CN218785033U

CN218785033U - Groove body structure of megasonic cleaning machine

Info

Publication number: CN218785033U
Application number: CN202223274546.5U
Authority: CN
Inventors: 章斌; 毛荣昌; 金豹
Original assignee: Quzhou Jingzhe Electronic Materials Co ltd
Current assignee: Quzhou Jingzhe Electronic Materials Co ltd
Priority date: 2022-12-07
Filing date: 2022-12-07
Publication date: 2023-04-04
Anticipated expiration: 2032-12-07

Abstract

The utility model belongs to the technical field of cleaning equipment, especially, relate to a groove body structure of megasonic cleaner, including the cleaning machine body, windy dry chamber and washing tank are seted up respectively to the inside of cleaning machine body, still include: the air drying mechanism is arranged on one side, close to the air drying cavity, of the outer part of the cleaning machine body; the limiting and placing mechanism is arranged inside the cleaning tank, and lifting mechanisms are arranged on the periphery of the limiting and placing mechanism; the inside of air-drying cavity has been seted up closed groove, the inside of closed groove is provided with on-off mechanism, the inside bottom fixed mounting of washing tank has the megasonic generator. Compared with the prior art, the utility model discloses reached and improved the cleaning efficiency and be convenient for quick air-dried effect.

Description

Groove body structure of megasonic cleaning machine

Technical Field

The utility model belongs to the technical field of cleaning equipment, especially, relate to a cell body structure of megasonic cleaner.

Background

The megasonic cleaner is a cleaning device which uses the principle of cleaning silicon chip by high-frequency (850 kHz) vibration effect and combining with the chemical reaction of chemical cleaning agent, the megasonic cleaning not only preserves the advantages of ultrasonic cleaning, but also overcomes the defects thereof, when cleaning, the transducer emits high-energy sonic wave with the wavelength of 1 μm and the frequency of 0.8 MHz, the solution molecules do accelerated motion under the push of the sonic wave, the maximum instantaneous speed can reach 30cm/s, therefore, bubbles like ultrasonic cleaning can not be formed, and only high-speed fluid wave can continuously impact the surface of the silicon chip, so that the fine particles of pollutants attached to the surface of the silicon chip are forcibly removed and enter the cleaning solution.

Chinese patent with application number CN201921882990.0 discloses a cell body structure of megasonic cleaning machine, including outer PP cell wall, megasonic breakwater, outer groove mount pad, interior cell wall, the oblique end of quartz cylinder, quartz cylinder groove, basket of flowers, megasonic generrator and megasonic protection box, outer PP cell wall contains four lateral walls and a diapire and forms the outer groove of cuboid, fixed mounting has backup pad one and backup pad two on two relative interior cell walls of the outer groove of cuboid, backup pad one with backup pad two is in same level, backup pad one with support and install on two backup pads interior cell wall, interior cell wall is enclosed by four sides and forms inside quartz cylinder groove, the bottom fixed mounting of quartz cylinder groove has the oblique end of quartz cylinder. Has the advantages that: the groove body structure of the megasonic cleaning machine is suitable for cleaning small objects, the cleaning frequency is higher, the energy utilization rate is high, and the waste is low. But the device lacks and limits the subassembly, when needs wash a plurality of silicon chips simultaneously, can make the silicon chip pile up to lead to piled up part to be difficult to thoroughly wash, in addition the device washs and can't in time air-dry the water stain on the silicon chip after finishing, needs the manual work to clean, and is very inconvenient. There is thus a need for improvement.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the technical problem who exists, provide a cell body structure of megasonic cleaner, reached and improved cleaning efficiency and be convenient for quick air-dried effect.

In view of this, the utility model provides a tank body structure of megasonic cleaner, including the cleaning machine body, air drying cavity and washing tank are seted up respectively to the inside of cleaning machine body, still include:

the air drying mechanism is arranged on one side, close to the air drying cavity, of the outer part of the cleaning machine body;

the limiting and placing mechanism is arranged inside the cleaning tank, and lifting mechanisms are arranged on the periphery of the limiting and placing mechanism;

the inside of air-drying cavity has been seted up closed groove, the inside of closed groove is provided with on-off mechanism, the inside bottom fixed mounting of washing tank has the megasonic generator.

In the above technical solution, further, the limited placement mechanism includes:

the cleaning frame is characterized in that a first motor is fixedly mounted at the bottom inside the cleaning frame, a waterproof shell is mounted on the surface of the first motor, and a partition plate is fixedly mounted at the output end of the first motor.

In this technical scheme, be provided with the division board through the inside placing the frame, can separately place the silicon chip, avoid the silicon chip all to put into the inside circumstances that piles up that appears of washing frame, improved the abluent efficiency of device, drive the division board through the motor in addition and rotate, can indirectly drive the silicon chip rotation between the division board, the convenience carries out air-dry fast to the silicon chip of different positions.

In the above technical solution, further, the air drying mechanism includes:

casing and heating rod, casing fixed mounting is on the surface in the cleaning machine body outside, the inside and the inside in air-dry chamber of casing are linked together, the inside fixed mounting of casing has the fan, the heating rod is provided with a plurality of, every the equal fixed mounting of heating rod is in the inside in air-dry chamber

Wherein, the air-drying cavity is communicated with the inside of the cleaning tank.

In this technical scheme, open heating rod and fan through control panel, the heating rod can heat up this moment, and the wind that the fan blew off can become hot-blastly after the heating of heating rod, and hot-blastly can reach inside the washing tank through the air-drying chamber to carry out quick air-drying to the inside silicon chip of cleaning frame, avoid the silicon chip to wash the condition appearance that the back surface persists a large amount of water stains.

In the above technical solution, further, the lifting mechanism includes:

the cleaning tank comprises mounting plates and a second motor, wherein the number of the mounting plates is eight, the eight mounting plates are fixedly mounted at the periphery of the interior of the cleaning tank in a pairwise symmetrical mode, a screw rod is rotatably mounted between every two mounting plates, a thread sleeve is sleeved on the surface of each screw rod in a threaded manner, the number of the second motor is four, the four second motors are respectively and fixedly mounted on the upper surfaces of the four mounting plates at the upper ends of the four second motors, and the output ends of the four second motors are respectively and fixedly connected with the top ends of the four screw rods;

the four threaded sleeves are respectively fixedly connected with the surfaces of the four sides of the cleaning frame.

In the technical scheme, the screw rod is driven to rotate through the second motor, so that the threaded sleeve in threaded connection with the screw rod can move up and down. The cleaning frame fixedly connected with the threaded sleeve is moved to move up and down, so that the cleaning frame is conveniently sunk into a water body, and the cleaning frame can be lifted to leave the water body for air drying in the later period.

In the above technical solution, further:

the cleaning machine comprises a cleaning machine body and is characterized in that a drain pipe is fixedly installed on one side of the outer portion of the cleaning machine body in a penetrating mode, a switch valve is fixedly installed on the surface of the drain pipe, a mounting hole is formed in one side of the bottom of the inner portion of the cleaning tank, a filter plate is movably clamped inside the mounting hole, and one end of the filter plate is inserted into the drain pipe.

In this technical scheme, can regularly change the inside water of washing tank through the drain pipe, and the filter is installed to one side of drain pipe, can strain down the great impurity that washs, avoids the condition emergence of the in-process impurity jam drain pipe at the drainage.

In the above technical solution, further, the switch mechanism includes:

the electric push rods are arranged and fixedly mounted at the bottom inside, and the top ends of the two electric push rods are fixedly connected with a sealing plate which is inserted inside in a sliding mode.

In this technical scheme, can drive the shut through electric putter and reciprocate, the shut shifts up and can shield air-dry chamber, avoids liquid can splash the inside in air-dry chamber when wasing and causes the normal use that pollutes or influence the heating rod, and moves down when the shut and then can open air-dry chamber, and the convenience air-dries the silicon chip after wasing fast, improves the practicality of device.

In the above technical solution, further:

the cleaning machine comprises a cleaning machine body and is characterized in that a transfer block is fixedly arranged on the upper surface of the cleaning machine body, two transfer blocks are arranged between the two transfer blocks in a rotating mode through a rotating shaft, and a handle is fixedly arranged on the surface of the cover plate, which is far away from one side of a cleaning tank.

In this technical scheme, can shield the upper end of washing tank through the apron, avoid dust impurity can get into the inside water that causes of washing tank when not using to pollute.

In the above technical solution, further:

the cleaning machine is characterized in that a control panel is fixedly mounted on the upper surface of the cleaning machine body and located right above the air drying cavity, and the control panel is electrically connected with the fan, the heating rod, the first motor, the second motor, the electric push rod, the switch valve and the megasonic generator in a wireless connection mode.

In this technical scheme, can control a plurality of electrical components simultaneously through control panel, improve staff's work efficiency, also reduce staff's operation burden.

The utility model has the advantages that:

1. the separating plates are arranged in the placing frame, so that the silicon wafers can be placed separately, the condition that the silicon wafers are completely placed in the cleaning frame and stacked is avoided, the cleaning efficiency of the device is improved, in addition, the motor drives the separating plates to rotate, the silicon wafers between the separating plates can be indirectly driven to rotate, and the silicon wafers at different positions can be conveniently and quickly air-dried;

2. the heating rod and the fan are opened through the control panel, the heating rod is heated at the moment, air blown by the fan is heated by the heating rod and then becomes hot air, and the hot air reaches the interior of the cleaning tank through the air drying cavity, so that the silicon wafer in the cleaning frame is quickly dried, and the condition that a large amount of water stains are left on the surface after the silicon wafer is cleaned is avoided;

3. the screw rod is driven to rotate through the second motor, so that the threaded sleeve in threaded connection with the screw rod can move up and down. The cleaning frame fixedly connected with the threaded sleeve moves up and down, so that the cleaning frame is conveniently sunk into a water body, and can be lifted to leave the water body for facilitating later air drying;

4. the water body in the cleaning tank can be replaced regularly through the drain pipe, and the filter plate is arranged on one side of the drain pipe, so that larger cleaned impurities can be filtered, and the situation that the drain pipe is blocked by the impurities in the draining process is avoided;

5. the sealing plate can be driven to move up and down through the electric push rod, the air drying cavity can be shielded by the upward movement of the sealing plate, liquid can be prevented from splashing into the air drying cavity during cleaning to cause pollution or influence the normal use of the heating rod, and the air drying cavity can be opened by the downward movement of the sealing plate, so that the silicon wafer after being cleaned can be quickly dried, and the practicability of the device is improved;

6. can shield the upper end of washing tank through the apron, avoid dust impurity can get into the inside water that causes of washing tank when not using to pollute.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

Fig. 1 is a schematic view of the overall closed state three-dimensional structure of the present invention.

Fig. 2 is a schematic view of the open-state three-dimensional structure of the present invention.

Fig. 3 is a schematic view of the open-state three-dimensional structure of the present invention.

Fig. 4 is a schematic view of the partially disassembled three-dimensional structure in the open state of the present invention.

Fig. 5 is a schematic top view of fig. 4.

Fig. 6 is a schematic view of an overall first cross-sectional structure according to the present invention.

Fig. 7 is a schematic view of an overall second sectional structure of the present invention.

The labels in the figures are:

the cleaning machine comprises a cleaning machine body 1, a cover plate 2, a control panel 3, an air drying mechanism 4, a shell 401, a fan 402, a heating rod 403, a drain pipe 5, a switch valve 6, a limited placing mechanism 7, a cleaning frame 701, a first motor 702, a separation plate 703, a lifting mechanism 8, a mounting plate 801, a second motor 802, a screw 803, a threaded sleeve 804, a switch mechanism 9, an electric push rod 901, a sealing plate 902, a handle 10, a switching block 11, an air drying cavity 12, a sealing groove 13, a filter plate 14, a mounting hole 15, a megasonic generator 16 and a cleaning groove 17.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present application, it is to be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. For convenience of description, the dimensions of the various features shown in the drawings are not necessarily drawn to scale. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

It should be noted that the terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/" generally means that a preceding and succeeding related objects are in an "or" relationship.

It should be noted that in the description of the present application, the orientation or positional relationship indicated by the terms such as "front, back, up, down, left, right", "lateral, vertical, horizontal" and "top, bottom" and the like are generally based on the orientation or positional relationship shown in the drawings for convenience of description and simplicity of description only, and in the case of not making a reverse description, these orientation terms do not indicate and imply that the device or element being referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the scope of the present application; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

It should be noted that, in the present application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a component of' 8230; \8230;" does not exclude the presence of another like element in a process, method, article, or apparatus that comprises the element. Further, it should be noted that the scope of the methods and apparatus of the embodiments of the present application is not limited to performing the functions in the order illustrated or discussed, but may include performing the functions in a substantially simultaneous manner or in a reverse order based on the functions involved, e.g., the methods described may be performed in an order different than that described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

Example 1:

the embodiment of the application provides a tank body structure of megasonic cleaner, including cleaning machine body 1, air dry chamber 12 and washing tank 17 are seted up respectively to cleaning machine body 1's inside, still include: the air drying mechanism 4 is arranged on one side, close to the air drying cavity 12, of the outer part of the cleaning machine body 1; the limited placing mechanism 7 is arranged in the cleaning tank 17, and lifting mechanisms 8 are arranged on the periphery of the limited placing mechanism 7;

wherein, the inside of the air drying cavity 12 is provided with a closed groove 13, the inside of the closed groove 13 is provided with a switch mechanism 9, and the bottom inside the cleaning tank 17 is fixedly provided with a megasonic generator 16.

Example 2:

the embodiment provides a tank body structure of a megasonic cleaning machine, which comprises the technical scheme of the embodiment and has the following technical characteristics, wherein the limited placing mechanism 7 comprises: the cleaning frame 701 is characterized in that a first motor 702 is fixedly installed at the bottom inside the cleaning frame 701, a waterproof shell is installed on the surface of the first motor 702, and a partition plate 703 is fixedly installed at the output end of the first motor 702.

In this embodiment, through being provided with the division board in the inside of placing the frame, can separately place the silicon chip, avoid the silicon chip all to put into the inside circumstances that piles up that appears of washing frame, improved the abluent efficiency of device, drive the division board through the motor in addition and rotate, can indirectly drive the silicon chip rotation between the division board, the convenience carries out air-dry fast to the silicon chip of different positions.

Example 3:

the embodiment provides a tank body structure of megasonic cleaner, in addition to including the technical scheme of the above-mentioned embodiment, still has following technical characteristics, and air-dry mechanism 4 includes: casing 401 and heating rod 403, casing 401 fixed mounting is on the surface in the cleaning machine body 1 outside, the inside and the inside of air-drying chamber 12 of casing 401 are linked together, the inside fixed mounting of casing 401 has fan 402, heating rod 403 is provided with a plurality of, the equal fixed mounting of every heating rod 403 is in the inside of air-drying chamber 12

Wherein, the air drying cavity 12 is communicated with the inside of the cleaning groove 17.

In this embodiment, open heating rod and fan through control panel, the heating rod can heat up this moment, and the wind that the fan blew off can become hot-blastly after the heating of heating rod, and hot-blastly can reach inside the washing tank through the air-drying chamber to carry out quick air-drying to the inside silicon chip of cleaning frame, avoid the silicon chip to wash the condition appearance that the surface persists a large amount of water stains after finishing.

Example 4:

the embodiment provides a tank body structure of a megasonic cleaning machine, which includes the technical solutions of the above embodiments, and further has the following technical features, and the lifting mechanism 8 includes: the cleaning tank comprises mounting plates 801 and two motors 802, eight mounting plates 801 are arranged, the eight mounting plates 801 are fixedly mounted on the periphery of the interior of the cleaning tank 17 in a pairwise symmetry manner, a screw 803 is rotatably mounted between every two mounting plates 801, a thread sleeve 804 is sleeved on the surface of each screw 803 in a threaded manner, the number of the motors two 802 is four, the four motors two 802 are fixedly mounted on the upper surfaces of the four mounting plates 801 at the upper ends respectively, and the output ends of the four motors two 802 are fixedly connected with the top ends of the four screws 803 respectively;

wherein, the four thread sleeves 804 are respectively fixedly connected with the surfaces of the four sides of the cleaning frame 701.

In this embodiment, drive the screw rod through motor two and rotate, can make the thread bush with screw rod threaded connection reciprocate. The cleaning frame fixedly connected with the threaded sleeve is moved to move up and down, so that the cleaning frame is conveniently sunk into a water body, and the cleaning frame can be lifted to leave the water body for air drying in the later period.

Example 5:

the embodiment provides a tank structure of a megasonic cleaning machine, which comprises the technical scheme of the embodiment and has the following technical characteristics: one side of the cleaning machine body 1 outside runs through the fixed mounting and has the drain pipe 5, the fixed surface of the drain pipe 5 has the switch valve 6, the mounting hole 15 has been seted up to the inside bottom one side of cleaning tank 17, the inside activity joint of mounting hole 15 has the filter 14, the one end of filter 14 inserts the inside of drain pipe 5.

In this embodiment, can regularly change the inside water of washing tank through the drain pipe, and the filter is installed to one side of drain pipe, can strain down the great impurity that washs, avoids the condition emergence of the in-process impurity jam drain pipe at the drainage.

Example 6:

the present embodiment provides a tank structure of a megasonic cleaning machine, which includes the technical solutions of the above embodiments, and further has the following technical features, wherein the switch mechanism 9 includes: the electric push rods 901 and the electric push rods 901 are arranged in two, the two electric push rods 901 are both fixedly installed at the bottom inside the 13, the top ends of the two electric push rods 901 are fixedly connected with the closing plate 902, and the closing plate 902 is inserted in the 13 in a sliding mode.

In this embodiment, can drive the closing plate through electric putter and reciprocate, the closing plate shifts up and can shield air-dry chamber, and the inside that avoids liquid can splash the air-dry chamber when wasing causes the normal use that pollutes or influence the heating rod, and moves down when the closing plate and then can open the air-dry chamber, conveniently air-dries the silicon chip after wasing fast, improves the practicality of device.

Example 7:

the embodiment provides a tank body structure of a megasonic cleaning machine, which comprises the technical scheme of the embodiment and is further characterized in that: the upper surface fixed mounting of cleaning machine body 1 has switching piece 11, and switching piece 11 is provided with two altogether, rotates through the pivot between two switching pieces 11 and installs apron 2, and the fixed surface of apron 2 one side far away from washing tank 17 installs handle 10.

In this embodiment, can shield the upper end of washing tank through the apron, avoid dust impurity can get into the inside water that causes of washing tank when not using to pollute.

Example 8:

the embodiment provides a tank body structure of a megasonic cleaning machine, which comprises the technical scheme of the embodiment and is further characterized in that: the cleaning machine comprises a cleaning machine body 1, and is characterized in that a control panel 3 is fixedly installed on the upper surface of the cleaning machine body 1, the control panel 3 is located right above an air drying cavity 12, and the control panel 3 is electrically connected with a fan 402, a heating rod 403, a first motor 702, a second motor 802, an electric push rod 901, a switch valve 6 and a megasonic generator 16 in a wireless connection mode.

In this embodiment, can control a plurality of electrical components simultaneously through control panel, improve staff's work efficiency, also reduce staff's operation burden.

While the embodiments of the present application have been described in connection with the drawings, the embodiments and features of the embodiments of the present application can be combined with each other without conflict, and the present application is not limited to the above-mentioned embodiments, which are only illustrative and not restrictive, and those skilled in the art can make many forms without departing from the spirit and scope of the present application and the claims.

Claims

1. The utility model provides a tank body structure of megasonic cleaner, includes cleaning machine body (1), windy dry chamber (12) and washing tank (17) are seted up respectively to the inside of cleaning machine body (1), its characterized in that still includes:

the air drying mechanism (4), the air drying mechanism (4) is arranged on one side, close to the air drying cavity (12), of the outer portion of the cleaning machine body (1);

the cleaning device comprises a limiting and placing mechanism (7), wherein the limiting and placing mechanism (7) is arranged inside a cleaning tank (17), and lifting mechanisms (8) are arranged on the periphery of the limiting and placing mechanism (7);

the inside of the air drying cavity (12) is provided with a closed groove (13), the inside of the closed groove (13) is provided with a switch mechanism (9), and the bottom inside the cleaning tank (17) is fixedly provided with a megasonic generator (16).

2. The tank structure of a megasonic cleaning machine as claimed in claim 1, wherein the limit placement mechanism (7) comprises:

the cleaning frame (701), the inside bottom fixed mounting of cleaning frame (701) has motor (702), the surface mounting of motor (702) has the buckler, the output fixed mounting of motor (702) has division board (703).

3. The tank structure of a megasonic cleaning machine as claimed in claim 1, wherein the seasoning mechanism (4) comprises:

the cleaning machine comprises a shell (401) and heating rods (403), wherein the shell (401) is fixedly installed on the surface of the outer side of a cleaning machine body (1), the inside of the shell (401) is communicated with the inside of an air drying cavity (12), a fan (402) is fixedly installed inside the shell (401), a plurality of heating rods (403) are arranged, and each heating rod (403) is fixedly installed inside the air drying cavity (12);

wherein, the air drying cavity (12) is communicated with the inside of the cleaning groove (17).

4. The tank structure of a megasonic cleaning machine as claimed in claim 1, wherein the lifting mechanism (8) comprises:

the cleaning tank comprises mounting plates (801) and a second motor (802), wherein the mounting plates (801) are provided with eight, the eight mounting plates (801) are fixedly mounted around the inside of the cleaning tank (17) in a pairwise symmetrical manner, a screw rod (803) is rotatably mounted between every two mounting plates (801), the surface of each screw rod (803) is in threaded sleeve connection with a threaded sleeve (804), the second motor (802) is provided with four, the four second motor (802) are respectively and fixedly mounted on the upper surfaces of the four mounting plates (801) at the upper ends, and the output ends of the four second motor (802) are respectively and fixedly connected with the top ends of the four screw rods (803);

the four threaded sleeves (804) are respectively fixedly connected with the surfaces of the four sides of the cleaning frame (701).

5. The tank structure of a megasonic cleaning machine as claimed in claim 1, wherein:

the cleaning machine is characterized in that a drain pipe (5) is fixedly arranged on one side of the outside of the cleaning machine body (1) in a penetrating mode, a switch valve (6) is fixedly arranged on the surface of the drain pipe (5), a mounting hole (15) is formed in one side of the bottom of the inside of the cleaning groove (17), a filter plate (14) is movably clamped inside the mounting hole (15), and one end of the filter plate (14) is inserted into the inside of the drain pipe (5).

6. The tank structure of a megasonic cleaner as claimed in claim 1, wherein the switching mechanism (9) comprises:

the electric push rods (901) are arranged, the two electric push rods (901) are fixedly mounted at the bottom of the inside of the closed groove (13), the top ends of the two electric push rods (901) are fixedly connected with a closed plate (902), and the closed plate (902) is inserted into the closed groove (13) in a sliding mode.

7. The tank structure of a megasonic cleaning machine as claimed in claim 1, wherein:

the cleaning machine is characterized in that a transfer block (11) is fixedly arranged on the upper surface of the cleaning machine body (1), two transfer blocks (11) are arranged, an cover plate (2) is rotatably arranged between the transfer blocks (11) through a rotating shaft, and a handle (10) is fixedly arranged on the surface of one side of the cover plate (2) away from a cleaning tank (17).

8. The tank structure of a megasonic cleaner as claimed in claim 1, wherein:

the cleaning machine is characterized in that a control panel (3) is fixedly mounted on the upper surface of the cleaning machine body (1), the control panel (3) is located right above the air drying cavity (12), and the control panel (3) is electrically connected with a fan (402), a heating rod (403), a first motor (702), a second motor (802), an electric push rod (901), a switch valve (6) and a megasonic generator (16) in a wireless connection mode.