CN218497270U - Off-axis aspheric reflector compensation optical system - Google Patents
Off-axis aspheric reflector compensation optical system Download PDFInfo
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- CN218497270U CN218497270U CN202222661156.7U CN202222661156U CN218497270U CN 218497270 U CN218497270 U CN 218497270U CN 202222661156 U CN202222661156 U CN 202222661156U CN 218497270 U CN218497270 U CN 218497270U
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Abstract
The utility model discloses an off-axis aspheric reflector compensating optical system, which has an off-axis structure; the spherical compensating mirror I, the spherical compensating mirror II and the aspheric reflector to be detected are sequentially arranged along the incident direction of light; the focal lengths of the spherical compensation mirror I, the spherical compensation mirror II and the to-be-detected aspheric reflector sequentially correspond to f 1 、f 2 、f 3 The normalized values of the curvature radiuses R of the aspheric surface vertexes of the aspheric surface reflectors to be detected are respectively equal to or more than-1 and equal to f' 1 ≤‑0.5、‑30≤f’ 2 ≤‑25、f’ 3 And =1. The utility model provides a compensation optical system imaging quality is high, can be applied to astronomical lightAnd (3) detecting a large-caliber aspheric reflector in optical and space optics.
Description
Technical Field
The utility model belongs to the technical field of optics, concretely relates to off-axis aspheric surface speculum compensation optical system.
Background
The large-aperture optical system is more and more widely applied to the fields of astronomical optics, space optics, ground space target detection and identification and the like. In order to enlarge a view field, improve imaging spatial resolution, improve imaging stability and increase signal energy, the large-caliber aspheric mirror reflector is widely applied to a large-caliber optical system.
The detection means of the aspheric mirror processed at present are few, and the detection means mainly comprises a contourgraph detection method, a Computer Generated Hologram (CGH) method, a zygo interferometer compensation mirror method and the like. The detection precision of the contourgraph is low; the large-caliber CGH manufacturing process is immature at present and also faces the problem of low precision. The compensation mirror method designs a corresponding compensation mirror for each aspheric surface reflector, so that the zygo interferometer is reused for detection, and the detection precision is good. Therefore, the design of a proper compensating mirror light path has very important significance for improving the astronomical observation, space remote sensing and early warning level in China.
Disclosure of Invention
The utility model discloses not enough to prior art exists, provide an off-axis aspheric surface speculum compensation optical system, the image quality is high, and stability is good, and is small, can be applied to the face type detection of coaxial and off-axis aspheric surface speculum.
In order to achieve the object, the utility model provides an off-axis aspheric mirror compensation optical system, the structure of the optical system is an off-axis structure; the detection device comprises a spherical compensation mirror I, a spherical compensation mirror II and an aspheric reflector to be detected in sequence along the incident direction of light rays; the focal lengths of the first spherical compensating mirror, the second spherical compensating mirror and the aspheric reflecting mirror to be detected sequentially correspond to f 1 、f 2 、f 3 The normalized values of the curvature radiuses R of the aspheric surface vertexes of the aspheric surface reflectors to be detected are respectively equal to or more than-1 and equal to f' 1 ≤-0.5、-30≤f′ 2 ≤-25、f′3＝ 1 。
Furthermore, the calibers of the first spherical compensation mirror, the second spherical compensation mirror and the aspheric reflector to be detected sequentially correspond to D 1 、D 2 D, their normalized values relative to the caliber D of the aspheric reflector to be detectedRespectively is not less than 2.2 and not more than D' 1 ≤4、2≤D′ 2 ≤2.8、D′＝1。
Furthermore, the first spherical compensation mirror and the second spherical compensation mirror are both spherical mirrors.
Further, the working waveband of the compensation optical system is 0.6328 μm.
Further, the total length of the compensating optical system is 260mm; the maximum caliber of the first spherical compensation mirror and the second spherical compensation mirror is 56mm.
Further, the total wave aberration of the compensating optical system reaches a PV value of better than 0.1 lambda and an RMS of better than 0.025 lambda, wherein lambda is 0.6328 μm.
Compared with the prior art, the utility model discloses the advantage lies in: the system consists of an off-axis aspheric mirror to be detected and two compensating mirrors, wherein light emitted by detection equipment is transmitted through a compensating lens and returns after the light reaches the self-alignment of the concave aspheric mirror to be detected. The two compensating mirrors bear larger aspheric normal aberration, and the compensating capacity is greatly improved. The two-piece compensator structure is adopted, so that the number of compensation lenses is small, and the scheme is simple; the spherical mirror is used as the compensation mirror, so that the processing and detection are easier, and the period is shorter; the quality of the image of the inspection light path is excellent, the wave aberration reaches a PV value which is better than 0.1 lambda, and the RMS is better than 0.025 lambda. Meanwhile, the aspheric surface in the off-axis state is detected, so that the actual light path can be restored, and the later-stage light path adjustment is facilitated.
Drawings
Fig. 1 is a schematic view of an off-axis aspheric mirror compensation optical system provided in embodiment 1 of the present invention;
fig. 2 is a wave aberration image quality diagram of the off-axis aspheric mirror compensation optical system provided in embodiment 1 of the present invention.
Detailed Description
The invention will be further explained by means of specific embodiments with reference to the drawings.
Example 1
This embodiment provides an off-axis aspheric mirror compensation optical system, which is in an off-axis structure, and the total length of the system is 260mm, and the working band thereof is 0.6328 μm, as shown in fig. 1. Edge lightThe line incidence direction sequentially comprises a spherical compensation mirror I1, a spherical compensation mirror II 2 and an aspheric reflector 3 to be detected, preferably, the spherical compensation mirror I1 and the spherical compensation mirror II 2 are spherical mirrors, the maximum caliber is 56mm, and quartz materials which are stable in property and easy to process are adopted; the focal lengths of the spherical compensation mirror I1, the spherical compensation mirror II 2 and the aspheric surface reflector 3 to be detected correspond to f in sequence 1 、f 2 、f 3 Normalized values of which with respect to the vertex curvature radius R of the aspherical mirror 3 to be detected are respectively-1 f' 1 ≤-0.5、-30≤f’ 2 ≤-25、f’ 3 ＝1。
The calibers of the spherical compensation mirror I1, the spherical compensation mirror II 2 and the aspheric surface reflector 3 to be detected sequentially correspond to D 1 、D 2 D, the normalized values of the two relative to the caliber D of the aspheric surface reflector 3 to be detected are respectively equal to or more than 2.2 and equal to D' 1 ≤4、2≤D’ 2 ≤2.8、D′＝1。
According to the aberration theory, the compensating mirror is used for compensating the aberration generated by the aspheric surface reflector to be detected, so that the imaging quality is close to the optical diffraction limit. The total wave aberration of the compensating optical system reaches a PV value of better than 0.1 lambda and an RMS of better than 0.025 lambda, wherein lambda is the detection wavelength of the zygo interferometer, and the wavelength value is 0.6328 mu m.
In the compensation optical system of the present embodiment, the aspheric equation of the aspheric mirror 3 to be detected is:
wherein, c =1/R 0 ，R 0 Is the curvature radius of the aspheric surface vertex, and K is a quadratic aspheric constant; a. The 0 、A 1 、A 2 、A 3 Is a high-order aspheric coefficient; y is the specific position of the aspheric reflector 3 to be detected; z is the rise of the aspheric mirror 3 to be detected under each position.
The embodiment provides a preferable scheme for the off-axis aspheric mirror compensation optical system, and specific data and adopted materials are shown in table 1. Wherein the aspheric surface to be detectedThe deviation of the reflector 3 from the optical axis is 60mm, and the distance from the focus of the zygo interferometer to the focus of the spherical compensation mirror I1 is 45.38mm; selecting R 0 = 252.4436; k =0.0192; the high-order aspheric coefficients are respectively: a. The 0 ＝0，A 1 ＝1.1617E-011，A 2 And = 1.4883E-016, and the aperture of the aspheric mirror to be detected is 120mm.
TABLE 1 optical construction parameters of the lens
Referring to fig. 2, the optical system of the present embodiment has excellent image quality, the wave aberration reaches a PV value of better than 0.1 λ, the RMS of better than 0.025 λ, and the image quality approaches the optical diffraction limit.
Therefore, the off-axis aspheric reflector compensation optical system provided by the utility model has better imaging quality; meanwhile, the volume is small, and the application is convenient; the method has a large detection range, and can be simultaneously suitable for detection of the off-axis aspheric mirror and the coaxial large-size aspheric mirror.
Finally, it is noted that: the above embodiments are only used for illustrating the present invention, and are not intended to limit the technical solutions described in the present invention. Thus, although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that modifications may be made to the invention; all technical solutions and modifications which do not depart from the scope of the present invention should be covered by the scope of the claims of the present invention.
Claims (6)
1. An off-axis aspheric mirror compensating optical system, characterized in that: the structure of the optical system is an off-axis structure; the spherical compensating mirror I, the spherical compensating mirror II and the aspheric reflector to be detected are sequentially arranged along the incident direction of light;the focal lengths of the spherical compensation mirror I, the spherical compensation mirror II and the to-be-detected aspheric reflector sequentially correspond to f 1 、f 2 、f 3 The normalized values of the curvature radius R of the vertex of the aspheric surface reflector to be detected are respectively equal to or more than-1 and equal to f' 1 ≤-0.5、-30≤f’ 2 ≤-25、f’ 3 ＝1。
2. An off-axis aspheric mirror compensating optical system as claimed in claim 1, characterized in that: the calibers of the first spherical compensation mirror, the second spherical compensation mirror and the aspheric surface reflector to be detected sequentially correspond to D 1 、D 2 D, the normalized values of the aspheric surface reflector to be detected and the caliber D of the aspheric surface reflector to be detected are respectively equal to or more than 2.2 and equal to D' 1 ≤4、2≤D’ 2 ≤2.8、D’＝1。
3. An off-axis aspheric mirror compensating optical system as defined in claim 1, characterized in that: the first spherical compensation mirror and the second spherical compensation mirror are both spherical mirrors.
4. An off-axis aspheric mirror compensating optical system as defined in claim 1, characterized in that: the working waveband of the compensating optical system is 0.6328 mu m.
5. An off-axis aspheric mirror compensating optical system as defined in claim 1, characterized in that: the total length of the compensating optical system is 260mm; the maximum caliber of the first spherical compensation mirror and the second spherical compensation mirror is 56mm.
6. An off-axis aspheric mirror compensating optical system as defined in claim 1, characterized in that: the total wave aberration of the compensating optical system reaches a PV value of better than 0.1 lambda and RMS of better than 0.025 lambda, wherein lambda is 0.6328 mu m.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222661156.7U CN218497270U (en) | 2022-10-10 | 2022-10-10 | Off-axis aspheric reflector compensation optical system |
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| CN202222661156.7U CN218497270U (en) | 2022-10-10 | 2022-10-10 | Off-axis aspheric reflector compensation optical system |
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| CN218497270U true CN218497270U (en) | 2023-02-17 |
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