CN218470146U - Automatic test equipment for optical device - Google Patents

Automatic test equipment for optical device Download PDF

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Publication number
CN218470146U
CN218470146U CN202222734562.1U CN202222734562U CN218470146U CN 218470146 U CN218470146 U CN 218470146U CN 202222734562 U CN202222734562 U CN 202222734562U CN 218470146 U CN218470146 U CN 218470146U
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testing
test
turnover
optical
optical device
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龚鹏辉
何伟亮
周泽康
梁文梓
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Optimal Coatech Guangzhou Co ltd
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Optimal Coatech Guangzhou Co ltd
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Abstract

The utility model relates to an optical device automatic test equipment. The test apparatus includes: the base is provided with two groups of parallel rails; the testing device is arranged on the base, and a testing platform opposite to the testing device is also arranged on the base; the turnover devices are arranged in two groups and are respectively arranged on two sides of the test board, and the turnover devices are movably connected to the track; the object tables are arranged into two groups and are respectively arranged between the turnover device and the test device, and the turnover device can pick up materials and turnover the materials between the object tables and the test table; the position detection devices are arranged in two groups and are arranged on the turnover device; and the controller is respectively in communication connection with the turnover device, the testing device and the position detection device so as to control the testing device and the turnover device to execute corresponding actions according to the current position information of the material transmitted by the position detection device. Therefore, the problems of inaccurate test result and low efficiency of the current optical device are solved.

Description

Automatic test equipment for optical device
Technical Field
The utility model belongs to optical device check out test set field, concretely relates to optical device automatic test equipment.
Background
After the optical device is assembled, parameters such as light transmission performance of the optical device such as a wavelength division multiplexer are detected, and therefore a high-quality optical device meeting production requirements is screened out.
The optical devices tested by the testing equipment are all in the form, and specifically, the form of the optical devices is as follows: the lower part of the large glass sheet is a light incidence position, and emergent light comes out from the four optical wafers above the product.
When evaluating the quality of an optical device product, three types of tests are generally required to be performed on the optical device. The test item 1 is a light spot test which can evaluate the parallelism of emergent light of the optical device; the test item 2 is a channel test which can evaluate whether the channel wavelengths of the optical device are mixed or not; test item 3 is a performance test for evaluating the light transmittance and the loss of the optical device. Therefore, by carrying out light spot test on the optical device, whether the four emergent rays are parallel or not can be evaluated, and whether the position of the four optical wafers is wrong or not can be evaluated by channel test; the clear test evaluates the loss of light energy and the wavelength shift after the light passes through the wafer.
However, at present, these three test items need to be performed on the corresponding three test platforms respectively. And when each platform is tested, the position of the product needs to be adjusted, so that the correctness of the position of incident light is ensured, but the testing efficiency is low, the consistency cannot be ensured, and meanwhile, the quality control of the device product cannot be effectively ensured due to the fact that factors such as process fatigue and individual testing method difference easily occur in manual work.
Aiming at the problems of inaccurate test result and low efficiency of the optical device in the prior art, a more reasonable technical scheme is required to be provided to solve the current technical problem.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an optical device automatic test equipment to solve the inaccurate and inefficiency problem of optical device test result that exists among the prior art.
In order to achieve the above object, the present invention provides an automatic testing apparatus for optical devices, comprising:
the base is provided with two groups of parallel rails;
the testing device is arranged on the base, a testing platform opposite to the testing device is also arranged on the base, and the testing device is used for detecting an optical device;
the turnover devices are arranged in two groups and are respectively arranged on two sides of the test board, the turnover devices are movably connected to the track, and the turnover devices are used for adsorbing and releasing materials;
the object carrying tables are arranged in two groups and are respectively arranged between the turnover device and the test device in a one-to-one correspondence mode, and the turnover device can pick up materials and turnover the materials between the object carrying tables and the test tables;
the position detection devices are arranged into two groups, are connected to the turnover device in a one-to-one correspondence manner and are used for detecting the current position information of the material on the object stage; and
and the controller is respectively in communication connection with the turnover device, the testing device and the position detection device so as to control the testing device and the turnover device to execute corresponding actions according to the current position information of the material transmitted by the position detection device.
In one possible design, the transfer device comprises a portal frame, a mounting seat, a driving piece and an adsorption component, wherein the portal frame is connected to the track through a driving structure; the mounting seat is connected to the portal frame, and the adsorption component is connected to the mounting seat through the driving piece so as to move in the vertical direction under the pushing of the driving piece.
In one possible design, the adsorption assembly may be coupled to the mounting base or the gantry in a liftable manner so as to be able to approach or move away from the stage.
In a possible design, the adsorption component includes air compressor machine, sleeve pipe and the suction nozzle of making by silica gel or rubber materials, sheathed tube one end communicate in the air compressor machine, the sheathed tube other end communicate in the suction nozzle, the suction nozzle has just to optical device's gas pocket, in order to work as the suction nozzle is attached in during the optical device, can produce the negative pressure in order to adsorb the optical device.
In one possible design, the testing device comprises a light splitter, an optical power instrument, a camera and a fixing clamp, wherein the light splitter, the optical power instrument and the fixing clamp are respectively and uniformly distributed along the circumferential direction of the testing table, the light splitter, the optical power instrument, the fixing clamp and the fixing clamp are respectively connected to the base through mechanical arms, and the fixing clamp is used for fixing an incident light source; the camera is configured into at least three groups, wherein one group is positioned above the test bench, the other group is arranged opposite to the fixed clamp, and the other end is arranged opposite to the light splitter.
In one possible embodiment, the holding clamp is provided as a clamping jaw.
In a possible design, the objective table is provided with at least two groups of material boxes, the material boxes are provided with a plurality of limiting hole groups which are arranged in an array manner and used for placing optical devices, and each limiting hole group comprises a plurality of limiting holes.
In a possible design, the edge of the material box is provided with a limiting groove, and the object stage are both provided with limiting columns matched with the limiting groove, so that when the limiting columns are inserted into the limiting groove, the position of the material box can be kept.
In a possible design, the plant further comprises two sets of traction devices connected respectively to the epicyclic device and to the epicyclic device so as to be able to drive the latter to move along the track.
In one possible design, the traction means are configured as a cylinder, the drive shaft of which is connected to the epicyclic means; alternatively, the traction means is provided as a belt drive assembly or a chain drive assembly and is connected to the epicyclic means.
In this way, the optical device placed on the object stage can be automatically picked up and placed on the test table, so that the single optical device is detected by the testing device (spot test, channel test and light transmission performance test), the whole detection time is shortened, and the detection efficiency is improved. In addition, the equipment can realize the detection and turnover work of the optical device completely in an automatic testing mode, thereby effectively avoiding the defects of large error and unstable and inaccurate detection result in manual detection, reducing the influence on the optical device in an automatic turnover mode, and further playing a role in protecting the surface quality of the optical device to a certain extent.
In addition, in the process of testing the optical device, the optical device does not displace, and the three items of light transmission, channels and light spots of the optical device can be effectively tested on the test platform. Furthermore, whether the four emergent rays are parallel or not can be accurately evaluated, whether the position of the four optical wafers arranged on the optical device is wrong or not is judged, and the light energy loss and the wavelength deviation of emergent light are evaluated after the light passes through the wafers on the optical device. Because the position of the optical device cannot move in the test process, the displacement error can be avoided, and the accuracy and the effectiveness of the test result are ensured. Three kinds of test items can be carried out simultaneously, so that the waiting time can be saved, and the test efficiency is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic perspective view of an automatic testing apparatus for optical devices provided by the present invention at a first viewing angle;
fig. 2 is a schematic perspective view of the automatic testing apparatus for optical devices provided by the present invention at a second viewing angle;
FIG. 3 is a schematic view of the structure of the magazine;
fig. 4 is a schematic view of the structure of the sleeve in the adsorption module.
11-base, 12-track, 2-turnover device, 21-portal frame, 22-mounting seat, 23-driving piece, 24-adsorption component, 3-test table, 4-test device, 41-spectroscope, 42-optical power instrument, 43-camera, 44-fixing clamp, 5-objective table, 61-material box, 62-limiting cavity, 63-limiting groove and 7-position detection device.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. Specific structural and functional details disclosed herein are merely illustrative of example embodiments of the invention.
In accordance with the present disclosure, an optical device automatic test apparatus is provided, one embodiment of which is shown in fig. 1 to 4.
The technical concept of the automatic testing equipment for the optical devices is as follows: the disordered optical devices are placed into the material boxes of the object stage 5 one by one. At this time, the position detection device 7 (for example, a CCD camera) may perform image recognition on the optical device on the stage 5, and the controller may process the captured image of the optical device to recognize current position information of the optical device, so as to locate the position of the optical device. After receiving the position information of the optical device, the controller may send a command according to the current position information, so as to move the turnover device 2 and enable the suction assembly 24 on the turnover device to effectively pick up the optical device on the stage 5. Thereafter, the turnaround device 2 moves with the optics to a position opposite the test stand 3, and then causes the suction assembly 24 to release the optics to move the optics onto the test stand 3.
In this case, the testing device 4 can analyze and identify the position of the optical device on the testing table 3 and transmit the position information to the controller, so that the controller can issue a command to accurately set the position of the optical device at a calibrated position by adjusting the position of the optical device.
After the position correction of the optical device is completed, a light spot picture of the optical device is obtained through a camera (namely, a video camera described below), the obtained picture information is transmitted to the controller, and the controller analyzes and evaluates the picture, so that whether the light spot of the current optical device meets a preset standard or not is judged. Meanwhile, the channel wavelength information and the light transmission information of the optical device can be respectively tested, and the controller respectively analyzes and judges according to the received channel wavelength information and the light transmission information, so that the quality of the current optical device is evaluated. So far, the performance test of the optical device for light spots, light passing and channels is completed. The controller analyzes and processes the tested data according to a preset formula, so that the quality of the current optical device is judged, a worker can conveniently and reversely debug production parameters according to the fed-back result, the process quality of a product is favorably and effectively controlled, and the product quality of the optical device is indirectly improved.
After the optical device completes the test, the controller can send out an instruction, so that the turnover device can move to the position where the test bench is located, pick (adsorb) the tested optical device, then move along the track, and finally place the optical device on the objective table to complete the blanking work. In this case, the worker may remove the magazine from the stage in preparation for subsequent material transfers.
It should be noted that if three test items of the optical device do not meet the preset value range, the optical device is determined to be a defective product, and when the optical device is picked up, the turnover device moves the optical device into the corresponding magazine to distinguish the optical device from the defective product.
In the present disclosure, five cartridges are provided on the cartridges and classified into five types of a, B, C, D, and NG according to product quality grades, and the cartridges are arranged in sequence.
Specifically, the specific structure of the test device will be described in detail below.
As shown in fig. 1 to 4, the automatic testing apparatus for optical devices provided in this embodiment includes a base 11, which is provided with two sets of parallel rails 12; the testing device 4 is arranged on the base 11, the base 11 is also provided with a testing table 3 which is arranged opposite to the testing device 4, and the testing device 4 is used for detecting the optical device; the two groups of turnover devices 2 are arranged on two sides of the test board 3 respectively, the turnover devices 2 are movably connected to the track 12, and the turnover devices 2 are used for adsorbing and releasing materials; the object tables 5 are arranged in two groups and are respectively arranged between the turnover device 2 and the test device 4 in a one-to-one correspondence mode, and the turnover device 2 can pick up materials and turnover the materials between the object tables 5 and the test table 3; the position detection devices 7 are arranged into two groups and are connected to the turnover device 2 in a one-to-one correspondence manner so as to be used for detecting the current position information of the material on the objective table 5; and the controller is respectively in communication connection with the turnover device 2, the testing device 4, the adsorption component 24 and the position detection device 7 so as to control the turnover device 2 and the testing device 4 to execute corresponding actions according to the current position information of the material transmitted by the position detection device 7.
In this way, the optical device placed on the stage 5 can be automatically picked up and placed on the test stage 3, and thus the test device 4 can be used to test (spot test, channel test, and light transmission performance test) a single optical device, thereby shortening the overall test time and improving the test efficiency. In addition, the equipment can realize the detection and turnover work of the optical device completely in an automatic testing mode, thereby effectively avoiding the defects of large error and unstable and inaccurate detection result in manual detection, reducing the influence on the optical device in an automatic turnover mode, and further playing a role in protecting the surface quality of the optical device to a certain extent.
In addition, in the process of testing the optical device, the optical device does not displace, and the effective test of the light passing, the channel and the light spot of the optical device can be completed on the test platform. Furthermore, whether the four emergent rays are parallel or not can be accurately evaluated, whether the four optical wafers arranged on the optical device have wrong positions or not is judged, and the light energy loss and the wavelength deviation of emergent light are evaluated after the light passes through the wafers on the optical device. Because the position of the optical device cannot move in the test process, the displacement error can be avoided, and the accuracy and the effectiveness of the test result are ensured. Three kinds of test items can be carried out simultaneously, so that the waiting time can be saved, and the test efficiency is further improved.
In one possible design, the transfer device 2 comprises a gantry 21, a mounting seat 22, a driving part 23 and an adsorption component 24, wherein the gantry 21 is connected to the track 12 through a driving structure; the mounting base 22 is connected to the gantry 21, and the suction assembly 24 is connected to the mounting base 22 through a driving member 23 to move in a vertical direction by being pushed by the driving member 23.
The specific working process is as follows: first, the position detection device is brought close to the stage 5 and extracts the image information of the current optical device, and then the information is transmitted to the controller, and the controller recognizes and judges the image information according to a preset program or an analysis method, thereby obtaining the position information of the current optical device. Based on this position information, the controller commands the actuator to move, thereby causing the suction assembly 24 to suck the optical device from the stage 5 and then move toward the test stand 3. After moving to the preset position, the adsorption assembly 24 releases the optical device, and the optical device is placed on the test stand 3. Then, the portal frame resets, and the driving piece resets, and adsorption component resets to be ready for next material turnover work.
Specifically, the adsorption component 24 is configured as a CCD camera; the driving member 23 is disposed as any one of an air cylinder, a linear module, and a hydraulic cylinder.
In the present disclosure, the driving member 23 is provided as an air cylinder, whereby the suction member 24 is connected to the mount 22 so as to be movable up and down to approach or separate from the stage 5. In other embodiments, the suction assembly 24 may be coupled to the mounting base via any suitable linear adjustment, such as a linear module.
In one embodiment, the suction assembly 24 includes an air compressor, a sleeve and a suction nozzle made of silica gel or rubber material, one end of the sleeve is communicated with the air compressor, the other end of the sleeve is communicated with the suction nozzle, and the suction nozzle has an air hole facing the optical device, so that when the suction nozzle is attached to the optical device, a negative pressure can be generated to suck the optical device. And when the air compressor machine shut down, can release optics. Fig. 4 is a structure of an adsorption assembly.
In one embodiment, the testing device 4 includes an optical splitter 41, an optical power instrument 42, a camera 43 and a fixing clamp 44, the optical splitter 41, the optical power instrument 42 and the fixing clamp 44 are respectively and uniformly arranged along the circumferential direction of the testing table 3, the optical splitter 41, the optical power instrument 42, the fixing clamp 44 and the fixing clamp 44 are respectively connected to the base 11 through a mechanical arm, and the fixing clamp 44 is used for fixing an incident light source; the cameras 43 are arranged in at least three groups, one of which is located above the test bench 3, one of which is located opposite the holding fixture 44 and the other of which is located opposite the beam splitter 41. Therefore, different test items of the optical device can be completed on the test board 3, and because the position of the optical device does not move in the test process, the displacement error can be avoided, and the accuracy and the effectiveness of the test result are improved.
For the test setup, in this disclosure, the spot test scheme requires two cameras 43 for testing; the channel test scheme requires a camera 43 for testing; the clear test protocol is primarily tested by the optical power instrument 42. It should be noted that, regarding the composition and arrangement position of the testing device 4, a person skilled in the art may make routine arrangement or improvement under the technical concept provided by the present disclosure, which is only exemplary shown here.
It is understood that in the present disclosure, the number of each "group" can be flexibly configured by one skilled in the art according to the test environment. For example, 1 camera may be a group, 2 cameras may be a group, or 3 cameras may be a group.
In the present disclosure, the fixing clamp 44 is provided as a clamping jaw so as to clamp and release the incident light source. Of course, the fixture may be configured as other types of positioning tools or positioning fixtures, and those skilled in the art may flexibly configure the fixture according to the actual testing environment.
Specifically, the video camera 43 is provided as a CCD camera in the related art. Of course, the video camera may be configured as other types of industrial cameras or high-definition cameras, and those skilled in the art may flexibly arrange the video camera under the technical concept of the present disclosure.
In an embodiment, at least two sets of magazines 61 are disposed on the object stage 5 and the object stage 5, a plurality of rows of limiting cavities 62 for placing the optical device are disposed on the magazines 61, and each set of limiting cavities 62 includes a plurality of limiting cavities 62. So that multiple optical devices can be accommodated.
The matrix design is beneficial to effectively identifying the position of the optical device, and further beneficial to enabling the turnover device 2 to move according to the unit displacement (the distance between adjacent limiting holes) when the controller gives out the indication, so that the optical device can be accurately and effectively picked up.
In one embodiment, the edge of the magazine 61 is provided with a limiting groove 63, and the stage 5 is provided with a limiting post adapted to the limiting groove 63 so as to maintain the position of the magazine 61 when the limiting post is inserted into the limiting groove 63. Thus, the magazine 61 of the stopper hole 62 of another specification can be replaced according to the specification of the optical device. And simple structure, spacing convenient and reliable has better maneuverability.
In an embodiment provided by the present disclosure, the apparatus further includes two sets of traction devices, and the traction devices are respectively connected to the turnover device 2 to be able to drive the turnover device 2 to move along the track 12, thereby realizing the turnover of the optical device.
In particular, the traction means are provided as cylinders, the driving shaft of which is connected to the epicyclic means 2; alternatively, the traction means is provided as a belt drive assembly or chain drive assembly and is connected to the epicyclic means 2. Each set of traction devices may include two cylinders or a set of two cylinders. Therefore, the technical personnel in the field can flexibly set according to actual requirements.
Wherein, the structure and the working principle of the cylinder, the belt transmission component and the chain transmission component are all the prior art, and the technical conception of the disclosure can be obtained by conventional improvement of the technical conception of the present disclosure.
In an embodiment provided by the present disclosure, the position detection device 7 includes a camera, and in addition, the position detection device may further include at least one of a laser displacement sensor, a ranging sensor and a radar, so as to detect the position information of the current optical device in real time, and transmit the obtained information to the controller, so that the controller performs effective integration, analysis and judgment according to the received information, thereby sending corresponding instructions to the turnover device 2 and the testing device 4.
It should be noted that the above-mentioned "at least one" may be configured as any one of the ranging sensor, the laser displacement sensor and the radar, or may be configured as multiple detection mechanisms of the same type among the three, or may be configured and used in any suitable manner, and for this, a person skilled in the art may flexibly set the detection mechanism according to the application environment.
Specifically, in the present disclosure, the controller is configured as a central processor. While in other embodiments, the controller may also be configured as one of a digital signal processor, an application specific integrated circuit, or a field programmable gate array. Further, the controller may also be a network processor, other programmable logic device, discrete gate or transistor logic device, discrete hardware component. In this regard, those skilled in the art can flexibly configure the device according to the actual application environment.
Further, the turnaround device 2, the test device 4, the position detection device 7 and the controller may transmit data via various wireless transmission protocols known in the art, such as GPRS, wi-Fi, bluetooth, etc., so as to reduce the number of signal lines. Of course, wired transmission of data may also be achieved through a communication cable or the like, which is not limited by the present disclosure.
The present invention is not limited to the above-mentioned alternative embodiments, and various other products can be obtained by anyone under the teaching of the present invention. The above detailed description should not be taken as limiting the scope of the invention, which is defined in the following claims, and which can be used to interpret the claims.

Claims (10)

1. An optical device automatic test apparatus, comprising:
the base (11) is provided with two groups of parallel rails (12);
the testing device (4) is arranged on the base (11), the base (11) is further provided with a testing table (3) opposite to the testing device (4), and the testing device (4) is used for detecting an optical device;
the turnover devices (2) are arranged in two groups and are respectively arranged on two sides of the test board (3), the turnover devices (2) are movably connected to the track (12), and the turnover devices (2) are used for adsorbing and releasing materials;
the object carrying tables (5) are arranged in two groups and are respectively arranged between the transfer device (2) and the test device (4) in a one-to-one correspondence mode, and the transfer device (2) can pick up materials and transfer the materials between the object carrying tables (5) and the test table (3);
the position detection devices (7) are arranged into two groups and are connected to the turnover device (2) in a one-to-one correspondence mode so as to be used for detecting the current position information of the material on the objective table (5); and
and the controller is respectively in communication connection with the turnover device (2), the testing device (4) and the position detection device (7) so as to control the testing device (4) and the turnover device (2) to execute corresponding actions according to the current position information of the material transmitted by the position detection device (7).
2. The automatic optical device testing equipment according to claim 1, characterized in that said carousel (2) comprises a gantry (21), a mounting seat (22), a driving member (23) and an adsorption assembly (24), said gantry (21) being connected to said rail (12) by a driving structure; the mounting seat (22) is connected to the portal frame (21), and the adsorption component (24) is connected to the mounting seat (22) through the driving part (23) so as to move in the vertical direction under the pushing of the driving part (23).
3. The automatic optical device testing apparatus according to claim 2, wherein the driving member (23) is provided as a pneumatic cylinder, a hydraulic cylinder, or a linear module.
4. The automatic testing equipment of optical devices as claimed in claim 2, wherein the suction assembly (24) comprises an air compressor, a sleeve and a suction nozzle made of silica gel or rubber material, one end of the sleeve is communicated with the air compressor, the other end of the sleeve is communicated with the suction nozzle, and the suction nozzle is provided with an air hole facing the optical devices, so that when the suction nozzle is attached to the optical devices, negative pressure can be generated to suck the optical devices.
5. The automatic optical device testing equipment according to claim 1, wherein the testing device (4) comprises a light splitter (41), an optical power instrument (42), a camera (43) and a fixing clamp (44), the light splitter (41), the optical power instrument (42) and the fixing clamp (44) are uniformly arranged along the circumferential direction of the testing table (3), the light splitter (41), the optical power instrument (42), the fixing clamp (44) and the fixing clamp (44) are respectively connected to the base (11) through mechanical arms, and the fixing clamp (44) is used for fixing an incident light source; the cameras (43) are arranged in at least three groups, one group being located above the test table (3), one group being located opposite the fixture (44) and the other group being located opposite the beam splitter (41).
6. The automatic optical device testing apparatus according to claim 5, characterized in that said holding clamps (44) are provided as clamping jaws.
7. The automatic testing equipment for the optical devices according to claim 1, wherein at least two sets of magazines (61) are arranged on the object stage (5) and the object stage (5), a plurality of rows of limiting cavities (62) arranged in an array and used for placing the optical devices are arranged on the magazines (61), and each set of limiting cavities (62) comprises a plurality of limiting cavities (62).
8. The automatic optical device testing equipment according to claim 7, wherein a limiting groove (63) is formed in the edge of the magazine (61), and a limiting column adapted to the limiting groove (63) is formed on the stage (5) so as to maintain the position of the magazine (61) when the limiting column is inserted into the limiting groove (63).
9. Automatic testing equipment of optical devices according to any one of claims 1 to 8, characterized in that it further comprises two sets of traction means connected respectively to said turnaround means (2) and to said turnaround means (2) so as to be able to move said turnaround means (2) and said turnaround means (2) along said track (12).
10. The automatic testing equipment of optical devices according to claim 9, characterized in that said traction means are provided as pneumatic cylinders, the driving shafts of which are connected to said epicyclic means (2); alternatively, the traction means are arranged as belt or chain drive assemblies and are connected to the epicyclic means (2).
CN202222734562.1U 2022-10-14 2022-10-14 Automatic test equipment for optical device Active CN218470146U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222734562.1U CN218470146U (en) 2022-10-14 2022-10-14 Automatic test equipment for optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222734562.1U CN218470146U (en) 2022-10-14 2022-10-14 Automatic test equipment for optical device

Publications (1)

Publication Number Publication Date
CN218470146U true CN218470146U (en) 2023-02-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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