CN218613654U - Glass positioning device for vacuum cavity chamber - Google Patents
Glass positioning device for vacuum cavity chamber Download PDFInfo
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- CN218613654U CN218613654U CN202223186837.9U CN202223186837U CN218613654U CN 218613654 U CN218613654 U CN 218613654U CN 202223186837 U CN202223186837 U CN 202223186837U CN 218613654 U CN218613654 U CN 218613654U
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Abstract
The utility model provides a glass positioning device for a vacuum cavity, which structurally comprises a vacuum cavity; the glass sucker is arranged in the vacuum chamber and used for sucking glass; the deviation rectifying part is arranged in the vacuum chamber and connected with the vacuum chamber, and can drive the glass sucker to move along a first direction, a second direction and rotate along the circumferential direction, wherein the first direction is perpendicular to the second direction; and the connecting part is connected with the glass sucker and the deviation rectifying part, and can drive the glass sucker to move along a third direction which is perpendicular to the first direction and the second direction. The glass positioning device for the vacuum chamber can solve the problem of how to position glass by the vacuum chamber.
Description
Technical Field
The application relates to the technical field of vacuum chambers, in particular to a glass positioning device for a vacuum chamber.
Background
Vacuum chambers are used in many fields and in many devices, the use of which is mostly related to the positioning of glass.
The specific process of glass positioning is usually realized by a visual positioning device and a glass positioning device for fine adjustment of the glass position, and how to position glass in a vacuum chamber is an urgent problem to be solved.
SUMMERY OF THE UTILITY MODEL
In view of the above, an object of the present invention is to provide a glass positioning device for a vacuum chamber, which is used to solve the problem of how to position glass in the vacuum chamber.
According to a first aspect of the present invention, there is provided a glass positioning device for a vacuum chamber, wherein the glass positioning device for a vacuum chamber comprises: a vacuum chamber; the glass sucker is arranged in the vacuum chamber and used for sucking glass; the deviation rectifying part is arranged in the vacuum chamber and connected with the vacuum chamber, and can drive the glass sucker to move along a first direction, a second direction and rotate along the circumferential direction, wherein the first direction is perpendicular to the second direction; and the connecting part is connected with the glass sucker and the deviation rectifying part, and can drive the glass sucker to move along a third direction which is perpendicular to the first direction and the second direction.
Preferably, the deviation correcting portion includes: the top of the first driving part is connected to the connecting part, and the first driving part can drive the connecting part to move along the first direction; the top of the second driving part is connected with the first driving part, and the second driving part can drive the first driving part to move along the second direction; and the top of the third driving part is connected with the second driving part, and the third driving part can drive the second driving part to rotate along the circumferential direction.
Preferably, the first driving part includes: a first transverse plate connected to the bottom of the connecting portion; the number of the first sliding blocks is multiple, and the multiple first sliding blocks are connected with the bottom of the first transverse plate; the first slide rails are arranged along the first direction, and the first slide blocks are mounted on the first slide rails; the first driving part is connected with the first transverse plate and can drive the first transverse plate to move back and forth along the first direction; the first sliding rail is arranged at the top of the second transverse plate; and the top end of the first connecting piece is fixedly connected with the first transverse plate, the bottom end of the first connecting piece is movably connected with the second transverse plate, and the first connecting piece can move along the first direction relative to the second transverse plate.
Preferably, the first driving part includes: the first driving block is fixedly connected with the first transverse plate; and the first driving block is provided with a threaded hole matched with the first lead screw, and the first lead screw is used for driving the first driving block to move back and forth along the first direction.
Preferably, the second driving part includes: the number of the second sliding blocks is multiple, and the second sliding blocks are connected with the bottom of the first driving part; the number of the second slide rails is multiple, the second slide rails are arranged along the second direction, and the second slide blocks are mounted on the second slide rails; a second driving member connected to the first driving unit, the second driving member being capable of driving the first driving unit to reciprocate in the second direction; the second sliding rail is arranged at the top of the third transverse plate; and the top end of the second connecting piece is fixedly connected with the first driving part, the bottom end of the second connecting piece is movably connected with the third transverse plate, and the second connecting piece can move along the second direction relative to the third transverse plate.
Preferably, the second driving part includes: the second driving block is fixedly connected with the first driving part; and the second driving block is provided with a threaded hole matched with the second lead screw, and the second lead screw is used for driving the second driving block to reciprocate along the second direction.
Preferably, the third driving part includes: the top of the first circular plate is connected with the bottom of the second driving part, and a first fan-shaped annular groove is formed at the bottom of the first circular plate; a plurality of third sliding blocks, wherein the third sliding blocks are connected with the bottom of the first circular plate; a plurality of third slide rails are arranged along the circumferential direction, and the third slide blocks are mounted on the third slide rails; the bottom of the second circular plate is connected with the vacuum chamber, a second fan-shaped annular groove is formed in the top of the second circular plate, and the second fan-shaped annular groove is opposite to the first fan-shaped annular groove in position; a third driving member connected to the first disk, the third driving member being capable of driving the first disk to move in the circumferential direction, the third driving member being fixed to the second disk; and the top end of the third connecting piece is fixedly connected with the first circular plate, the bottom end of the third connecting piece is movably connected with the second circular plate, and the third connecting piece can move along the circumferential direction relative to the second circular plate.
Preferably, the third driving part includes: the bottom plate is provided with a fan-shaped protrusion which is used for being clamped with the second fan-shaped groove; the bottom of the fan-shaped clamping groove is connected with the top surface of the bottom plate; the first part of the fan-shaped clamping piece is positioned in the fan-shaped clamping groove, the fan-shaped clamping piece can move back and forth along the circumferential direction, the second part of the fan-shaped clamping piece is exposed out of the fan-shaped clamping groove, a threaded hole is formed for connecting a third lead screw, and the third lead screw is used for driving the fan-shaped clamping piece; and the fan-shaped matching piece is fixedly connected with the second part of the fan-shaped clamping piece and is used for being clamped with the first fan-shaped annular groove.
Preferably, the connecting part is a sliding table cylinder, and the connecting part includes: the sliding platform part is connected with the bottom of the glass sucker; and the bottom of the cylinder body is connected with the top of the deviation rectifying part, the side part of the cylinder body is movably connected with the sliding table part, and the sliding table part can move back and forth relative to the cylinder body along the third direction.
Preferably, an installation groove for installing the deviation correcting part is formed at the center of the bottom of the vacuum chamber.
The utility model discloses glass positioner that vacuum chamber was used is provided with the glass sucking disc that can adsorb glass and drive glass and remove in its vacuum chamber to and can drive the glass sucking disc along the first direction motion, along the second direction motion and along circumferencial direction pivoted portion of rectifying. The connecting part is used for connecting the deviation rectifying part and the glass sucker and can drive the glass sucker to move along a third direction, wherein the first direction is perpendicular to the second direction, and the third direction is perpendicular to the first direction and the second direction, so that the problem of how to position the glass by the vacuum chamber can be effectively solved.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic view of a glass positioning device for a vacuum chamber according to the present invention.
Fig. 2 is a schematic view of the inside of the glass positioning device for a vacuum chamber according to the present invention.
FIG. 3 is a schematic view of a deviation rectifying portion of the glass positioning device for a vacuum chamber according to the present invention.
Fig. 4 is a schematic view of a first driving part of the glass positioning device for a vacuum chamber according to the present invention.
Fig. 5 is a schematic view of a second driving part of the glass positioning device for a vacuum chamber according to the present invention.
Fig. 6 is a schematic view of a third driving part of the glass positioning device for a vacuum chamber according to the present invention.
Fig. 7 is another schematic view of the third driving part of the glass positioning device for a vacuum chamber according to the present invention.
Fig. 8 is a schematic view of a connecting portion of a glass positioning device for a vacuum chamber according to the present invention.
Reference numerals: 1-glass sucker; 2-a connecting part; 21-a sled portion; 22-a cylinder body; 3-a deviation rectifying part; 31-a first drive section; 311-a first transverse plate; 312-a first slider; 313-a first slide rail; 314-a first drive member; 3141-a first drive block; 3142-a first lead screw; 315-a second transverse plate; 316-first connecting member; 32-a second drive section; 321-a second slider; 322-a second slide rail; 323-a second drive member; 3231-a second drive block; 3232-second lead screw; 324-a third cross plate; 325 — a second connector; 33-a third drive section; 331-a first circular plate; 332-a third slider; 333-a third sliding rail; 334-a second circular plate; 335-a third drive member; 301-a base plate; 302-sector annular clamping groove; 303-fan ring fastener; 3031-third lead screw; 304-fan ring fitting; 336-a third connector; 4-vacuum chamber.
Detailed Description
The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, devices, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and/or systems described herein will be apparent to those skilled in the art in view of the disclosure of the present application. For example, the order of operations described herein is merely an example, which is not limited to the order set forth herein, but rather, may be changed in addition to operations that must occur in a particular order, as will be apparent upon an understanding of the present disclosure. Moreover, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.
The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and/or systems described herein that will be apparent after understanding the disclosure of the present application.
Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on," "connected to," coupled to, "over," or "overlying" another element, it may be directly "on," "connected to," coupled to, "over," or "overlying" the other element, or one or more other elements may be present therebetween. In contrast, when an element is referred to as being "directly on," "directly connected to," directly coupled to, "directly over" or "directly overlying" another element, there may be no intervening elements present.
As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.
Although terms such as "first", "second", and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section referred to in the examples described herein may be termed a second element, component, region, layer or section without departing from the teachings of the examples.
For ease of description, spatial relationship terms such as "above 8230 \8230; above", "upper", "above 8230 \8230; below" and "lower" may be used herein to describe the relationship of one element to another element as shown in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to other elements would then be oriented "below" or "lower" relative to the other elements. Thus, the term "over" \\8230; \8230; "includes both orientations" over "\8230; \8230and" under "\8230;" depending on the spatial orientation of the device. The device may also be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein should be interpreted accordingly.
The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms also are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.
Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.
The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of this application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application.
The utility model provides a glass positioner that vacuum chamber was used, as shown in fig. 1 to 8, this glass positioner that vacuum chamber was used includes glass sucking disc 1, connecting portion 2, rectifying portion 3 and vacuum chamber 4.
In the following description, a specific structure of the above-described components of the glass positioning device for a vacuum chamber and a connection relationship of the above-described components will be specifically described with reference to fig. 1 to 8.
As shown in fig. 1 and fig. 2, in the embodiment, a glass suction cup 1 capable of sucking glass and driving the glass to move and a deviation rectifying portion 3 capable of driving the glass suction cup 1 to move along a first direction, move along a second direction and rotate along a circumferential direction are disposed in a square vacuum chamber 4, and the deviation rectifying portion 3 is fixedly connected to the vacuum chamber 4. The first direction and the second direction are perpendicular to each other, and the circumferential direction is parallel to a plane formed by the first direction and the second direction. The connecting part 2 is used for connecting the deviation rectifying part 3 with the glass sucker 1, and the connecting part 2 can drive the glass sucker to move along a third direction. The third direction is perpendicular to the first direction and the second direction, so that the glass sucker 1 can drive the adsorbed glass to move in a space coordinate system formed by the first direction, the second direction and the third direction and can rotate in the circumferential direction.
Preferably, as shown in fig. 2 to 7, in the embodiment, the deviation rectifying part 3 may include a first driving part 31, a second driving part 32, and a third driving part 33. Wherein, the top of the first driving part 31 is bolted to the connecting part 2, and the first driving part 31 is used for driving the connecting part 2 to move along the first direction (which may be the direction perpendicular to the paper surface in fig. 4). The top of the second driving part 32 is connected to the first driving part 31, and the second driving part 32 is used for driving the first driving part 31 to move along the second direction (which may be a transverse direction in fig. 4). The top of the third driving part 33 is connected to the second driving part 32, and the third driving part 33 is used for driving the second driving part 32 to rotate along the circumferential direction (which may be parallel to the bottom plate of the vacuum chamber 4 in fig. 2). In this way, the third driving portion 33 drives the second driving portion 32, the second driving portion 32 drives the first driving portion 31, and the first driving portion 31 drives the connecting portion 2 to indirectly drive the glass sucker 1, so as to realize the function of moving the glass along the first direction, the second direction and the circumferential direction.
Further, as shown in fig. 2 to 4, in an embodiment, the first driving portion 31 may include a first transverse plate 311, a first slider 312, a first slide rail 313, a first driving member 314, a second transverse plate 315, and a first connecting member 316. The first horizontal plate 311 is a horizontally disposed square plate, and the top surface thereof is connected to the bottom of the connecting portion 2 by bolts. The number of the first sliding blocks 312 may be multiple, and may be four in the embodiment shown, and the top of the four first sliding blocks 312 are bolted to the bottom of the first transverse plate 311. The number of the first slide rails 313 may be multiple, and may be two in the embodiment, the extending directions of the two first slide rails 313 are both parallel to the first direction, and two first slide blocks 312 are mounted on each first slide rail 313, so that the first slide blocks 312 can move back and forth along the first direction. The bottom of the first slide rail 313 is bolted to the top surface of the second horizontal plate 315, and the second horizontal plate 315 may be a square plate disposed opposite to the first horizontal plate 311. The top of the first connecting member 316 is fixedly connected to the side of the first horizontal plate 311 through a bolt, and the bottom thereof is slidably connected to the sliding slot formed at the side of the second horizontal plate 315 through a sliding block. The first driving member 314 is connected to the first horizontal plate 311 for driving the first horizontal plate 311 to move back and forth along the first direction.
Specifically, as shown in fig. 3 and 4, in an embodiment, the first driving part 314 may include a first driving block 3141 and a first lead screw 3142. The first driving block 3141 is disposed along the first direction, the top surface thereof is bolted to the bottom surface of the first transverse plate 311, and a threaded hole capable of being engaged with the first lead screw 3142 is formed at the end of the first driving block 3141. The first lead screw 3142 is disposed along the first direction, so that the first lead screw 3142 can drive the first driving block 3141 to move back and forth along the first direction, and further drive the first horizontal plate 311 to move along the first direction.
Preferably, as shown in fig. 2 to 5, in an embodiment, the second driving part 32 may include a second slider 321, a second slide rail 322, a second driving member 323, a third transverse plate 324, and a second connecting member 325. The number of the second sliding blocks 321 may be multiple, and may be four as shown in the embodiment, and the tops of the four second sliding blocks 321 are connected with the bottom of the first driving part 31 by bolts. The number of the second slide rails 322 may be multiple, and may be two as shown in the embodiment, the extending directions of the two second slide rails 322 are both parallel to the second direction, and two second slide blocks 321 are mounted on each second slide rail 322, so that the second slide blocks 321 can reciprocate along the second direction. The bottom of the second slide rail 322 is bolted to the top surface of the third horizontal plate 324, and the third horizontal plate 324 can be a square plate disposed opposite to the second horizontal plate 315. The top of the second connecting member 325 is fixedly connected to the lateral portion of the second horizontal plate 315 through a bolt, the bottom thereof is slidably connected to the sliding slot formed at the lateral portion of the third horizontal plate 324 through a sliding block, and the first connecting member 316 and the second connecting member 325 are respectively located at different sides of the second horizontal plate 315. The second driving member 323 is connected to the first driving part 31 for driving the first driving part 31 to reciprocate along the second direction.
Specifically, as shown in fig. 2 to 5, in an embodiment, the second driving part 323 may include a second driving block 3231 and a second lead screw 3232. The second driving block 3231 is disposed along the second direction, the top surface thereof is bolted to the bottom surface of the second horizontal plate 315, and a threaded hole capable of being engaged with the second lead screw 3232 is formed at the end of the second driving block 3231. The second screw shaft 3232 is disposed along the second direction, such that the second screw shaft 3232 can drive the second driving block 3231 to reciprocate along the second direction, and further drive the first driving portion 31 to move along the second direction.
Preferably, as shown in fig. 5 to 7, in an embodiment, the third driving part 33 may include a first circular plate 331, a third slider 332, a third slide rail 333, a second circular plate 334, a third driving member 335, and a third connecting member 336. The first circular plate 331 is a horizontally disposed circular plate, the top surface of which is bolted to the bottom of the second driving portion 32, and the bottom surface of which is provided with a first sector annular groove. The number of the third sliding blocks 332 may be multiple, specifically, three third sliding blocks 332 are shown in the embodiment, and the tops of the three third sliding blocks 332 are all bolted to the bottom of the second driving portion 32. The number of the third slide rails 333 may be multiple, specifically, three third slide rails 333 shown in the embodiment may be provided, three third slide rails 333 are all arranged along the circumferential direction, and one third slide block 332 is mounted on each third slide rail 333, so that the third slide block 332 can rotate along the circumferential direction. The bottom of the third slide rail 333 is bolted to the top surface of the second circular plate 334, the second circular plate 334 may be a circular plate disposed opposite to the first circular plate 331, and the top of the second circular plate may be formed with a second fan-shaped annular groove, where the first fan-shaped annular groove is opposite to the second fan-shaped annular groove. The top of the third connecting member 336 is fixedly connected to the side of the first circular plate 331 through a bolt, and the bottom thereof is slidably connected to a sliding groove formed in the side of the second circular plate 334 through a sliding block. The third driving part 335 is connected to the first circular plate 331 for driving the first circular plate 331 to rotate along the circumferential direction. Preferably, a circular mounting groove for fixedly mounting the second disk 334 and further the deviation rectifying part 3 may be formed at the center of the bottom plate in the vacuum chamber 4.
Specifically, as shown in fig. 5 to 7, in an embodiment, the third driving part 335 may include a bottom plate 301, a sector ring slot 302, a sector ring clip 303, a sector ring mating piece 304, and a third lead screw 3031. The bottom plate 301 is formed with a sector annular protrusion which can be clamped and fixed with the second sector annular groove, the bottom of the sector annular clamping groove 302 is bolted to the top surface of the bottom plate 301, and a sector annular gap is formed in the sector annular clamping groove 302 and used for placing the sector annular clamping piece 303. The first part of the fan-shaped clamping piece 303 is placed in the fan-shaped clamping groove 302 and can move back and forth in the fan-shaped clamping groove 302 along the circumferential direction, the second part of the fan-shaped clamping piece 303 is exposed out of the fan-shaped clamping groove 302, a threaded hole is formed in the end part of the fan-shaped clamping piece 303 and used for being connected with a third lead screw 3031, and the third lead screw 3031 can drive the fan-shaped clamping piece 303 to move in the fan-shaped clamping groove 302. The sector annular mating member 304 can be clamped and fixed with the first sector annular groove, and the end of the sector annular mating member 304 is connected with the second part of the sector annular clamping piece 303 through a bolt, so that the sector annular clamping piece 303 can drive the sector annular mating member 304 to synchronously move when moving, and further the first circular plate 331 is rotated.
Preferably, as shown in fig. 1, 2 and 8, the connecting part 2 may be a slide table cylinder, which may include a table part 21 and a cylinder main body 22. The top of the slider portion 21 is bolted to the bottom of the glass suction cup 1, and the bottom of the cylinder main body 22 is bolted to the center of the top surface of the first horizontal plate 311. The slider portion 21 is slidably connected to a side portion of the cylinder main body 22 by a slide rail, and is capable of reciprocating in a third direction (which may be a vertical direction in fig. 8) with respect to the cylinder main body 22 to perform a function of driving the glass suction cup 1 to move in the third direction.
In practice, the top surface of the vacuum chamber 4 is the opening side, the top surface of the glass chuck 1 is parallel to the top surface of the vacuum chamber 4, and after the device is started, the glass is adsorbed on the glass chuck 1. The third driving part 33 in the vacuum chamber 4 can drive the second driving part 32 to rotate circularly, the second driving part 32 can drive the first driving part 31 to move along the second direction, the first driving part 31 can drive the connecting part 2 to move along the first direction, and the connecting part 2 can drive the glass sucker 1 to move along the third direction, so that the glass positioning device for the vacuum chamber drives the glass to be driven in a space coordinate system formed by the first direction, the second direction and the third direction and can rotate circularly, and the purpose of positioning the glass is achieved.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present application and are intended to be covered by the appended claims. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A glass positioning device for a vacuum chamber, comprising:
a vacuum chamber;
the glass sucker is arranged in the vacuum chamber and used for sucking glass;
the deviation rectifying part is arranged in the vacuum chamber and connected with the vacuum chamber, and can drive the glass sucker to move along a first direction, a second direction and rotate along the circumferential direction, wherein the first direction is perpendicular to the second direction; and
the connecting part is connected with the glass sucker and can drive the glass sucker to move along a third direction, and the third direction is perpendicular to the first direction and the second direction.
2. The glass positioning apparatus for a vacuum chamber according to claim 1, wherein the deviation correcting portion comprises:
the top of the first driving part is connected to the connecting part, and the first driving part can drive the connecting part to move along the first direction;
the top of the second driving part is connected with the first driving part, and the second driving part can drive the first driving part to move along the second direction; and
and the top of the third driving part is connected to the second driving part, and the third driving part can drive the second driving part to rotate along the circumferential direction.
3. The glass positioning apparatus for a vacuum chamber according to claim 2, wherein the first driving unit comprises:
a first transverse plate connected to the bottom of the connecting portion;
the number of the first sliding blocks is multiple, and the first sliding blocks are connected with the bottom of the first transverse plate;
the first slide rails are arranged in the first direction, and the first sliding blocks are mounted on the first slide rails;
the first driving part is connected with the first transverse plate and can drive the first transverse plate to move back and forth along the first direction;
the first sliding rail is arranged at the top of the second transverse plate; and
and the top end of the first connecting piece is fixedly connected with the first transverse plate, the bottom end of the first connecting piece is movably connected with the second transverse plate, and the first connecting piece can move along the first direction relative to the second transverse plate.
4. The glass positioning apparatus for a vacuum chamber according to claim 3, wherein the first driving means comprises:
the first driving block is fixedly connected with the first transverse plate; and
the first driving block is provided with a threaded hole matched with the first lead screw, and the first lead screw is used for driving the first driving block to move back and forth along the first direction.
5. The glass positioning apparatus for a vacuum chamber according to claim 2, wherein the second driving unit comprises:
the number of the second sliding blocks is multiple, and the second sliding blocks are connected with the bottom of the first driving part;
the number of the second slide rails is multiple, the multiple second slide rails are arranged along the second direction, and the second slide blocks are mounted on the second slide rails;
a second driving member connected to the first driving unit, the second driving member being capable of driving the first driving unit to reciprocate in the second direction;
the second sliding rail is arranged at the top of the third transverse plate; and
and the top end of the second connecting piece is fixedly connected with the first driving part, the bottom end of the second connecting piece is movably connected with the third transverse plate, and the second connecting piece can move along the second direction relative to the third transverse plate.
6. The glass positioning apparatus for a vacuum chamber according to claim 5, wherein the second driving means comprises:
the second driving block is fixedly connected with the first driving part; and
and the second driving block is provided with a threaded hole matched with the second lead screw, and the second lead screw is used for driving the second driving block to reciprocate along the second direction.
7. The glass positioning apparatus for a vacuum chamber according to claim 2, wherein the third driving portion comprises:
the top of the first circular plate is connected with the bottom of the second driving part, and a first fan-shaped annular groove is formed at the bottom of the first circular plate;
a plurality of third sliders, which are connected to the bottom of the first circular plate;
a plurality of third slide rails are arranged along the circumferential direction, and the third slide blocks are mounted on the third slide rails;
the bottom of the second circular plate is connected with the vacuum chamber, a second fan-shaped annular groove is formed in the top of the second circular plate, and the second fan-shaped annular groove is opposite to the first fan-shaped annular groove in position;
a third driving member connected to the first disk, the third driving member being capable of driving the first disk to move in the circumferential direction, the third driving member being fixed to the second disk; and
and the top end of the third connecting piece is fixedly connected with the first circular plate, the bottom end of the third connecting piece is movably connected with the second circular plate, and the third connecting piece can move along the circumferential direction relative to the second circular plate.
8. The glass positioning apparatus for a vacuum chamber according to claim 7, wherein the third driving means comprises:
the bottom plate is provided with a fan-shaped protrusion which is used for being clamped with the second fan-shaped groove;
the bottom of the fan-shaped clamping groove is connected with the top surface of the bottom plate;
the first part of the fan-shaped clamping piece is positioned in the fan-shaped clamping groove, the fan-shaped clamping piece can move back and forth along the circumferential direction, the second part of the fan-shaped clamping piece is exposed out of the fan-shaped clamping groove, a threaded hole is formed for connecting a third lead screw, and the third lead screw is used for driving the fan-shaped clamping piece; and
and the fan-shaped matching piece is fixedly connected with the second part of the fan-shaped clamping piece and is used for being clamped with the first fan-shaped annular groove.
9. The glass positioning device for a vacuum chamber of claim 1, wherein the coupling part is a slide table cylinder, the coupling part comprising:
the sliding platform part is connected with the bottom of the glass sucker; and
the cylinder main part, the bottom with the top of rectifying a deviation is connected, the lateral part of cylinder main part with slip table portion swing joint, slip table portion can for the cylinder main part is followed the third direction is toward returning the motion.
10. The glass positioning apparatus for a vacuum chamber according to claim 1, wherein a mounting groove for mounting the correcting portion is formed in the center of the bottom of the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223186837.9U CN218613654U (en) | 2022-11-28 | 2022-11-28 | Glass positioning device for vacuum cavity chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223186837.9U CN218613654U (en) | 2022-11-28 | 2022-11-28 | Glass positioning device for vacuum cavity chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218613654U true CN218613654U (en) | 2023-03-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223186837.9U Active CN218613654U (en) | 2022-11-28 | 2022-11-28 | Glass positioning device for vacuum cavity chamber |
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| CN (1) | CN218613654U (en) |
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Address after: 230000, 508, Block B, Science and Technology Innovation Building, Shaoquan Lake Science and Technology Park, Intersection of Tongling North Road and Xifeihe Road, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei Boshi Electronic Technology Co.,Ltd. Country or region after: China Address before: No. a2497, second floor, College Park, Dongsheng science and Technology Park, Zhongguancun, No. 18 Xueqing Road, Haidian District, Beijing 100089 Patentee before: Beijing Boshi Electronic Technology Co.,Ltd. Country or region before: China |
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