CN218539807U

CN218539807U - Magnetron sputtering coating cooling chamber

Info

Publication number: CN218539807U
Application number: CN202222996854.2U
Authority: CN
Inventors: 冯斌; 王德苗; 顾骏; 顾为民; 任高潮
Original assignee: Hangzhou Bifanke Electronic Technology Co ltd
Current assignee: Hangzhou Bifanke Electronic Technology Co ltd
Priority date: 2022-11-08
Filing date: 2022-11-08
Publication date: 2023-02-28
Anticipated expiration: 2032-11-08

Abstract

The utility model discloses a magnetron sputtering coating film cooling chamber, including the cooling chamber body, one side of cooling chamber body is provided with the air inlet case, the top fixedly connected with suction fan of air inlet case, the input fixedly connected with connector of suction fan, one side equidistance fixedly connected with cooling copper pipe of suction fan is kept away from to the connector, the inside fixedly connected with cooling box of cooling chamber body, the inside equidistance fixedly connected with loop configuration's of cooling box condensation plate, cooling copper pipe all run through the inside that the condensation plate just extended to the cooling box, the beneficial effects of the utility model reside in that: through laying the cooling copper pipe in the cooling chamber body to cool down the air of cooling copper intraduct through the condensation plate, thereby make the gas of cooling copper intraduct be in lower temperature behind the condensation plate, and then make this strand of cold air contact with the top of cooling chamber body, thereby take away the heat that the target transmitted for the cooling chamber body through heat conduction, thereby can be better for the target cooling that dispels the heat.

Description

Magnetron sputtering coating cooling chamber

Technical Field

The utility model relates to a magnetron sputtering cooling field, concretely relates to magnetron sputtering coating film cooling chamber.

Background

The magnetron sputtering coating machine comprises a cathode for placing a target material and an anode for placing a substrate, wherein a permanent magnet group is placed below the target material to introduce a magnetic field, and the magnetic field and an electric field between the target material and the substrate form an electromagnetic field. In the sputtering process, inert gas filled in a sputtering coating chamber is ionized under the action of an electric field, ions bombard a target at a high speed under the action of the electric field and a magnetic field near the target, atoms on the surface of the target are sputtered, and the sputtered atoms are deposited on the surface of a substrate to form a film.

In the process of magnetron sputtering coating, the ions bombard the target at high speed, and heat is generated on the surface of the target due to impact in the coating process, and the heat can generate adverse effects on sputtering, so that the coating effect is poor, and the coating quality is affected.

SUMMERY OF THE UTILITY MODEL

For solving the technical problem, the utility model provides a magnetron sputtering coating film cooling chamber, including the cooling chamber body, one side of cooling chamber body is provided with the air inlet case, the top fixedly connected with suction fan of air inlet case, the input fixedly connected with connector of suction fan, one side equidistance fixedly connected with cooling copper pipe of suction fan is kept away from to the connector, the inside fixedly connected with cooling box of cooling chamber body, the inside equidistance fixedly connected with loop configuration's of cooling box condensation plate, the cooling copper pipe all runs through the inside that the condensation plate just extended to the cooling box.

Preferably: the inside equidistance symmetry of air inlet case is provided with the drying plate, the outside fixedly connected with filter screen of air inlet case.

Preferably: the top equidistance of cooling chamber body is provided with the soft magnetic material section, the soft magnetic material section outside is plated with permalloy.

Preferably: permanent magnets are arranged in the cooling chamber body at equal intervals, and a target is arranged above the cooling chamber body.

Preferably: the cooling copper pipe is kept away from the one end of suction fan and all extends to the inside of air inlet box.

Preferably: the condensing plate and the suction fan are both electrically connected with external control equipment

The utility model discloses a technological effect and advantage:

the utility model discloses in, through laying the cooling copper pipe in this internal of cooling chamber to cool down through the air of cold plate to the cooling copper intraduct, thereby make the gas of cooling copper intraduct be in lower temperature behind the cold plate, and then make this share of cold air contact with the top of cooling chamber body, thereby take away the heat that the target transmitted for the cooling chamber body through heat conduction, thereby can be better for the target cooling that dispels the heat.

Drawings

Fig. 1 is a schematic diagram of the overall structure of the utility model:

fig. 2 is a schematic view of the internal structure of the connector of the utility model;

FIG. 3 is a schematic view of the internal structure of the cooling box of the utility model;

fig. 4 is a side view of the utility model.

In the figure: 1. a cooling chamber body; 2. an air inlet box; 3. a suction fan; 4. a connector; 5. cooling the copper pipe; 6. a cooling tank; 7. a condensing plate; 8. a permanent magnet; 9. a segment of soft magnetic material; 10. a target material; 11. drying the plate; 12. and (4) a filter screen.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

Referring to fig. 1 to 4, in the present embodiment, a magnetron sputtering coating cooling chamber is provided, including a cooling chamber body 1, a target material 10 can conduct heat through the cooling chamber body 1, an air inlet box 2 is disposed on one side of the cooling chamber body 1, the air inlet box 2 can provide a supporting force for a suction fan 3 and can better absorb surrounding air, a suction fan 3 is fixedly connected to the top of the air inlet box 2, a connector 4 is fixedly connected to an input end of the suction fan 3, the connector 4 is disposed in west so as to be connected to a plurality of cooling copper pipes 5, the side of the connector 4 away from the suction fan 3 is fixedly connected with the cooling copper pipes 5 at equal intervals, a cooling box 6 is fixedly connected to the inside of the cooling chamber body 1, the air passing through the cooling copper pipes 5 can be cooled through the cooling box 6, a ring-structured condensing plate 7 is fixedly connected to the inside of the cooling box 6 at equal intervals, and the condensing plate 7 is disposed so as to better realize gas cooling, and the cooling copper pipes 5 all penetrate through the condensing plate 7 and extend to the inside of the cooling box 6; the inside equidistance symmetry of air inlet case 2 is provided with drying plate 11, thereby can handle the hydrone in the air through setting up drying plate 11, getting rid of the air. The outer side of the air inlet box 2 is fixedly connected with a filter screen 12, and large particle substances in the air can be filtered by arranging the filter screen 12; soft magnetic material sections 9 are arranged at the top of the cooling chamber body 1 at equal intervals, and permalloy is plated on the outer sides of the soft magnetic material sections 9; permanent magnets 8 are equidistantly arranged in the cooling chamber body 1, and a target material 10 is arranged above the cooling chamber body 1; because the cooling chamber body 1 is arranged between the target material 2 and the permanent magnet 8, a gap exists between the target material 2 and the permanent magnet 8, so that the magnetic field distribution on the surface of the target is influenced, and one end of the cooling copper pipe 5, which is far away from the suction fan 3, extends into the air inlet box 2; the condensation plate 7 and the suction fan 3 are both electrically connected with external control equipment.

The utility model discloses a theory of operation is: in the in-service use, at first start suction fan 3, suction fan 3 can begin to induced draft, the air filters some large-grained impurity at first through filter screen 12, the air passes through the wind channel that drying plate 11 constitutes afterwards, wherein, the air can contact with drying plate 11, thereby filter the hydrone in the air, its aim at, make cooling copper pipe 5 be located the inside part of condensation plate 7, inside being difficult to freeze after long-time the use, thereby block up the pipeline, later the air passes through condensation plate 7, the air rethread cooling copper pipe 5 laid's pipeline after the cooling of condensation plate 7, thereby lower the temperature to the top of cooling chamber body 1, thereby utilize the characteristics that cooling chamber body 1 and target 10 contacted to carry out better cooling to the heat that target 10 passed off, and then play better work purpose of lowering the temperature to target 10.

It is to be understood that the disclosed embodiments are merely exemplary of the invention, and are not intended to limit the invention to the precise embodiments disclosed. Based on the embodiments in the present disclosure, all other embodiments obtained by a person of ordinary skill in the art and related fields without creative efforts shall fall within the protection scope of the present disclosure. The structures, devices, and methods of operation of the present invention, not specifically described and illustrated, are generally practiced by those of ordinary skill in the art without specific recitation or limitation.

Claims

1. The utility model provides a magnetron sputtering coating film cooling chamber, includes cooling chamber body (1), its characterized in that, one side of cooling chamber body (1) is provided with air inlet box (2), top fixedly connected with suction fan (3) of air inlet box (2), the input end fixedly connected with connector (4) of suction fan (3), one side equidistance fixedly connected with cooling copper pipe (5) of suction fan (3) are kept away from in connector (4), inside fixedly connected with cooling box (6) of cooling chamber body (1), inside equidistance fixedly connected with loop configuration's of cooling box (6) condensing panel (7), cooling copper pipe (5) all run through condensing panel (7) and extend to the inside of cooling box (6).

2. The magnetron sputtering coating cooling chamber of claim 1, characterized in that the interior of the air inlet box (2) is provided with drying plates (11) at equal intervals and symmetrically, and the outer side of the air inlet box (2) is fixedly connected with a filter screen (12).

3. The magnetron sputtering coating cooling chamber as defined in claim 1, characterized in that the top of the cooling chamber body (1) is equidistantly provided with soft magnetic material segments (9), and the outside of the soft magnetic material segments (9) is coated with permalloy.

4. The magnetron sputtering coating cooling chamber according to claim 1, characterized in that permanent magnets (8) are equidistantly arranged inside the cooling chamber body (1), and a target (10) is arranged above the cooling chamber body (1).

5. The magnetron sputtering coating cooling chamber of claim 1, characterized in that the end of the cooling copper pipe (5) far away from the suction fan (3) extends to the inside of the air inlet box (2).

6. The magnetron sputtering coating cooling chamber of claim 1, wherein the condensation plate (7) and the suction fan (3) are electrically connected with an external control device.