CN113607385A - Inter-sub-mirror position error detection system for splicing main mirror optical system - Google Patents
Inter-sub-mirror position error detection system for splicing main mirror optical system Download PDFInfo
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Abstract
The invention provides a system for detecting position errors among sub-mirrors of a splicing main mirror optical system, which relates to the technical field of optical imaging, and can detect the position errors of the sub-mirrors, complete the correction of the position errors of the sub-mirrors, ensure that the splicing main mirror optical system can normally image and improve the defects of a beam splitting interference method; the method comprises the steps of sequentially arranging a first splicing reflection main mirror, a second reflection mirror, a third reflection mirror, a folding axis mirror and a micro lens array on a light path to enable light rays to generate an image point interference phenomenon and to be imaged on a focal plane, and obtaining and correcting position errors of a secondary mirror in the first splicing reflection main mirror according to an imaging result. The technical scheme provided by the invention is suitable for the process of position error detection and correction of the sub-mirrors of the spliced main mirror.
Description
Technical Field
The invention relates to the technical field of optical imaging, in particular to a system for detecting position errors between sub-mirrors of a splicing main mirror optical system.
Background
In order to obtain more detailed information of the target object, a higher resolution optical system is required. The resolution of an optical system is inversely proportional to the wavelength and directly proportional to the system aperture, and when the wavelength used by the system is determined, the system aperture needs to be increased to improve the resolution. In the development history of optical systems, the aperture is larger and larger from the earliest millimeter-scale aperture to the current meter-scale aperture, so that with the development requirement in the future, the aperture of the optical system is larger and larger, such as a 2.4 m-aperture haber telescope, a 6.5 m-aperture jenserveber telescope, a 30 m-aperture MMT and the like.
And the large-aperture optical system is generally realized by the form of splicing sub-mirrors. Since the sub-mirrors are displaced from the ideal position during the unfolding process, there is a certain co-phasing error, i.e. therefore a different position error in six degrees of freedom along the coordinate axes. The tilt error causes the image point to move, which is easy to detect and correct, while the displacement error along the optical axis direction is relatively difficult to correct. To detect the position error between the sub-mirrors, through many years of research studies, several methods commonly used can be summarized as: the detection method comprises an electrical detection method, a Hartmann-shack wave front sensor, a phase difference wave front sensor, a rectangular pyramid wave front sensor, a dispersion fringe sensing technology, a diffraction method, a beam splitting interference technology and other optical detection methods. The shack-Hartmann sensor can well detect the inclination error, but the microlens array used in the optical path has high manufacturing difficulty and high position precision requirement, a wide/narrow band algorithm needs to be used interactively, and the detection complexity is increased. The rectangular pyramid wave-front sensor has the advantages of high sensitivity and light energy utilization rate, flexible sampling partition mode and the like. However, the edges of the quadrangular pyramid lens must be sharp, the base angle is small, and the conical surface is smooth to reduce the loss of light energy, and meanwhile, the vertex of the quadrangular pyramid needs to be strictly coincident with the focal point of the optical system in the use process. The dispersion fringe sensor has low requirements on a light source and a large measurement range, but has complex algorithm and high requirements on the precision and the position of a micro-lens array and a prism grating. The phase difference method does not need complex hardware devices, and the algorithm is also complex. The split beam interference method is widely applied, but has the defects of high requirements on environmental influence, large vibration influence, need of split beam elements and the like, and still cannot be well adapted to all measurement environments.
Accordingly, there is a need to develop a new inter-sub-mirror position error detection system for a splicing main mirror optical system that addresses the deficiencies of the prior art to address or mitigate one or more of the problems set forth above.
Disclosure of Invention
In view of this, the invention provides a system for detecting position errors between sub-mirrors of a main mirror splicing optical system, which uses an image point interference mode to perform measurement, can detect the position errors of the sub-mirrors, and complete the correction of the position errors of the sub-mirrors, so that the main mirror splicing optical system can normally image, and the defects of a beam splitting interference method are overcome.
In one aspect, the invention provides a system for detecting position errors among secondary mirrors of a primary mirror splicing optical system, which is characterized in that a first primary mirror splicing reflector, a second reflector, a third reflector, a folding axis mirror and a micro lens array are sequentially arranged on an optical path, so that light rays generate an image point interference phenomenon and are imaged on a focal plane, and the position errors of the secondary mirrors in the first primary mirror splicing reflector are obtained according to an imaging result and are corrected.
In accordance with the above aspect and any possible implementation manner, there is further provided an implementation manner, in which the first split-joint primary reflecting mirror and the second reflecting mirror are disposed opposite to each other and both are focused reflection, and a distance between the two is greater than a focal length of the second reflecting mirror;
the third reflector and the folding axis mirror are respectively arranged at two sides of the first splicing reflection main mirror, and the folding axis mirror is arranged between the focus of the second reflector and the first splicing reflection main mirror;
the micro lens array is disposed outside the third reflecting mirror.
The above aspects and any possible implementation manners further provide an implementation manner, where the first splicing reflection main mirror is formed by splicing a plurality of sub-mirrors, and each sub-mirror is independent of each other; all the sub-mirrors are symmetrically distributed.
There is further provided in accordance with the above-described aspect and any possible implementation, an implementation in which the first split mirror has an optical characteristic of-0.2 f' < f1′＜-0.05f′，-0.4f′＜R1< -0.1 f'; the optical characteristics of the second mirror are: -0.02 f' < f2′＜-0.004f′，-0.045f′＜R2< -0.008 f'; the optical characteristics of the third reflector are as follows: -0.02 f' < f3′＜-0.0075f′，-0.045f′＜R3< -0.015 f'; the optical characteristics of the folding axis mirror are as follows: f. of4′＝∞，R4Infinity; the optical characteristics of the microlens array are: f is more than 3mm5′＜10mm，3mm＜R5＜10mm，-10mm＜R6＜-3mm；
Wherein f' is the focal length of the optical system; f. of1′、f2′、f3′、f4′、f5The focal lengths of the first splicing reflection main mirror, the second reflection mirror, the third reflection mirror, the folding axis mirror and the micro lens array are sequentially arranged; r1、R2、R3、R4The curvature radiuses of the first splicing reflection main mirror, the second reflection mirror, the third reflection mirror and the folding axis mirror are sequentially arranged; r5、R6Is the radius of curvature of the microlens array.
Generally, the wavefront generated by an optical system can be perfectly imaged under one twentieth wavelength (which refers to the wavelength of incident light), while the imaging waveband of the existing large-aperture optical system is generally an infrared waveband and cannot be imaged in a visible waveband, and the conventional large-aperture optical system comprises a famous jenserveier telescope (JWST), wherein the size of the wave aberration formed in the visible waveband is about one fifth wavelength and can only be imaged in a short-wave infrared waveband to a medium-wave infrared waveband, so that for the imaging of the large-aperture optical system in the visible waveband, the structural parameters of the system need to be re-optimized, the structural parameters comprise the curvature radius of each reflector, the quadratic coefficient, the distance between the mirrors and the like, the optical system with brand-new structural parameters is obtained, the size of the formed wave aberration is less than one twentieth wavelength, and the optical characteristics are optimized optical characteristics, the system can have a good error detection result.
The above aspects and any possible implementations further provide an implementation in which the microlens array is formed by arranging 19 circular microlenses, and adjacent microlenses are connected tangentially; the aperture size of the micro lens is 5-10mm, and the focal length is 3-10 mm.
The above aspects and any possible implementations further provide an implementation in which a diaphragm is located on the first split-mirror primary mirror and is incident with parallel light rays.
The above-described aspect and any possible implementation further provide an implementation in which the first split reflection main mirror is composed of 18 sub-mirrors, and the structural parameters of all the sub-mirrors are the same.
The above-described aspects and any possible implementation further provide an implementation that enables correction of a positional error between 100nm and a half wavelength (referring to a wavelength of incident light) based on information of a shift in a position of an interference fringe imaged at a focal plane with respect to a standard position.
The above-described aspects and any possible implementation further provide an implementation in which the sub-mirror error is corrected to within 30nm according to information about changes in secondary fringes on both sides of the interference fringes imaged in the focal plane.
The above-described aspect and any possible implementation manner further provide an implementation manner that the change information of the secondary stripe is a luminance change of the secondary stripe.
Compared with the prior art, one of the technical schemes has the following advantages or beneficial effects: the system light path directly adopts image points to generate interference, a dispersion prism is not used, and the structure is simple; a micro-lens array is not adopted in the front section of the optical path of the system, so that the requirement that each micro-lens is divided on two sub-mirrors in equal parts is avoided; the image point offset generated by the sub-mirror due to the inclination error can be well corrected according to the offset condition of the image point; interference fringes can be generated on a focal plane between every two sub-mirrors, and the displacement error of the sub-mirrors can be obtained according to the change of fringe information;
another technical scheme in the above technical scheme has the following advantages or beneficial effects: the method is mainly used for detecting the position errors among the sub-mirrors of the large-aperture splicing main mirror optical system and the sparse aperture optical system, and realizes confocal common phase among all the sub-mirrors, so that the splicing system or the sparse aperture system can obtain better imaging quality, and the imaging quality equivalent to that of a single main mirror with the same aperture is obtained.
Of course, it is not necessary for any one product in which the invention is practiced to achieve all of the above-described technical effects simultaneously.
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In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a diagram of a sub-mirror position error detection path provided by one embodiment of the present invention;
FIG. 2 is a schematic view of a microlens array provided by one embodiment of the present invention;
FIG. 3 is a schematic illustration of the dimensions of a microlens array provided by an embodiment of the present invention;
fig. 4 is an interference fringe pattern corresponding to different position errors (0 nm,50nm, and 100nm interference fringe patterns from left to right) provided by an embodiment of the present invention.
Wherein, in the figure:
1. a primary mirror reflector; 2. a second reflector; 3. a third reflector; 4. a folding axis mirror; 5. a microlens array.
Detailed Description
For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.
It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the examples of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
Aiming at the defects of the prior art, the invention provides a method for detecting the position error of a sub-mirror of a large-aperture spliced main mirror optical system/sparse aperture optical system, wherein the optical system comprises a main mirror reflector 1, a second reflector 2, a third reflector 3, a folding axis mirror 4 and a micro-lens array 5 which are sequentially arranged along the light propagation direction; the diaphragm is positioned on the main mirror, and in order to compress the size of the system, the size of the whole system is shortened by adopting the folding axis mirror. The main mirror reflector is composed of 18 sub-mirrors, the structural parameters are the same, and light is transmitted on a focal plane through the sub-mirrors to generate image point interference to generate interference fringes. The second reflector 2 is arranged at the opposite side of the main reflector 1, the third reflector 3 is arranged at the opposite side of the second reflector 2, namely at the same side of the main reflector 1, and the folding axis mirror 4 is arranged at the opposite side of the third reflector 3. Specifically, the third mirror 3 is disposed on the rear side of the main mirror 1, the folding axis mirror 4 is disposed on the front side of the main mirror 1, and the distances from the third mirror 3 and the folding axis mirror 4 to the main mirror 1 are both much smaller than the distance from the second mirror 2 to the main mirror 1. The micro lens array 5 is arranged at the rear side of the third reflector 3, and the positions of the third reflector 3, the folding axis mirror 4 and the micro lens array 5 are in a folding line shape.
The curvature and the optical center position between each sub-mirror of the main mirror reflector are the same, and the whole mirror reflector is symmetrically arranged. The primary mirror reflector is concave as a whole so as to reflect the irradiated parallel rays to the secondary mirror 2, which is much smaller in area than the primary mirror. The second reflecting mirror 2 has a concave surface to reflect the light reflected by the main reflecting mirror again, and all the light reflected by the second reflecting mirror 2 is split again after intersecting at a point at a certain position and is totally irradiated on the third reflecting mirror 3. The arrangement position of the folding axis mirror 4 is arranged at the right side of the intersection point of the light rays, namely, at the side close to the main mirror reflector, and receives the light rays reflected by the third reflector 3, and the light rays reflected by the folding axis mirror 4 are converged on the micro lens array 5 to be subjected to image point interference on the focal plane after being transmitted, so that interference fringes are formed.
The optical properties of the primary mirror reflector are: -0.2 f' < f1′＜-0.05f′，-0.4f′＜R1< -0.1 f'; the optical properties of the second mirror are: -0.02 f' < f2′＜-0.004f′，-0.045f′＜R2< -0.008 f'; the optical properties of the third mirror are: -0.02 f' < f3′＜-0.0075f′，-0.045f′＜R3< -0.015 f'; the optical characteristics of the folding axis mirror are as follows: f. of4′＝∞，R4Infinity; the optical properties of the microlens array are: f 5' is more than 3mm and less than 10mm, R is more than 3mm5＜10mm，-10mm＜R6-3 mm; wherein f' is the focal length of the system, f is the focal length of the microlens array, f1′、f2′、f3′、f4′、f5' in turn, the focal length of the system mirror; r1、R2、R3、R4Four curvature radiuses corresponding to the system reflector are sequentially arranged; r5、R6Is the radius of curvature of the microlens array.
Large aperture optical designs are typically designed with a single primary mirror, but cannot analyze the effect on system imaging quality due to sub-mirror position deviations from the ideal position. The main mirror adopts a block design, the large-size main mirror is obtained by splicing a plurality of small-size sub-mirrors, each sub-mirror is independent, and the influence on system imaging can be superposed, so that according to the theory that the size of the wave aberration generated by an optical system is smaller than one twenty-one wavelength if the optical system is in normal imaging, the size of the wave aberration caused by the position error of each sub-mirror can be decomposed and obtained on the basis of considering the wave aberration generated by various aberrations which cannot be corrected and inherent in the system, and the position tolerance of each sub-mirror is obtained. The positions of the sub-mirrors are symmetrically distributed, and the position error tolerance of each sub-mirror is the same.
The interference fringe information on the focal plane can change with the position error between the sub-mirrors, namely, the fringe information generated by the system under the condition of different sub-mirror position errors can have changes, including the change of the fringe position and the change of the fringe brightness. The position of the sub-mirror is quantitatively changed, the position change of the stripe and the brightness of the stripe can be obtained, and after multiple assignments, a fitting formula of the position error of the stripe, the moving distance of the stripe and the brightness of the stripe can be obtained through numerical value fitting. In addition, the position of the interference fringe on the focal plane can also move with the position error of the sub-mirror to a certain extent, the position error of the sub-mirror can be obtained by solving and calculating through a formula between the moving distance of the fringe and the position error of the sub-mirror, and the position error of the sub-mirror can be adjusted to be within the range of 100nm to half wavelength through the moving information of the fringe; the brightness of the secondary bright stripes on the two sides of the main maximum on the focal plane changes along with the position error of the sub-mirror, the position error of the sub-mirror is obtained by calculating through a formula between the brightness change of the secondary bright stripes on the two sides of the main maximum stripe and the position error of the sub-mirror, and finally the position error of the sub-mirror can be adjusted to be within a range of about 30 nm.
As shown in fig. 1, which is a schematic structural diagram of the optical system of the present invention, a main mirror of the system is formed by splicing 18 small-sized sub-mirrors, incident light is reflected by the splicing main mirror, the second reflecting mirror, the third reflecting mirror, the folding axis mirror and the micro-lens array, and then interferes on an image plane, and the size of the position error between the sub-mirrors is analyzed by the change of interference fringe information.
As shown in fig. 2 and 3, the microlens array is formed by arranging 19 circular microlenses, and the adjacent microlenses are connected in a tangent manner. The aperture size of a single micro lens is 5-10mm, and the focal length is 3-10 mm.
The optical focal length provided by the embodiment is 70-80m, the parallel light enters, and the aperture size of the system is 5.2-6.2 m. As shown in fig. 4, when there is no position error, the main fringe of the interference fringe has the maximum brightness, the secondary fringes are symmetrically distributed on two sides of the central bright fringe, and the position and the brightness are symmetrical; when the position error is increased, the position of the central bright stripe is changed, and the brightness is changed; the brightness and position of the secondary bright stripes vary.
The change of the position of the sub-mirror from 100nm to half wavelength can be obtained through analyzing the position change of the central bright stripe, and the correction is realized; through the change of the brightness of the secondary bright stripes, the detection and correction with the position error of 30nm can be obtained, and finally, the common-phase adjustment of all the sub-mirrors is realized, and the common-phase imaging of the spliced main mirror is realized.
The inter-sub-mirror position error detection system for the optical system of the spliced main mirror provided by the embodiment of the application is described in detail above. The above description of the embodiments is only for the purpose of helping to understand the method of the present application and its core ideas; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
As used in the specification and claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to substantially achieve the technical effect. The description which follows is a preferred embodiment of the present application, but is made for the purpose of illustrating the general principles of the application and not for the purpose of limiting the scope of the application. The protection scope of the present application shall be subject to the definitions of the appended claims.
It is also noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a commodity or system that includes the element.
It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
The foregoing description shows and describes several preferred embodiments of the present application, but as aforementioned, it is to be understood that the application is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the application as described herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the application, which is to be protected by the claims appended hereto.
Claims (10)
1. A position error detection system between sub-mirrors of an optical system of a splicing main mirror is characterized in that a first splicing reflection main mirror, a second reflection mirror, a third reflection mirror, a folding axis mirror and a micro-lens array are sequentially arranged on a light path, so that light rays generate an image point interference phenomenon and form images on a focal plane, and the position error of the sub-mirror in the first splicing reflection main mirror is obtained according to an imaging result and is corrected.
2. The system for detecting the inter-lens position error of a splicing main mirror optical system according to claim 1, wherein the first splicing main mirror and the second mirror are arranged oppositely and are both focusing reflection, and the distance between the first splicing main mirror and the second mirror is larger than the focal length of the second mirror;
the third reflector and the folding axis mirror are respectively arranged at two sides of the first splicing reflection main mirror, and the folding axis mirror is arranged between the focus of the second reflector and the first splicing reflection main mirror;
the micro lens array is disposed outside the third reflecting mirror.
3. The inter-mirror position error detection system for a spliced main mirror optical system as claimed in claim 1, wherein the first spliced main reflecting mirror is formed by splicing a plurality of sub-mirrors, each of which is independent of the other; all the sub-mirrors are symmetrically distributed.
4. The system for detecting the inter-mirror position error of a spliced primary mirror optical system as claimed in claim 1, wherein the optical characteristics of the first spliced reflective primary mirror are: -0.2 f' < f1′＜-0.05f′，-0.4f′＜R1< -0.1 f'; the optical characteristics of the second mirror are: -0.02 f' < f2′＜-0.004f′，-0.045f′＜R2< -0.008 f'; the optical characteristics of the third reflector are as follows: -0.02 f' < f3′＜-0.0075f′，-0.045f′＜R3< -0.015 f'; the optical characteristics of the folding axis mirror are as follows: f. of4′＝∞，R4Infinity; the optical characteristics of the microlens array are: f is more than 3mm5′＜10mm，3mm＜R5＜10mm，-10mm＜R6＜-3mm；
Wherein f' is the focal length of the optical system; f. of1′、f2′、f3′、f4′、f5The focal lengths of the first splicing reflection main mirror, the second reflection mirror, the third reflection mirror, the folding axis mirror and the micro lens array are sequentially arranged; r1、R2、R3、R4The curvature radiuses of the first splicing reflection main mirror, the second reflection mirror, the third reflection mirror and the folding axis mirror are sequentially arranged; r5、R6Is the radius of curvature of both faces of the microlens array.
5. The system for detecting the inter-lens position error of the spliced main mirror optical system as claimed in claim 1, wherein the microlens array is formed by arranging 19 circular microlenses, and the adjacent microlenses are in tangent connection; the aperture size of the micro lens is 5-10mm, and the focal length is 3-10 mm.
6. The system of claim 1, wherein a stop is located on the first split mirror primary mirror and is incident with parallel light rays.
7. The system of claim 3, wherein the first split mirror primary mirror is composed of 18 sub-mirrors, and all sub-mirrors have the same structural parameters.
8. The system for detecting positional error between sub-mirrors of a spliced main mirror optical system according to any one of claims 1 to 7, wherein correction of positional error between 100nm and a half wavelength of incident light is carried out based on information on the movement of the position of interference fringes imaged at the focal plane with respect to a standard position.
9. The inter-sub-mirror position error detection system for a split-joint main mirror optical system according to any one of claims 1 to 7, wherein sub-mirror errors are corrected to within 30nm based on information on changes in secondary fringes on both sides of interference fringes imaged at a focal plane.
10. The system according to claim 9, wherein the change information of the secondary fringe is a luminance change of the secondary fringe.
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| CN115453750A (en) * | 2022-08-30 | 2022-12-09 | 中国科学院长春光学精密机械与物理研究所 | Surface shape precision analysis method, device and equipment for spliced reflector |
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