CN218481432U - High-precision detection device for surface defects of optical element - Google Patents
High-precision detection device for surface defects of optical element Download PDFInfo
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- CN218481432U CN218481432U CN202222137755.9U CN202222137755U CN218481432U CN 218481432 U CN218481432 U CN 218481432U CN 202222137755 U CN202222137755 U CN 202222137755U CN 218481432 U CN218481432 U CN 218481432U
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Abstract
The utility model discloses a high-precision detection device for surface defects of optical elements, which comprises a carrying platform used for placing the optical elements to be detected; the horizontal adjusting platform is arranged below the object carrying platform; the guide rail moving mechanism is arranged below the horizontal adjusting table; the first lifting mechanism and the second lifting mechanism are fixed on the portal frame; the CCD detection module is used for rapidly scanning the optical element to obtain surface defect position information; the high-precision detection module is used for carrying out fine detection on the surface defects of the optical element to obtain a high-resolution defect image; and the cleaning cover is arranged outside the detection device. The utility model discloses a CCD detection module acquires optical element surface defect positional information, guide rail moving mechanism move the objective table according to positional information and arrange the defect in high accuracy detection module below, acquire optical element high resolution defect image finally realizes optical element surface defect high resolution, location detection, has improved detection precision and detection efficiency greatly.
Description
Technical Field
The utility model relates to an optical element surface defect detection area, concretely relates to optical element surface defect high accuracy detection device.
Background
Precision components are the key foundation for many industries, and the market has a greatly increased demand for semiconductor chips, optical components, display screens, and the like. The performance of optoelectronic components and system devices depends on the component material and the component surface quality. The surface defect of optical element is one of the key indexes for judging the technical quality level of semiconductor, optical, photoelectronic and display screen precision elements.
At present, the manual visual contrast method is the mainstream method for detecting the surface defects of the optical element. The method is greatly influenced by the subjectivity of detection personnel, the repeatability of a detection result is poor, the detection efficiency is low, the position of the defect cannot be accurately positioned, the conditions of erroneous judgment, missing judgment and the like occur, a large amount of time is consumed, and the detection accuracy is low.
Therefore, how to solve the subjective uncertainty caused by manual detection and improve the detection accuracy rate is a problem which needs to be solved urgently.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the not enough that prior art exists, provide an optical element surface defect high accuracy detection device, solve the artifical problem that detects that can't accomplish optical element surface defect high accuracy fast, accurately, realize that surface defect accurate positioning, automatic high accuracy detect.
The utility model discloses technical scheme as follows:
a high precision optical element surface defect detection apparatus, the apparatus comprising:
the carrying platform is used for placing an optical element to be detected;
the horizontal adjusting platform is arranged below the object carrying platform and used for adjusting the horizontal posture of the object carrying platform;
the guide rail moving mechanism is arranged below the horizontal adjusting table;
the first lifting mechanism and the second lifting mechanism are fixed on the portal frame;
the CCD detection module is connected with the first lifting mechanism and is used for rapidly scanning the optical element to obtain surface defect position information and realize defect positioning;
the high-precision detection module is connected with the second lifting mechanism and is used for carrying out fine detection on the surface defects of the optical element to obtain a high-resolution defect image;
further, the horizontal adjusting table comprises a rotating mechanism which rotates along the theta x direction and the theta y direction respectively.
Further, the guide rail moving mechanism comprises a moving mechanism which moves along the X direction and the Y direction respectively.
Furthermore, the first lifting mechanism and the second lifting mechanism move along the Z-axis direction and are respectively used for driving the CCD detection module and the high-precision detection module to move up and down.
Further, the CCD detection module includes a CCD camera, a lens and a combined light source, and is configured to perform omnidirectional fast scanning imaging on the surface of the optical element to obtain surface defect position information.
Furthermore, the high-precision detection module comprises a high-resolution camera, a high-power lens and a matched light source, and is used for acquiring a high-resolution defect image.
Further, the device also comprises a cleaning cover used for guaranteeing the cleanliness of the environment when the device operates, the cleaning cover is arranged outside the detection device and used for guaranteeing that the cleanliness of the environment when the device operates is better than hundred, and the interference of dust, external air flow and other factors on the detection process is avoided.
The utility model has the advantages that:
the utility model provides an optical element surface defect high accuracy detection device has solved artifical and has detected the problem that can't accomplish optical element surface defect high accuracy fast, accurately, realizes that surface defect accurate positioning, automatic high accuracy detect, improves detection efficiency, reduces the erroneous judgement rate.
Drawings
FIG. 1 is an overall structure diagram of the device of the present invention;
fig. 2 is an exploded view of the device of the present invention.
Detailed Description
In order to make the technical solution of the present invention better understood, the present invention is further described in detail below with reference to the accompanying drawings and the specific embodiments, and the content of the embodiments is not limited to the present invention. The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 and fig. 2, the high-precision optical element surface defect detection device provided by the present invention comprises an object carrying platform 1, and a horizontal adjustment table 2 fixed below the object carrying platform 1; the guide rail moving mechanism 3 is arranged below the horizontal adjusting platform 2 and is used for driving the object carrying platform 1 to move along the X and Y directions; the first lifting mechanism 4 and the second lifting mechanism 5 are fixed on a portal frame 8 and are respectively used for driving the CCD detection module 6 and the high-precision detection module 7 to respectively move along the Z-axis direction; and the cleaning cover 9 is arranged outside the detection device and used for ensuring the cleanliness of the environment in which the equipment is operated.
In the working process of the embodiment, the guide rail moving mechanism 3 drives the loading platform 1 to move below the CCD detection module 6, and the element to be detected is perpendicular to the CCD detection module 6 by controlling the horizontal adjusting platform 2. CCD detection module 6 carries out all-round quick scanning to the component under test, obtains the defect image of the component under test to obtain defect position information, then, guide rail moving mechanism 3 drives cargo platform 1, moves the defect to the high accuracy detection module 7 below, makes the component under test perpendicular to high accuracy detection module 7 through controlling horizontal adjustment platform 2. The high-precision detection module 7 is used for carrying out fine detection on the defects of the detected element to obtain a high-resolution defect image. Finally, high-resolution and positioning detection of the surface defects of the optical element is realized. Preferably, the high-resolution defect image can be used for carrying out relevant image processing analysis through additional image processing equipment according to the requirements of a subsequent user so as to obtain information such as surface defect topography data.
In this embodiment, the guide rail moving mechanism 3 includes a first moving mechanism 31 for driving the loading platform 1 to move along the X-axis direction and a second moving mechanism 32 for driving the loading platform 1 to move along the Y-axis direction. The horizontal adjusting platform 2 comprises a first rotating mechanism 21 for driving the loading platform 1 to rotate along the thetax direction and a second rotating mechanism 22 for driving the loading platform to rotate along the thetay direction. The first moving mechanism 31 and the second moving mechanism 32 may be driven by linear motors, and the first rotating mechanism 21 and the second rotating mechanism 22 may be driven by stepping motors.
In this embodiment, the first moving block 311 of the first moving mechanism 31 is connected to the base of the second moving mechanism 32, the second moving block 321 of the second moving mechanism 32 is connected to the base of the second rotating mechanism 22, the second rotating block 221 of the second rotating mechanism 22 is connected to the base of the first rotating mechanism 21, and the object carrying platform 1 is disposed above the first rotating block 211 of the first rotating mechanism 21. Therefore, the movement of the stage 1 along the X, Y, θ X, θ Y directions is realized under the driving action of the first moving mechanism 31, the second moving mechanism 32, the first rotating mechanism 21, and the second rotating mechanism 22.
In this embodiment, the first lifting mechanism 4 and the second lifting mechanism 5 are fixed to the gantry 8. The first lifting mechanism 4 and the second lifting mechanism 5 may be driven by stepping motors. The first moving rail 41 of the first elevating mechanism 4 is connected to the first connection plate 411, and the CCD detection module 6 is disposed on the first connection plate 411. The second moving rail 51 of the second elevating mechanism 5 is connected to the second connection plate 511, and the high-precision detecting module 7 is disposed on the second connection plate 511. Therefore, the first lifting mechanism 4 and the second lifting mechanism 5 respectively realize the movement of the CCD detection module 6 and the high-precision detection module 7 along the Z-axis direction.
The above embodiments are merely exemplary embodiments adopted to illustrate the principles of the present invention, and the protection scope of the present invention should not be limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and essence of the invention, and these changes and modifications are to be considered as the scope of the invention.
Claims (7)
1. A high-precision detection device for surface defects of optical elements is characterized in that: the device comprises:
the carrying platform is used for placing an optical element to be detected;
the horizontal adjusting platform is arranged below the object carrying platform and used for adjusting the horizontal posture of the object carrying platform;
the guide rail moving mechanism is arranged below the horizontal adjusting table;
the first lifting mechanism and the second lifting mechanism are fixed on the portal frame;
the CCD detection module is connected with the first lifting mechanism and used for rapidly scanning the optical element to obtain surface defect position information and realize defect positioning;
and the high-precision detection module is connected with the second lifting mechanism and is used for carrying out fine detection on the surface defects of the optical element and acquiring a high-resolution defect image.
2. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: the horizontal adjusting table comprises rotating mechanisms which rotate along the theta x direction and the theta y direction respectively.
3. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: the guide rail moving mechanism comprises a moving mechanism which moves along the X direction and the Y direction respectively.
4. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: and the first lifting mechanism and the second lifting mechanism move along the Z-axis direction and are respectively used for driving the CCD detection module and the high-precision detection module to lift and move.
5. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: the CCD detection module comprises a CCD camera, a lens and a combined light source and is used for carrying out all-dimensional rapid scanning imaging on the surface of the optical element to obtain surface defect position information.
6. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: the high-precision detection module comprises a high-resolution camera, a high-power lens and a matched light source and is used for acquiring a high-resolution defect image.
7. The apparatus for detecting surface defects of optical elements with high precision as set forth in claim 1, wherein: the cleaning cover is arranged outside the detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222137755.9U CN218481432U (en) | 2022-08-15 | 2022-08-15 | High-precision detection device for surface defects of optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222137755.9U CN218481432U (en) | 2022-08-15 | 2022-08-15 | High-precision detection device for surface defects of optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218481432U true CN218481432U (en) | 2023-02-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222137755.9U Active CN218481432U (en) | 2022-08-15 | 2022-08-15 | High-precision detection device for surface defects of optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218481432U (en) |
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2022
- 2022-08-15 CN CN202222137755.9U patent/CN218481432U/en active Active
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