CN218454219U

CN218454219U - Tubular pecvd equipment fire door electrode structure

Info

Publication number: CN218454219U
Application number: CN202222196360.6U
Authority: CN
Inventors: 蒋国龙
Original assignee: Trina Solar Suqian Photoelectric Co ltd
Current assignee: Trina Solar Suqian Photoelectric Co ltd
Priority date: 2022-08-19
Filing date: 2022-08-19
Publication date: 2023-02-07
Anticipated expiration: 2032-08-19

Abstract

The utility model discloses a tubular pecvd equipment fire door electrode structure, including arc electrode piece body and No. two threaded connection holes, arc electrode piece body surface is provided with a threaded connection hole, a threaded connection hole upper portion is provided with a recess, arc electrode piece body surface is provided with No. two threaded connection holes, no. two threaded connection hole upper portions are provided with No. two recesses. Through adopting stainless steel to improve the bulk strength of arc electrode piece body with arc electrode piece body, avoid arc electrode piece body by wearing and tearing in long-term use through the intensity that promotes arc electrode piece body, cause the condition of present not hard up slope, lead to electrode contact failure, equipment operation unstability, cause production product quality to descend, through threaded connection hole No. one.

Description

Tubular pecvd equipment fire door electrode structure

Technical Field

The utility model belongs to the technical field of tubular pecvd equipment fire door technique and specifically relates to a tubular pecvd equipment fire door electrode structure.

Background

The electrode is used as one of the two ends of conducting medium (solid, gas, vacuum or electrolyte solution) for inputting or outputting current, and the electrode is called anode or cathode for inputting current and cathode or cathode for discharging current.

Traditional electrode member adopts graphite material more, and the structure is single, graphite piece slope leads to reasons such as furnace mouth seat foot abnormal discharge or high frequency to cause local arcing, easily produce dust pollution in the pipe, it is bad to lead to the fact EL such as numb black point, dark piece indirectly, graphite piece leads to electrode piece and the unable normal discharge of boat foot in case the slope, must cool down the adjustment, the adjustment electrode needs 4H work load at least very big, seriously influence the productivity, graphite electrode piece easily wears out or the surface easily appears scorching form and influences the current stability, lead to the product membrane look unusual. Therefore, the furnace mouth electrode structure of the tubular pecvd equipment is provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a tubular pecvd equipment furnace mouth electrode structure in this embodiment, a graphite material is adopted for traditional electrode member is many among the solution prior art, and single structure, graphite piece slope leads to reasons such as furnace mouth seat foot discharge abnormity or high frequency to cause local arcing, intraductal easy dust pollution that produces, lead to the fact numb black point indirectly, EL such as dark piece is bad, graphite piece in case the slope leads to electrode piece and the unable normal discharge of boat foot, must cool down the adjustment, the adjustment electrode needs 4H work load very big at least, seriously influence the productivity, graphite electrode piece is easy wearing and tearing or the surface scorching form influence current stability easily appears, lead to the unusual problem of product membrane color.

According to the utility model discloses an aspect provides a tubular pecvd equipment fire door electrode structure, including arc electrode piece body and No. two threaded connection holes, arc electrode piece body surface is provided with a threaded connection hole, a threaded connection hole upper portion is provided with a recess, arc electrode piece body surface is provided with No. two threaded connection holes, no. two threaded connection hole upper portions are provided with No. two recesses.

Furthermore, the upper part of the arc-shaped electrode block body is provided with two first threaded connecting holes, and the two first threaded connecting holes are symmetrically distributed on the surface of the upper part of the arc-shaped electrode block body.

Furthermore, a threaded connection hole diameter is 5.5mm, arc electrode block body surface is provided with two recesses No. one, two the recess is located a threaded connection hole upper portion respectively.

Furthermore, the arc electrode block body adopts stainless steel material, and arc electrode block body one end is the arc.

Furthermore, four second threaded connecting holes are formed in the surface of the arc-shaped electrode block body and are symmetrically distributed on two sides of the arc-shaped electrode block body.

Furthermore, a threaded connection hole diameter is located 6.5mm, arc electrode block body surface is provided with four No. two recesses, four No. two recesses are located No. two threaded connection hole upper portions respectively.

Through the above-mentioned embodiment of the utility model, cross the arc design on arc electrode piece body surface, improve arc electrode piece body and ceramic support pole contact surface, improve the stability of holistic installation simultaneously, through the bulk strength that adopts stainless steel material improvement arc electrode piece body with arc electrode piece body, avoid arc electrode piece body worn and torn in long-term use through the intensity that promotes arc electrode piece body, cause the condition of the slope that becomes flexible now, lead to the electrode contact failure, equipment operation is unstable, cause the production product quality to descend, through a threaded connection hole.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.

Fig. 1 is a schematic overall three-dimensional structure of an embodiment of the present invention;

fig. 2 is a schematic overall side view of an embodiment of the present invention;

fig. 3 is a schematic diagram of the overall internal structure of an embodiment of the present invention.

In the figure: 1. an arc-shaped electrode block body; 2. a first threaded connection hole; 3. a first groove; 4. a second threaded connection hole; 5. groove two.

Detailed Description

In order to make the technical solution of the present invention better understood, the technical solution of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged under appropriate circumstances for purposes of describing the embodiments of the invention herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In the present invention, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are used primarily to better describe the invention and its embodiments, and are not intended to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in the present invention can be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "mounted," "disposed," "provided," "connected," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

It should be noted that, in the case of no conflict, the embodiments and features of the embodiments of the present invention may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Referring to fig. 1-3, a tubular pecvd device furnace mouth electrode structure comprises an arc electrode block body 1 and a second threaded connection hole 4, wherein the surface of the arc electrode block body 1 is provided with the first threaded connection hole 2, the upper portion of the first threaded connection hole 2 is provided with a first groove 3, the surface of the arc electrode block body 1 is provided with the second threaded connection hole 4, and the upper portion of the second threaded connection hole 4 is provided with a second groove 5.

1 upper portion of arc electrode piece body is provided with two threaded connection hole 2, two 2 symmetric distribution of threaded connection hole is connected with two outside bolts through two threaded connection hole 2 on the surface of 1 upper portion of arc electrode piece body, improves the stability of installation, 2 diameters of threaded connection hole are 5.5mm, 1 surface of arc electrode piece body is provided with two recess 3, two recess 3 is located 2 upper portions of threaded connection hole respectively, arc electrode piece body 1 adopts stainless steel, and 1 one end of arc electrode piece body is the arc, 1 surface of arc electrode piece body is provided with No. two threaded connection hole 4, four No. two threaded connection hole 4 symmetric distribution is in 1 both sides of arc electrode piece body, is connected through four No. two threaded connection hole 4 and four outside bolts and improves the installation stability, no. one threaded connection hole 2 diameter is located 6.5mm, 1 surface of arc electrode piece body is provided with No. four No. two recess 5, four No. two recess 5 is located No. two threaded connection hole 4 upper portions respectively.

The utility model discloses when using, respectively with threaded connection hole 2 and No. two threaded connection hole 4 threaded connection through the bolt, the while bolt is connected with outside ceramic bracing piece, install arc electrode piece body 1 on ceramic bracing piece surface, through the design of a recess 3 on a threaded connection hole 2 surface, make bolt embedding arc electrode piece body 1 surface, through the design of No. two recesses 5 on No. two threaded connection hole 4 surfaces on the same reason, make bolt embedding arc electrode piece body 1 surface, avoid spiral shell arch and external contact, improve stability, through the arc design on arc electrode piece body 1 surface, improve arc electrode piece body 1 and ceramic bracing piece contact surface, improve the stability of holistic installation simultaneously, through adopting stainless steel material with arc electrode piece body 1 to improve arc electrode piece body 1's bulk strength, avoid arc electrode piece body 1 to be worn and torn in long-term use through the intensity that promotes arc electrode piece body 1, cause the condition of not hard up slope now, lead to the electrode contact badly, equipment operation is unstable, cause production product quality to descend, through threaded connection hole 2.

The utility model discloses an useful part lies in:

1. the utility model discloses have the installation measure, through the bolt respectively with threaded connection hole and No. two threaded connection hole threaded connection, the bolt is connected with outside ceramic bracing piece simultaneously, install arc electrode block body on ceramic bracing piece surface, through the design of the recess No. one on a threaded connection hole surface, make the bolt imbed arc electrode block body surface, through the design of the recess No. two on No. two threaded connection hole surfaces, make the bolt imbed arc electrode block body surface, avoid the spiral shell arch to contact with the outside, improve stability;

2. the utility model discloses rational in infrastructure, through the arc design on arc electrode piece body surface, improve arc electrode piece body and ceramic support pole contact surface, improve the stability of holistic installation simultaneously, through the bulk strength that adopts stainless steel material improvement arc electrode piece body with arc electrode piece body, intensity through promoting arc electrode piece body is avoided being worn and torn in long-term use arc electrode piece body, cause the condition of the present not hard up slope, lead to the electrode contact failure, equipment operation is unstable, cause the production product quality to descend, through a threaded connection hole.

It is well within the skill of those in the art to implement, without undue experimentation, the present invention does not relate to software and process improvements, as related to circuits and electronic components and modules.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a tubular pecvd equipment fire door electrode structure which characterized in that: including arc electrode block body (1) and No. two threaded connection holes (4), arc electrode block body (1) surface is provided with a threaded connection hole (2), a threaded connection hole (2) upper portion is provided with recess (3), arc electrode block body (1) surface is provided with No. two threaded connection holes (4), no. two threaded connection hole (4) upper portion is provided with No. two recess (5).

2. The tubular pecvd apparatus furnace mouth electrode structure of claim 1, wherein: the arc-shaped electrode block is characterized in that two first threaded connecting holes (2) are formed in the upper portion of the arc-shaped electrode block body (1), and the first threaded connecting holes (2) are symmetrically distributed on the surface of the upper portion of the arc-shaped electrode block body (1).

3. The tubular pecvd apparatus furnace mouth electrode structure of claim 1, wherein: the diameter of the first threaded connecting hole (2) is 5.5mm, two grooves (3) are formed in the surface of the arc-shaped electrode block body (1), and the grooves (3) are located in the upper portion of the first threaded connecting hole (2) respectively.

4. The tubular pecvd apparatus furnace mouth electrode structure of claim 1, wherein: the arc-shaped electrode block body (1) is made of stainless steel, and one end of the arc-shaped electrode block body (1) is arc-shaped.

5. The tubular pecvd apparatus furnace mouth electrode structure of claim 1, wherein: the surface of the arc-shaped electrode block body (1) is provided with four second threaded connecting holes (4), and the four second threaded connecting holes (4) are symmetrically distributed on two sides of the arc-shaped electrode block body (1).

6. The tubular pecvd device furnace mouth electrode structure according to claim 1, wherein: the diameter of the first threaded connecting hole (2) is 6.5mm, four grooves (5) are formed in the surface of the arc-shaped electrode block body (1), and the grooves (5) are located in the upper portions of the second threaded connecting holes (4) respectively.