CN218660452U

CN218660452U - Full-automatic wafer laminating machine

Info

Publication number: CN218660452U
Application number: CN202220236527.4U
Authority: CN
Inventors: 鲍占林; 闫兴; 陶为银; 巩铁建; 蔡正道; 乔赛赛; 张伟; 王鹏; 杜磊
Original assignee: Henan General Intelligent Equipment Co Ltd
Current assignee: Jiangsu General Semiconductor Co.,Ltd.
Priority date: 2022-01-28
Filing date: 2022-01-28
Publication date: 2023-03-21
Anticipated expiration: 2032-01-28

Abstract

The utility model discloses a full-automatic wafer laminating machine, include: the utility model provides a film system is put to rack, complex film, receive clout system, protection film and receive membrane system, wafer pad pasting system, multifunctional robot system and feeding system, the membrane system is put to complex film, receive clout system, protection film and receive the membrane system setting on the vertical lateral wall of rack, and wafer pad pasting system sets up on the horizontal stand of rack to be in the complex film and put between membrane system and the receipts clout system, multifunctional robot system includes six arms and fixes the multifunctional mechanical hand on six arms, through changeing six arms, the wafer pad pasting system is transported by feeding system to multifunctional mechanical hand with the wafer, and cut the wafer of having pasted the PE membrane.

Description

Full-automatic wafer laminating machine

Technical Field

The utility model relates to a wafer pad pasting technical field especially relates to a wafer laminating machine of full-automatic pad pasting.

Background

With the progress of science and technology, intelligent wearing and the development of smart phones and tablet computers towards high speed and large capacity in the aspect of storage; the size of the flash memory is becoming thinner, the technology development direction requires the flash memory and the memory controller to be thinner and thinner, the wafer area tends to be larger and larger, and the thickness tends to be thinner and thinner, so that the problem of cracking during processing and cutting of the ultra-thin chips in the conventional process is more challenging. The silicon carbide wafer has high hardness and cannot be cracked in a film expanding mode, equipment needs to be suitable for being cracked one by one along a wafer cutting path, the surface of a chip is sensitive to chips, a layer of PE film is pasted on the surface of the wafer in the splitting process, a cleaver of a splitting mechanism is prevented from being in direct contact with the surface of the wafer, and the chips are prevented from being splashed and polluted by the chips generated in the splitting process.

At present, when the film is pasted, the used film is a composite film. The film attached to the wafer is a PE film. The area of the cut PE film is often larger than that of the wafer disc, so that the wafer disc is inconvenient to put back into the bin box.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a can be with accurate, the smooth full-automatic wafer laminating machine who pastes on the wafer of PE membrane.

The specific scheme is as follows:

full-automatic wafer laminating machine includes: membrane system, receipts clout system, protection film receipts membrane system, wafer pad pasting system, multifunctional robot system and feeding system are put to rack, complex film, the membrane system is put to the complex film, receive clout system, protection film receipts membrane system setting on the longitudinal side wall of rack, wafer pad pasting system sets up on the level frame of rack to be in the complex film and put between membrane system and the receipts clout system, multifunctional robot system includes six arms and fixes the multifunctional machinery hand on six arms, through rotating six arms, the multifunctional machinery hand transports the wafer pad pasting system with the wafer by feeding system, and cut the wafer to having pasted the PE membrane.

The composite membrane releasing system comprises: the film releasing air expansion shaft, the driven roller system and the film releasing cache roller are arranged, a film releasing electromagnetic brake is fixed at the end part of the film releasing air expansion shaft and electrically connected with the tension control roller, the tension control roller detects the tension of a film belt and feeds the tension back to the film releasing electromagnetic brake to keep the composite film tensioned all the time.

The composite film releasing system further comprises a first buffer roller, the first buffer roller is connected with the guide rail arranged on the longitudinal side wall as a sliding block, and the first buffer roller is contacted with the film belt by means of self gravity.

The utility model discloses a PE film laminating machine, including a film placing system, a wafer pad pasting system, a PE film, a protection film, a first fixed roller, a first driving roller, a first fixed roller, a passageway, a first fixed roller, a second driving roller, a first fixed roller, a second fixed roller, a first driving roller, a second driving roller, a first fixed roller, a PE film and a first fixed roller.

The protective film collecting system comprises a protective film collecting air expansion shaft and a protective film collecting wheel train, the protective film passes through the protective film collecting roller system through a first fixed rotating roller and is wound on the protective film collecting air expansion shaft, and a protective film collecting electromagnetic brake is fixed at the end part of the protective film collecting air expansion shaft and keeps tensioned all the time when the protective film is collected.

The wafer pad pasting system comprises a pad pasting elevating platform, an anti-static pad pasting roller and a film angle adjusting roller, wherein the anti-static pad pasting roller is fixed on the longitudinal side wall through a two-dimensional moving device and is in contact with a PE film on the pad pasting elevating platform, the film angle adjusting roller is fixed on the longitudinal side wall through a lifting cylinder, and the PE film penetrating out of the pad pasting elevating platform is in contact with the bottom of the film angle adjusting roller, so that the angle between a film belt and a horizontal plane is unchanged.

The multifunctional robot system comprises six mechanical arms and a multifunctional manipulator fixed on the six mechanical arms, the multifunctional manipulator comprises a base and a sucker manipulator fixed on the base, the side of the base is fixed with the sucker manipulator, the rotary cutting assembly is arranged on the opposite side wall of the side wall where the sucker manipulator is located, the visual system is arranged on the adjacent side wall of the side wall where the sucker manipulator is located, and the orientation of the visual system is consistent with that of the rotary cutting assembly.

The rotary cutting assembly includes: fix the rotary driving device at the base lateral wall, fix at the terminal swinging boom of rotary driving device output shaft and with swinging boom end connection's adjustable knife tackle, its characterized in that, adjustable knife tackle includes: the knife flywheel mounting seat, the swinging device, the movable plate and the knife flywheel; the knife flywheel mounting seat is fixed at the end part of the rotating arm, the movable plate is connected with the knife flywheel mounting seat through a swinging device, the knife flywheel is mounted at the bottom of the movable plate, a U-shaped notch is formed in the end, far away from the rotating motor, of the knife flywheel mounting seat, and the swinging device comprises a swinging plate, a swinging shaft, an adjusting plate, an adjusting screw rod and the movable plate; the swinging plate is arranged in the U-shaped notch through a swinging shaft, the swinging shaft is fixed on the side wall of the U-shaped notch through a bearing, and a margin is reserved between the swinging plate and the side wall adjacent to the U-shaped notch; adjusting plates are fixed at the top and the bottom of the U-shaped notch, grooves corresponding to the U-shaped notch are formed in the bottom of each adjusting plate, and adjusting holes are formed in the top of each adjusting plate; the adjusting screw rod penetrates through the adjusting hole and penetrates through the swinging plate, the radial area of the adjusting screw rod is smaller than that of the adjusting hole, the adjusting screw rod is in threaded connection with the swinging plate, and butterfly nuts are in threaded connection with the end parts of the screw rod; the movable plate is connected with the side wall of the swinging plate extending out of the U-shaped notch, a semicircular gasket is arranged between the butterfly nut and the adjusting plate, the semicircular gasket penetrates through the adjusting screw rod, and the arc-shaped surface of the semicircular gasket is in contact with the adjusting plate.

The bottom of the movable plate is fixed with a door-shaped knife flywheel fixing seat; the knife flywheel is coaxially fixed with a knife flywheel bearing, is rotatably connected with the door-shaped knife flywheel fixing seat through a knife flywheel pin shaft and is fixed through a knife flywheel clamp spring.

The excess material collecting system comprises an excess material air expansion shaft, a second driving roller, an excess material collecting roller system and a second cache roller, the film belt penetrates through the film angle adjusting roller and then penetrates out of the excess material collecting roller system through the upper surface of the second driving roller, the film belt is wound on the excess material air expansion shaft, an electromagnetic brake is fixed at the end of the excess material air expansion shaft, and the PE film is kept tensioned all the time when being recovered.

The utility model discloses a complex film is put the inflatable axle in the membrane system and is put cooperation and first buffer memory roller between membrane electromagnetic braking ware and the tension control roller and rely on the dead weight, guarantees that the composite film area can keep sufficient tension in putting the membrane system. The anti-static film sticking roller moves to the position above the PE film through the two-dimensional moving device to tightly press the PE film. Receive the PE membrane area that the interior second buffer memory roller of clout system relied on self gravity to make the cutting accomplish and keep sufficient tension throughout, and it is nimble convenient in the multi-functional robot system working process, adjusts the break bar angle through control butterfly nut among the cutting assembly, carries out accurate cutting, and half round gasket makes can not block when pendulous device's swing and dies, and the break bar is at angle regulation's in-process, and buffer can prevent the too fast of break bar lift, causes the damage. The vision system can be accurately positioned to the center of the wafer and the edge of the wafer.

Drawings

FIG. 1 is a schematic structural diagram of a full-automatic laminator;

FIG. 2 is a side view of FIG. 1;

FIG. 3 is a schematic diagram of a multi-function robotic system architecture;

FIG. 4 is a schematic view of a multi-function manipulator configuration;

FIG. 5 is a schematic view of a rotary cutting assembly;

fig. 6 is a schematic structural view of an adjustable cutter wheel set.

1. The film laminating machine comprises a machine frame, a composite film releasing system, a 21, a film releasing air expansion shaft, a 22, a driven roller system, a 23, a film releasing buffer roller, a 24, a tension control detection roller, a 25, a first driving roller, a 3, a waste material collecting system, a 31, a waste material collecting air expansion shaft, a 32, a second driving roller, a 33, a waste material collecting roller system, a 34, a second buffer roller, a 4, a protective film receiving system, a 41, a protective film receiving air expansion shaft, a 42, a protective film receiving roller system, a 5, a wafer laminating system, a 51, a film laminating lifting platform, a 52, an anti-static film laminating roller, a 53, a film angle adjusting roller, a 6, a multifunctional robot system, a 61, a six-axis mechanical arm, a 62, a multifunctional mechanical arm, a 621, a base, a 6211, a sucker mechanical arm, a 6212, a vision system, a 6213, a rotary cutting assembly, a 62131, a rotary driving device, a 62132, a rotary arm, a 62133, an adjustable cutter wheel set, a 62134, a cutter wheel, a 7 and a feeding system.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the implementations of the present invention, and not all implementations, and all other embodiments obtained by those skilled in the art without any inventive work are included in the scope of the present invention.

As shown in fig. 1-6. Full-automatic wafer laminating machine includes: film system 2 is put to rack 1, complex film, the excess material system 3 is received to receipts clout system 3, protection film receives membrane system 4, wafer pad pasting system 5, multifunctional robot system 6 and feeding system 7, the complex film is put membrane system 2, is received clout system 3, protection film and is received membrane system 4 and set up on the vertical lateral wall of rack 1, and wafer pad pasting system 5 sets up on the horizontal stand of rack 1 to be in the complex film and put between membrane system 2 and the receipts clout system 3, and multifunctional robot system 6 includes six arms 61 and fixes the multifunctional mechanical hand 62 on six arms 61, and through rotating six arms 61, multifunctional mechanical hand 62 transports the wafer by feeding system 7 wafer pad pasting system 5 to the wafer to having pasted the PE membrane is cut. The composite film comprises a PE film and a protective film, the composite film roll is discharged from the composite film discharging system 2, the PE film and the protective film are separated through a wafer film pasting system, the protective film is recovered through the protective film receiving system 4, the PE film is attached to a wafer conveyed by the multifunctional robot system 6 when passing through the film pasting system, the PE film is cut into a size matched with the wafer by the multifunctional robot, and the PE film after cutting is recovered through excess materials.

The composite membrane releasing system 2 comprises: the film releasing air expansion shaft 21, the driven roller system 22 and the film releasing buffer roller 23 are arranged in the film releasing air expansion shaft 21, a film releasing electromagnetic brake is fixed at the end of the film releasing air expansion shaft 21 and electrically connected with the tension control roller 24, the tension control roller 24 detects the tension of a film belt and feeds the tension back to the film releasing electromagnetic brake to keep the composite film tensioned all the time. The composite film releasing system 2 further comprises a first buffer roller, the first buffer roller is connected with a guide rail arranged on the longitudinal side wall as a sliding block, and the first buffer roller is contacted with the film belt by means of self gravity. Be provided with first drive roller 25 between membrane system 2 and the wafer pad pasting system 5 is put to the complex film, first drive roller 25 below sets up first fixed roller, has the passageway that supplies the membrane area to advance between first fixed roller and the first drive roller 25, and PE membrane and first drive roller 25 in close contact with, protection film and first fixed roller in close contact with. The PE film sequentially passes through the rollers, the film placing electromagnetic brake is matched with the tension control roller 24, and the first buffer roller depends on the dead weight, so that the composite film belt can keep enough tension in the film placing system.

The protective film collecting system 4 comprises a protective film collecting air expansion shaft 41 and a protective film collecting wheel train, the protective film passes through the protective film collecting roller system 42 through a first fixed rotating roller and is wound on the protective film collecting air expansion shaft 41, a protective film collecting electromagnetic brake is fixed at the end part of the protective film collecting air expansion shaft 41, and the protective film is kept tensioned all the time when being collected.

Wafer pad pasting system 5 includes pad pasting elevating platform 51, prevents static pad pasting roller 52 and membrane angle adjusting roller 53, prevents that static pad pasting roller 52 fixes on vertical lateral wall through two-dimensional mobile device, through the contact of two-dimensional mobile device and the PE membrane on the pad pasting lift platform, and membrane angle adjusting roller 53 passes through the lift cylinder to be fixed on vertical lateral wall, and the PE membrane that wears out pad pasting lift platform contacts with membrane angle adjusting roller 53 bottom for the angle between membrane area and the horizontal plane is unchangeable. After the wafer is transported to the film sticking lifting platform by the multifunctional robot system 6, the lifting platform rises to be in contact with the PE film, and the anti-static film sticking roller 52 moves to the position above the PE film through the two-dimensional moving device to tightly press the PE film.

The multifunctional robot system 6 comprises six mechanical arms 61 and a multifunctional manipulator 62 fixed on the six mechanical arms 61, the multifunctional manipulator 62 comprises a base 621 and a suction cup manipulator 6211 fixed on the side of the base 621, opposite side walls of the side walls where the suction cup manipulators 6211 are located are provided with rotary cutting assemblies 6213, the side walls adjacent to the side walls where the suction cup manipulators 6211 are located are provided with vision systems 6212, and the orientation of the vision systems 6212 is consistent with that of the rotary cutting assemblies 6213. The suction cup robot 6211 takes the wafer out of the feeding system 7 and places the wafer in the wafer film pasting system 5, so that the wafer starts film pasting, and after the film pasting is completed, the multifunctional robot 62 rotates, so that the vision system 6212 aligns with the wafer, detects the center position and the edge position of the wafer, and the cutting assembly starts to work to cut the PE film. After the dicing is completed, the chuck robot 6211 returns the wafer to the supply system 7.

The rotary cutting assembly 6213 comprises: the rotary driving device 62131 fixed on the side wall of the base 621, the rotary arm 62133 fixed on the end of the output shaft of the rotary driving device 62131, and the adjustable knife wheel 62134 group 62133 connected with the end of the rotary arm 62133, characterized in that the adjustable knife wheel 62134 group 62133 includes: a knife flywheel 62134 mounting seat, a swinging device, a movable plate and a knife flywheel 62134; the knife flywheel 62134 mounting seat is fixed at the end part of the rotating arm 62133, the movable plate is connected with the knife flywheel 62134 mounting seat through a swinging device, the knife flywheel 62134 is mounted at the bottom of the movable plate, a U-shaped notch is arranged at the end of the knife flywheel 62134 mounting seat far away from the rotating motor, and the swinging device comprises a swinging plate, a swinging shaft, an adjusting plate, an adjusting screw and a movable plate; the swinging plate is arranged in the U-shaped notch through a swinging shaft, the swinging shaft is fixed on the side wall of the U-shaped notch through a bearing, and a margin is reserved between the swinging plate and the side wall adjacent to the U-shaped notch; adjusting plates are fixed at the top and the bottom of the U-shaped notch, grooves corresponding to the U-shaped notch are formed in the bottom of each adjusting plate, and adjusting holes are formed in the top of each adjusting plate; the adjusting screw rod penetrates through the adjusting hole and penetrates through the swinging plate, the radial area of the adjusting screw rod is smaller than that of the adjusting hole, the adjusting screw rod is in threaded connection with the swinging plate, and butterfly nuts are in threaded connection with the end parts of the screw rod; the movable plate is connected with the side wall of the swinging plate extending out of the U-shaped notch, a semicircular gasket is arranged between the butterfly nut and the adjusting plate, the semicircular gasket penetrates through the adjusting screw rod, and the arc-shaped surface of the semicircular gasket is in contact with the adjusting plate. A door-shaped knife flywheel 62134 fixing seat is fixed at the bottom of the movable plate; the knife flywheel 62134 is coaxially fixed with a knife flywheel 62134 bearing, is rotatably connected to a door-shaped knife flywheel 62134 fixing seat through a knife flywheel 62134 pin shaft, and fixes the knife flywheel 62134 through a knife flywheel 62134 clamp spring. The lead screw is adjusted in control, and pendulous device swings around the swing axle for the angle of break bar 62134 can obtain accurate regulation, makes things convenient for break bar 62134 to carry out accurate cutting to the PE membrane, and half round gasket makes can not block when pendulous device's swing.

A buffer device is connected between the movable plate and the swinging plate, and comprises a buffer base plate, a buffer spring, a buffer limiting shaft, a linear guide rail and a buffer baffle plate; the buffer baffle is fixed at the top of the movable plate; the buffer base plate is connected with the side wall of the U-shaped notch extending out of the swing shaft, the buffer base plate is connected with the slide block of the linear guide rail, and the guide rail in the linear guide rail is fixed on the movable plate; the buffer limiting shaft penetrates through the buffer baffle, one end of the buffer limiting shaft is connected with the movable base plate, the other end of the buffer limiting shaft is connected with a buffer gasket, and a buffer spring is sleeved between the buffer gasket and the buffer baffle.

The rotary driving device 62131 comprises a rotary motor, a rotary cutting knife fixing plate, a motor mounting seat and a rotary shaft; the motor mount pad is fixed at the rotary cutter fixed plate, and the rotary cutter fixed plate is connected with base 621, and the output of rotating electrical machines is fixed to the rotation axis to terminal and rotatory arm is connected.

The excess material collecting system 3 comprises an excess material air expansion shaft, a second driving roller 32, an excess material collecting roller system 33 and a second cache roller 34, the film belt penetrates through the film angle adjusting roller 53 and then penetrates out of the excess material collecting roller system 33 through the upper surface of the second driving roller 32 to be wound on the excess material air expansion shaft, an electromagnetic brake is fixed at the end part of the excess material air expansion shaft, and the PE film is kept tensioned all the time when being recovered.

The composite film roll is fixed on the film releasing air expansion shaft 21 and penetrates through the film releasing air expansion shaft 21 system, so that the composite film reaches between the first driving roller 25 and the first rotating roller, the composite film is divided into a PE film and a protective film, the protective film penetrates through the protective film receiving wheel train and is wound on the protective film receiving air expansion shaft 41, the PE film passes through the wafer film pasting system 5, meanwhile, the six-shaft mechanical arm 61 rotates, so that the multifunctional mechanical arm 62 takes out a wafer in the feeding system 7, the multifunctional mechanical arm 62 is placed on a film pasting lifting platform of the wafer film pasting system 5, the platform is lifted to enable the wafer to be in contact with the PE film, the anti-static film pasting roller 52 is arranged on a two-dimensional moving device and compresses the PE film on the surface of the wafer, the multifunctional mechanical arm 62 rotates, so that the vision system 6212 is aligned with the wafer, the center position and the edge position of the wafer are detected, the cutting assembly starts to work and cut the PE film. After the dicing is completed, the chuck robot 6211 returns the wafer to the supply system 7. The cut PE film belt passes through the excess material recovery roller system and is wound on the excess material recovery air expansion shaft.

The cooperation between the air expansion shaft in the composite film releasing system 2 and the film releasing electromagnetic brake and the tension control roller 24 and the self weight of the first buffer roller ensure that the composite film belt can keep enough tension in the film releasing system. The antistatic laminating roller 52 moves above the PE film by a two-dimensional moving device, and compresses the PE film. Receive the interior PE membrane area that second buffer memory roller 34 of clout system 3 relied on the gravity of self to make the cutting accomplish and remain sufficient tension throughout, it is nimble convenient in the multifunctional robot system 6 working process, adjust break bar 62134 angle through control butterfly nut among the cutting assembly, carry out accurate cutting, half round gasket makes can not block when pendulous device's swing and dies, break bar 62134 is at angle regulation's in-process, buffer can prevent that the break bar 62134 goes up and down too fast, cause the damage. The vision system 6212 can be precisely positioned at the center of the wafer and at the edge of the wafer.

The technical means disclosed by the scheme of the present invention is not limited to the technical means disclosed by the above embodiments, but also includes the technical scheme formed by the arbitrary combination of the above technical features. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications are also considered as the protection scope of the present invention.

Claims

1. Full-automatic wafer laminating machine includes: the multifunctional robot system comprises six mechanical arms and a multifunctional mechanical arm fixed on the six mechanical arms, and the multifunctional mechanical arm conveys wafers to the wafer film pasting system from the feeding system and cuts the wafers pasted with the PE films.

2. The full-automatic wafer laminating machine of claim 1, wherein the composite film laying system comprises: the film releasing and air expanding device comprises a film releasing and air expanding shaft, a driven roller system and a film releasing and caching roller, wherein a film releasing electromagnetic brake is fixed at the end part of the film releasing and air expanding shaft, the film releasing electromagnetic brake is electrically connected with a tension control roller, the tension control roller detects the tension of a film tape and feeds the tension back to the film releasing electromagnetic brake, and the composite film is kept tensioned all the time.

3. The full-automatic wafer laminating machine of claim 2, wherein, the composite film laying system further comprises a first buffer roller, the first buffer roller is used as a slide block and is connected with a guide rail arranged on the longitudinal side wall, and the first buffer roller is contacted with the film belt by self gravity.

4. The full-automatic wafer laminating machine according to claim 3, wherein a first driving roller is arranged between the composite film laying system and the wafer laminating system, a first fixed roller is arranged below the first driving roller, a channel for the film belt to advance exists between the first fixed roller and the first driving roller, the PE film is in close contact with the first driving roller, and the protective film is in close contact with the first fixed roller.

5. The full-automatic wafer laminating machine of claim 4, wherein the protective film collecting system comprises a protective film collecting air expansion shaft and a protective film collecting wheel train, the protective film passes through the protective film collecting roller system through the first fixed roller and is wound on the protective film collecting air expansion shaft, and a protective film collecting electromagnetic brake is fixed at the end part of the protective film collecting air expansion shaft and keeps tensioned all the time when the protective film is collected.

6. The full-automatic wafer laminating machine according to claim 5, wherein the wafer laminating system comprises a laminating lifting platform, an anti-static laminating roller and a film angle adjusting roller, the anti-static laminating roller is fixed on the longitudinal side wall through a two-dimensional moving device and is in contact with the PE film on the laminating lifting platform through the two-dimensional moving device, the film angle adjusting roller is fixed on the longitudinal side wall through a lifting cylinder, and the PE film penetrating out of the laminating lifting platform is in contact with the bottom of the film angle adjusting roller, so that the angle between the film belt and the horizontal plane is unchanged.

7. The full-automatic wafer laminating machine according to claim 6, wherein the multifunctional robot system comprises six mechanical arms and a multifunctional mechanical arm fixed on the six mechanical arms, the multifunctional mechanical arm comprises a base, a suction cup mechanical arm is fixed on the side of the base, a rotary cutting assembly is arranged on the opposite side wall of the side wall where the suction cup mechanical arm is located, a vision system is arranged on the side wall adjacent to the side wall where the suction cup mechanical arm is located, and the orientation of the vision system is consistent with that of the rotary cutting assembly.

8. The fully automatic wafer laminator according to claim 7, wherein said rotary cutting assembly comprises: fix the rotary driving device at the base lateral wall, fix at the terminal swinging boom of rotary driving device output shaft and with swinging boom end connection's adjustable break bar group, adjustable break bar group includes: the knife flywheel mounting seat, the swinging device, the movable plate and the knife flywheel; the knife flywheel mounting seat is fixed at the end part of the rotating arm, the movable plate is connected with the knife flywheel mounting seat through a swinging device, the knife flywheel is mounted at the bottom of the movable plate, a U-shaped notch is formed in the end, far away from the rotating motor, of the knife flywheel mounting seat, and the swinging device comprises a swinging plate, a swinging shaft, an adjusting plate, an adjusting screw rod and the movable plate; the swinging plate is arranged in the U-shaped notch through a swinging shaft, the swinging shaft is fixed on the side wall of the U-shaped notch through a bearing, and a margin is reserved between the swinging plate and the side wall adjacent to the U-shaped notch; adjusting plates are fixed at the top and the bottom of the U-shaped notch, grooves corresponding to the U-shaped notch are formed in the bottom of each adjusting plate, and adjusting holes are formed in the top of each adjusting plate; the adjusting screw rod penetrates through the adjusting hole and penetrates through the swinging plate, the radial area of the adjusting screw rod is smaller than that of the adjusting hole, the adjusting screw rod is in threaded connection with the swinging plate, and butterfly nuts are in threaded connection with the end parts of the screw rod; the movable plate is connected with the side wall of the swinging plate extending out of the U-shaped notch, a semicircular gasket is arranged between the butterfly nut and the adjusting plate, the semicircular gasket penetrates through the adjusting screw rod, and the arc-shaped surface of the semicircular gasket is in contact with the adjusting plate.

9. The full-automatic wafer laminating machine of claim 8, wherein a door-shaped knife wheel fixing seat is fixed at the bottom of the movable plate; the knife flywheel is coaxially fixed with a knife flywheel bearing, is rotatably connected to the door-shaped knife flywheel fixing seat through a knife flywheel pin shaft and is fixed through a knife flywheel clamp spring.

10. The full-automatic wafer laminating machine according to claim 9, wherein the excess material collecting system comprises an excess material air expansion shaft, a second driving roller, an excess material collecting roller system and a second buffer roller, the film belt passes through the film angle adjusting roller, passes through the upper surface of the second driving roller, passes through the excess material collecting roller system, is wound on the excess material air expansion shaft, and an electromagnetic brake is fixed at the end of the excess material air expansion shaft to keep the PE film tensioned all the time when being recovered.