, and this second absorption tubular module is established in the second space, wherein a Filter screen is installed in the second space of this box, and this Filter screen is located between this second absorption tubular module and this outlet duct, and this Filter screen is High efficiency air purification Filter screen (High efficiency particulate air Filter, HEPA) or the wherein arbitrary of super High efficiency air purification Filter screen (ULPA), let the gas that passes through second absorption tubular module can Filter through this Filter screen again, make to have and reach the efficiency that the Filter effect is about DOP 99.97%, and then increase holistic usability.

Another object of the present invention is to provide a mobile micro-pollution removing device, which is provided with two kinds of implementation forms through the box, the first implementation form is vertical form for the box, and the first space of the box is adjacent to the second space, the air inlet pipe extends in the upward direction, and the air outlet pipe extends in the upward direction, and the rotation chamber of the box is disposed below the first space and the second space, furthermore, the second implementation form is inverted in the side direction for the box, and is inverted in the left side or any direction in the right side, the first space of the box is disposed below the second space, and the air inlet pipe extends in the inverted direction, and the second space is disposed above the first space, the air outlet pipe extends in the inverted direction, and the rotation chamber of the box is disposed at the side of the first space and the second space, therefore, the box can be installed under different indoor space restriction conditions, so that the adsorption efficiency can be easily achieved, and the integrity of the whole box can be increased.

Drawings

Fig. 1 is a perspective view of a first embodiment of the present invention;

FIG. 2 is a schematic diagram of the first mode of air inlet and outlet according to the embodiment of the present invention;

FIG. 3 is a schematic view of a first embodiment of the present invention showing the inlet and outlet of a filter;

fig. 4 is a perspective view of a second embodiment of the present invention;

fig. 5 is a schematic diagram of the inlet and outlet with a filter net according to the second embodiment of the present invention.

Description of reference numerals:

10. box body

11. Air inlet pipe

12. Air outlet pipe

13. A first space

14. The second space

15. Rotary chamber

20. A first adsorption tubular module;

30. a second adsorption tubular module;

40. filter screen

50. Moving body

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.

Please refer to fig. 1 to 5, which are schematic diagrams illustrating an embodiment of the present invention. The best mode of the mobile micro-pollution removal device provided by the embodiment of the invention is applied to a clean room, a dust-free room or a similar indoor space in the semiconductor industry, the photoelectric industry or the chemical related industry, and has the efficiency of removing micro-pollution in a local space, so as to achieve the effects of cleaning indoor air and reducing the product reject ratio.

The embodiment of the present invention provides a mobile micro-Contamination removing device, which mainly comprises a box 10, a combination design of at least one first adsorption tubular module 20 and at least one second adsorption tubular module 30 (as shown in fig. 1), wherein the first adsorption tubular module 20 and the second adsorption tubular module 30 are respectively composed of a plurality of hollow fiber adsorbing materials, the hollow fiber adsorbing materials are made of high Molecular polymer and added micron-sized inorganic particles, the added micron-sized inorganic particles have strong adsorption capacity to organic solvent vapor or AMC, wherein AMC (air Molecular Contamination) is a gaseous chemical contaminant capable of forming a monolayer (monolayer) film on the surface of a wafer by sedimentation in the environment. In addition, the micron-sized inorganic particles currently used for adsorbing substances have a particle size of 0.005 to 50um, and the micron-sized inorganic particles have a two-dimensional or three-dimensional pore structure, and the pores are regular or irregular shaped bodies, and the micron-sized inorganic particles include at least one selected from the group consisting of molecular sieves, a-type zeolites (e.g., 3A, 4A, or 5A), X-type zeolites (e.g., 13X), Y-type zeolites, ZSM-5 zeolites, metal Organic Frameworks (MOFs), activated carbon, and graphene.

The polymer is at least one selected from the group consisting of Polysulfone (PSF), polyethersulfone (PESF), polyvinylidene fluoride (PVDF), polyphenylsulfone (PPSU), polyacrylonitrile (polyacrylonitrile), cellulose acetate, cellulose diacetate, polyimide (PI), polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, polylactic-co-glycolic acid, polycaprolactone, polyvinylpyrrolidone, ethylene vinyl alcohol (ethylene vinyl alcohol), polydimethylsiloxane, polytetrafluoroethylene, and Cellulose Acetate (CA). And a method for manufacturing the synthetic fiber may be used to prepare the hollow fiber adsorbent, and may be classified into a melt spinning method (melt spinning process), a dry spinning method (dry spinning process), a wet spinning method (wet spinning process), and a dry-wet spinning method (dry-wet spinning process) according to a polymer precipitation solidification method.

The hollow fiber adsorption material is in the shape of a hollow long pipe, the diameter and the outer diameter of the hollow fiber adsorption material are more than 0.5mm, so that the hollow fiber adsorption material has high specific surface area, has the effects of low mass transfer resistance, low pressure difference, high adsorption and desorption rate, high adsorption and selectivity and the like, is easy to adsorb and desorb, and therefore, the dosage of micron-sized inorganic particles is less than that of the traditional particle type, the same dynamic adsorption effect can be achieved, and the desorption can be completed by naturally using less heat energy during desorption, so that the hollow fiber adsorption material has an energy-saving effect. The first adsorption tubular module 20 and the second adsorption tubular module 30 are respectively composed of a plurality of hollow fiber adsorption materials, and the hollow fiber adsorption materials have large surface areas, so that no dust is generated in the adsorption process, and the dust generation problem is avoided, so that the operation stability is good, and the service life is long.

Furthermore, the present invention provides a first form in which the box 10 is provided with an air inlet pipe 11, an air outlet pipe 12, a first space 13, a second space 14 and a rotary chamber 15, the box 10 is provided at the bottom with at least one moving body 50 (as shown in fig. 2 and 4), wherein the moving body 50 is any one of a Polyurethane (PU) wheel, a thermoplastic rubber wheel, a plastic wheel, a nylon wheel, an electric wood wheel, an iron casting wheel, a foam wheel, a pneumatic tire wheel and a semi-hollow tire wheel, so that the box 10 can move indoors through the moving body 50, the air inlet pipe 11 is connected with the first space 13, the first adsorption pipe module 20 is provided in the first space 13 of the box 10, the air outlet pipe 12 is connected with the second space 14, the second adsorption pipe module 30 is provided in the second space 14 of the box 10, and the rotary chamber 15 is communicated with the first space 13 and the second space 14, and the first adsorption pipe 20 and the second adsorption pipe module 30 in the box 10 achieve a cleaning effect and a cleaning effect for removing indoor pollutants by adsorbing indoor pollutants.

The utility model discloses in the second form of embodiment this box 10 be equipped with an intake pipe 11, an outlet duct 12, a first space 13, a second space 14 and a gyration room 15, this box 10 installs at least a moving body 50 (as shown in fig. 3 and fig. 5) in the bottom, wherein this moving body 50 is polyurethane super glue (PU) wheel, thermoplastic rubber wheel, plastic wheel, nylon wheel, bakelite wheel, cast iron wheel, foaming wheel, pneumatic tire wheel, half hollow tire wheel wherein arbitrary, in order to let this box 10 can move at indoor through moving body 50, this intake pipe 11 is connected with this first space 13, and this first absorption tubular module 20 is established in first space 13 of this box 10, this outlet duct 12 is connected with this second space 14, and this second absorption tubular module 30 is established in second space 14 of this box 10, and this gyration room 15 and this first space 13 and this second space 14 intercommunication, this filter screen 40 reaches second space 14 of this box 10, this second absorption tubular module 30 is installed in this second absorption tubular module 10, the filtration room carries out the harmful gas state adsorption module 10 and carries out the filtration efficiency through the filtration module 10 and the filtration after the filtration is carried out the filtration of this filtration of the clean room.

The Filter 40 in the second aspect of the embodiment of the present invention is any one of a High efficiency air purification Filter (HEPA) and an ultra High efficiency air purification Filter (ULPA), the first embodiment of the High efficiency air purification Filter (HEPA) is made of chemical fibers, the chemical fibers are polypropylene fibers or polyester fibers, the second embodiment of the High efficiency air purification Filter (HEPA) is made of glass fibers, and the Filter is published according to the United States Department of Energy (DOE), and the High efficiency air purification Filter (HEPA) should Filter particles in air with a diameter of 99.97% or more and 0.3 micrometers (μm) at least. This is also the standard adopted by most U.S. industry sectors. The minimum air flow resistance, or pressure drop, of the screen is typically specified as 300 pascals at its nominal flow rate. The Ultra-high efficiency Air purification Filter screen (ULPA) is made of glass fiber through gluing and folding, the outer frame can be selected from a sandwich wood board, a galvanized copper plate, a stainless steel plate and an aluminum alloy plate, the outer frame is tightly bonded through polyurethane glue, and the Ultra-high efficiency Air purification Filter screen has the advantages of light quality, large Air permeability, high dust collection rate of 99.95-99.999%, alkali resistance and high temperature resistance. Mainly used for removing particles with the diameter of more than 0.1 μm, and the filtering effect is more than 99.995 percent of DOP.

The air inlet pipe 11 in the first and second forms is connected to a fan (not shown) to send air into the air inlet pipe 11 through the fan, and the air is a volatile organic chemical gaseous substance in a room, and then is conveyed into the first and

second spaces

13 and 14 of the box 10 through the air inlet pipe 11, so that the volatile organic chemical gaseous substance is adsorbed on the first and second

adsorption pipe modules

20 and 30, and the first and second

adsorption pipe modules

20 and 30 have high adsorption capacity, thereby reducing the problem of the volatile organic chemical gaseous substance in the room, reducing the reject ratio of the product, and further increasing the overall usability.

Furthermore, the box 10 of the embodiment of the present invention has two embodiments, and the first embodiment is that the box 10 is upright (as shown in fig. 1 to fig. 3), the first space 13 of the box 10 is adjacent to the second space 14, the air inlet pipe 11 extends upward, the air outlet pipe 12 extends upward, and the rotation chamber 15 of the box 10 is disposed below the first space 13 and the second space 14. A second embodiment is that the box 10 is laterally inverted (as shown in fig. 4 and 5) and is laterally inverted to either the left or the right, the first space 13 of the box 10 is located below the second space 14, the air inlet pipe 11 extends laterally, the second space 14 is located above the first space 13, the air outlet pipe 12 extends laterally, the rotation chamber 15 of the box 10 is located at the side of the first space 13 and the second space 14, the first adsorption pipe module 20 of the first space 13 can be changed to a stacked design of one layer, two layers, three layers, four layers or more, and the second adsorption pipe module 30 of the second space 14 can be changed to a stacked design of one layer, two layers, three layers, four layers or more, so that the box 10 can be installed in accordance with different indoor space restrictions to achieve the effect of easy adsorption.

From the above detailed description, it will be apparent to those skilled in the art that the present invention can actually achieve the above objects and can be filed for patent applications in accordance with the provisions of the patent statutes.

The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims

1. A mobile micro-pollution removal device, comprising:

the box body is provided with an air inlet pipe, an air outlet pipe, a first space, a second space and a rotary chamber, wherein the air inlet pipe is connected with the first space, the air outlet pipe is connected with the second space, and the rotary chamber is communicated with the first space and the second space;

the first adsorption pipe type module is arranged in the first space of the box body; and

and the second adsorption pipe type module is arranged in the second space of the box body.

2. The mobile micro-pollution removal device of claim 1, wherein a filter screen is further installed in the second space of the box body, and the filter screen is located between the second adsorption tube module and the air outlet tube.

3. The mobile micro-pollution removal device of claim 1, wherein the housing is further laterally inverted and is laterally inverted in either direction, the first space of the housing is located below the second space, the air inlet pipe extends in the lateral direction, the second space is located above the first space, the air outlet pipe extends in the lateral direction, and the turning chamber of the housing is disposed at the side edges of the first space and the second space.

4. The mobile micro-pollution removal device of claim 1, wherein the housing is further upright, the first space of the housing is adjacent to the second space, the air inlet pipe extends upward, the air outlet pipe extends upward, and the turning chamber of the housing is disposed below the first space and the second space.

5. The mobile micro-pollution removal device of claim 1, wherein the air inlet pipe of the box body is further connected to a blower so that air is fed into the air inlet pipe through the blower and then is delivered to the first space of the box body through the air inlet pipe.

6. The mobile micro-pollution removal device of claim 2, wherein the filter is a high efficiency air purification filter made of chemical fiber, the chemical fiber is polypropylene fiber or polyester fiber.

7. The mobile micro-pollution removal device of claim 2, wherein the screen is further a high efficiency air purification screen made of glass fiber.

8. The mobile micropollution removal device of claim 2, wherein the screen is further an ultra-high efficiency air purification screen made of fiberglass.