CN218585928U - Part holding structure, cleaning and loading and unloading device, machine table and vibrating brush - Google Patents

Abstract

The utility model belongs to the technical field of microelectronic product processing and manufacturing, in particular to a component holding structure, a cleaning and loading and unloading device, a machine table and a vibrating brush; the cleaning component embedded into the groove is adopted, so that the cleaning process of the component holding structure is more thorough, further, the invasion of process residues of related devices and machines is reduced, the damage of impurities or related falling objects in the hidden groove component to a product is avoided, and the yield of workpieces or wafers is improved.

Description

Part holding structure, cleaning and loading and unloading device, machine table and vibrating brush

Technical Field

The utility model belongs to the technical field of microelectronics product processing and manufacturing, especially, relate to a part retaining structure, washing and handling device, board and vibrating brush.

Background

A Head Clean and wafer Load/unload (HCLU) device is an important component of a machine, and during a semiconductor product manufacturing process, a DeIonized Water (DIW) cleaning device of the HCLU device lacks a cleaning capability for a machine Retention Ring (RR), and slurry-like impurities and accumulation or accumulation of polishing by-products or crystals are easily formed in a RR groove; the by-products or crystals are easy to fall off in the grinding process, which causes scratching of the product and reduces the yield.

On the other hand, the related structure of the machine includes trench Parts GPs (Grooved Parts) of the HCLU; will bond firmly with the RR; the conventional Inter-plate Clean method IPC (Inter-plate Clean) cannot effectively remove slurry impurities in the trenches GPs, and therefore, it is necessary to solve the corresponding technical problems and improve the process.

Disclosure of Invention

The embodiment of the utility model discloses a component holding structure, which comprises a first holding structure body, a second dirt cleaning component, a third supporting component and a fourth driving component; the first holding structure body comprises a first groove structure, a second groove structure and an Nth groove structure; the second cleaning component comprises a first cleaning structure, a second cleaning structure and an Nth cleaning structure, wherein N is a natural number.

Furthermore, the third support component comprises a support plate, a first elastic connecting piece, a second elastic connecting piece and an Mth elastic connecting piece, wherein M is a natural number; the number M of elastic connections is chosen according to the rigidity or elasticity requirements of the component holding structure, ensuring a matching or compromise between deformation and rigidity.

Further, fourth drive part includes drive power generating device, drive power transmission assembly, and this part does the utility model discloses the embodiment provides the policy power for relevant mechanical action efficiency is improved.

Specifically, the second cleaning component is fixedly connected to the first end face of the supporting disc, the first cleaning structure of the second cleaning component is embedded into the first groove structure, and the second cleaning structure is embedded into the second groove structure until the Nth cleaning structure is embedded into the Nth groove structure; the first elastic connecting piece of the cleaning mechanism adjusts the first action distance between the first end face of the first elastic connecting piece and the second end face of the first holding structure body until the Mth elastic connecting piece through deformation, provides mechanical stroke for related cleaning actions, and ensures effective execution of the mechanical actions.

Further, the first cleaning structure may further include a first cleaning brush, and the second cleaning structure may include a second cleaning brush, up to the nth cleaning structure may include an nth cleaning brush; the first cleaning brush is in elastic contact with the first groove structure, the second cleaning brush is in elastic contact with the second groove structure until the Nth cleaning brush is in elastic contact with the Nth groove structure.

In order to avoid secondary damage to workpieces or equipment in the cleaning process, the open end of the first cleaning brush, the open end of the second cleaning brush and the open end of the Nth cleaning brush can be in a shape processed by a deburring process, or the open ends are in a spherical or smooth transition structure; the bristles of the first, second, and up to the nth cleaning brushes may be made of a known material having a hardness lower than a predetermined value.

In order to improve the pollutant removal capacity and improve the decontamination efficiency, the fourth driving component can output a periodic and cyclic excitation, and the period of the excitation is smaller than a preset first period threshold, namely, the excitation has a sufficiently fast action frequency; at the moment, the first action distance of the device completes forced vibration under the excitation of the fourth driving part, and therefore pollutants are removed more effectively.

Specifically, the first cleaning brush, the second cleaning brush and the nth cleaning brush can further comprise a fastening unit, the fastening unit fastens the first cleaning brush, the second cleaning brush and the nth cleaning brush, and the fastening unit limits the cross section envelope of the first cleaning brush, the second cleaning brush and the nth cleaning brush within the cross section envelope range of the first groove structure, the second groove structure and the nth groove structure.

Further, the fourth driving component can comprise an eccentric wheel shaft, an eccentric wheel and a transmission shaft structure; the eccentric wheel shaft is driven by a driving force generating device; wherein the driving force generating means may be a rotating electric machine.

In particular, the first retaining structure body thereof may employ an annular retaining ring structure.

In order to improve the cleaning effect, the cleaning part can be subjected to self-cleaning treatment; when the first action distance is in a preset range or a numerical value, the parts of the second cleaning component, which comprise the first cleaning structure, the second cleaning structure and the Nth cleaning structure, are exposed to the spraying or flushing range of the cleaning liquid/air flow; the self-cleaning arrangement further reduces the risk of contamination of adjacent components or workpieces.

Correspondingly to the structure, the embodiment of the utility model also discloses a cleaning and loading and unloading device and a machine platform; the cleaning, loading and unloading device comprises a base, a workpiece holding mechanism, a spraying or scouring part and a top cover part; wherein the workpiece holding mechanism may further comprise a workpiece/wafer exchange mechanism; the cleaning and handling device further comprises the component holding structure; the machine comprises any one of the above parts holding structures and/or the above cleaning and handling device HCLU.

Further, the embodiment of the utility model also discloses a vibrating brush, which comprises a first cleaning structure, a second cleaning structure and an Nth cleaning structure, wherein N is a natural number; the first cleaning structure comprises a first cleaning brush, the second cleaning structure comprises a second cleaning brush, and the cleaning brush is arranged in the range from the first cleaning structure to the Nth cleaning structure; the first cleaning brush is in elastic contact with the first groove structure, the second cleaning brush is in elastic contact with the second groove structure until the Nth cleaning brush is in elastic contact with the Nth groove structure.

Specifically, the open end of the first cleaning brush, the open end of the second cleaning brush and the open end of the nth cleaning brush can be processed by a deburring process, or the open ends of the first cleaning brush, the second cleaning brush and the nth cleaning brush are set to be spherical or smooth transition structures; the bristles of the first cleaning brush, the second cleaning brush and the Nth cleaning brush can also be made of known materials with the hardness lower than a preset value.

In addition, the vibrating brush can be provided with a fourth driving component, and the fourth driving component outputs periodic and cyclic excitation, wherein the period of the excitation is smaller than a preset first period threshold value; wherein, first clean dirty brush, the clean dirty brush of second up to the clean dirty brush of Nth can include a fastening unit, and first clean dirty brush, the clean dirty brush of second up to the clean dirty brush of Nth are tightened to its fastening unit, and its fastening unit limits the cross section envelope of first clean dirty brush, the clean dirty brush of second up to the clean dirty brush of Nth inside first groove structure, the clean dirty brush of second up to the clean dirty brush of Nth groove structure cross section envelope range.

Further, the fourth driving part may include an eccentric wheel shaft, an eccentric wheel, a transmission shaft; the eccentric wheel shaft is driven by a driving force generating device which can be a rotating motor.

The utility model discloses a clean part of embedding slot for the clean process of part holding structure is more thorough, and then makes relevant device, board reduce the invasion and attack of technology residue, has avoided hiding impurity or relevant junk infringement among the slot part to the product, has promoted the yield of work piece or wafer.

It should be noted that the terms "first", "second", and the like are used herein only for describing the components in the technical solution, and do not constitute a limitation on the technical solution, and are not understood as an indication or suggestion of the importance of the corresponding component; an element in the similar language "first", "second", etc. means that in the corresponding embodiment, the element includes at least one.

Drawings

In order to more clearly explain the technical solution of the present invention, it is beneficial to further understand the technical effects, technical features and objects of the present invention, and it is right to combine the drawings below to perform the detailed description of the present invention, and the drawings constitute the necessary components of the specification, and together with the embodiments of the present invention, the technical solution of the present invention is used for explaining the present invention, but does not constitute the limitation of the present invention.

The same reference numerals in the drawings denote the same elements, and in particular:

FIG. 1 is a schematic diagram of an HCLU self-cleaning structure according to an embodiment of the present invention,

FIG. 2 is a detailed structural diagram of an HCLU wafer handler according to an embodiment of the present invention,

FIG. 3 is an exemplary brushing part and its detailed configuration features of the embodiment of the present invention,

FIG. 4 is a schematic view of the attachment of the brushing member and the retaining ring according to the embodiment of the present invention;

FIG. 5 is a comparison of the loading and unloading tray of the embodiment of the present invention with a conventional loading and unloading tray;

FIG. 6 is a schematic view of the assembly of the handling tray and the brushing member according to the embodiment of the present invention;

fig. 7 is a comparison of the embodiment of the present invention with a prior art off-line effect scatter diagram;

FIG. 8 is a comparison of scratch improvement effect between the embodiment of the present invention and the prior art;

FIG. 9 is a comparison of the cleaning effect of the embodiment of the present invention and the prior art;

fig. 10 is a schematic view of the working state of the embodiment of the present invention;

FIG. 11 is a photograph showing the accumulation state of RR trench crystals that tends to occur in the prior art;

FIG. 12 is a schematic diagram of the HCLU water spray area according to the embodiment of the present invention;

fig. 13 is a schematic view of the working state of the HCLU component holding structure according to the embodiment of the present invention;

FIG. 14 is a schematic view of an HCLU vibrating brush and a driving device thereof according to an embodiment of the present invention;

fig. 15 is a schematic view of a layout structure of a cleaning and loading/unloading device, a machine table, and a vibrating brush according to an embodiment of the present invention.

Wherein:

110-a first body of a holding structure,

111-the working state of the embodiment of the present invention,

119-holding structure of the prior art,

120-a second soil cleaning component,

130-the third support member or members,

140-a fourth drive member, and,

151. 152, 153, 154, 155, 15N-first, second, third, fourth, fifth, nth trench structures,

161. 162, 163, 164, 165, 16N-first, second, third, fourth, fifth, nth cleaning structures,

200-the effect of the embodiment of the present invention illustrates a scatter diagram,

201-existing structure scatter plot diagram,

300-a top cover, wherein the top cover,

301-schematic view of cleaning of the embodiment of the present invention;

600-the cleaning and handling device, the machine table or the vibrating brush of the utility model has a cleaning effect picture,

601-example of a prior art physical photograph;

700-a machine table, wherein the machine table is provided with a plurality of machine tables,

710-cleaning and handling device (HCLU),

800-vibrating brush.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. Of course, the following description of the specific embodiments is only for the purpose of explaining the technical solution of the present invention, and is not intended to limit the present invention. In addition, the portions shown in the examples or the drawings are merely illustrative of the relevant portions of the present invention, and are not all of the present invention.

As shown in fig. 2 and 14, a component holding structure of the present embodiment includes a first holding structure body 110, a second cleaning component 120, a third supporting component 130, and a fourth driving component 140; the first retaining structure body 110 includes a first trench structure 151, a second trench structure 152, and up to the nth trench structure 15N.

As shown in fig. 2, 3, 4, 5, and 6, the second cleaning member 120 includes a first cleaning structure 161, a second cleaning structure 162, and an nth cleaning structure 1qn, where N is a natural number; the third support member 130 includes a support plate 131, a first elastic coupling member 171, a second elastic coupling member 172, and up to an mth elastic coupling member 17m, which is a natural number.

As shown in fig. 14, the fourth driving member 140 includes a driving force generating device 190 and a driving force transmission assembly.

Specifically, as shown in fig. 2, the second cleaning component 120 is fixedly connected to the first end surface 132 of the supporting plate 131, the first cleaning structure 161 is embedded in the first groove structure 151, and the second cleaning structure 162 is embedded in the second groove structure 152 until the nth cleaning structure is embedded in the nth groove structure 15N; the first elastic connecting member 171 extends to the mth elastic connecting member 17M, and the first moving distance between the first end surface 132 and the second end surface 112 of the first retaining structure body 110 is adjusted by deformation.

Further, the first cleaning structure 161 includes a first cleaning brush, the second cleaning structure 162 includes a second cleaning brush, through the nth cleaning structure 16N includes an nth cleaning brush; the first cleaning brush is elastically contacted with the first groove structure 151, the second cleaning brush is elastically contacted with the second groove structure 152, and the cleaning brush is elastically contacted with the nth groove structure 15N.

Specifically, as shown in fig. 3, the open end of the first cleaning brush, the open end of the second cleaning brush, and up to the open end of the nth cleaning brush are processed by a deburring process, or the open ends are in a spherical or smooth transition structure.

Further, the bristles of the first, second, and up to the nth cleaning brushes are made of a known material having a hardness lower than a predetermined value.

Further, as shown in fig. 14, the fourth driving part 140 outputs a periodically-cycled excitation, the period of which is less than a preset first period threshold; the first action distance completes forced vibration under the excitation of the fourth driving component.

Specifically, as shown in fig. 3 and 4, the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush include a fastening unit 50N, the fastening unit 50N fastens the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush, and the fastening unit 50N limits the cross-sectional envelopes of the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush within the cross-sectional envelopes of the first groove structure 151, the second groove structure 152, and up to the nth groove structure 15N.

Further, as shown in fig. 14, the fourth driving member may include a cam shaft 193, a cam 192, and a transmission shaft 191; wherein, the eccentric wheel shaft 193 is driven by the driving force generating device 190, and the driving force generating device 190 can be a rotating motor; the first retaining structure body 110 may be in the form of an annular retaining ring.

As shown in fig. 2, when the first movement distance is within the preset range or value, the second cleaning component includes the first cleaning structure 161, the second cleaning structure 162, and up to the nth cleaning structure 16N, which are exposed to the spraying or flushing range of the cleaning liquid/air flow.

The cleaning and handling device of fig. 1, 14, 15 comprises a base, a workpiece holding mechanism, a spraying or flushing component, a top cover component 300, wherein the workpiece holding mechanism comprises a workpiece/wafer exchange mechanism; the cleaning and handling device further comprises any one of the component holding structures.

Referring to fig. 15, the machine includes the component holding structure and/or any of the cleaning and handling devices HCLU.

As shown in fig. 2, 3, 4, and 14, the vibrating brush embodiment includes: a first cleaning structure 161, a second cleaning structure 162 and an Nth cleaning structure 1691, wherein N is a natural number; the first cleaning structure 161 includes a first cleaning brush, the second cleaning structure 162 includes a second cleaning brush, and up to the nth cleaning structure 16N includes an nth cleaning brush; the first cleaning brush is elastically contacted with the first groove structure 151, the second cleaning brush is elastically contacted with the second groove structure 152, and the cleaning brush is elastically contacted with the nth groove structure 15N.

Further, as shown in fig. 3, the open end of the first cleaning brush, the open end of the second cleaning brush, and the open end of the nth cleaning brush are processed by the deburring process, or the open ends are in a spherical or smooth transition structure; the bristles of the first, second, and up to Nth cleaning brushes are made of a known material having a hardness lower than a predetermined value.

As shown in fig. 14, the vibrating brush further includes a fourth driving member 140, wherein the fourth driving member 140 outputs a periodically-cycled excitation, and the period of the excitation is less than a preset first period threshold.

As shown in fig. 4, the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush include a fastening unit 50N, the fastening unit 50N fastens the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush, and the fastening unit 50N limits the cross-sectional envelopes of the first cleaning brush, the second cleaning brush, and up to the nth cleaning brush within the cross-sectional envelopes of the first groove structure 151, the second groove structure 152, and up to the nth groove structure 15N.

As shown in fig. 14, the fourth driving component includes an eccentric wheel shaft 193, an eccentric wheel 192, and a transmission shaft 191; the eccentric wheel shaft 193 is driven by a driving force generating device 190, the driving force generating device 190 is a rotating electrical machine, and the first holding structure body 110 adopts an annular holding ring structure.

As shown in fig. 7 and 8, the structure, device or product according to the embodiment of the present invention can improve the cleaning effect; accordingly, the yield of the machine or the related equipment is also improved.

It should be noted that the above embodiments are only for clearly illustrating the technical solutions of the present invention, and those skilled in the art can understand that the embodiments of the present invention are not limited to the above contents, and obvious changes, substitutions or replacements based on the above contents do not exceed the scope covered by the technical solutions of the present invention; other embodiments will fall within the scope of the invention without departing from the inventive concept.

Claims (12)

1. A component holding structure comprising:

a first holding structure body (110), a second cleaning component (120), a third supporting component (130), a fourth driving component (140); wherein the content of the first and second substances,

the first retaining structure body (110) comprises a first trench structure (151), a second trench structure (152) up to an Nth trench structure (15N);

the second cleaning component (120) comprises a first cleaning structure (161), a second cleaning structure (162) and an Nth cleaning structure (16N), wherein N is a natural number;

the third supporting component (130) comprises a supporting plate (131), a first elastic connecting piece (171), a second elastic connecting piece (172) and an up-to-M elastic connecting piece (17M), wherein M is a natural number;

the fourth driving part (140) comprises a driving force generating device (190) and a driving force transmission assembly;

the second cleaning component (120) is fixedly connected to the first end surface (132) of the support plate (131), the first cleaning structure (161) is embedded in the first groove structure (151), and the second cleaning structure (162) is embedded in the second groove structure (152) until the Nth cleaning structure is embedded in the Nth groove structure (15N); the first elastic connecting piece (171) and the Mth elastic connecting piece (17M) adjust a first action distance between the first end face (132) and the second end face (112) of the first holding structure body (110) through deformation.

2. The component holding structure according to claim 1, wherein:

the first cleaning structure (161) comprises a first cleaning brush, the second cleaning structure (162) comprises a second cleaning brush, and up to the nth cleaning structure (16N) comprises an nth cleaning brush;

the first cleaning brush is in elastic contact with the first groove structure (151), the second cleaning brush is in elastic contact with the second groove structure (152), and the cleaning brush is in elastic contact with the Nth groove structure (15N).

3. The component holding structure according to claim 2, wherein:

the open end of the first dirt cleaning brush, the open end of the second dirt cleaning brush and the open end of the Nth dirt cleaning brush are processed by a deburring process, or the open ends are in a spherical or smooth transition structure;

the bristles of the first, second and nth cleaning brushes are made of known materials having a hardness lower than a predetermined value.

4. The component holding structure of any one of claims 2 or 3, wherein:

the fourth drive component (140) outputs a periodically cyclical excitation, the period of the excitation being less than a preset first period threshold;

the first action distance completes forced vibration under the excitation of the fourth drive component;

the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush comprise a fastening unit (50N), the fastening unit (50N) tightens the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush, and the fastening unit (50N) limits the cross-sectional envelope of the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush to be within the cross-sectional envelope range of the first groove structure (151), the second groove structure (152) and up to the Nth groove structure (15N).

5. The component holding structure of claim 4, wherein:

the fourth driving component comprises an eccentric wheel shaft (193), an eccentric wheel (192) and a transmission shaft (191);

the eccentric wheel shaft (193) is driven by the driving force generation device (190), and the driving force generation device (190) comprises a rotating motor;

the first retaining structure body (110) is in the form of an annular retaining ring structure.

6. The component holding structure as claimed in any one of claims 1, 2, or 3, wherein:

when the first action distance is within a preset range or value, the components of the second cleaning component (120) including the first cleaning structure (161), the second cleaning structure (162) and up to the nth cleaning structure (16N) are exposed to a spray or wash range of cleaning/air flow.

7. A cleaning and handling device comprising:

a base, a workpiece holding mechanism, a spray or rinse component, a top cover component (300), the workpiece holding mechanism comprising a workpiece/wafer exchange mechanism;

the cleaning and handling device further comprises: the component holding structure as claimed in any one of claims 1, 2, 3 or 5.

8. A machine, comprising:

the component holding structure of any one of claims 1, 2, 3, or 5;

and/or a cleaning and handling device HCLU according to claim 7.

9. A vibrating brush comprising the component holding structure according to claim 1;

the device comprises a first cleaning structure (161), a second cleaning structure (162) and an Nth cleaning structure (16N), wherein N is a natural number;

the first cleaning structure (161) comprises a first cleaning brush, the second cleaning structure (162) comprises a second cleaning brush, and up to the nth cleaning structure (16N) comprises an nth cleaning brush;

the first cleaning brush is in elastic contact with the first groove structure (151), the second cleaning brush is in elastic contact with the second groove structure (152), and the cleaning brush is in elastic contact with the Nth groove structure (15N).

10. The vibrating brush of claim 9, wherein:

the open end of the first cleaning brush, the open end of the second cleaning brush and the open end of the Nth cleaning brush are processed by a deburring process, or the open ends are in a spherical or smooth transition structure;

the bristles of the first, second and nth cleaning brushes are made of known materials having a hardness lower than a predetermined value.

11. The vibrating brush of claim 9 or 10, further comprising:

a fourth drive component (140), the fourth drive component (140) outputting a periodic cyclical excitation, a period of the excitation being less than a preset first period threshold;

the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush comprise a fastening unit (50N), the fastening unit (50N) tightens the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush, and the fastening unit (50N) limits the cross-sectional envelope of the first cleaning brush, the second cleaning brush and up to the Nth cleaning brush to be within the cross-sectional envelope range of the first groove structure (151), the second groove structure (152) and up to the Nth groove structure (15N).

12. The vibrating brush of claim 11, wherein:

the fourth driving component comprises an eccentric wheel shaft (193), an eccentric wheel (192) and a transmission shaft (191);

the eccentric wheel shaft (193) is driven by the driving force generation device (190), and the driving force generation device (190) comprises a rotating motor;

the first retaining structure body (110) is in the form of an annular retaining ring structure.

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