CN218512796U - Novel laser direct writing exposure device - Google Patents
Novel laser direct writing exposure device Download PDFInfo
- Publication number
- CN218512796U CN218512796U CN202222732720.XU CN202222732720U CN218512796U CN 218512796 U CN218512796 U CN 218512796U CN 202222732720 U CN202222732720 U CN 202222732720U CN 218512796 U CN218512796 U CN 218512796U
- Authority
- CN
- China
- Prior art keywords
- control
- platform
- exposure
- laser direct
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a novel laser is directly write and is exposed device belongs to exposure equipment technical field. The utility model discloses on integrated a control processing integrated circuit board with platform control and automatically controlled control, realize platform and automatically controlled dual control at this integrated circuit board, compare in current control structure, the utility model discloses need not realize the coordination between platform and automatically controlled through exposure software, solved the communication delay and the bit error rate problem when both dispatches, improved the synchronization performance between laser direct writing exposure equipment platform and the exposure equipment, promoted the rate of accuracy of exposure; the utility model discloses a light source is controlled by the DMD part, and automatically controlled part adopts the distributed control mode, compares in traditional centralized control mode, the utility model discloses reduce the complexity of overall arrangement and wiring, simplified control structure.
Description
Technical Field
The utility model relates to a novel laser is directly write and is exposed device belongs to exposure equipment technical field.
Background
The laser direct-writing exposure equipment needs to monitor and operate the platform part and the electric control part during exposure so as to complete an exposure period. With the continuous progress of the technology, the demand of the client for the capacity is higher and higher, and the demand of the intelligent manufacturing is continuously increased. The control structure of the existing laser direct-writing exposure equipment is shown in fig. 1, and it can be seen from the structure that a controller of a platform and an electrically controlled controller adopt respective management modes, and the coordination between the two is scheduled through exposure software, so that communication delay and an error rate exist, and the improvement of later-period capacity is restricted.
The control structure of the existing laser direct writing exposure equipment specifically has the following problems: 1. the PC is connected with the platform part and the electric control part in a TCP/IP mode, so that the communication delay is long and a certain error rate exists; 2. the scheduling of the whole control system is completed on the exposure software level, and the exposure precision is influenced due to the delay between tasks; 3. the electric control system adopts a centralized control mode, and the layout and wiring are troublesome.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, the utility model provides a novel laser direct writing exposure device, include:
the main control computer PC is used for controlling the working process of the laser direct-writing exposure equipment and the processing of graphic data, and converting the original image to be exposed to generate a graphic with a data format which can be received by the DMD component;
the platform control module is connected with the main control computer PC and used for controlling the exposure platform;
the electronic control module is connected with the main control computer PC and used for controlling the electronic control components inside the laser direct-writing exposure equipment, and the electronic control components comprise: the device comprises a power supply device, an induction device and a control element;
the figure synchronizer comprises a DMD component and a light source, wherein the DMD component receives figure data and a light source control command of the main control computer PC and converts the light source control command into a voltage signal and a light source switching signal for controlling the light source, so that the figure and the light source are synchronized in the exposure process;
the imaging device is used for imaging the pattern of the DMD component on a material to be photoetched, which is placed on an exposure platform;
the exposure platform is connected with the platform control module through a platform driver, and the working process is controlled by the platform control module;
the platform control module and the electric control module are integrated on a control processing board card, and the control processing board card realizes dual control of the exposure platform and electric control.
In an embodiment, the control processing board card is respectively communicated with the platform driver and the electronic control component through two communication interfaces, for example, an EtherCat interface may be adopted.
In one embodiment, the electronic control module includes:
the digital quantity module transmits digital quantity control signals which comprise 1 and 0 and is used for realizing the control of the digital electric control component;
the analog quantity module is used for transmitting an analog quantity control signal and controlling the analog electric control component;
the control processing board card, the digital quantity module and the analog quantity module are connected through a communication interface, if: the EtherCat interface.
In one embodiment, the power supply device supplies power to each component inside the laser direct-writing exposure apparatus, and includes: the exposure platform, the main control computer PC, the light source, DMD part.
In one embodiment, the sensing device is a temperature, humidity, vacuum degree detection device, a position signal sensor or an equipment state sensor.
In one embodiment, the control element comprises: solenoid valve and switch of control gas circuit.
In one embodiment, the digital electronic control component includes: digital sensor, relay, tower lamp, button and MARK MARK device.
In one embodiment, the analog electronic control component includes: an analog sensor.
In one embodiment, the communication between the control processing board and the master PC is implemented by using a communication method such as TCP/IP or PCIE.
The utility model has the advantages that:
the utility model provides a pair of novel laser is directly write and is exposed device, with platform control and the integrated control processing integrated board that arrives of automatically controlled control on, realize platform and automatically controlled dual control, compare in current detached control structure, the utility model discloses need not realize the platform and automatically controlled between the coordination through exposure software, solved the problem of communication delay and error rate when both dispatches, improved the laser and directly write the synchronism ability between exposure equipment platform and the exposure equipment, promoted the rate of accuracy of exposure.
The utility model discloses a light source is controlled by the DMD part, and automatically controlled part adopts the distributed control mode, compares in traditional centralized control mode, the utility model discloses reduce the complexity of overall arrangement and wiring, simplified control structure.
Drawings
Fig. 1 is a schematic control structure diagram of a conventional laser direct writing apparatus.
Fig. 2 is a block diagram of the laser direct writing exposure apparatus of the present invention.
Fig. 3 is a block diagram of the distributed electronic control module of the present invention.
Detailed Description
The present invention will be described in detail below.
Example 1
As shown in fig. 2, for the embodiment of the present invention provides a novel laser direct writing exposure apparatus, including:
the main control computer PC is used for controlling the working process of the laser direct-writing exposure equipment and the processing of graphic data, and converting the original image to be exposed to generate a graphic with a data format which can be received by the DMD component;
the platform control module is connected with the main control computer PC and used for controlling the exposure platform;
the automatically controlled control module, with the main control computer PC is connected for the inside automatically controlled components and parts of control laser direct write exposure equipment, automatically controlled components and parts include: the device comprises a power supply device, an induction device and a control element;
the figure synchronizer comprises a DMD component and a light source, wherein the DMD component receives figure data and a light source control command of the main control computer PC and converts the light source control command into a voltage signal and a light source switching signal for controlling the light source, so that the figure and the light source are synchronized in the exposure process;
the imaging device is used for imaging the pattern of the DMD component on a material to be photoetched, which is placed on an exposure platform;
the exposure platform is connected with the platform control module through a platform driver, and the working process is controlled by the platform control module;
the platform control module and the electric control module are integrated on a control processing board card, and the control processing board card realizes dual control of the exposure platform and electric control.
Example 2
This embodiment provides a novel laser direct write exposure device, includes:
1. and the main control computer PC is used for controlling the working process of the laser direct-writing exposure equipment and the processing of the graphic data, and converting the original image to be exposed to generate a graphic with a data format which can be received by the DMD component.
The processing process of the graphic data comprises the following steps: starting from the exposed original gds pattern, the image is transformed into a data format that can be received by the DMD component.
2. The platform control module is connected with the main control computer PC and used for controlling the exposure platform;
3. the automatically controlled control module, with the main control computer PC is connected for the inside automatically controlled components and parts of control laser direct write exposure equipment, automatically controlled components and parts include: the device comprises a power supply device, an induction device and a control element;
wherein, power supply unit is to each inside part of laser direct write exposure equipment supplies power, includes: the device comprises an exposure platform, a main control computer PC, a light source and a DMD component; the sensing device comprises a temperature, humidity and vacuum degree detection device, a position signal sensor or an equipment state sensor and the like; the control element refers to an electric control element which can control some parts of the equipment, such as: electromagnetic valve, switch of control gas circuit, etc.
The electronic control module adopts a distributed electronic control mode, as shown in fig. 3, the electronic control module comprises: digital quantity module and analog quantity module.
The digital quantity module transmits digital quantity control signals which comprise 1 and 0 and are used for realizing the control of the digital electric control components; the analog quantity module is used for transmitting an analog quantity control signal and realizing the control of the analog electric control component;
the control processing board card, the digital quantity module and the analog quantity module are connected through an EtherCat interface.
The utility model discloses a platform control module with automatically controlled control module is integrated on a control processing integrated circuit board the control processing integrated circuit board realizes exposing platform and automatically controlled dual control. The control processing board card is respectively communicated with the platform driver and the electric control element through two EtherCat interfaces.
EtherCat is an advanced industrial bus mode, and its characteristics have:
(1) The communication response delay is small, on the order of about 20-50 us.
(2) The connection mode adopts a standard RJ45 interface and a standard 100M network cable to realize the mutual communication between the points.
(3) And any interconnection among the points is supported, and no requirement is imposed on the sequence of the nodes.
Because of the above characteristics of the EtherCat bus, the EtherCat bus is widely applied to platform control and large distributed control systems at present.
4. The pattern synchronization device comprises a DMD component and a light source, wherein the DMD component receives pattern data and a light source control command of the main control computer PC and converts the light source control command into a voltage signal and a light source switching signal for controlling the light source, so that the pattern and the light source are synchronized in the exposure process.
5. And the imaging device is used for imaging the pattern of the DMD component on the material to be photoetched, which is placed on the exposure platform.
6. And the exposure platform is connected with the platform control module through a platform driver, and the working process is controlled by the platform control module.
The utility model discloses a theory of operation:
the utility model discloses on will integrated a control processing integrated circuit board with platform control and electrical control, realize platform and automatically controlled dual control, the integrated circuit board realizes respectively through two EtherCat interfaces with platform driver and the communication of automatically controlled components and parts. The communication between the control processing board and the main control computer PC can adopt a traditional TCP/IP mode, a PCIE mode or other interface modes.
The utility model discloses a light source is controlled by the DMD part, specific control mode:
(1) The main control computer PC sends graphic data and a light source control command to the DMD component;
(2) The DMD part receives the graphic data and the light source control command of the main control computer PC, and converts the light source control command into a voltage signal and a light source switching signal for controlling the light source, so that the graphic and the light source are synchronized in the exposure process.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes and modifications can be made by one skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A novel laser direct writing exposure device is characterized in that the exposure device comprises:
the main control computer PC is used for controlling the working process of the laser direct-writing exposure equipment and the processing of graphic data, and converting the original image to be exposed to generate a graphic with a data format which can be received by the DMD component;
the platform control module is connected with the main control computer PC and used for controlling the exposure platform;
the automatically controlled control module, with the main control computer PC is connected for the inside automatically controlled components and parts of control laser direct write exposure equipment, automatically controlled components and parts include: the device comprises a power supply device, an induction device and a control element;
the image synchronizer comprises a DMD component and a light source, wherein the DMD component receives image data and a light source control command of the main control computer PC and converts the light source control command into a voltage signal and a light source switching signal for controlling the light source;
the imaging device is used for imaging the pattern of the DMD component on a material to be photoetched, which is placed on the exposure platform;
the exposure platform is connected with the platform control module through a platform driver, and the working process is controlled by the platform control module;
the platform control module and the electric control module are integrated on a control processing board card, and the control processing board card realizes dual control of the exposure platform and electric control.
2. The novel laser direct-write exposure device according to claim 1, wherein the control processing board card is respectively in communication with the platform driver and the electrically controlled component through two communication interfaces.
3. The novel laser direct-write exposure device according to claim 2, wherein the electronic control module comprises:
the digital quantity module transmits a digital quantity control signal which comprises 1 and 0 and is used for realizing the control of the digital circuit element;
the analog quantity module is used for transmitting an analog quantity control signal and realizing the control of an analog circuit element;
the control processing board card, the digital quantity module and the analog quantity module are connected through a communication interface.
4. The novel laser direct-write exposure device according to any one of claims 2 or 3, wherein the communication interface is: the EtherCat interface.
5. The novel laser direct-write exposure device according to claim 1, wherein the power supply device supplies power to each component inside the laser direct-write exposure apparatus, and the power supply device comprises: the exposure platform, the main control computer PC, the light source and the DMD component.
6. The novel laser direct write exposure apparatus according to claim 1, wherein the sensing device comprises: temperature, humidity, vacuum degree detection device, position signal sensor or equipment state sensor.
7. The novel laser direct write exposure apparatus according to claim 1, wherein the control component comprises: solenoid valve and the switch of control gas circuit.
8. A novel laser direct-writing exposure apparatus according to claim 3, wherein the digital circuit element comprises: digital sensor, relay, tower lamp, button and MARK MARK device.
9. The novel laser direct-writing exposure device according to claim 3, wherein the analog circuit component comprises: an analog sensor.
10. The novel laser direct-write exposure device according to claim 1, wherein the communication mode between the control processing board card and the main control computer PC includes: TCP/IP or PCIE is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222732720.XU CN218512796U (en) | 2022-10-17 | 2022-10-17 | Novel laser direct writing exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222732720.XU CN218512796U (en) | 2022-10-17 | 2022-10-17 | Novel laser direct writing exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218512796U true CN218512796U (en) | 2023-02-21 |
Family
ID=85215954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222732720.XU Active CN218512796U (en) | 2022-10-17 | 2022-10-17 | Novel laser direct writing exposure device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218512796U (en) |
-
2022
- 2022-10-17 CN CN202222732720.XU patent/CN218512796U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN218512796U (en) | Novel laser direct writing exposure device | |
| CN102045255B (en) | Control method of data stream of avionics system of civil light airplane | |
| CN108415866A (en) | Intelligent platform management controller | |
| CN111885008A (en) | Protocol conversion module between robot and welding equipment and conversion method thereof | |
| CN115685886A (en) | Linkage laser marking control card based on EtherCAT network communication | |
| CN207457768U (en) | A kind of global function remote device monitoring device | |
| CN115826505A (en) | Multi-axis electro-hydraulic servo slave station control system based on synchronous real-time Ethernet | |
| CN109189358A (en) | A kind of Internet of Things intelligent display terminal system | |
| CN112040131B (en) | Intelligent camera based on EtherCAT industrial Ethernet bus and control method thereof | |
| CN102508084B (en) | Power system monitoring method and system thereof | |
| CN114710866A (en) | Far-field voice integrated circuit and intelligent device capable of performing man-machine interaction | |
| CN113741648A (en) | Computer hardware system | |
| JPH10207591A (en) | Interface board | |
| CN211296730U (en) | Clock synchronization system | |
| US8327049B2 (en) | Electrical process interface device | |
| CN112491683B (en) | Simulation module communication type based on CAN bus | |
| CN220680812U (en) | Medical robot and electrical control system thereof | |
| CN220305646U (en) | Edge intelligent controller | |
| JP2003345478A (en) | Intelligent type device capable of sharing identical user input/output interface by al intelligent type modules | |
| CN219802593U (en) | Wireless sensor and wireless sensor network system | |
| JPH11119903A (en) | Method for control between pointing device and computer, and the pointing device and the computer | |
| CN212515419U (en) | Circuit controller | |
| CN212569488U (en) | Remote automatic power-on control system | |
| CN217892812U (en) | Vehicle control system and vehicle | |
| CN110794946B (en) | Power management system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |