CN218573505U - Washing liquid medicine configuration system - Google Patents
Washing liquid medicine configuration system Download PDFInfo
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- CN218573505U CN218573505U CN202222682453.XU CN202222682453U CN218573505U CN 218573505 U CN218573505 U CN 218573505U CN 202222682453 U CN202222682453 U CN 202222682453U CN 218573505 U CN218573505 U CN 218573505U
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- 239000007788 liquid Substances 0.000 title claims abstract description 315
- 239000003814 drug Substances 0.000 title abstract description 141
- 238000005406 washing Methods 0.000 title abstract description 10
- 238000002360 preparation method Methods 0.000 claims abstract description 114
- 238000004140 cleaning Methods 0.000 claims abstract description 89
- 239000011550 stock solution Substances 0.000 claims abstract description 54
- 238000011084 recovery Methods 0.000 claims description 48
- 239000000243 solution Substances 0.000 claims description 32
- 238000009826 distribution Methods 0.000 claims description 23
- 238000012544 monitoring process Methods 0.000 claims description 16
- 238000004064 recycling Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 20
- 229910052710 silicon Inorganic materials 0.000 abstract description 19
- 239000010703 silicon Substances 0.000 abstract description 19
- 229940079593 drug Drugs 0.000 abstract description 3
- 238000005304 joining Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 7
- 238000012546 transfer Methods 0.000 description 6
- 239000013589 supplement Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000001502 supplementing effect Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model provides a washing liquid medicine configuration system, include: stock solution part: it is provided with a stock solution tank; a liquid preparation part: it is provided with a liquid preparation tank; a cleaning section in which a cleaning tank is disposed; each stock solution tank is communicated with at least one liquid preparation tank; one of the raw liquid tanks is communicated with all the liquid preparation tanks and at least one of the cleaning tanks; each cleaning tank is communicated with at least one liquid preparation tank. The utility model relates to a wash liquid medicine configuration system can dispose the multiunit liquid medicine automatically, and can guarantee that all liquid medicines are often used and new, the silicon chip that is particularly useful for the continuation washs used liquid medicine to can monitor the liquid medicine of every inslot, accomplish with present joining in marriage, join in marriage earlier and use, not only can mend liquid automatically but also can guarantee the fresh and alive nature of liquid medicine, improve the silicon chip cleaning performance.
Description
Technical Field
The utility model belongs to the technical field of the configuration of silicon chip washing liquid medicine, especially, relate to a wash liquid medicine configuration system.
Background
The liquid medicine used by the existing silicon chip is configured in a semi-automatic mode, the dosage of the stock solution is counted manually, then the stock solution is mixed manually, the mixed liquid medicine is placed into a transfer tank to be shaken and mixed, and then the mixed liquid medicine is conveyed into a cleaning machine from the transfer tank. When the alarm occurs in the transfer tank, the mixed liquid medicine is poured into the transfer tank manually for liquid supplement. The mode not only can not control the preparation proportion, but also can cause harm to human bodies and easily pollute the environment. Meanwhile, the transfer tank is mixed by adopting a shaking method, so that the liquid medicine is easy to splash out, the liquid level position height in the transfer tank is difficult to monitor, and great troubles are brought to the liquid medicine monitoring. The manual monitoring fluid infusion can not ensure the use continuity and stability of the liquid medicine, and the personnel need to prepare the liquid medicine in advance, so that the effectiveness of liquid medicine mixing can not be ensured, the concentration in the liquid medicine can be diluted, the cleaning effect can be weakened, and the surface of silicon wafers in batches can be unqualified in cleaning.
SUMMERY OF THE UTILITY MODEL
The utility model provides a wash liquid medicine configuration system, especially be applicable to the washing piece by piece of jumbo size silicon chip, solved the technical problem that can't automatic fluid infusion in the current liquid medicine is prepared.
In order to solve the technical problem, the utility model adopts the technical scheme that:
a cleaning solution dispensing system, comprising:
stock solution part: it is provided with a raw liquid tank;
a liquid preparation part: it is provided with a liquid preparation tank;
a cleaning section in which a cleaning tank is disposed;
each stock solution tank is communicated with at least one liquid preparation tank;
one of the raw liquid tanks is communicated with all the liquid preparation tanks and at least one of the cleaning tanks;
each cleaning tank is communicated with at least one liquid preparation tank.
Furthermore, a position finder for monitoring the liquid level height and a temperature measurer for monitoring the temperature are arranged in each liquid distribution tank.
Furthermore, each liquid preparation tank is at least provided with two output pipes, wherein the liquid medicine of one output pipe flows into the cleaning tank, and the liquid medicine of the other output pipe reflows to the liquid preparation tank where the liquid medicine is located.
Further, the output pipe communicated with the cleaning tank is communicated with a supply pump arranged on the liquid preparation tank.
Furthermore, the output pipes of all the raw liquid tanks and the output pipes of all the liquid preparation tanks are provided with one-way control valves.
Furthermore, the device also comprises a recovery part which is provided with recovery grooves, and each recovery groove is communicated with one liquid preparation groove.
Further, the cleaning device is also provided with a treatment part which is provided with a treatment pool, and all the cleaning tanks are communicated with the treatment pool.
Furthermore, the output pipes of all the recovery tanks are communicated with the treatment tank or the corresponding liquid preparation tanks.
Furthermore, an output pipe communicated with the recovery tank in the liquid preparation tank and the other two output pipes share one supply pump.
Further, the device also comprises a monitoring part which is provided with a controller, and the controller is respectively and electrically connected with the stock solution part, the solution distribution part, the cleaning part, the recovery part and the processing part.
Adopt the utility model relates to a wash liquid medicine configuration system can dispose the multiunit liquid medicine automatically, and can guarantee that all liquid medicines are used always newly, is particularly useful for the silicon chip of continuation and washs used liquid medicine to can monitor the liquid medicine of every inslot, accomplish just with joining in marriage now, join in marriage earlier and use, can not only mend liquid automatically but also can guarantee the instantaneity and the fresh and alive nature of liquid medicine, improve the silicon chip cleaning performance.
Drawings
FIG. 1 is a schematic view of a cleaning solution dispensing system according to one embodiment;
fig. 2 is a schematic view of a cleaning solution distribution system according to a second embodiment.
In the figure:
10. a stock solution part 11, a stock solution tank I12, a stock solution tank II
13. Stock solution tank three 14, stock solution tank four 15 and stock solution tank five
20. A liquid preparation part 21, a first liquid preparation tank 22, and a second liquid preparation tank
23. Liquid preparation tank III 24, position finder 25 and temperature measuring instrument
30. A cleaning part 31, a first cleaning tank 32, a second cleaning tank
40. A recovery part 41, a first recovery tank 42, a second recovery tank
43. Recovery tank III 50, treatment unit 51, and treatment tank
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The embodiment provides a cleaning liquid medicine configuration system, as shown in fig. 1, which is mainly used for a cleaning process after semiconductor silicon wafer polishing, polishing liquid, silicon powder particles and impurities are remained on the surface of a polished silicon wafer, so two-stage cleaning is required in the subsequent cleaning process, the first-stage cleaning is performed on the surface of the silicon wafer by using liquid medicine obtained by mixing ammonia water, hydrogen peroxide and water according to a certain proportion, and then the silicon wafer is cleaned by using pure water alone; the second cleaning is to clean the surface of the silicon wafer by adopting independent hydrogen fluoride liquid medicine and ozone water liquid medicine, and the liquid medicine for the second cleaning needs to be separately configured, namely, the hydrogen fluoride liquid medicine is the liquid medicine with set concentration prepared by mixing hydrogen fluoride stock solution and water, and the ozone water liquid medicine is the liquid medicine with set concentration prepared by mixing ozone stock solution and water. However, in the process of liquid medicine preparation, how to ensure the automatic monitoring of the preparation of each mixed liquid is the key point of the utility model.
Specifically, the system comprises a stock solution part 10 for storing stock solution, a solution preparation part 20 for mixing the stock solution to prepare a secondary solution, a cleaning part 30 for cleaning by adopting a common combination of a plurality of secondary solutions, a recovery part 40 for recovering the secondary solution by a user, and a control part (the drawing is omitted) for monitoring the control of the whole system. The stoste part 10 is provided with a plurality of stoste tanks, including a stoste tank I11 for bearing ammonia stoste, a stoste tank II 12 for bearing hydrogen peroxide stoste, a stoste tank III 13 for bearing hydrogen fluoride stoste, a stoste tank IV 14 for bearing ozone stoste and a stoste tank V15 for bearing pure water; the liquid preparation part 20 is provided with a plurality of liquid preparation tanks, including a first liquid preparation tank 21 for preparing ammonia water, hydrogen peroxide and water according to a set proportion, a second liquid preparation tank 22 for preparing hydrogen fluoride liquid medicine, namely hydrogen fluoride stock solution and water, and a third liquid preparation tank 23 for preparing ozone water liquid medicine, namely ozone and water; the cleaning part 30 is provided with two cleaning tanks, namely a first cleaning tank 31 and a second cleaning tank 32; the control unit is provided with a controller, and the controller is electrically connected to the stock solution unit 10, the solution preparation unit 20, the cleaning unit 30, the recovery unit 40, and the processing unit 50, respectively.
Each stock solution groove is communicated with at least one solution preparation groove, and in the implementation, the stock solution groove I11, the stock solution groove II 12 and the stock solution groove V15 are communicated with the solution preparation groove I21; the stock solution tank III 12 and the stock solution tank V15 are both communicated with the liquid preparation tank II 22; the stock solution tank four 14 and the stock solution tank five 15 are both communicated with the liquid preparation tank three 23.
And one of the raw liquid tanks is communicated with all the liquid preparation tanks and at least one of the cleaning tanks. That is, the stock solution tank five 15 for carrying pure water is respectively communicated with the first liquid preparation tank 21, the second liquid preparation tank 22 and the third liquid preparation tank 23 to respectively prepare the liquid medicine for primary cleaning and the independent liquid medicine for secondary cleaning; and is also communicated with the first cleaning tank 31 so as to be cleaned by pure water after the first-stage liquid medicine is cleaned.
Each cleaning tank is at least communicated with one liquid distribution tank, namely the liquid distribution tank I21 is communicated with the cleaning tank I31; the liquid preparation tank two 22 and the liquid preparation tank three 23 are both communicated with the cleaning tank two 32.
Further, in order to ensure that the liquid level heights of the liquids in all the dispensing tanks are within a reasonable range, it is required that a position detector 24 for monitoring the liquid level height be provided in each dispensing tank, wherein the position detector 24 can be used for monitoring the highest position and the lowest position in the dispensing tank. In the present embodiment, three measured positions, i.e., the highest position, the intermediate standard position, and the lowest position of the liquid medicine, are provided in each liquid dispensing tank. When the position detector 23 detects that the position of the liquid medicine exceeds the highest position, the excess liquid medicine in the liquid preparation tank needs to be discharged while cleaning, and the excess liquid medicine is divided into a first recovery tank 41 in the recovery part 40 through a branch pipe. When the position of the liquid medicine measured by the position finder 24 is lower than the lowest position, the liquid medicine cannot be cleaned, the liquid medicine needs to be replenished into the liquid preparation tank after the machine is stopped, the cleaning can be continued when the intermediate standard position is reached, and how to replenish the liquid medicine is described in detail later. When the position of the liquid medicine measured by the position finder 24 is at the intermediate standard position, the washing is continued.
Since the cleaning solution needs to have a certain temperature during cleaning, a temperature measuring instrument 25 for monitoring the temperature is also provided in each liquid preparation tank.
In order to monitor, dispense, and monitor the liquid preparation tank, in addition to the position finder 24, the position finder 24 and the temperature finder 25 are provided in each raw liquid tank and each recovery tank, so that it is further ensured that the position finder 24 and the temperature finder 25 are provided in all the tanks for dispensing the liquid medicine and are communicated with the controller, and the number of the position finders 24 provided in the raw liquid tank and the recovery tanks is determined based on actual conditions, and is not particularly limited herein. Because the cleaning tank can directly discharge liquid and outflow while cleaning, the position finder 24 and the temperature finder 25 are not needed.
Furthermore, each liquid distribution tank is provided with at least two output pipes, the liquid medicine of one output pipe flows into the cleaning tank, and the liquid medicine of the other output pipe flows back to the liquid distribution tank where the liquid medicine is located; and all output pipes communicated with the cleaning tank are communicated with the supply pump, so that the sustainability of liquid supply is ensured. The output end of one supply pump in the liquid distribution tank I21 is provided with two output pipes, one of the output pipes is directly communicated with the first cleaning tank 31, and the other output pipe reduces the liquid medicine to flow back to the liquid distribution tank I21; by analogy, the liquid preparation tank II 22 and the liquid preparation tank III 23 are both provided with the structure, so that the liquid medicine is continuously conveyed into the cleaning tank, the freshness and the activity of the liquid medicine in the liquid preparation tank are ensured through the liquid medicine which circularly flows back, the liquid medicine is fully mixed, the solute cannot sink, the solute is fully mixed with the solvent and is suspended, and the medicine property and the instantaneity of the liquid medicine are ensured; compared with the existing mode of adopting a circulating pump to dispose, the device saves more space and saves electric energy consumption, is environment-friendly, is convenient to maintain and install, and reduces the production cost.
In order to prevent the downflow stock solution or the liquid medicine from returning to the stock solution tank or the liquid preparation tank, the output pipes of all the stock solution tanks and the output pipes of all the liquid preparation tanks are provided with one-way control valves. The control valve has the function of flow control, and the solution in the liquid distribution tank or the raw liquid tank flows out, and is controlled by the flow meter to ensure the flow of all the solution flowing out. In this embodiment, the ratio of the ammonia water, the hydrogen peroxide and the water in the first liquid preparation tank 21, the ratio of the hydrogen fluoride and the water in the second liquid preparation tank 22, and the ratio of the ozone and the water in the third liquid preparation tank 23 are not within the protection range of the present application, and can be determined based on the actual situation, and these ratios can be controlled by the flow meter on the control valve.
Further, the configuration system in the present application further includes a recycling portion 40, which is provided with a plurality of recycling tanks, and each liquid preparation tank is communicated with one of the recycling tanks; namely, three recovery tanks are arranged, wherein the first recovery tank 41 is communicated with the first liquid preparation tank 21 and is used for recovering redundant liquid medicine in the first liquid preparation tank 21; the second recovery tank 42 is communicated with the second liquid preparation tank 22 and is used for recovering the redundant liquid medicine in the second liquid preparation tank 22; the third recovery tank 43 is communicated with the third liquid preparation tank 23 and is used for recovering the redundant liquid medicine in the third liquid preparation tank 23.
That is, when the position detector 24 in the liquid distribution tank detects that the liquid level therein exceeds the upper limit of the highest position, the controller informs the controller of the liquid discharge requirement, and the controller informs the corresponding liquid distribution tank, at this time, the controller informs all the stock solution tanks in the upper layer of the liquid distribution tank to stop supplying stock solution to the liquid distribution tank, and simultaneously informs the liquid distribution tank to continue supplying liquid to the cleaning tank to clean the silicon wafer and continue to make the liquid medicine in the liquid distribution tank self-circulate through the output pipe, and then opens the output pipe connected with the recovery tank to discharge the redundant liquid medicine until the liquid medicine is below the highest upper limit position, and then stops discharging the liquid. Three recovery tanks are arranged in the three liquid preparation tanks, and the output pipes in the liquid preparation tanks, which are communicated with the recovery tanks, are driven by the same supply pump shared by the two other output pipes.
Further, a treatment section 50 is provided, which is provided with a treatment tank 51 for recovering the waste liquid after washing, each of the washing tanks is communicated with the treatment tank 51, and the first washing tank 31 and the second washing tank 32 are communicated with the treatment tank 51.
In one embodiment, as shown in fig. 1, the liquid medicine in all the recycling tanks is directly discharged into the treatment tank 51 for centralized treatment, that is, the liquid medicine in the recycling tanks one 41, two 42 and three 43 and the liquid medicine wastewater used in the cleaning tanks one 31 and two 32 are directly discharged into the treatment tank 51 for centralized treatment. The direct treatment mode can simplify the operation pipeline, improve the treatment efficiency and avoid the environmental pollution caused by the discharged air.
Specifically, when the position finder 24 monitors that the liquid level in the dispensing tank is lower than the lowest position, the controller is informed that the dispensing tank needs to be replenished with the liquid medicine, and the controller is informed that the dispensing tank stops supplying the liquid medicine into the cleaning tank. Because the liquid preparation tank is directly communicated with the output pipe of the stock solution tank, the controller can inform each stock solution tank communicated with the liquid preparation tank to directly and synchronously convey stock solution to the liquid preparation tank according to a preset proportion until the liquid supplement requirement is met.
The other embodiment, as shown in fig. 2, is the most different from the previous embodiment in that the output tubes of all the recycling slots are communicated with the corresponding liquid dispensing slots, i.e. the medical liquid in the recycling slots is returned to the liquid dispensing slots.
Specifically, when the position finder 24 monitors that the liquid level in the dispensing tank is lower than the lowest position, the controller is informed that the dispensing tank needs to be replenished with the liquid medicine, and the controller is informed that the dispensing tank stops supplying the liquid medicine into the cleaning tank. The controller needs to return the liquid medicine in the recovery tank to the corresponding liquid preparation tank, but needs to judge whether the liquid medicine in the recovery tank is supplemented with the liquid medicine or not, and if so, then the liquid medicine is supplemented to the liquid preparation tank; if not, the controller informs the stock solution tanks communicated with the solution preparation tank, and directly and synchronously conveys the stock solution to the solution preparation tank according to a preset proportion until the solution supplementing requirement is met.
When the liquid medicine is in the recovery tank, the judgment that the amount of the liquid medicine in the recovery tank is not enough to the amount of the liquid medicine needed in the liquid preparation tank is also required. If the quantity of the liquid is enough, the finished product of the liquid medicine is directly supplemented from the recovery tank. At this time, if the recovery tank still contains the redundant liquid medicine, the liquid medicine is continuously replenished when waiting for the next time of replenishing the liquid medicine. If the amount of the liquid medicine in the recovery tank is not enough to the dosage required in the liquid preparation tank, the controller informs the raw liquid tanks communicated with the liquid preparation tank to synchronously convey the raw liquid to the liquid preparation tank according to a preset proportion until the liquid preparation requirement is met.
The control process is suitable for all the recovery tanks, and in the liquid supplementing process, once the liquid medicine capacity in the liquid preparation tank reaches the capacity of being output for cleaning, the controller can immediately inform the liquid preparation tank to continuously feed the liquid medicine to the cleaning tank. The configuration mode not only saves the liquid medicine, but also can automatically circularly control the liquid medicine to be replenished, so that the liquid medicine can be replenished when being used, and can be used firstly, thereby not only automatically replenishing the liquid, but also ensuring the freshness and the activity of the liquid medicine, and improving the cleaning effect of the silicon wafer.
A cleaning solution dispensing monitoring method for monitoring a dispensing system as defined in any one of the above, comprising the steps of:
s1, acquiring the position of the liquid level in the liquid preparation tank.
Specifically, the height of the liquid in the dispensing tank is first measured by the position measuring instrument 24.
S2, judging whether the position of the liquid level in the liquid preparation tank is within a standard range.
Specifically, the position finder 24 informs the controller of the amount and position of the liquid medicine in the liquid preparation tank after detecting the height of the liquid medicine position; the controller can automatically judge whether the height of the position is within the standard liquid medicine height range.
And S21, if so, continuously outputting the prepared liquid medicine into the cleaning tank.
That is, when the position detector detects that the position of the liquid medicine in the dispensing tank is within the predetermined range, i.e., not exceeding the upper limit position or falling below the lower limit position, the position detector transmits a signal to the controller, and the controller determines and confirms the position based on the data transmitted from the position detector, and notifies the dispensing tank to continue supplying the liquid medicine into the cleaning tank. At the moment, one output pipe in the liquid preparation tank continues to circulate the liquid medicine in a self-circulation mode; the other outlet conduit communicating with the recovery tank is closed.
And S22, if not, replenishing the liquid medicine in the liquid distribution tank or discharging redundant liquid medicine.
When the position of the liquid level in the liquid preparation tank is measured by the position measuring instrument 24 to be lower than the lowest limit position;
and (3) directly continuing to supplement the stock solution from the stock solution tank to the solution preparation tank according to the preparation proportion so as to mix the stock solution and the solution preparation tank to prepare corresponding liquid medicine.
Specifically, the controller is notified that the chemical needs to be replenished to the dispensing tank, while the controller notifies the dispensing tank to suspend supplying the chemical into the cleaning tank. Because the liquid preparation tank is directly communicated with the output pipe of the stock solution tank, the controller informs each stock solution tank communicated with the liquid preparation tank to directly and synchronously convey the stock solution to the liquid preparation tank according to a preset proportion until the liquid supplement requirement is met.
Alternatively, the first and second electrodes may be,
replenishing the mixed liquid medicine from the recovery tank to the liquid preparation tank; when the liquid medicine amount in the recovery tank is insufficient, the stock solution is continuously replenished to the liquid preparation tank from the stock solution tank.
Specifically, the controller is notified that the chemical needs to be replenished to the liquid preparation tank, while the controller notifies the liquid preparation tank to suspend the supply of the chemical into the cleaning tank. The controller needs to return the liquid medicine in the recovery tank to the corresponding liquid preparation tank, but needs to judge whether the liquid medicine in the recovery tank is supplemented with the liquid medicine or not, and if so, then the liquid preparation is carried out on the liquid preparation tank; if not, the controller informs the raw liquid tanks communicated with the liquid preparation tank, and directly and synchronously conveys the raw liquid to the liquid preparation tank according to a preset proportion until the liquid supplement requirement is met.
When the liquid medicine is in the recovery tank, the judgment that the amount of the liquid medicine in the recovery tank is not enough to the amount of the liquid medicine needed in the liquid preparation tank is also required. If the quantity of the liquid is enough, the finished product of the liquid medicine is directly supplemented from the recovery tank. At this time, if the recovery tank still contains the redundant liquid medicine, the liquid medicine is continuously replenished when waiting for the next time of replenishing the liquid medicine. If the amount of the liquid medicine in the recovery tank is not enough to the dosage required in the liquid preparation tank, the controller informs the raw liquid tanks communicated with the liquid preparation tank to synchronously convey the raw liquid to the liquid preparation tank according to a preset proportion until the liquid preparation requirement is met.
In the liquid supplementing process, once the liquid medicine capacity in the liquid preparation tank reaches the capacity that the liquid medicine can be output for cleaning, the controller can immediately inform the liquid preparation tank to continuously feed the liquid medicine into the cleaning tank. The configuration mode not only saves the liquid medicine, but also can automatically and circularly control the liquid medicine to be supplemented, so that the liquid medicine can be prepared as before, prepared and used first, the liquid medicine can be automatically supplemented, the freshness and the activity of the liquid medicine can be ensured, and the silicon wafer cleaning effect is improved.
When the position of the liquid level in the liquid preparation tank is measured by the position measuring instrument 24 to be higher than the highest upper limit position;
the controller informs the liquid preparation tank to discharge the excessive liquid medicine in the tank into the recovery tank for centralized collection, at the same time, the controller also informs all the stock solution tanks on the upper layer of the liquid preparation tank to stop supplying stock solution to the liquid preparation tank, and simultaneously informs the liquid preparation tank to continuously supply liquid to the cleaning tank to clean the silicon wafer and continuously make the liquid medicine in the liquid preparation tank self-circulate through the output pipe, then opens the output pipe connected with the recovery tank to discharge the excessive liquid medicine until the height of the liquid medicine is below the highest upper limit position, and then stops discharging the liquid. In the whole process, one of the output pipes in the liquid preparation tank continues to circulate the liquid medicine in a self-circulation mode.
Adopt the utility model relates to a wash liquid medicine configuration system and monitoring method can dispose the multiunit liquid medicine automatically, and can guarantee that all liquid medicines are often used and new, be applicable to the silicon chip of continuation especially and wash used liquid medicine to can monitor the liquid medicine of every inslot, accomplish just using now to join in marriage, join in marriage earlier and use earlier, not only can mend liquid automatically but also can guarantee the freshness and activity of liquid medicine, improve the silicon chip cleaning performance.
The embodiments of the present invention have been described in detail, and the description is only for the preferred embodiments of the present invention, and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (10)
1. A cleaning solution preparing system, comprising:
stock solution part: it is provided with a stock solution tank;
a liquid preparation part: it is provided with a liquid preparation tank;
a cleaning section in which a cleaning tank is disposed;
each stock solution tank is communicated with at least one liquid preparation tank;
one of the raw liquid tanks is communicated with all the liquid preparation tanks and at least one of the cleaning tanks;
each cleaning tank is communicated with at least one liquid distribution tank;
a position finder for monitoring the liquid level height is arranged in each liquid distribution groove;
the device also comprises a controller which is respectively electrically connected with the stock solution part, the solution distribution part, the cleaning part and the recovery part.
2. The cleaning solution dispensing system according to claim 1, wherein each of the dispensing tanks has a temperature measuring instrument for monitoring a temperature.
3. A cleaning solution dispensing system according to claim 1 or 2, wherein each of said dispensing tanks has at least two outlet pipes, one of said outlet pipes having a solution flowing into said cleaning tank, and the other of said outlet pipes having a solution flowing back into said dispensing tank.
4. The cleaning solution dispensing system according to claim 3, wherein the output pipe communicating with the cleaning tank communicates with a supply pump disposed on the dispensing tank.
5. The system of claim 4, wherein the output pipes of all of the raw liquid tanks and the output pipes of all of the dispensing tanks are provided with one-way control valves.
6. A cleaning solution distribution system according to claim 4 or 5, wherein said recovery portion is provided with recovery grooves, each of said recovery grooves communicating with one of said distribution grooves.
7. The cleaning solution distribution system according to claim 6, further comprising a treatment section having a treatment tank, wherein all of the cleaning tanks are communicated with the treatment tank.
8. A cleaning solution dispensing system according to claim 7, wherein the output pipes of all the recycling tanks are in communication with the treatment tank or the dispensing tank corresponding thereto.
9. A dispensing system for cleaning solution according to claim 7 or 8 wherein the delivery line of the dispensing tank communicating with the recovery tank shares a supply pump with the other two delivery lines.
10. The cleaning solution dispensing system according to claim 9, further comprising a monitoring portion provided with the controller, the controller being electrically connected to the processing portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222682453.XU CN218573505U (en) | 2022-10-12 | 2022-10-12 | Washing liquid medicine configuration system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222682453.XU CN218573505U (en) | 2022-10-12 | 2022-10-12 | Washing liquid medicine configuration system |
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| Publication Number | Publication Date |
|---|---|
| CN218573505U true CN218573505U (en) | 2023-03-07 |
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ID=85367243
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222682453.XU Active CN218573505U (en) | 2022-10-12 | 2022-10-12 | Washing liquid medicine configuration system |
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2022
- 2022-10-12 CN CN202222682453.XU patent/CN218573505U/en active Active
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