CN218372511U

CN218372511U - Simple flow field device for vapor deposition of carbon-based composite material and deposition furnace

Info

Publication number: CN218372511U
Application number: CN202222485031.3U
Authority: CN
Inventors: 范丽君; 王毅楠
Original assignee: Yantai Luhang Carbon Materials Technology Co ltd
Current assignee: Yantai Luhang Carbon Materials Technology Co ltd
Priority date: 2022-09-20
Filing date: 2022-09-20
Publication date: 2023-01-24
Anticipated expiration: 2032-09-20

Abstract

The utility model relates to a simple flow field device and a deposition furnace for carbon-based composite material vapor deposition, the simple flow field device comprises a gas preheating chamber and a prefabricated body deposition chamber which are connected in sequence, the gas preheating chamber is provided with an air inlet pipeline, the opposite end of the air inlet pipeline of the gas preheating chamber is also connected with a vent plate distributed with a plurality of through holes, and the circumference of the gas preheating chamber is enclosed with a first backing ring; the circumference of the prefabricated body deposition chamber is enclosed by a closed layer, the closed layer is connected with a gas diffusion disc, a plurality of groups of clamping plate assemblies used for clamping carbon fiber prefabricated bodies are arranged in the prefabricated body deposition chamber, the clamping plate assemblies are provided with air holes, and a slit area is formed between every two adjacent clamping plate assemblies. The utility model provides a simple and easy flow field device can reduce frock manufacturing cost when guaranteeing the directional diffusion effect of gas, and the equipment is simple and easy, easily matches the furnace body of different specifications. Meanwhile, the uniformity of gas flow can be ensured, so that the uniformity of diffusion and deposition of the gas to the carbon fiber preform is improved.

Description

Simple flow field device for vapor deposition of carbon-based composite material and deposition furnace

Technical Field

The utility model relates to a carbon back combined material vapor deposition equipment technical field specifically is a simple and easy flow field device and deposition furnace for carbon back combined material vapor deposition.

Background

Chemical Vapor Deposition (CVD) is a widely used method for preparing high-performance carbon-based composite materials, the flow uniformity of carbon source gas in a deposition space is an important factor influencing the vapor deposition effect of a workpiece, if the gas flow distribution is not uniform, the deposition thickness of the workpiece is uneven, the product quality is directly influenced, and therefore, a gas flow field is generally required to be designed in the process. The utility model with the publication number of CN207452252U discloses a device for uniformly feeding air for a vapor deposition furnace, and specifically discloses that the device comprises a connecting flange, an air inlet pipeline, an air collecting hood, a screw rod, a nut and other structures, wherein one end of the connecting flange is connected with an air inlet of the vapor deposition furnace, and the other end of the connecting flange is connected with the air inlet pipeline. One end of the air inlet pipeline is fixedly communicated with an air inlet of the deposition furnace, the other end of the air inlet pipeline is fixedly communicated with the gas collecting hood, and a plurality of air outlet holes are formed in the surface of the gas collecting hood. The gas-collecting hood comprises an upper inverted funnel hood, a circular connecting hood and a lower conical hood; the small-mouth end of the upper inverted funnel cover is fixedly communicated with the air inlet pipeline; the circular connecting cover fixedly communicates the large opening end of the upper inverted funnel cover with the large opening end of the lower conical cover respectively; and a plurality of air outlet holes are formed in the conical surface of the lower conical cover and the side wall of the circular connecting cover. The existing gas flow field needs to be assisted by a special high-cost high-temperature-resistant tool, the manufacturing cost is high, the tool with different specifications needs to be matched with the furnace bodies with different specifications, and the using and processing cost is extremely high.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a simple and easy flow field device and sedimentation furnace for carbon base combined material vapor deposition aims at reduce cost, simplified operation, improves the interior deposition efficiency of deposit chamber.

In order to achieve the above object, the utility model provides a following technical scheme: a simple flow field device for vapor deposition of carbon-based composite materials comprises a gas preheating chamber and a preform deposition chamber which are sequentially connected; the gas preheating chamber is provided with an air inlet pipeline, the opposite end of the air inlet pipeline of the gas preheating chamber is also connected with a vent plate with a plurality of through holes, and a first backing ring is surrounded on the circumference of the gas preheating chamber; the prefabricated body sedimentation chamber is characterized in that a sealing layer is circumferentially enclosed, one end, far away from the gas preheating chamber, of the sealing layer is connected with a gas diffusion disc for diffusing gas, a plurality of groups of clamping plate assemblies for clamping carbon fiber prefabricated bodies are arranged inside the prefabricated body sedimentation chamber, the clamping plate assemblies are provided with air holes, and a slit area is formed between every two adjacent clamping plate assemblies.

Preferably, one end of the preform deposition chamber, which is close to the gas preheating chamber, is connected with a gas guide layer, the gas guide layer is provided with a gas guide channel matched with the slit area, and the gas guide layer abuts against the vent plate. And the carbon source gas is guided into the prefabricated body deposition chamber through the gas guide channel and accurately guided into the slit region, so that smooth airflow and directional gas diffusion are ensured. The air guide layer preferably adopts graphite paper which is low in cost and convenient to process.

As preferred scheme, the splint subassembly includes carries out the first splint and the second splint of clamping in carbon fiber preform both sides face respectively, the bleeder vent distributes in the surface of first splint, and the bleeder vent is not established to the second splint.

Preferably, the aeration plate is provided in a disc shape, and the diameter of the aeration plate is larger than that of the first backing ring, so as to ensure the tightness of the gas preheating chamber.

As a preferred scheme, the sealing layer is made of graphite paper which is low in cost and convenient to process.

Preferably, the simplified flow field device further comprises a gas diffusion chamber connected to the gas diffusion disc. The gas diffusion chamber comprises a second backing ring connected to the gas diffusion disc and a blind plate covering the top end of the second backing ring, and a plurality of gaskets are distributed between the blind plate and the upper end face of the second backing ring. The gas diffusion chamber can improve the gas utilization rate and increase the flowing time of the carbon source gas in the preform deposition chamber.

Preferably, the gas preheating chamber and the preform deposition chamber are provided in at least one layer, and may be provided in a plurality of layers as necessary.

The utility model also provides a technical scheme of sedimentation stove, including above-mentioned arbitrary scheme simple and easy flow field device.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model provides a simple and easy flow field device for carbon base composite vapor deposition designs simply, and through the combination of gaseous preheating chamber, preform deposit room and gas diffusion room and the simple and easy structure setting of each room, when guaranteeing gaseous directional diffusion effect, can reduce frock manufacturing cost, and the equipment is simple and easy, easily matches the furnace body of different specifications, unusual convenient practicality.

Simultaneously, through the combination of breather plate and air guide layer to and the cooperation have the first splint of bleeder vent, the clamping form of second splint, can ensure the homogeneity that gas flows, thereby promote the gas to the degree of consistency of carbon fiber preform diffusion deposit.

Drawings

Fig. 1 is a schematic overall structure diagram of the simple flow field device for vapor deposition of carbon-based composite materials according to the present invention;

fig. 2 is a schematic structural view of the middle air-vent plate of the present invention;

FIG. 3 is a schematic structural view of the middle air-guiding layer of the present invention;

FIG. 4 is a schematic view of the structure of the middle air-permeable plate and the air-permeable layer of the present invention;

fig. 5 is a schematic structural view of the first clamping plate and the second clamping plate of the present invention.

The various reference numbers in the figures mean:

1. a gas preheating chamber; 2. a preform deposition chamber; 3. a gas diffusion chamber; 4. an air intake line; 5. a breather plate; 51. a through hole; 6. a first backing ring; 7. a carbon fiber preform; 8. a gas diffusion plate; 81. air diffusing holes; 9. a gas-conducting layer; 91. an air guide channel; 10. a cleat assembly; 101. a first splint; 1011. air holes are formed; 102. a second splint; 1021. connecting holes; 11. a sealing layer; 12. a second backing ring; 13. a gasket; 14. and (4) a blind plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Referring to fig. 1-5, the embodiment discloses a simple flow field device for vapor deposition of a carbon-based composite material, comprising a gas preheating chamber 1, a preform deposition chamber 2 and a gas diffusion chamber 3 which are sequentially connected from bottom to top.

The bottom end of the gas preheating chamber 1 is provided with an air inlet pipeline 4, a carbon source gas is introduced into the gas preheating chamber 1 through the air inlet pipeline 4, the opposite end of the air inlet pipeline 4 of the gas preheating chamber 1, namely the top end of the gas preheating chamber 1 in the embodiment, is connected with an aeration plate 5, a plurality of through holes 51 are uniformly distributed on the surface of the aeration plate 5, and the carbon source gas enters the preform deposition chamber 2 through the aeration plate 5. The gas preheating chamber 1 is provided with a first backing ring 6 in the circumferential direction, the vent plate 5 is connected to the top end of the first backing ring 6, the vent plate 5 is preferably in a disc shape matched with the first backing ring 6, and the diameter of the vent plate 5 is slightly larger than that of the first backing ring 6 so as to ensure the airtightness of the gas preheating chamber 1.

The prefabricated body deposition chamber 2 is used for placing a carbon fiber prefabricated body 7, the top end and the bottom end of the prefabricated body deposition chamber 2 are respectively connected with a gas diffusion disc 8 and a gas guide layer 9, and are respectively communicated with the gas diffusion chamber 3 through the gas diffusion disc 8 and the gas preheating chamber 1 through the gas guide layer 9. The flow field device provided by the embodiment further comprises a clamping plate assembly 10 which is arranged in the preform deposition chamber 2 and used for clamping the carbon fiber preforms 7, and each carbon fiber preform 7 is vertically placed in the preform deposition chamber 2 after being fixed by the clamping plate assembly 10. The cleat assembly 10 further includes a first cleat 101 and a second cleat 102, the first cleat 101 and the second cleat 102 being combined into a set, both fitted to both sides of the carbon fiber preform 7 to fix it. A plurality of air holes 1011 are uniformly distributed on the surface of the first clamping plate 101, the second clamping plate 102 is not provided with the air holes 1011, connecting holes 1021 are formed in the four corners of the second clamping plate 102, the first clamping plate 101, the carbon fiber prefabricated body 7 and the second clamping plate 102 are fixed through bolt and nut assemblies, and a complete deposition unit is formed by the first clamping plate 101, the carbon fiber prefabricated body 7 and the second clamping plate 102. The carbon source gas is diffusion-deposited toward the carbon fiber preform 7 through the gas permeable holes 1011. The fixed deposition units are vertically arranged in parallel in the preform deposition chamber 2, and the deposition units at both sides need to ensure that one side close to the sidewall of the preform deposition chamber is the second clamping plate 102. A slit region is formed between the adjacent nip plate assemblies 10, that is, between the adjacent deposition cells, and the carbon source gas is circulated from the gas preheating chamber 1 to the slit region, and further diffused and deposited toward the carbon fiber preform 7 through the gas permeable holes 1011.

The top end of the preform deposition chamber 2 is provided with a gas diffusion plate 8 for diffusing gas, and the center of the gas diffusion plate 8 is provided with a gas diffusion hole 81. The bottom of preform deposit room 2 is equipped with air guide layer 9, and air guide layer 9 butt in the upper surface of breather plate 5 is equipped with the air guide channel 91 with the slot district matching on the air guide layer 9, and air guide channel 91 communicates to the perforating hole 51 that corresponds on the breather plate 5, through air guide channel 91, with carbon source gas drainage to preform deposit room 2 in to accurate drainage is distinguished to the slot, ensures that the air current is unobstructed, gaseous directional diffusion. In this embodiment, the air guiding layer 9 is preferably made of graphite paper, which has a size corresponding to the air-permeable panel 5 and is laid on the air-permeable panel 5, and the air guiding channel 91 can be cut on the graphite paper. The flow field device provided by the embodiment does not need to design a complex multilayer preheating chamber, can ensure gas preheating and directional diffusion by adopting the cooperation of the first backing ring 6, the porous disc and the graphite paper, and can effectively reduce the processing cost. The prefabricated body deposition chamber 2 is circumferentially surrounded by a closed layer 11, the gas diffusion disc 8 is connected to the upper end of the closed layer 11, gas diffusion is reduced through the closed layer 11, the waste of gas diffusion in a vacuum state is further reduced, directional vapor deposition of each deposition unit is guaranteed, and the effect of vapor deposition is improved. In this embodiment, graphite paper is preferably used for the sealing layer 11, and carbon ropes are used to fix the graphite paper, so that the cost can be further reduced while the sealing effect is ensured.

The gas diffusion chamber 3 is connected above the prefabricated body deposition chamber 2 and comprises a second backing ring 12 connected to the upper end face of the gas diffusion disc 8 and a blind plate 14 covering the top end of the second backing ring 12, a plurality of gaskets 13 are uniformly distributed between the blind plate 14 and the upper end face of the second backing ring 12 at intervals along the circumferential direction, and the gaskets 13 form gas outlet gaps between the blind plate 14 and the second backing ring 12 for gas diffusion. The gas diffusion chamber 3 can improve the gas utilization rate and increase the flow time of the carbon source gas in the preform deposition chamber 2.

In this embodiment, the gas preheating chamber 1 and the preform deposition chamber 2 are provided as one layer, and it is understood that the gas preheating chamber 1 and the preform deposition chamber 2 may be provided as many layers as required.

In this embodiment, the material used for the first backing ring 6, the second backing ring 12, the vent plate 5, the clamping plate assembly 10, the air diffuser 8, and the blind plate 14 in the flow field device is graphite, or carbon/carbon composite material or high temperature resistant ceramic material.

The foregoing shows and describes the basic principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a simple and easy flow field device for carbon base combined material vapor deposition which characterized in that, including connecting gradually:

the gas preheating chamber (1) is provided with an air inlet pipeline (4), the opposite end of the air inlet pipeline (4) of the gas preheating chamber (1) is also connected with an air vent plate (5) with a plurality of through holes (51) distributed thereon, and a first backing ring (6) is surrounded on the circumferential direction of the gas preheating chamber (1);

prefabricated body deposit room (2), the circumference of prefabricated body deposit room (2) is enclosed and has been closed airtight layer (11), and airtight layer (11) is connected with the gas dish that looses (8) that are used for loosing gas in the one end of keeping away from gas preheating chamber (1), and the inside of prefabricated body deposit room (2) is equipped with a plurality of groups splint subassembly (10) that are used for clamping carbon fiber preform (7), splint subassembly (10) are equipped with bleeder vent (1011), form the slit area between adjacent splint subassembly (10).

2. The simple flow field device for the vapor deposition of carbon-based composite materials according to claim 1, characterized in that one end of the preform deposition chamber (2) close to the gas preheating chamber (1) is connected with a gas guiding layer (9), the gas guiding layer (9) is provided with a gas guiding channel (91) matched with the slit area, and the gas guiding layer (9) is abutted against the gas guiding plate (5).

3. The simple flow field device for vapor deposition of carbon-based composite material according to claim 2, characterized in that the gas guiding layer (9) is made of graphite paper.

4. The simple flow field device for vapor deposition of carbon-based composite materials according to claim 1, wherein the clamping plate assembly (10) comprises a first clamping plate (101) and a second clamping plate (102) which clamp two sides of the carbon fiber preform (7), and the air holes (1011) are distributed on the surface of the first clamping plate (101).

5. The simplified flow field device for vapor deposition of carbon-based composite materials according to claim 1, characterized in that the aeration plate (5) is provided in the shape of a circular disc with a diameter larger than the diameter of the first rim (6).

6. The simple flow field device for vapor deposition of carbon-based composite materials according to claim 1, characterized in that the sealing layer (11) is made of graphite paper.

7. The simplified flow field device for vapor deposition of carbon-based composite materials according to claim 1, characterized in that it further comprises a gas diffusion chamber (3) connected to a gas dispersion disc (8).

8. The simplified flow field device for vapor deposition of carbon-based composite materials according to claim 7, characterized in that the gas diffusion chamber (3) comprises a second backing ring (12) connected to the gas diffusion disk (8), and a blind plate (14) covering the top end of the second backing ring (12), wherein a plurality of gaskets (13) are distributed between the blind plate (14) and the upper end face of the second backing ring (12).

9. The simplified flow field device for vapor deposition of carbon-based composite materials according to claim 1, characterized in that the gas preheating chamber (1) and the preform deposition chamber (2) are provided in at least one layer.

10. A deposition furnace comprising the simplified flow field apparatus of any of claims 1-9.