CN218524830U

CN218524830U - Quartz wafer test bench

Info

Publication number: CN218524830U
Application number: CN202222747452.9U
Authority: CN
Inventors: 曹鹏
Original assignee: Nanjing Luxian Automation Technology Co ltd
Current assignee: Nanjing Luxian Automation Technology Co ltd
Priority date: 2022-10-19
Filing date: 2022-10-19
Publication date: 2023-02-24
Anticipated expiration: 2032-10-19

Abstract

The utility model discloses a quartz wafer testboard, concretely relates to testboard technical field, including lower tray and last tray, from supreme X that has set gradually to adjustment mechanism, Y to adjustment mechanism and bearing mechanism down between tray and the last tray down, bearing mechanism includes the connection box, the inside fixed mounting of connection box has third step motor, the bracing piece is installed to the connection box internal rotation, bracing piece lower extreme body coupling has two spacing pieces down, go up tray fixed mounting on the top of bracing piece to fixed mounting has a plurality of dishes of accepting in the last tray. The utility model discloses a set up X to adjustment mechanism, Y to adjustment mechanism and bearing mechanism, realized that quartz wafer's rotation, X to removing and Y to removing, only need adjust on the arm at the in-process of test the probe in vertical ascending height of side can, avoided the arm to arouse the angle change of probe when removing and influence the test result.

Description

Quartz wafer test bench

Technical Field

The utility model relates to a testboard technical field, more specifically say, the utility model relates to a quartz wafer testboard.

Background

The quartz wafer is mainly used in various electronic components and is a very good basic material. The quartz wafer needs to be tested before use, and can be used after the test is qualified. In the existing wafer testing device, a wafer is placed on a testing table, a point to be tested of the wafer is placed below a probe, a mechanical arm is connected with the probe through a connecting piece, the mechanical arm controls the probe to move, so that the probe is in contact with the surface of the wafer, and mercury contained in the probe is connected with the surface of the wafer to complete a circuit loop, so that testing is realized.

The contact area of the probe and the semiconductor wafer is an important parameter in the test process, and the contact surface of the probe and the wafer is kept parallel to be an ideal state in the test process. In the prior art, the mechanical arm drives the probe to move so that the probe approaches to the wafer, and therefore the wafer is tested, but in the process of moving the mechanical arm, the angle of the probe is inevitably changed, so that the contact surface of the probe and the wafer is not parallel, and the test result is inaccurate. The present invention was made in view of the above problems.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above-mentioned defect of prior art, the utility model provides a quartz wafer testboard solves the arm that proposes in the above-mentioned background art and drives when the probe removes, and its angle can change unavoidably to cause the contact surface of probe and wafer problem that is no longer parallel.

In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides a quartz wafer testboard, including lower tray and last tray, from supreme X that has set gradually to adjustment mechanism down between lower tray and the last tray, Y is to adjustment mechanism and bearing mechanism, bearing mechanism includes the connection frame, the inside fixed mounting of connection frame has third step motor, the bracing piece is installed to the connection frame internal rotation, bracing piece lower extreme a body coupling has two lower spacing pieces, the belt pulley has all been cup jointed on third step motor output and the bracing piece, and be provided with driving belt between two belt pulleys, go up tray fixed mounting on the top of bracing piece, and fixed mounting has a plurality of dishes of accepting in going up the tray.

In a preferred embodiment, the X-direction adjusting mechanism comprises two first guide frames arranged along the X direction, a first threaded rod is rotatably mounted in each first guide frame, and a first moving block is in threaded connection with each first threaded rod.

In a preferred embodiment, the front sides of the two first guide frames are provided with first stepping motors, and the output ends of the two first stepping motors are respectively connected with the output ends of the two first threaded rods.

In a preferred embodiment, two first guide frames are fixedly installed at left and right sides of the upper surface of the lower tray, respectively, and the two first guide frames are arranged in left and right symmetry.

In a preferred embodiment, the length of the first moving block is the same as the inner length dimension of the first guide frame.

In a preferred embodiment, the Y-direction adjusting mechanism comprises a second guide frame arranged along the Y direction, the second guide frame is fixedly mounted on the first two moving blocks, a second threaded rod is rotatably mounted in the second guide frame, and the second threaded rod is in threaded connection with the second moving block.

In a preferred embodiment, a second stepping motor is arranged outside the second guide frame, and the output end of the second stepping motor is connected with the output end of the second threaded rod.

In a preferred embodiment, the width of the second moving block is the same as the inner width of the second guide frame.

In a preferred embodiment, the connecting frame is provided with a plurality of heat dissipation grooves in a penetrating manner.

Compared with the prior art, the beneficial effects of the utility model are that:

this quartz wafer testboard is through setting up X to adjustment mechanism, Y is to adjustment mechanism and bearing mechanism, by X to adjustment mechanism, Y to adjustment mechanism realize go up the tray in X to, Y to the removal, improve the flexibility of this testboard, the rotation of tray is realized by bearing mechanism, at the in-process to quartz wafer test, only need on the adjustment arm probe in vertical ascending height of side can, the angle of having avoided the arm to arouse the probe when removing changes and influences the test result.

Drawings

For a clearer explanation of the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and it is obvious for those skilled in the art to obtain other drawings according to these drawings.

Fig. 1 is a front view of the structure of the present invention;

FIG. 2 is a side view of the structure of the present invention;

FIG. 3 is a partial sectional view of the present invention;

fig. 4 is an enlarged schematic view of the region a in fig. 3 according to the present invention.

Description of reference numerals:

1. a lower tray; 2. an upper tray; 3. an X-direction adjusting mechanism; 301. a first guide frame; 302. a first threaded rod; 303. moving a first block; 304. a first step motor; 4. a Y-direction adjusting mechanism; 401. a second guide frame; 402. a second threaded rod; 403. a second moving block; 404. a second step motor; 5. a supporting mechanism; 501. a connecting frame; 502. a third step motor; 503. a support bar; 504. lower limiting; 505. a belt pulley; 506. a drive belt; 6. a bearing plate; 7. a heat dissipation groove.

Detailed Description

The present invention is described in terms of specific embodiments, and other advantages and benefits of the present invention will become apparent to those skilled in the art from the following disclosure. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Examples

Referring to fig. 1, the quartz wafer test bench of the embodiment includes a lower tray 1 and an upper tray 2, and a plurality of receiving trays 6 are fixedly mounted in the upper tray 2, and when in use, a quartz wafer is placed in the receiving tray 6, so that the plurality of quartz wafers can be tested, and the work efficiency is improved.

Referring to the attached drawing 1, from the supreme X that has set gradually to adjustment mechanism 3, Y is to adjustment mechanism 4 and supporting mechanism 5 down between tray 1 and the last tray 2 down, realize carrying out X to, Y to the removal of last tray 2, improve the flexibility of this testboard, supporting mechanism 5 can realize the rotation of last tray 2, in the test process, rotate last tray 2 under the unmovable condition of arm, guarantee that the probe of installation is parallel with quartz wafer contact surface on the arm to guarantee the accuracy of test result.

Referring to fig. 1, the X-direction adjusting mechanism 3 includes two first guide frames 301 arranged along the X direction, the two first guide frames 301 are respectively and fixedly mounted on the left side and the right side of the upper surface of the lower tray 1, the two first guide frames 301 are arranged in bilateral symmetry, first step motors 304 are arranged on the front sides of the two first guide frames 301, a first motor plate is arranged below the two first step motors 304 and fixedly mounted on the lower tray 1, the first step motors 304 are fixedly mounted on the first motor plate, the structural stability of the two first step motors 304 is ensured, the first threaded rods 302 are rotatably mounted in the two first guide frames 301, the output ends of the two first step motors 304 are respectively connected with the output ends of the two first threaded rods 302, a first moving block 303 is in threaded connection with the first threaded rod 302, the length of the first moving block 303 is the same as the inner length of the first guide frames 301, the first moving block 303 is limited, and the first moving block 303 can move along the first guide frames 301 when the first threaded rods 302 rotate, and the first moving blocks 304 are started to drive the first step motors 304 to rotate the output ends of the two first step motors 304, so that the first step motors are realized.

Referring to fig. 2, the Y-direction adjusting mechanism 4 includes a second guide frame 401 arranged along the Y direction, the second guide frame 401 is fixedly mounted on the first two moving blocks 303, the second guide frame 401 moves along with the first two moving blocks 303, a second stepping motor 404 is arranged on the outer side of the second guide frame 401, a second motor plate is fixedly mounted on the outer side of the second guide frame 401, the second stepping motor 404 is fixedly mounted on the second motor plate, so that the structural stability of the second stepping motor 404 is ensured, a second threaded rod 402 is rotatably mounted in the second guide frame 401, the output end of the second stepping motor 404 is connected with the output end of the second threaded rod 402, when the Y-direction adjusting mechanism is in use, the second stepping motor 404 is started, so that the rotation of the second threaded rod 402 can be realized, the second moving block 403 is connected to the second threaded rod 402 through a threaded connection, the width of the second moving block 403 is the same as the inner width of the second guide frame 401, so that the second threaded rod 403 can be limited, and the moving block 403 can move along the second threaded rod 401 in the rotation process of the second threaded rod 402.

Referring to fig. 3 and 4, the supporting mechanism 5 includes a connecting frame 501, the connecting frame 501 is fixedly mounted on a second moving block 403, the supporting mechanism 5 moves along with the second moving block 403, a third stepping motor 502 is fixedly mounted inside the connecting frame 501, a supporting rod 503 is rotatably mounted in the connecting frame 501, the upper tray 2 is fixedly mounted at the top end of the supporting rod 503, pulleys 505 are respectively sleeved on an output end of the third stepping motor 502 and the supporting rod 503, a transmission belt 506 is arranged between the two pulleys 505, the third stepping motor 502 is started in a use process, and the supporting rod 503 rotates under connection of the two pulleys 505 and the transmission belt 506, so that rotation of the supporting mechanism 5 and rotation of a quartz wafer placed in the supporting mechanism 5 are realized.

Referring to fig. 4, the lower end of the supporting rod 503 is integrally connected with two lower limiting pieces 504, and the structural stability of the supporting rod 503 in the rotating process is ensured by the arrangement of the lower limiting pieces 504.

Referring to fig. 4, a plurality of heat dissipation grooves 7 are formed in the connection frame 501 in a penetrating manner, and since the motor generates heat in the operation process, the heat dissipation grooves 7 are formed in the connection frame 501, so that the heat generated in the operation process of the third stepping motor 502 can be dissipated in time, and the third stepping motor 502 can operate normally.

The first stepping motor 304, the second stepping motor 404 and the third stepping motor 502 related in the present invention all adopt Y07-43D4-5065D stepping motors provided by the kaifu electromechanical company limited.

This device is at the in-process that tests quartz wafer, the angle of the probe of installing on the arm is adjusted earlier, make it parallel with quartz wafer's contact surface, through starting first step motor 304 in the test process, second step motor 404 and third step motor 502, realize that quartz wafer is in X to, the ascending removal of Y, and can also realize quartz wafer's rotation, when the arm tests the quartz wafer of different positions, only need adjust the probe in the ascending height of vertical direction can, the angle that has avoided the arm to arouse the probe when removing changes and influences the test result.

And finally: the above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A quartz wafer test bench comprises a lower tray (1) and an upper tray (2), and is characterized in that: lower tray (1) and last tray (2) between follow supreme X to adjustment mechanism (3), Y to adjustment mechanism (4) and bearing mechanism (5) of having set gradually down, bearing mechanism (5) are including connecting frame (501), the inside fixed mounting of connecting frame (501) has third step motor (502), bracing piece (503) are installed to connecting frame (501) internal rotation, bracing piece (503) lower extreme body coupling has two lower spacing pieces (504), all cup jointed belt pulley (505) on third step motor (502) output and bracing piece (503) to be provided with between two belt pulleys (505) driving belt (506), go up tray (2) fixed mounting on the top of bracing piece (503) to go up tray (2) internal fixed mounting and have a plurality of trays (6).

2. A quartz wafer test stand according to claim 1, wherein: the X-direction adjusting mechanism (3) comprises two first guide frames (301) arranged along the X direction, threaded rods (302) are installed in the two first guide frames (301) in a rotating mode, and a first moving block (303) is connected to each threaded rod (302) in a threaded mode.

3. A quartz wafer test stand according to claim 2, wherein: the front sides of the two first guide frames (301) are respectively provided with a first stepping motor (304), and the output ends of the two first stepping motors (304) are respectively connected with the output ends of the two first threaded rods (302).

4. A quartz wafer test stand according to claim 2, wherein: the two first guide frames (301) are fixedly installed on the left side and the right side of the upper surface of the lower tray (1) respectively, and the two first guide frames (301) are arranged in a bilateral symmetry mode.

5. A quartz wafer test stand according to claim 2, wherein: the length of the first moving block (303) is the same as the inner length of the first guide frame (301).

6. A quartz wafer test stand according to claim 2, wherein: the Y-direction adjusting mechanism (4) comprises a second guide frame (401) arranged along the Y direction, the second guide frame (401) is fixedly installed on the first two moving blocks (303), a second threaded rod (402) is rotatably installed in the second guide frame (401), and the second threaded rod (402) is in threaded connection with a second moving block (403).

7. A quartz wafer test stand according to claim 6, wherein: and a second stepping motor (404) is arranged on the outer side of the second guide frame (401), and the output end of the second stepping motor (404) is connected with the output end of the second threaded rod (402).

8. A quartz wafer test stand according to claim 6, wherein: the width of the second moving block (403) is the same as the inner width of the second guide frame (401).

9. A quartz wafer test stand according to claim 1, wherein: the connecting frame (501) is provided with a plurality of radiating grooves (7) in a penetrating manner.