CN218465996U

CN218465996U - Graphite crucible

Info

Publication number: CN218465996U
Application number: CN202222915746.8U
Authority: CN
Inventors: 黄治成; 郭晨光; 尹士平
Original assignee: Anhui Guangzhi Technology Co Ltd
Current assignee: Anhui Guangzhi Technology Co Ltd
Priority date: 2022-11-03
Filing date: 2022-11-03
Publication date: 2023-02-10
Anticipated expiration: 2032-11-03

Abstract

The utility model belongs to the technical field of single crystal growing furnace, a graphite crucible is disclosed. Pot and connecting rod in pot and the graphite in outer pot of graphite, graphite are open-top, in the pot through the connecting rod suspension in the graphite outer pot, just in the graphite between pot outer wall and the graphite outer pot inner wall leave the clearance, pot bottom sets up the hourglass material hole that communicates with the graphite outer pot in the graphite. The utility model discloses a graphite crucible simple structure in the single crystal growing furnace use, utilizes this graphite crucible, can effectively get rid of crystal growth initial stage fuse-element surface dross, shortens crystal growth cycle greatly, reduces energy resource consumption, practices thrift the cost.

Description

Graphite crucible

Technical Field

The utility model belongs to the technical field of single crystal growing furnace, a graphite crucible is related to, more specifically relates to a graphite crucible is used to single crystal growing furnace.

Background

The single crystal furnace is main equipment for producing the germanium single crystal by adopting a Czochralski method, wherein a small part of scum can float on the surface of the germanium melted in the initial growth stage of the single crystal during the production process of the single crystal germanium, and as the pot bottom materials are left in the growth stage of the single crystal germanium, more and more scum is accumulated on the surface of a melt in the initial growth stage of the crystal when the furnace charging times are increased, so that the crystal change phenomenon is brought to the initial growth stage of the crystal, and the crystal forming rate is reduced.

In order to remove dross on the surface of a melt at the initial stage of crystal growth, the prior art generally uses the traditional dirty material sticking process to process, a part of dross is calcined and volatilized by adopting a high-temperature material burning mode in the production of germanium crystals, and then the dross is stuck to the shoulder of the dirty material by adopting a mode of low crystal rotation, crucible rotation, low pulling speed and large shouldering angle.

SUMMERY OF THE UTILITY MODEL

To the above-mentioned problem that exists among the prior art, the utility model aims to provide a be applicable to single crystal growing furnace, simple structure graphite crucible, in the single crystal growing furnace use, utilize this graphite crucible, can effectively get rid of crystal growth initial stage fuse-element surface dross, shorten crystal growth cycle greatly, reduce energy resource consumption, practice thrift the cost.

In order to achieve the above object, the utility model adopts the following technical scheme:

the utility model provides a graphite crucible, includes pot and connecting rod in outer pot of graphite, the graphite, and the pot is open-top in outer pot of graphite and the graphite, the pot passes through the connecting rod suspension in the outer pot of graphite, just leave the clearance between pot outer wall and the outer pot inner wall of graphite in the graphite, pot bottom portion sets up the hourglass material hole with the outer pot intercommunication of graphite in the graphite.

The utility model discloses creatively designs graphite crucible, in the inside thermal field of germanium single crystal stove, the raw materials (zone-melting germanium spindle) of production germanium single crystal hold in pot in graphite, and wherein the outer crucible of graphite is held in the palm by the crucible and is supported, and the crucible is connected through the outer crucible of connecting rod and graphite in the graphite, and it has the hole of leaking material to open bottom the pot in graphite to realize that germanium flows in pot and the outer crucible of graphite in graphite under the molten state.

Furthermore, the outer wall of the graphite inner pot is circumferentially and uniformly provided with stabilizing blocks. The scratch between the graphite inner pot and the graphite outer pot in the feeding process is reduced, and the effects of stability, balance and collision prevention are achieved.

Further preferably, the stabilizing block is of a semi-cylindrical structure.

Further, the material leaking hole is formed in the center of the bottom of the graphite inner pot.

Furthermore, the material leaking hole is an inclined hole.

Further, the connecting rod is a molybdenum connecting rod.

Furthermore, the connecting rods are of an L-shaped structure, at least two connecting rods are arranged, one end of each connecting rod is fixed on the graphite inner pot, and the other end of each connecting rod is arranged on the edge of the opening of the graphite outer pot.

Further preferably, the connecting rod is fixed with the graphite inner pot through bolts, one end of the connecting rod is provided with a flange, a through hole for the bolts to pass through is formed in the flange, and a threaded hole opposite to the through hole is formed in the opening edge of the graphite inner pot; the bolt penetrates through the through hole to be matched with the threaded hole.

Furthermore, a counterweight hole and a counterweight matched with the counterweight hole are arranged on the opening or the side wall of the graphite inner pot, so that the graphite crucible is counterweighted, and the feeding depth of the graphite inner crucible is controlled.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses a graphite crucible simple structure, in the single crystal growing furnace use, utilize this graphite crucible, can effectively get rid of crystal growth initial stage fuse-element surface dross, shorten crystal growth cycle greatly, reduce energy resource consumption, practice thrift the cost.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of a graphite crucible;

FIG. 2 is a schematic side view of the graphite inner pot;

FIG. 3 is a schematic top view of the graphite inner pot;

FIG. 4 is a schematic top view of the connecting rod;

FIG. 5 is a schematic top view of the connecting rod;

wherein: 1-graphite outer pot, 2-graphite inner pot, 3-connecting rod, 4-threaded hole, 5-material leakage hole, 6-stabilizing block, 7-through hole and 8-counterweight hole.

Detailed Description

To facilitate understanding of the present invention, the present invention will be described more fully and specifically with reference to the accompanying drawings and preferred embodiments, but the scope of the present invention is not limited to the specific embodiments described below.

Unless otherwise defined, all terms of art used hereinafter have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the present invention.

Unless otherwise specifically stated, various raw materials, reagents, instruments, equipment and the like used in the present invention are commercially available or can be prepared by an existing method.

Example 1

As shown in 1~5, this embodiment provides a graphite crucible, pot 2 and connecting rod 3 in pot 1, graphite outside including graphite, pot 2 is open-top in pot 1 and the graphite, pot 2 is in the graphite through connecting rod 3 suspension in pot 1 outside the graphite, and leaves the clearance between pot 2 outer wall and the graphite outer pot 1 inner wall in the graphite, pot 2 bottom sets up the hole of leaking 5 that communicates with pot 1 outside the graphite in the graphite.

In this embodiment, the connecting rod 3 is a molybdenum connecting rod having an L-shaped structure. 3 connecting rods 3 are arranged, one end of each connecting rod 3 is provided with a flange, a through hole 7 for a bolt to pass through is arranged on each flange, and a threaded hole 4 opposite to the through hole 7 is arranged at the opening edge of the graphite inner pot 2; the bolt passes through the through hole 7 and is matched with the threaded hole 4, and the connecting rod 3 and the graphite inner pot 2 are fixed. The other end of the connecting rod 3 is arranged on the opening edge of the graphite outer pot 1.

In this embodiment, for reducing and acutely rocking producing with crucible collision in-process, improve hanging and increase rotatory stationarity of in-process, guarantee fuse-element stable surface, provide the guarantee for semiconductor material stable growth, 2 outer walls circumference of pot evenly set up 8 semicylindrical structure's in the graphite piece 6 that stabilizes. The material leaking hole 5 is an inclined hole with a certain inclination angle and arranged at the center of the bottom of the graphite inner pot 2, so that the melt can freely enter and exit through lifting the crucible position in a melting state.

In this embodiment, the opening of pot 2 evenly sets up 4 weight ports 8 and the balancing weight (not shown) with the balancing weight of 8 looks adaptations of weight port in the graphite, to the counter weight of carrying on of graphite crucible, control 2 feeding depths of crucible in the graphite.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims

1. The utility model provides a graphite crucible, its characterized in that, graphite crucible includes pot and connecting rod in the outer pot of graphite, and pot is open-top in the outer pot of graphite and the graphite, pot in the graphite through the connecting rod suspension in the outer pot of graphite, just leave the clearance between pot outer wall and the outer pot inner wall of graphite in the graphite, pot bottom sets up the hole that leaks that communicates with the outer pot of graphite in the graphite.

2. The graphite crucible as claimed in claim 1, wherein the graphite inner pot outer wall is provided with stabilizing blocks uniformly in the circumferential direction.

3. The graphite crucible of claim 2, wherein the stabilizing blocks are of a semi-cylindrical configuration.

4. The graphite crucible as set forth in claim 1, wherein the leakage hole is provided in the center of the bottom of the graphite inner pot.

5. The graphite crucible of claim 1, wherein the weep hole is an inclined hole.

6. The graphite crucible as claimed in claim 1, wherein the connecting rods have an L-shaped structure, at least two connecting rods are provided, one end of the connecting rod is fixed on the graphite inner pot, and the other end of the connecting rod is placed on the opening edge of the graphite outer pot.

7. The graphite crucible as claimed in claim 6, wherein the connecting rod is fixed with the graphite inner pot by a bolt, one end of the connecting rod is provided with a flange, the flange is provided with a through hole for the bolt to pass through, and the edge of the opening of the graphite inner pot is provided with a threaded hole opposite to the through hole; the bolt penetrates through the through hole to be matched with the threaded hole.

8. The graphite crucible as claimed in claim 1, wherein the opening or the sidewall of the graphite inner pot is provided with a weight hole and a weight block adapted to the weight hole.