CN218450649U - Plasma ceramic insulating connecting piece - Google Patents
Plasma ceramic insulating connecting piece Download PDFInfo
- Publication number
- CN218450649U CN218450649U CN202222124391.0U CN202222124391U CN218450649U CN 218450649 U CN218450649 U CN 218450649U CN 202222124391 U CN202222124391 U CN 202222124391U CN 218450649 U CN218450649 U CN 218450649U
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- post
- stopper
- screw thread
- insulating
- electrode connecting
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Abstract
The utility model relates to a plasma surface treatment technical field indicates a plasma ceramic insulating connecting piece very much, including ceramic insulation, electrode connecting post mounting and insulator nut, ceramic insulation includes first stopper and first screw thread post, the diameter of first stopper is greater than the diameter of first screw thread post, first screw thread post left end with first stopper integrated into one piece, ceramic insulation runs through along first screw thread post axle center direction first stopper and first screw thread post are equipped with the through-hole, the insulator nut with first screw thread post right-hand member threaded connection, the left end and the electrode connection of electrode connecting post, the right-hand member passes the through-hole with electrode connecting post mounting fixed connection, the electrode connecting post with through-hole inside wall zonulae occludens. The utility model discloses high temperature resistant difficult being burnt out and puncturing, the leakproofness is good, simple structure is convenient for install moreover.
Description
Technical Field
The utility model relates to a plasma surface treatment technical field indicates a plasma ceramic insulation connecting piece very much.
Background
Vacuum plasma treatment facility generally is equipped with high frequency generator and vacuum plasma cylinder body, the high frequency generator output is connected through the electrode connecting piece that has insulating casing with vacuum plasma cylinder body, generally can adopt the insulating connecting piece of teflon among the prior art, along with high frequency generator output power is higher and higher, insulating casing is burnt out easily, burn through, during the assembly use, the screw thread wearing and tearing that the dismouting all can lead to teflon at every turn of insulating connecting piece of teflon, lead to the insulating part gas tightness to descend, reach the effect of stable pressurize.
Accordingly, there is a need for improvements and improvements in the art that address the above-mentioned deficiencies and drawbacks.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to the defect of above-mentioned prior art with not enough, provide a simple structure, high temperature resistant is difficult for being burnt out and punctures, the ceramic-insulated connecting piece that the leakproofness is good moreover.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a plasma ceramic insulating connecting piece, including ceramic insulation, electrode connecting post mounting and insulator nut, ceramic insulation includes first stopper and first screw thread post, the diameter of first stopper is greater than the diameter of first screw thread post, first screw thread post left end with first stopper integrated into one piece, ceramic insulation runs through along first screw thread post axle center direction first stopper and first screw thread post are equipped with the through-hole, the insulator nut with first screw thread post right-hand member threaded connection, the left end and the electrode connection of electrode connecting post, the right-hand member passes the through-hole with electrode connecting post mounting fixed connection, the electrode connecting post with through-hole inside wall zonulae occludens.
According to the scheme, one end, close to the first limiting block, of the first threaded column is provided with the insulating part sealing ring.
According to the scheme, an annular groove is formed in one side face, opposite to the first limiting block, of the insulating part nut, and an insulating part nut sealing ring is arranged in the groove.
According to above scheme, the electrode connecting column includes second stopper and second screw thread post, second screw thread post left end with second stopper integrated into one piece, second stopper diameter is greater than the through-hole diameter, electrode connecting column mounting with second screw thread post right-hand member threaded connection.
According to the scheme, an electrode connecting sealing ring is arranged between the second limiting block and the first limiting block.
According to the scheme, the left side of the electrode connecting column is provided with the columnar groove, and the columnar groove is used for installing the electrode.
According to the scheme, the electrode connecting column is of a screw structure.
According to the scheme, the electrode connecting column fixing part is of a nut structure.
The utility model discloses a ceramic insulator is difficult to be burnt out and punctures, and will be strong than traditional teflon insulator rigidity moreover, and first stopper, first screw post and nut cooperation use can firmly fix ceramic insulation connecting piece in the mounting hole under the prerequisite that the rigidity satisfies, the electrode connecting post is closely installed in ceramic insulator, has solved the electrically conductive leakproofness among the vacuum environment.
Drawings
Fig. 1 is a schematic structural view of the whole of the present invention;
fig. 2 is a schematic sectional structure of the present invention.
In the figure: 1. a ceramic insulator; 2. an electrode connection post; 3. an electrode connection post fixing member; 4. an insulator nut; 5. an insulator seal ring; 6. an insulator nut seal ring; 7. the electrode is connected with the sealing ring.
Detailed Description
The technical solution of the present invention will be described below with reference to the accompanying drawings and examples.
The utility model relates to a plasma ceramic insulating connecting piece, which is used for connecting the output end of a high-frequency generator and a vacuum plasma cylinder body and comprises a ceramic insulating piece 1, an electrode connecting post 2, an electrode connecting post fixing piece 3 and an insulating piece nut 4, wherein the ceramic insulating piece 1 comprises a first limiting block and a first threaded post, the diameter of the first limiting block is larger than that of the first threaded post, the left end of the first threaded post is integrally formed with the first limiting block, the ceramic insulating piece 1 penetrates through the first limiting block and the first threaded post along the axial direction of the first threaded post, the insulating piece nut 4 is in threaded connection with the right end of the first threaded post, the left end of the electrode connecting post 2 is connected with an electrode, and the right end penetrates through the through hole to be fixedly connected with the electrode connecting post fixing piece 3, the electrode connecting column 2 is tightly connected with the inner side wall of the through hole, preferably, the first limiting block is of a cylindrical structure, when the electrode connecting column is installed, the first threaded column penetrates into the installation hole, the first limiting block is abutted against the outer side wall of the vacuum plasma cylinder body, the insulating piece nut 4 is screwed in from the right end of the first threaded column and abutted against the inner side wall of the vacuum plasma cylinder body, the ceramic insulating piece 1 is not easy to burn out and puncture, the rigidity of the electrode connecting column is higher than that of the traditional Teflon insulating piece, the ceramic insulating connecting piece can be firmly fixed in the installation hole by matching the first limiting block, the first threaded column and the insulating piece nut 4, in addition, the connecting piece of the utility model can be suitable for installation holes with different thicknesses, the ceramic insulating piece can be locked by only adjusting the position of the insulating piece nut 4, the electrode connecting column 2 is tightly installed in the ceramic insulating piece 4, the conductive sealing performance in a vacuum environment can be well solved.
One end of the first threaded column, which is close to the first limiting block, is provided with an insulating part sealing ring 5, so that the tightness between the first limiting block and the mounting hole is effectively improved.
The side that insulating part nut 4 with first stopper is relative is equipped with the annular groove, be equipped with insulating part nut sealing washer 6 in the recess, insulating part nut sealing washer 6 with vacuum plasma jar inside wall closely offsets, makes ceramic insulating part 4 installation more firm, can also increase vacuum plasma jar's gas tightness.
The second stopper with be equipped with electrode connection sealing washer 7 between the first stopper, adopt the setting like this, improvement electrode connection post 2 that can be further and ceramic insulator 1's leakproofness.
The left side of the electrode connecting column 2 is provided with a strip-shaped groove, and the strip-shaped groove is used for installing electrodes, so that the electrodes are convenient to install.
The electrode connecting column 2 is of a screw structure, the electrode connecting column fixing part 3 is of a nut structure, and the electrode connecting column fixing part is simple and rapid to install and firm in overall structure.
When the utility model is installed, firstly, the electrode connecting sealing ring 7 is placed at the position, close to the second limiting block, of the second threaded column of the electrode connecting column 2, then the second threaded column is penetrated into the through hole of the ceramic insulating part 1, and then the electrode connecting column fixing part 3 is screwed into the second threaded column and locked; and secondly, placing the sealing ring 5 of the insulating part to a corresponding position, then placing the ceramic insulating part 1 provided with the electrode connecting column 2 into a mounting hole of a vacuum plasma cylinder, and finally screwing the insulating part nut 4 provided with the nut sealing ring 6 of the edge part into the first threaded column of the ceramic insulating part 1 and locking.
The utility model discloses simple structure is firm, simple to operate, and the leakproofness is good, is difficult for being burnt out and punctures.
The above is only the preferred embodiment of the present invention, so all the equivalent changes or modifications made by the structure, features and principles in accordance with the claims of the present invention are included in the claims of the present invention.
Claims (8)
1. The utility model provides a plasma ceramic insulating connecting piece, its characterized in that, includes ceramic insulation spare (1), electrode connecting post (2), electrode connecting post mounting (3) and insulating part nut (4), ceramic insulation spare (1) includes first stopper and first screw thread post, the diameter of first stopper is greater than the diameter of first screw thread post, first screw thread post left end with first stopper integrated into one piece, ceramic insulation spare (1) runs through along first screw thread post axle center direction first stopper and first screw thread post are equipped with the through-hole, insulating part nut (4) with first screw thread post right-hand member threaded connection, the left end and the electrode connection of electrode connecting post (2), the right-hand member passes the through-hole with electrode connecting post mounting (3) fixed connection, electrode connecting post (2) with through-hole inside wall zonulae occludens.
2. The insulating connecting piece of plasma ceramics according to claim 1, characterized in that the end of the first threaded column near the first stopper is provided with an insulating piece sealing ring (5).
3. The plasma ceramic insulating connecting piece according to claim 1, wherein an annular groove is formed in a side surface of the insulating piece nut (4) opposite to the first limiting block, and an insulating piece nut sealing ring (6) is arranged in the groove.
4. The insulating connecting piece of plasma ceramic of claim 1, characterized in that, the electrode connecting column (2) includes a second stopper and a second threaded column, the second threaded column left end with the second stopper integrated into one piece, the second stopper diameter is greater than the through-hole diameter, the electrode connecting column mounting (3) and the second threaded column right end threaded connection.
5. The plasma ceramic insulating connecting piece according to claim 4, wherein an electrode connecting seal ring (7) is arranged between the second limiting block and the first limiting block.
6. The plasma ceramic insulating connecting piece according to claim 4, characterized in that the left side of the electrode connecting column (2) is provided with a cylindrical groove for mounting an electrode.
7. The plasmatron insulating connection piece according to claim 4, characterized in that the electrode connection post (2) is provided in a screw structure.
8. The plasmonic ceramic insulating connection member of claim 4, wherein the electrode connection post fixture (3) is of a nut structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222124391.0U CN218450649U (en) | 2022-08-12 | 2022-08-12 | Plasma ceramic insulating connecting piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222124391.0U CN218450649U (en) | 2022-08-12 | 2022-08-12 | Plasma ceramic insulating connecting piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218450649U true CN218450649U (en) | 2023-02-03 |
Family
ID=85093463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222124391.0U Active CN218450649U (en) | 2022-08-12 | 2022-08-12 | Plasma ceramic insulating connecting piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218450649U (en) |
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2022
- 2022-08-12 CN CN202222124391.0U patent/CN218450649U/en active Active
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