CN218382449U

CN218382449U - Detection platform with double-sided wafer detection microscope

Info

Publication number: CN218382449U
Application number: CN202222735929.1U
Authority: CN
Inventors: 肖体春; 张作霖; 洪苑辉; 肖洁; 陈树杰
Original assignee: Shenzhen Sendongbao Technology Co ltd
Current assignee: Shenzhen Sendongbao Technology Co ltd
Priority date: 2022-10-17
Filing date: 2022-10-17
Publication date: 2023-01-24
Anticipated expiration: 2032-10-17

Abstract

The utility model relates to a test table with two-sided wafer inspection microscope, including support body, microscope main part, alignment jig and flexible swivel mount, whole device sets up in the frame, the alignment jig includes L shape connecting plate, first adjusting part and second adjusting part, first adjusting part is fixed to be set up on L shape connecting plate, first adjusting part includes the lantern ring piece, lantern ring piece cover is established microscope main part week side and fixed the setting is in on the first adjusting part, flexible swivel mount includes roating seat, expansion bracket and slide bar, the slide bar slides and sets up on the expansion bracket, the one end of expansion bracket is rotated and is set up on the swivel mount, the other end of expansion bracket is fixed to be set up on the second adjusting part, the support body includes roof-rack, support frame and chassis, the chassis with the roof-rack passes through the support frame is fixed from top to bottom and is set up, the roof-rack fretwork. The wafer detection device has the effect that the upper surface and the lower surface of the wafer can be detected simultaneously.

Description

Detection platform with double-sided wafer detection microscope

Technical Field

The application relates to the field of microscopes, in particular to a detection platform with a double-sided wafer detection microscope.

Background

The wafer inspection microscope is an apparatus for inspecting the surface defects of a wafer, can find out the problems on the surface of the wafer, and is an important inspection tool.

At present, in conventional wafer surface defect detection, a wafer detection microscope is arranged above a wafer, the wafer is placed on a bottom frame at the bottom of a detection platform for detection, the surface defect detection is firstly carried out on the upper surface of the wafer by using the microscope, then the wafer is turned over and then the surface defect detection is carried out on the lower surface of the wafer by using the microscope.

Aiming at the related technology, the defects of separated detection of the upper surface and the lower surface of the wafer detection and low efficiency exist.

SUMMERY OF THE UTILITY MODEL

In order to improve the efficiency of wafer detection, this application provides a test table with two-sided wafer inspection microscope.

The application provides a test bench with two-sided wafer inspection microscope adopts following technical scheme:

the utility model provides a examine test table with two-sided wafer inspection microscope, includes support body, microscope main part, alignment jig and flexible swivel mount, and whole device sets up in the frame, the alignment jig includes L shape connecting plate, first adjusting part and second adjusting part, first adjusting part is fixed to be set up on L shape connecting plate, first adjusting part includes the lantern ring piece, lantern ring piece cover is established microscope main part week side and fixed the setting is in on the first adjusting part, flexible swivel mount includes roating seat, expansion bracket and slide bar, the slide bar slides and sets up on the expansion bracket, the one end of expansion bracket is rotated and is set up on the swivel mount, the other end of expansion bracket is fixed to be set up on the second adjusting part, the support body includes roof-rack, support frame and chassis, the chassis with the roof-rack passes through support frame is fixed from top to bottom to be set up, the roof-rack fretwork.

Through adopting above-mentioned technical scheme, the microscope main part is installed on first adjusting part, first adjusting part is connected to the one end of L shape connecting plate, second adjusting part is connected to the other end, second adjusting part is connected with flexible swivel mount, rotate around the roating seat through first mount and realize the regulation to the microscope main part at the position that the horizontal plane was located through the slide bar between first link and second link, the wafer has been placed on the roof-rack, and the roof-rack fretwork is in order to expose below the wafer, make the viewing aperture in the microscope main part also detect simultaneously below the wafer.

The first adjusting component further comprises a first adjusting seat and a first connecting seat, the first adjusting seat is slidably arranged on the top surface of the first connecting seat, the first adjusting seat comprises a first limiting plate and a first adjusting rod mounting plate, a first fine adjusting rod is fixedly arranged on the first adjusting rod mounting plate in a penetrating manner, the first limiting plate is integrally arranged on the side surface of the first connecting seat, a first limiting hole is formed in the first limiting plate, the first connecting seat comprises a first baffle and a first coarse adjusting rod, the first baffle is integrally arranged on one side of the first connecting seat, the first baffle is perpendicular to the first fine adjusting rod, and the first coarse adjusting rod is in threaded connection with the other side of the first connecting seat, the second adjusting component further comprises a second adjusting seat and a second connecting seat, the second adjusting seat is arranged on the top surface of the second connecting seat in a sliding mode, the second adjusting seat comprises a second limiting plate and a second adjusting rod mounting plate, a second fine adjusting rod is fixedly arranged on the second adjusting rod mounting plate in a penetrating mode, the second limiting plate is integrally arranged on the side face of the second connecting seat, a second limiting hole is formed in the second limiting plate, the second connecting seat comprises a second baffle and a second coarse adjusting rod, the second baffle is integrally arranged on one side of the second connecting seat, the second baffle is perpendicular to the second fine adjusting rod, the second coarse adjusting rod is in threaded connection with the other side of the second connecting seat, and the second coarse adjusting rod penetrates through the second limiting hole.

Through adopting above-mentioned technical scheme, microscope main part fixed mounting is on first regulation seat, first regulation seat slides and sets up at first connecting seat, adjust first regulation seat through first coarse adjustment pole and first fine setting pole, can realize adjusting microscope main part on the horizontal direction, first connecting seat is installed on L shape connecting plate, the second connecting seat is installed to another face, the second mounting seat slides and sets up on the second connecting seat, adjust the second mounting seat through second coarse adjustment pole and second fine setting pole, the realization is to the regulation of microscope main part in vertical side.

Preferably, the expansion bracket includes first mounting bracket, first link, second mounting bracket and second link, first mounting bracket encloses to be established on the roating seat, the second mounting bracket is fixed to be set up on second adjusting part, the slide bar includes first slide bar, second slide bar, third slide bar and fourth slide bar, first slide bar with the fourth slide bar slides and sets up first mounting bracket and on the second mounting bracket, first link is fixed to be set up on the first mounting bracket, the second link is fixed to be set up on the second mounting bracket, the slide bar slides and sets up on first link and the second link.

Through adopting above-mentioned technical characteristics, it is provided with second slide bar and third slide bar to slide on first link and the second link, it is provided with first slide bar and fourth slide bar to slide on first mounting bracket and second mounting bracket, and first link fixed mounting is on first mounting bracket, second link fixed mounting is on the second mounting bracket, through second mounting bracket and the second link of sliding on the slide bar, make L shape connecting plate removed, and then drive the microscope main part and remove, realize the removal on a large scale of microscope main part.

Preferably, the roating seat includes base, top cap, axle sleeve and axostylus axostyle, the base is fixed to be set up on the support body, the axostylus axostyle is integrative to be set up on the base, the top cap is fixed to be set up the axostylus axostyle is kept away from the top surface of the one end of base, two the axle sleeve cover is established on the axostylus axostyle, first mounting bracket encloses to be established two on the axostylus axostyle, first mounting bracket centers on the roating seat is rotatory.

Through adopting above-mentioned technical scheme, establish the axle sleeve at axostylus axostyle outside cover, then enclose first mount pad and establish in the axle sleeve outside, the frictional force that all the mount pad received reduces for the rotation of first mount pad is more in the same direction as smooth.

Preferably, a copper sleeve is arranged in the first connecting frame, the first sliding rod and the second sliding rod are arranged in the copper sleeve in a sliding mode, a copper sleeve is arranged in the second connecting frame, and the second sliding rod and the third sliding rod are arranged in the copper sleeve in a sliding mode.

Through adopting above-mentioned technical scheme, all the cover is established the copper sheathing on the slide bar, and the frictional force that the slide bar received when sliding in the copper sheathing is less to the bronze drum still plays the guide effect to the slide bar, and whole slide bar increases in the same direction as smooth on the expansion bracket.

Preferably, the microscope main body comprises a transmission section, a placing groove is formed in the outer side of the tube wall of the transmission section, the rack is provided with a positioning rod, and the positioning rod is inserted into the placing groove to store and fix the microscope main body.

Through adopting above-mentioned technical scheme, use up the instrument when the user and insert into the standing groove through the one end with the locating lever after, accomodate fixedly the microscope main part, the microscope main part is difficult to receive and collides with.

Preferably, the microscope main body still includes the processing section, the transmission section includes lens installation pipe, lens installation pipe includes the speculum, the viewing aperture has been seted up to lens installation pipe, the speculum slope is installed the one end of lens installation pipe, the speculum is with light reflection extremely the processing section.

Through adopting above-mentioned technical scheme, transversely transmit and receive the light of vertical reflection in detecting the wafer through the speculum, the shared space of the microscope main part of horizontal setting is smaller, reduces the volume of whole detecting instrument, and is more convenient when the user transports or carries.

Preferably, the transmission section further comprises a connecting pipe and a transmission pipe, the connecting pipe is in threaded connection with the transmission pipe, the lens mounting pipe is in threaded connection with the connecting pipe, and the transmission pipeline is in threaded connection with the treatment section.

Through adopting above-mentioned technical scheme, be threaded connection between lens installation pipe, connecting pipe, transmission pipe and the data transmission end, whole microscope main part all can be dismantled in arbitrary one part, can be very convenient when the lens installation pipe of different models of needs dismantles the change, also can conveniently dismantle the change when arbitrary one part in the microscope main part damages.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the microscope body is adjusted through the adjusting frame, the observation port moves to the position below the top frame, the wafer is placed on the top frame, the top frame is hollowed out to expose the lower surface of the wafer, and therefore the observation port in the microscope body can detect the lower surface of the wafer at the same time;

2. the positions of the microscope main body in the horizontal direction and the vertical direction are adjusted through the first adjusting assembly, the second adjusting assembly and the telescopic rotating frame;

3. the lens installation pipe, the connecting pipe, the transmission pipe and the data transmission end are in threaded connection, so that the lens installation pipe can be conveniently disassembled and replaced when different types of lenses are needed, and the lens installation pipe can also be conveniently disassembled and replaced when any one part in the microscope main body is damaged.

Drawings

Fig. 1 is a schematic view of the overall structure of the microscope and the frame.

Fig. 2 is a schematic view of the overall structure of the microscope.

Fig. 3 is a schematic view of the structure of the adjusting bracket.

Fig. 4 is a front view of the telescopic rotating frame.

Fig. 5 isbase:Sub>A sectional view of the telescopic rotating framebase:Sub>A-base:Sub>A.

Description of reference numerals: 1. a microscope body; 11. a transmission section; 111. a lens mounting tube; 1111. a mirror; 1112. a viewing port; 112. a connecting pipe; 113. a conveying pipe; 114. a placement groove; 12. a processing section; 2. an adjusting bracket; 21. an L-shaped connecting plate; 22. a first adjustment assembly; 221. a first adjusting seat; 2211. a first limit plate; 22111. a first limit hole; 2212. a first adjusting rod mounting plate; 22121. a first fine adjustment lever; 222. a first connecting seat; 2221. a first baffle plate; 2222. a first coarse adjustment lever; 223. a collar member; 23. a second adjustment assembly; 231. a second adjusting seat; 2311. a second limiting plate; 23111. a second limiting hole; 2312. a second adjusting rod mounting plate; 23112. a second fine adjustment lever; 232. a second connecting seat; 2321. a second baffle; 2322. a second coarse adjustment lever; 3. a telescopic rotating frame; 31. a rotating base; 311. a base; 312. a top cover; 313. a shaft sleeve; 314. a shaft lever; 32. a slide bar; 33. a telescopic frame; 331. a first mounting bracket; 332. a first connecting frame; 333. a second mounting bracket; 334. a second link frame; 4. a frame body; 41. a top frame; 42. a support frame; 43. a chassis.

Detailed Description

The present application is described in further detail below with reference to figures 1-5.

The embodiment of the application discloses a detection platform with a double-sided wafer detection microscope. Referring to fig. 1 and 2, an inspection stage with a double-sided wafer inspection microscope includes a microscope body 1, an adjusting frame 2, a telescopic rotating frame 3 and a frame body 4, the whole inspection stage is installed on a rack, the telescopic rotating frame 3 includes a rotating base 31, a sliding rod 32 and a telescopic frame 33, the rotating base 31 is fixedly installed on the rack, the sliding rod 32 is slidably disposed on the telescopic frame 33, one end of the telescopic frame 33 is rotatably disposed on the rotating base 31, specifically, the telescopic frame 33 is rotatably disposed on a shaft sleeve 313, the other end of the telescopic frame 33 is fixedly connected on the adjusting frame 2, the microscope body 1 is fixedly disposed on the adjusting frame 2, the frame body 4 includes a top frame 41, a supporting frame 42 and a bottom frame 43, the bottom frame 43 is disposed on the rack, the supporting frame 42 is fixedly disposed on the top frame 41, a wafer is clamped in the top frame 41, the bottom of the top frame 41 for clamping the wafer is hollowed out, so that the underside of the wafer is exposed, the microscope body 1 can rotate around the rotating base 31, so that an observation port is located below the wafer 1112 clamped on the top frame 41.

Referring to fig. 1 and 2, microscope body 1 includes transmission section 11 and processing section 12, transmission section 11 includes lens installation tube 111, connecting pipe 112 and transmission pipe 113, lens installation tube 111 and connecting pipe 112 threaded connection, connecting pipe 112 is connected with transmission pipe 113, transmission pipe 113 and processing section 12 threaded connection, lens installation tube 111 is provided with viewing port 1112, specifically, viewing port 1112 sets up on lens installation tube 111, and the opening of viewing port 1112 faces upwards in order to be used for detecting below the wafer, standing groove 114 has been seted up on the pipe wall of connecting pipe 112, standing groove 114 sets up on the surface of connecting pipe 112, the frame includes the locating lever, the perpendicular microscope body 1 setting of locating lever, the locating lever cooperates with standing groove 114 in the grafting, in order to fix a position microscope body 1.

Referring to fig. 2 and 3, the adjusting bracket 2 includes an L-shaped connecting plate 21, a first adjusting assembly 22 and a second adjusting assembly 23, the first adjusting assembly 22 includes a first adjusting seat 221, a first adjusting seat 221 and a collar member 223, the collar member 223 is sleeved on the microscope main body 1, four mounting through holes are formed in the bottom of the collar member 223, mounting through holes are formed in positions, close to four corners, of the bottom of the first adjusting seat 221, the collar member 223 is fixedly connected to the top surface of the first adjusting seat 221, specifically, the collar member 223 is arranged along the axial length of the microscope main body 1, the length of the collar member 223 is equal to that of the first connecting member, the mounting through holes of the first adjusting seat 221 and the mounting through holes of the collar member 223 are collinear, screws are arranged in the two mounting through holes, and the collar member 223 is fixed to the first adjusting seat 221 through screws. First connection base 222 is slidably disposed at the bottom of first adjusting base 221, first connection base 222 is fixedly connected to the top surface of one plate surface of L-shaped connecting plate 21, specifically, a sliding groove is formed in the top of first connection base 222, a sliding block is integrally disposed at the bottom of first adjusting base 221, sliding fit is performed in the sliding groove through the sliding block so that first adjusting base 221 can move on first connection base 222, one side of first connection base 222 is connected with a coarse adjusting rod through threads, the other side of first connection base 222 is integrally provided with a baffle, the specific coarse adjusting rod is perpendicular to the side of first connection base 222, the baffle is perpendicular to the other side of first connection base 222, a limiting plate is disposed on the side of first adjusting base 221, first limiting plate 22111 is formed in first limiting plate 2211, first limiting hole 22111 is a rounded rectangle, the coarse adjusting rod passes through first limiting hole 11 and is fixed on the side of first connection base 222, a first adjusting rod 2212 is integrally disposed on the other side of first adjusting base, a mounting plate 2212 is formed in the first adjusting rod mounting plate 2212, a mounting plate 22121 is provided with a first adjusting rod mounting plate, and a first fine adjusting rod mounting plate 22121 can move on a microscope mounting plate 2222221 and a first fine adjusting base 22221.

Referring to fig. 2 and 5363, a second adjusting assembly 23 is fixedly connected to the bottom surface of the other plate surface of the L-shaped connecting plate 21, the second adjusting assembly 23 includes a second adjusting seat 231 and a second connecting seat 232, mounting through holes are formed at positions of four corners of one surface of the L-shaped connecting plate 21, which are close to the second connecting seat 232, mounting through holes are also formed at positions corresponding to the L-shaped connecting plate 21, screws are disposed in the mounting through holes, the second connecting seat 232 and the L-shaped connecting plate 21 are fixedly connected by the screws, specifically, a second limiting plate 2311 is integrally disposed on one side surface of the second connecting seat 232, a second limiting hole 23111 is formed in the second limiting plate 2311, a second adjusting rod mounting plate 2312 is disposed on the other side surface of the second connecting seat 232, a mounting hole is formed in the second adjusting mounting plate, and a second fine adjusting rod 23112 is disposed in the mounting hole, one side that L shape connecting plate 21 was kept away from to second connecting seat 232 sets up fixedly connected with second regulation seat 231, the integrative slider that is provided with in bottom of first connecting seat 222, the spout has been seted up at the top of second regulation seat 231, the slider slides and sets up in the spout, so that second regulation seat 231 sliding connection is on second connecting seat 232, the side of second regulation seat 231 is provided with second coarse adjustment pole 2322, the opposite side of second regulation seat 231 is provided with second baffle 2321, second fine adjustment pole 23112 is through rotatory and make the one end that the fine adjustment pole is close to second baffle 2321 contradict on second baffle 2321, so that second regulation seat 231 moves on second connecting seat 232 and slides, second coarse adjustment pole 2322 passes spacing hole 23111 and threaded connection on second limiting plate 2311 and adjusts the seat 231.

Referring to fig. 4 and 5, the telescopic rotating frame 3 includes a rotating base 31, a sliding rod 32 and a telescopic frame 33, the rotating base 31 includes a base 311, a top cover 312 and a shaft sleeve 313, two threaded holes are opened on the top of the top cover 312, the top cover is mounted on the top end of the base 311 through screws, the base 311 is integrally provided with a shaft rod 314, the shaft rod 314 is cylindrical, two shaft sleeves 313 are sleeved on the shaft rod 314, the telescopic frame 33 includes a first mounting frame 331, a first connecting frame 332, a second mounting frame 333 and a second connecting frame 334, the second mounting frame 333 is fixedly arranged at the bottom of the second adjusting base 231, one side of the second mounting frame 333 away from the second adjusting base 231 is provided with the second connecting frame 334, specifically, four connecting holes are opened on the side of the second connecting frame 334, copper sleeves are respectively placed in the two connecting holes in the middle, the diameter of the copper sleeves is equal to the diameter of the connecting holes of the second connecting frame 334, the sliding rod 32 includes a first sliding rod, a second sliding rod, a third sliding rod and a fourth sliding rod, the four sliding rods are located on the same plane, specifically, the two copper sleeves respectively penetrate through the second sliding rod and the third sliding rod, one ends, far away from the second connecting frame 334, of the second sliding rod and the third sliding rod are connected with the first connecting frame 332, specifically, four connecting holes are formed in the side face of the first connecting frame 332, the two connecting holes at the two ends are respectively provided with the copper sleeves, the diameter of each copper sleeve is equal to that of the connecting hole of the first connecting frame 332, the two copper sleeves respectively penetrate through the first sliding rod and the fourth sliding rod, the side face, far away from the second connecting frame 334, of the first connecting frame 332 is connected with the first mounting frame 331, the first mounting frame 331 is provided with two sliding holes, the positions of the two sliding holes respectively correspond to the positions of the first sliding rod and the fourth sliding rod, the first sliding rod and the fourth sliding rod penetrate through the connecting holes in the first connecting frame 332 and are slidably connected in the first mounting frame 331, the second mounting bracket 333 is provided with two sliding holes, the positions of the two sliding holes correspond to the positions of the second sliding rod and the third sliding rod respectively, and the second sliding rod and the third sliding rod pass through the connecting holes on the second connecting bracket 334 and pass through the sliding holes to be connected in the second mounting bracket 333 in a sliding manner.

The implementation principle of the detection platform with the double-sided wafer detection microscope in the embodiment of the application is as follows: taking the microscope body 1 out of the positioning rod, screwing the microscope body 1 out through the rotating seat 31 on the telescopic rotating frame 3, screwing the microscope body 1 to a certain position below the wafer, shifting the first coarse adjustment rod 2222 on the first adjustment assembly 22, sliding the first adjustment seat 221 on the first connection seat 222, limiting the position of the first coarse adjustment rod 2222 by the first limiting hole 22111 on the first limiting plate 2211, adjusting the microscope body 1 to the approximate position of the wafer to be detected in the horizontal direction, then adjusting the first fine adjustment rod 22121 and abutting against the first baffle 2221 on the first connection seat 222 to finely adjust the first adjustment seat 221, shifting the second coarse adjustment rod 2322 to move the second adjustment seat 231 on the second connection seat 232, adjusting the microscope body 1 in the vertical direction, then adjusting the second fine adjustment rod 23112, abutting against the baffle 23112 on the second connection seat 232 to adjust the microscope body 1, adjusting the wafer body 1, inserting the first fine adjustment rod 2311 into the positioning seat 2311, and inserting the microscope body into the positioning rod 2311 to restore the microscope body to the initial position, and inserting the microscope body into the positioning seat 2311, and adjusting the microscope body into the positioning seat 2311, and inserting the microscope body into the positioning seat, and adjusting groove, and adjusting the microscope body to restore the initial position.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a examine test table with two-sided wafer inspection microscope which characterized in that: including support body (4), microscope main part (1), alignment jig (2) and flexible swivel mount (3), whole device sets up in the frame, alignment jig (2) are including L shape connecting plate (21), first adjusting part (22) and second adjusting part (23), first adjusting part (22) are fixed to be set up on L shape connecting plate (21), first adjusting part (22) are including lantern ring piece (223), lantern ring piece (223) cover is established microscope main part (1) week side and fixed the setting is in on first adjusting part (22), flexible swivel mount (3) are including roating seat (31), expansion bracket (33) and slide bar (32), slide bar (32) slide and set up on expansion bracket (33), the one end of expansion bracket (33) is rotated and is set up on the swivel mount, the other end of expansion bracket (33) is fixed to be set up on second adjusting part (23), support body (4) are including roof-rack (41), support frame (42) and chassis (43), chassis (43) with roof-rack (41) pass through fretwork fixed roof-rack (41) about the roof-rack (41), support frame (41).

2. The inspection station of claim 1, wherein: the first adjusting assembly (22) further comprises a first adjusting seat (221) and a first connecting seat (222), the first adjusting seat (221) is slidably disposed on the top surface of the first connecting seat (222), the first adjusting seat (221) comprises a first limiting plate (2211) and a first adjusting rod mounting plate (2212), a first fine adjusting rod is fixedly disposed on the first adjusting rod mounting plate (2212) in a penetrating manner, the first limiting plate (2211) is integrally disposed on the side surface of the first connecting seat (222), a first limiting hole (22111) is formed in the first limiting plate (2211), the first connecting seat (222) comprises a first baffle plate (2221) and a first coarse adjusting rod (2222), the first baffle plate (2221) is integrally disposed on one side of the first connecting seat (222), the first baffle plate (2221) is perpendicular to the first fine adjusting rod, the first coarse adjusting rod (2222) is in threaded connection with the first connecting seat (2222), the second adjusting seat (23123) comprises a second adjusting rod (2312), and a second adjusting seat (2312) is fixedly disposed on the second adjusting seat (2312), and the second adjusting seat (2312) comprises a second adjusting rod mounting plate (23112), the second limiting plate (2311) is integrally arranged on the side face of the second connecting seat (232), a second limiting hole (23111) is formed in the second limiting plate (2311), the second connecting seat (232) comprises a second baffle (2321) and a second coarse adjustment rod (2322), the second baffle (2321) is integrally arranged on one side of the second connecting seat (232), the second baffle (2321) is perpendicular to the second fine adjustment rod (23112), the second coarse adjustment rod (2322) is in threaded connection with the other side of the second connecting seat (232), and the second coarse adjustment rod (2322) penetrates through the second limiting hole (23111).

3. The inspection station of claim 2, wherein: expansion bracket (33) includes first mounting bracket (331), first link (332), second mounting bracket (333) and second link (334), first mounting bracket (331) encloses to be established on roating seat (31), second mounting bracket (333) is fixed to be set up on second adjusting part (23), slide bar (32) includes first slide bar, second slide bar, third slide bar and fourth slide bar, first slide bar with the fourth slide bar slides and sets up first mounting bracket (331) and on second mounting bracket (333), first link (332) is fixed to be set up on first mounting bracket (331), second link (334) is fixed to be set up on second mounting bracket (333), slide bar (32) slides and sets up on first link (332) and second link (334).

4. The inspection station of claim 3, wherein: the rotating seat (31) comprises a base (311), a top cover (312), shaft sleeves (313) and shaft rods (314), wherein the base (311) is fixedly arranged on a frame body (4), the shaft rods (314) are integrally arranged on the base (311), the top cover (312) is fixedly arranged on the top surface of one end, away from the base (311), of the shaft rods (314), the shaft sleeves (313) are sleeved on the shaft rods (314), the first mounting frames (331) are arranged on the two shaft rods (314) in a surrounding mode, and the first mounting frames (331) rotate around the rotating seat (31).

5. The inspection station of claim 3, wherein: the first connecting frame (332) is provided with a copper sleeve, the first sliding rod and the second sliding rod are arranged in the copper sleeve in a sliding mode, the second connecting frame (334) is provided with the copper sleeve, and the second sliding rod and the third sliding rod are arranged in the copper sleeve in a sliding mode.

6. The inspection station of claim 1, wherein: the microscope body (1) comprises a transmission section (11), a placing groove (114) is formed in the outer side of the tube wall of the transmission section (11), the frame body (4) is provided with a positioning rod, and the positioning rod is inserted into the placing groove (114) to store and fix the microscope body (1).

7. The inspection station of claim 6, wherein: the microscope body (1) further comprises a treatment section (12), the transmission section (11) comprises a lens mounting pipe (111), the lens mounting pipe (111) comprises a reflecting mirror (1111), the lens mounting pipe (111) is provided with an observation port (1112), the reflecting mirror (1111) is obliquely mounted at one end of the lens mounting pipe (111), and the reflecting mirror (1111) reflects light rays to the treatment section (12).

8. The inspection station of claim 7, wherein: the transmission section (11) further comprises a connecting pipe (112) and a transmission pipe (113), the connecting pipe (112) is in threaded connection with the transmission pipe (113), the lens mounting pipe (111) is in threaded connection with the connecting pipe (112), and the transmission pipe (113) is in threaded connection with the treatment section (12).