CN218585919U - Improved structure of magnetron cooling water channel for microwave power supply - Google Patents
Improved structure of magnetron cooling water channel for microwave power supply Download PDFInfo
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- CN218585919U CN218585919U CN202222606021.0U CN202222606021U CN218585919U CN 218585919 U CN218585919 U CN 218585919U CN 202222606021 U CN202222606021 U CN 202222606021U CN 218585919 U CN218585919 U CN 218585919U
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Abstract
The utility model relates to an improvement structure in magnetron cooling water route for microwave power supply, the cooling water route cool off the inside positive pole part of magnetron, the inlet channel gets into from the position that leans on down in the centre of the positive pole chamber of metal outsourcing, the water route that rises through the inside spiral of magnetron, cool off to the magnetron is inside, the cooling water after the heating of positive pole chamber is carried out to the delivery port that leans on down in the middle of the rethread positive pole piece and is given cold the machine, the exit water pipe of magnetron cooling water all uses the copper pipe, and with threaded connection in order to reach the not long enough purpose of extension business turn over water pipe, use threaded connection business turn over water copper pipe in addition, can dismantle at any time according to the installation environment difference, the terminal water pipe that uses of business turn over water copper pipe is directly inserted to connect, make things convenient for the cooling water hose to peg graft. Compared with the prior art, the water cooling effect in the anode cavity of the magnetron can be better, and the danger of the magnetron in use can be further reduced.
Description
Technical Field
The utility model relates to a structure in magnetron cooling water route especially involves the water route improvement structure of magnetron among the high-power microwave plasma power supply unit, is fit for being as the cooling water route of the continuous wave magnetron among the heating equipment such as high-power microwave plasma.
Background
Generally, a cooling water path water inlet and outlet pipe outside a continuous wave magnetron used by a high-power microwave plasma power supply extends from a position above a cylindrical anode cavity and close to a cathode filament, an internal cooling water path extends from one end of a cooling water inlet and outlet and extends from one end of a cooling water outlet in the anode cavity, and internal cooling water pipes are distributed at two ends to cool the whole internal anode cavity.
In practical use, the conventional magnetron can generate microwave with a frequency of 2450MHz, which is actually that a cathode of the magnetron is loaded with a direct-current high voltage, a cathode filament of the magnetron is gradually heated, the filament generates electrons after being heated to a certain temperature, the electrons accelerate and fly out under the control of an orthogonal constant electric field and a constant magnetic field and the interaction of a high-frequency electromagnetic field, the electrons start to make a cycloid movement, and finally hit on an anode cavity, and microwave energy converted from the constant electric field is emitted through a microwave emitting antenna connected to the anode cavity.
If the water inlet and outlet pipeline is arranged above the anode cavity, the original metal pipeline is removed and changed into the direct-insertion type connector, and the water inlet and outlet pipeline is directly connected into the anode cavity through the direct-insertion type connector, so that the cooling effect is good, but huge potential safety hazards exist. The water pipe adopts a rubber hose, so that the distance between the water pipe and the cathode filament is difficult to control when the water pipe is connected, the water pipe can touch the cathode filament or is too close to the filament carelessly, and the water pipe is burnt out to spray water inside the water pipe. If the sputtering target is sputtered on a cathode filament of a magnetron, explosion is possibly generated and extremely dangerous, and in addition, a water pipe at the plugging part is easy to become fragile and easy to break after being heated and roasted for a long time by the hot cathode filament, so that great potential safety hazard exists.
Therefore, it is necessary to improve the design of the magnetron cooling water path, and to improve the position and direction of the cooling water pipe and the structure of the water pipe, so as to improve the cooling effect of the cooling water on the inside of the magnetron anode cavity on the premise of ensuring the safety.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that an improvement structure in magnetron cooling water route for microwave power supply is provided, water route structure through improvement magnetron, when guaranteeing the security, improve the cooling water to the cooling effect of magnetron, can reduce to make such condition emergence of magnetron damage because of magnetron self is overheated, and can reduce to cause the microwave power supply to be absorbed in the appearance of paralysed serious chain reaction so because of magnetron breaks down, with this can reduce great economic loss, can also improve the durability of magnetron simultaneously, prolong the life of magnetron, and the work efficiency is improved.
The utility model provides an above-mentioned technical problem's technical scheme as follows:
an improved structure of cooling water channel for magnetron used in microwave power supply is composed of internal and external parts, external water inlet and outlet pipes at lower position in the middle of anode cavity, and internal water inlet and outlet pipes parallelly surrounding the whole anode cavity and spirally rising from bottom to top.
In order to improve the safety, the external water inlet and outlet pipe is arranged at the lower position in the middle of the anode cavity, and the extended pipeline is far away from the cathode filament as far as possible, so that the heating effect of the incandescent cathode filament on the water inlet and outlet pipe is reduced to the minimum.
The external water inlet and outlet pipe and the internal cooling water pipe are made of the same metal material.
The outermost layer of the external water inlet and outlet pipe is plated with a layer of relatively thick insulating material, and high-power high-voltage electrical elements such as transformers, electromagnets and the like exist in the box body, so that insulation measures need to be taken for the water inlet and outlet pipe, the insulation performance of the water inlet and outlet pipe is ensured, and abnormal discharge of high voltage electricity in the box body to the cooling water pipeline is prevented.
Threaded connection is used to the terminal department of outside business turn over water pipe, also uses same pipeline threaded connection in the box outside the box, because the emergence of the condition such as damaged can appear warping in the long-time use of plastic hose, so change into metal pipeline, can be according to the installation box size of difference, design the transition cooling water connecting tube of different lengths, also convenient the dismantlement simultaneously.
The external water inlet and outlet pipe and the internal cooling water pipe are integrated and extend out from inside to outside.
The tail end of the external threaded connecting pipeline is connected with a water inlet and outlet pipe in the box body through a water pipe direct-insertion adapter.
By the aforesaid the technical scheme provided by the utility model can see out, use this magnetron in high-power microwave plasma power, can reduce the magnetron and in the latent danger of long-term use, can improve the cooling effect of cooling water to the microwave magnetron simultaneously, prolong the life of magnetron, improve the work efficiency of magnetron.
Drawings
FIG. 1 is an overall design diagram of a cooling water path of the magnetron for a microwave power supply of the present invention;
FIG. 2 is a schematic view showing the orientation of the water inlet and outlet pipes in the anode chamber of the magnetron improved cooling water channel for microwave power supply of the present invention.
In the drawings, the reference numbers indicate the following list of parts:
1. the cathode filament, 2, cooling water inlet and outlet pipes, 3, water inlet pipe, 4, the tail ends of water inlet and outlet pipes, and 5, water pipe direct-insert adapters.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
An improved structure of a magnetron cooling water path for a microwave power supply comprises an inner part and an outer part, wherein the outer part is a water inlet and outlet pipeline which is arranged at the lower position in the middle of an anode cavity, and the inner part is a water inlet and outlet pipeline which is arranged in parallel and surrounds the whole anode cavity and spirals up from bottom to top.
In order to improve the safety, the external water inlet and outlet pipe is arranged at the lower position in the middle of the anode cavity, and the extended pipeline is far away from the cathode filament as far as possible, so that the heating effect of the incandescent cathode filament on the water inlet and outlet pipe is reduced to the minimum.
And the external water inlet and outlet pipe and the internal cooling water pipe are made of the same metal material.
The outermost layer of the external water inlet and outlet pipe is plated with a layer of relatively thick insulating material, and high-power high-voltage electrical elements such as transformers, electromagnets and the like exist in the box body, so that insulation measures need to be taken for the water inlet and outlet pipe, the insulation performance of the water inlet and outlet pipe is guaranteed, and abnormal discharge of high voltage electricity in the box body to a cooling water pipeline is prevented.
Threaded connection is used to the terminal department of outside business turn over water pipe, also uses same pipeline threaded connection in the box outside the box, because the emergence of the condition such as damaged can appear warping in the long-time use of plastic hose, so change into metal pipeline, can be according to the installation box size of difference, design the transition cooling water connecting tube of different lengths, also convenient the dismantlement simultaneously.
The external water inlet and outlet pipe and the internal cooling water pipe are integrated and extend out from inside to outside.
The tail end of the external threaded connecting pipeline is connected with a water inlet and outlet pipe in the box body through a water pipe direct-insertion adapter.
As shown in fig. 1, for the implementation of the present invention, the improved design schematic diagram of the water path direction and structure of the magnetron used in the high-power microwave plasma power supply includes a water inlet and outlet pipeline at the lower position in the middle of the external anode cavity;
in order to improve the cooling effect of the cooling water on the anode cavity, the water inlet pipeline 3 which is arranged at the middle lower part of the outer anode cavity is arranged at a position which is far away from the cathode filament 1 as far as possible;
the water inlet and outlet pipeline 3 at the lower position in the middle of the external anode cavity is changed into a thin copper pipe so as to facilitate the installation of a magnetron, the tail ends 4 of the water inlet and outlet pipeline are connected by threads, the same pipeline is used for connecting the distance from the outside of the box body to the inside of the box body, the tail end of the water inlet and outlet pipeline is connected with an external water inlet and outlet hose by using a water pipe direct-insertion adapter 5, and a thicker insulating material layer is plated on the outermost layer from the water inlet and outlet pipeline 3 connected at the lower position in the middle of the anode cavity to the cooling water pipeline at the transition section in the middle;
as shown in fig. 2, which is a schematic view of the water inlet and outlet pipes in the anode cavity of the improved cooling water channel for the magnetron for the microwave power supply, the internal cooling water inlet and outlet pipe 2 is formed by two pipes which are arranged side by side from bottom to top and surround and wrap the whole internal anode cavity, and the whole anode cavity is water-cooled;
to sum up, the utility model discloses the improvement structure in microwave magnetron cooling water route for power supply through the improvement design to microwave magnetron cooling water route, not only can reduce the latent danger that exists when microwave magnetron uses, can also reach the cooling requirement to the magnetron during operation, can also prolong the life of microwave magnetron, improves the work efficiency of magnetron.
The utility model relates to an improvement structure in microwave magnetron cooling water route for power has carried out appropriate improvement to the cooling water route of microwave magnetron for power, can make water-cooled cooling effect better under the lower circumstances of cost. The cooling water route cool off the inside positive pole part of magnetron, the inlet channel gets into from the position that leans on down in the centre of the positive pole chamber of metal outsourcing, the water route that rises through the inside spiral of magnetron, cool off magnetron inside, the cooling water after the heating of positive pole chamber is carried out to the water-cooling machine by the delivery port that leans on down in the middle of the rethread positive pole piece, the exit water pipe of magnetron cooling water all uses the copper pipe, and with threaded connection in order to reach the not long enough purpose of extension business turn over water pipe, use threaded connection business turn over water copper pipe in addition, can dismantle at any time according to the installation environment difference, the end of business turn over water copper pipe uses the water pipe to cut straightly and connects, make things convenient for the cooling water hose to peg graft. Compared with the prior art, the water cooling effect in the anode cavity of the magnetron can be better, the danger of the magnetron in use can be reduced, the magnetron can be more stable in work, and the huge economic loss caused by burning due to overheating in the magnetron can be reduced.
Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (7)
1. An improved structure of a magnetron cooling water path for a microwave power supply is characterized in that: the cooling water path consists of an inner part and an outer part, the outer part is a water inlet and outlet pipeline which is arranged at the middle of the anode cavity and is close to the lower position, and the inner part is a water inlet and outlet pipeline which is arranged together and is spirally ascended from bottom to top.
2. The improved structure of the cooling water circuit of the magnetron used in the microwave power supply as claimed in claim 1, characterized in that: the cooling water pipe with the inner part spirally rising from bottom to top wraps the whole anode cavity.
3. The improved structure of the cooling water path of the magnetron for the microwave power supply as claimed in claim 2, characterized in that: and the water inlet and outlet pipeline at the lower position in the middle of the external anode cavity and the cooling water pipe which spirals upwards from bottom to top are made of metal copper.
4. An improved structure of a cooling water path of a magnetron for a microwave power supply as claimed in claim 3, characterized in that: and the outermost layer of the water inlet and outlet pipeline at the lower position in the middle of the external anode cavity is plated with a layer of insulating material from the inside of the box body to the outside of the box body.
5. The improved structure of the cooling water path of the magnetron for the microwave power supply as claimed in claim 4, characterized in that: the water inlet and outlet pipeline close to the lower position in the middle of the external anode cavity is in threaded connection at the tail end, and the same pipeline is in threaded connection at a distance from the outside of the box body to the inside of the box body, so that the disassembly is convenient.
6. The improved structure of the cooling water path of the magnetron for the microwave power supply as claimed in claim 5, characterized in that: the cooling water pipe with the inner part spirally rising from bottom to top is integrated with the water inlet and outlet pipe of the outer part and extends out from inside to outside.
7. The improved structure of the cooling water path of the magnetron for the microwave power supply as claimed in claim 6, characterized in that: the tail end of the external threaded connecting pipeline is connected with a threaded water inlet and outlet pipe in the box body through a water pipe direct-insertion adapter and finally connected to an external water cooling machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222606021.0U CN218585919U (en) | 2022-09-30 | 2022-09-30 | Improved structure of magnetron cooling water channel for microwave power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222606021.0U CN218585919U (en) | 2022-09-30 | 2022-09-30 | Improved structure of magnetron cooling water channel for microwave power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218585919U true CN218585919U (en) | 2023-03-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222606021.0U Active CN218585919U (en) | 2022-09-30 | 2022-09-30 | Improved structure of magnetron cooling water channel for microwave power supply |
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| CN (1) | CN218585919U (en) |
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2022
- 2022-09-30 CN CN202222606021.0U patent/CN218585919U/en active Active
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