CN218821631U - High-purity alloy preparation facilities - Google Patents
High-purity alloy preparation facilities Download PDFInfo
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- CN218821631U CN218821631U CN202222756991.9U CN202222756991U CN218821631U CN 218821631 U CN218821631 U CN 218821631U CN 202222756991 U CN202222756991 U CN 202222756991U CN 218821631 U CN218821631 U CN 218821631U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
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Abstract
The utility model relates to a high pure material prepares technical field, and discloses a high pure alloy preparation facilities, including the synthetic furnace platform, the bottom surface fixed mounting of synthetic furnace platform has multiunit adjustable support, plays the supporting role to the synthetic furnace platform through the adjustable support, and the adjustable support can freely height-adjusting, be provided with heating mechanism on the synthetic furnace platform, heating mechanism includes synthetic furnace body, furnace body axis of rotation radiation shield casing and furnace body heating furnace and constitutes, furnace body heating furnace fixed mounting is on the synthetic furnace platform, the activity of synthetic furnace body cup joints the inside at the furnace body heating furnace. The utility model discloses in, during the synthesis, with the fixed placing of synthetic quartz capsule on the synthetic tube fixing base, rotate through the furnace body axis of rotation and drive synthetic tube fixing base and synthetic quartz capsule synchronous rotation, reached synthetic quartz capsule and turned over unity, continuity and the homogeneity of pipe process.
Description
Technical Field
The utility model relates to a high-purity material preparation technical field especially relates to a high-purity alloy preparation facilities.
Background
The high-purity alloy is a mixture with metal characteristics, which is synthesized by two or more high-purity metals and metals or nonmetals through a certain method. Typically by melting to a homogeneous liquid and solidifying. According to the number of constituent elements, binary alloys, ternary alloys, and multi-element alloys can be classified. Two or more high-purity metals are uniformly fused together through a certain process to obtain the high-purity alloy. The alloy is widely used in semiconductor industry and electronic information technology, and common high-purity alloys mainly comprise indium tin alloy, gallium indium tin alloy, silicon gallium powder, antimony lead alloy, antimony tin alloy, copper antimony alloy and the like. The tin droplet target in the indium-tin alloy is used as an exciting material, plays an important role in the whole photoetching light source system, the performance of the tin droplet target directly determines the output efficiency of a light source, and the tin droplet target is a key material in the development of the advanced semiconductor technology.
The prior high-purity alloy preparation device is mainly a muffle furnace and has the following defects: firstly, the synthesis tube can only be manually turned over according to the technological requirements in the preparation process, the heat radiation is strong, the labor intensity of operators is high, and secondly, in the synthesis process of the silicon-gallium powder, as the manual tube turning belongs to discontinuous operation, the uniformity, continuity and uniformity of the tube turning process are difficult to achieve, the synthesis of Si powder and Ga2O3 is insufficient, and the proportion of the synthesized silicon-gallium powder is not uniform.
Therefore, a high-purity alloy preparation device is provided.
SUMMERY OF THE UTILITY MODEL
The utility model mainly solves the technical problem and provides a high-purity alloy preparation device.
In order to achieve the purpose, the utility model adopts the following technical scheme, a high-purity alloy preparation device, which comprises a synthesis furnace platform, wherein a plurality of groups of adjustable supports are fixedly arranged on the bottom surface of the synthesis furnace platform, the adjustable supports support the synthesis furnace platform, the adjustable supports can freely adjust the height, people can freely adjust the lifting height of the synthesis furnace platform through the arranged adjustable supports, the plurality of groups of adjustable supports are adjusted to have different heights, so that the synthesis furnace platform is driven by the plurality of groups of adjustable supports to have different inclination angles so as to adapt to the process requirements of different alloy materials during preparation, a heating mechanism is arranged on the synthesis furnace platform, the heating mechanism comprises a synthesis furnace body, a furnace body rotating shaft heat insulation sleeve and a furnace body heating furnace, the furnace body heating furnace is fixedly arranged on the synthesis furnace platform, and the synthesis furnace body is movably sleeved in the furnace body heating furnace body;
a rotating shaft supporting rod is vertically and upwardly fixedly installed on the top surface of the synthesis furnace platform, a furnace body rotation driving motor is arranged on the rotating shaft supporting rod, and the output end of the furnace body rotation driving motor is fixedly connected with a furnace body rotating shaft;
and a synthetic tube fixing seat is fixedly arranged on the furnace body rotating shaft.
Preferably, the four upper, lower, left and right positions of the furnace body heating furnace are provided with synthesis furnace temperature control couples, the synthesis furnace temperature control couples are used for controlling the temperature field in the synthesis furnace body to be uniformly distributed, and the four synthesis furnace temperature control couples are in communication connection with a control system to form linkage control, so that the temperature control among the four synthesis furnace temperature control couples is realized to carry out real-time compensation.
Preferably, the furnace body rotating shaft is a circular sleeve, the furnace body rotating shaft is fixedly connected with the synthesis furnace body, one end of the furnace body rotating shaft, which is far away from the furnace body rotating driving motor, penetrates through the synthesis furnace body, extends to the outer wall surface of the synthesis furnace body, is movably connected with the cooling water connector, and the cooling water is conveyed into the furnace body rotating shaft through the cooling water connector.
Preferably, a furnace body rotating shaft heat-insulating sleeve is fixedly mounted at the excircle of the furnace body rotating shaft, the furnace body rotating shaft heat-insulating sleeve is distributed in the synthetic furnace body, and the furnace body rotating shaft heat-insulating sleeve arranged in the synthetic furnace body protects the furnace body rotating shaft distributed in the synthetic furnace body when the synthetic furnace body is at high temperature.
Preferably, the synthetic furnace body is provided with a furnace opening, the furnace opening and the furnace body rotating shaft are coaxially arranged, the furnace body rotating shaft is movably provided with a synthetic furnace opening baffle plate with a structure matched with the furnace opening structure, and during operation, the synthetic furnace opening baffle plate is distributed at the position of the furnace opening and plays a role in heat preservation of the synthetic furnace body through the arranged synthetic furnace opening baffle plate.
Advantageous effects
The utility model provides a high-purity alloy preparation facilities. The method has the following beneficial effects:
(1) This high-purity alloy preparation facilities during the synthesis, will synthesize the fixed placing of quartz capsule on the synthetic tube fixing base, the synthetic quartz capsule is after the alloy material according to the preparation assembles the raw materials, carries out the tube sealing under the high vacuum condition again and handles and form, rotates through the furnace body axis of rotation and drives synthetic tube fixing base and synthetic quartz capsule synchronous rotation, has reached synthetic quartz capsule and has turned over unity, continuity and the homogeneity of pipe process.
(2) The synthesis furnace temperature control galvanic couples are arranged at the upper position, the lower position, the left position and the right position of the furnace body heating furnace and are used for controlling the temperature field in the synthesis furnace body to be uniformly distributed, and the four synthesis furnace temperature control galvanic couples are in communication connection with the control system to form linkage control, so that the temperature control among the four synthesis furnace temperature control galvanic couples is realized to carry out real-time compensation, and the effect of improving the stability of the temperature field is achieved.
(3) This high-purity alloy preparation facilities, when the synthetic furnace internal high temperature, furnace body axis of rotation radiation shield casing through setting up plays the guard action to the furnace body axis of rotation that distributes in the synthetic furnace body, has improved the life of furnace body axis of rotation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structure, ratio, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential significance, and any structure modification, ratio relationship change or size adjustment should still fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy and the achievable purpose of the present invention.
FIG. 1 is a schematic plan view of the overall structure of the present invention;
FIG. 2 is a schematic plan view of the inner structure of the furnace body of the synthesis furnace of the present invention;
fig. 3 is a schematic plane view of the fixing base structure of the synthetic tube of the present invention.
Illustration of the drawings:
1. an adjustable support; 2. a synthesis furnace platform; 3. a rotating shaft support bar; 4. a furnace body rotating shaft; 5. the furnace body rotates and drives the motor; 6. a cooling water connector; 7. a synthetic furnace body; 8. a furnace body rotating shaft heat insulation sleeve; 9. a furnace body heating furnace; 10. a synthetic tube fixing seat; 11. a synthetic furnace mouth baffle plate; 12. a temperature control couple of the synthesis furnace; 13. and synthesizing a quartz tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example (b): a high-purity alloy preparation device is shown in figures 1-3 and comprises a synthesis furnace platform 2, wherein a plurality of groups of adjustable supports 1 are fixedly arranged on the bottom surface of the synthesis furnace platform 2, the adjustable supports 1 support the synthesis furnace platform 2, the adjustable supports 1 can freely adjust the height, people can freely adjust the lifting height of the synthesis furnace platform 2 by arranging the adjustable supports 1, and the adjustable supports 1 drive the synthesis furnace platform 2 to have different inclination angles by adjusting the adjustable supports 1 to have different heights so as to meet the process requirements of different alloy materials during preparation;
the synthesis furnace platform 2 is provided with a heating mechanism, the heating mechanism comprises a synthesis furnace body 7, a furnace body rotating shaft heat insulation sleeve 8 and a furnace body heating furnace 9, the furnace body heating furnace 9 is fixedly arranged on the synthesis furnace platform 2, the synthesis furnace body 7 is movably sleeved inside the furnace body heating furnace 9, and synthesis furnace temperature control couples 12 are arranged at the upper, lower, left and right positions of the furnace body heating furnace 9 and are used for controlling the temperature field in the synthesis furnace body 7 to be uniformly distributed, and the four synthesis furnace temperature control couples 12 are in communication connection with a control system to form interlocking control so as to realize real-time compensation of the temperature control among the four synthesis furnace temperature control couples 12;
a rotating shaft supporting rod 3 is vertically and upwards fixedly installed on the top surface of the synthesis furnace platform 2, a furnace body rotating driving motor 5 is arranged on the rotating shaft supporting rod 3, the furnace body rotating driving motor 5 is a variable-speed servo motor, the output end of the furnace body rotating driving motor 5 is fixedly connected with a furnace body rotating shaft 4, the furnace body rotating shaft 4 is a circular sleeve, the furnace body rotating shaft 4 is fixedly connected with a synthesis furnace body 7, one end, far away from the furnace body rotating driving motor 5, of the furnace body rotating shaft 4 penetrates through the synthesis furnace body 7 to extend to the outer wall surface of the synthesis furnace body 7 and is movably connected with a cooling water connector 6, and cooling water is conveyed into the furnace body rotating shaft 4 through the cooling water connector 6;
the outer circle of the furnace body rotating shaft 4 is fixedly provided with a furnace body rotating shaft heat insulation sleeve 8, the furnace body rotating shaft heat insulation sleeve 8 is distributed inside the synthetic furnace body 7, when the synthetic furnace body 7 is at high temperature, the furnace body rotating shaft heat insulation sleeve 8 is arranged to protect the furnace body rotating shaft 4 distributed inside the synthetic furnace body 7, the service life of the furnace body rotating shaft 4 is prolonged, the furnace body rotating driving motor 5 is enabled to rotate through the furnace body rotating shaft 4 by starting the furnace body rotating driving motor 5, the furnace body rotating shaft 4 drives the synthetic furnace body 7 and the furnace body rotating shaft heat insulation sleeve 8 to synchronously rotate, and the synthetic furnace body 7 is enabled to be uniformly heated inside the synthetic furnace body 7 through the rotating synthetic furnace body 7;
the furnace body rotating shaft 4 is also fixedly provided with a synthetic tube fixing seat 10, during synthesis, a synthetic quartz tube 13 is fixedly placed on the synthetic tube fixing seat 10, the synthetic quartz tube 13 is formed by assembling raw materials according to prepared alloy materials and then performing tube sealing treatment under a high vacuum condition, and the synthetic tube fixing seat 10 and the synthetic quartz tube 13 are driven to synchronously rotate by the rotation of the furnace body rotating shaft 4;
the synthetic furnace body 7 is provided with a furnace mouth, the furnace mouth and the furnace body rotating shaft 4 are coaxially arranged, the furnace body rotating shaft 4 is movably provided with a synthetic furnace mouth baffle 11 with a structure matched with the furnace mouth structure, and the synthetic furnace mouth baffle 11 is distributed at the position of the furnace mouth during operation and plays a role in heat preservation in the synthetic furnace body 7 through the synthetic furnace mouth baffle 11.
The utility model discloses a theory of operation:
during synthesis, the synthetic quartz tube 13 is fixedly placed on the synthetic tube fixing seat 10, the synthetic quartz tube 13 is formed by assembling raw materials according to the prepared alloy material and then performing tube sealing treatment under a high vacuum condition, and the synthetic tube fixing seat 10 and the synthetic quartz tube 13 are driven to synchronously rotate by the rotation of the furnace body rotating shaft 4.
The four synthesis furnace temperature control couples 12 are arranged at the upper, lower, left and right positions of the furnace body heating furnace 9 and are used for controlling the temperature field in the synthesis furnace body 7 to be uniformly distributed, and the four synthesis furnace temperature control couples 12 are in communication connection with a control system to form linkage control so as to realize real-time compensation of the temperature control among the four synthesis furnace temperature control couples 12.
When the synthetic furnace body 7 is at high temperature, the furnace body rotating shaft heat-insulating sleeve 8 arranged in the synthetic furnace body 7 protects the furnace body rotating shaft 4 distributed in the synthetic furnace body 7, and the service life of the furnace body rotating shaft 4 is prolonged.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only illustrative of the principles of the present invention, and that various changes and modifications may be made without departing from the spirit and scope of the present invention, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The utility model provides a high-purity alloy preparation facilities, includes synthetic furnace platform (2), the bottom surface fixed mounting of synthetic furnace platform (2) has multiunit adjustable support (1), its characterized in that: the synthetic furnace is characterized in that a heating mechanism is arranged on the synthetic furnace platform (2), the heating mechanism comprises a synthetic furnace body (7), a furnace body rotating shaft heat insulation sleeve (8) and a furnace body heating furnace (9), the furnace body heating furnace (9) is fixedly arranged on the synthetic furnace platform (2), and the synthetic furnace body (7) is movably sleeved inside the furnace body heating furnace (9);
a rotating shaft supporting rod (3) is vertically and upwardly fixedly installed on the top surface of the synthesis furnace platform (2), a furnace body rotation driving motor (5) is arranged on the rotating shaft supporting rod (3), and the output end of the furnace body rotation driving motor (5) is fixedly connected with a furnace body rotating shaft (4);
and a synthetic tube fixing seat (10) is also fixedly arranged on the furnace body rotating shaft (4).
2. The apparatus for preparing a high purity alloy according to claim 1, wherein: the upper, lower, left and right positions of the furnace body heating furnace (9) are provided with synthesis furnace temperature control couples (12).
3. The apparatus for preparing a high purity alloy according to claim 1, wherein: furnace body axis of rotation (4) are circular sleeve pipe, furnace body axis of rotation (4) and synthetic furnace body (7) fixed connection, and furnace body axis of rotation (4) are kept away from the outer wall outside that extends to synthetic furnace body (7) and with cooling water connector (6) swing joint through synthetic furnace body (7) to the one end of furnace body rotation driving motor (5).
4. The apparatus for preparing a high purity alloy according to claim 1, wherein: the outer circle of the furnace body rotating shaft (4) is fixedly provided with a furnace body rotating shaft heat insulation sleeve (8), and the furnace body rotating shaft heat insulation sleeve (8) is distributed inside the synthetic furnace body (7).
5. A high purity alloy production apparatus according to claim 1, wherein: the synthetic furnace is characterized in that a furnace mouth is formed in the synthetic furnace body (7), the furnace mouth and the furnace body rotating shaft (4) are coaxially arranged, a synthetic furnace mouth baffle (11) with a structure matched with the furnace mouth structure is movably mounted on the furnace body rotating shaft (4), and the synthetic furnace mouth baffle (11) is distributed at the position of the furnace mouth during work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222756991.9U CN218821631U (en) | 2022-10-19 | 2022-10-19 | High-purity alloy preparation facilities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222756991.9U CN218821631U (en) | 2022-10-19 | 2022-10-19 | High-purity alloy preparation facilities |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218821631U true CN218821631U (en) | 2023-04-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222756991.9U Active CN218821631U (en) | 2022-10-19 | 2022-10-19 | High-purity alloy preparation facilities |
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| Country | Link |
|---|---|
| CN (1) | CN218821631U (en) |
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2022
- 2022-10-19 CN CN202222756991.9U patent/CN218821631U/en active Active
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