CN218372485U - Device for adjusting evaporation rate on line - Google Patents
Device for adjusting evaporation rate on line Download PDFInfo
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- CN218372485U CN218372485U CN202221671744.2U CN202221671744U CN218372485U CN 218372485 U CN218372485 U CN 218372485U CN 202221671744 U CN202221671744 U CN 202221671744U CN 218372485 U CN218372485 U CN 218372485U
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Abstract
The utility model provides a device of online adjustment evaporation rate, include: the linear evaporation boat comprises a first surface and a second surface which are opposite, the first surface comprises an inner area and an edge area which surrounds the inner area, the inner area is provided with a groove, and the groove is used for containing an evaporation material source; a position-posture-adjustable conductive member located on the side of the second surface, the conductive member being in contact with the second surface. That is to say, the device adjusts the conductivity by placing a conductive part with adjustable position and posture at the bottom of the linear evaporation boat, and further adjusts the evaporation rates of different positions to be consistent as much as possible; the position with high evaporation rate is provided with a conductive component at the corresponding bottom of the linear evaporation boat to reduce the evaporation rate, and the position with low evaporation rate is not processed, so that the evaporation rate of each position on the whole linear evaporation boat is ensured to be close to the same.
Description
Technical Field
The utility model relates to a semiconductor device technical field, more specifically say, relate to a device of online regulation evaporation rate.
Background
Most of the existing linear evaporation boats are small-sized linear evaporation boats in laboratories, but in practical application, large-area and large-size substrates need to be subjected to evaporation deposition, and obviously, the small-sized linear evaporation boats cannot meet the requirement of the practical application.
If the small-sized linear evaporation boat is simply amplified, the phenomenon of uneven heat transfer occurs due to the fact that the size of the linear evaporation boat is amplified, evaporation rates at various positions are inconsistent, and finally the uniformity of the film thickness of evaporation deposition is poor.
When the evaporation rate is inconsistent or the film thickness uniformity is poor, the cavity is generally required to be deflated to open the cavity so as to adjust the connection mode of the evaporation boat, or the cavity is required to be opened to replace the evaporation boat and other operations, namely, no matter which operation needs equipment to be shut down to open the cavity, and the cost is increased under the condition of increasing the complexity of the process.
SUMMERY OF THE UTILITY MODEL
In view of this, in order to solve the above problem, the utility model provides a device for adjusting evaporation rate on line, technical scheme is as follows:
an apparatus for on-line regulation of evaporation rate, the apparatus comprising:
the linear evaporation boat comprises a first surface and a second surface which are opposite, wherein the first surface comprises an inner area and an edge area which surrounds the inner area, the inner area is provided with a groove, and the groove is used for accommodating an evaporation material source;
a position-posture-adjustable conductive member located on the side of the second surface, the conductive member being in contact with the second surface.
Preferably, in the above device, the conductive member is a plurality of independent metal pieces.
Preferably, in the above apparatus, the apparatus further comprises: and a folding member disposed between two adjacent metal sheets.
Preferably, in the above apparatus, the apparatus further comprises:
a first push hook provided on the first metal sheet;
and a second push hook provided on the last metal sheet.
Preferably, in the above apparatus, the apparatus further comprises: a drive assembly;
the driving assembly is used for controlling the position and the posture of the metal sheet through the first push hook and the second push hook.
Preferably, in the above apparatus, the linear evaporation boat is a conductive linear evaporation boat.
Compared with the prior art, the utility model discloses the beneficial effect who realizes does:
the utility model provides a pair of online regulation evaporation rate's device includes: the linear evaporation boat comprises a first surface and a second surface which are opposite, wherein the first surface comprises an inner area and an edge area which surrounds the inner area, the inner area is provided with a groove, and the groove is used for accommodating an evaporation material source; a position-posture-adjustable conductive member located on the side of the second surface, the conductive member being in contact with the second surface. That is to say, the device adjusts the conductivity by placing the conductive parts with adjustable positions and postures at the bottom of the linear evaporation boat, and further adjusts the evaporation rates at different positions to reach the consistency as much as possible; the position with high evaporation rate is provided with a conductive component at the corresponding bottom of the linear evaporation boat to reduce the evaporation rate, and the position with low evaporation rate is not processed, so that the evaporation rate of each position on the whole linear evaporation boat is ensured to be close to the same.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an apparatus for adjusting an evaporation rate on line according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a conductive component according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another conductive component according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another device for adjusting an evaporation rate on line according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an apparatus for adjusting an evaporation rate on line according to an embodiment of the present invention, the apparatus includes:
the linear evaporation boat 11 comprises a first surface and a second surface which are opposite, the first surface comprises an inner area and an edge area which surrounds the inner area, the inner area is provided with a groove, and the groove is used for containing an evaporation material source.
A position and posture adjustable conductive member 12 on the side of the second surface, the conductive member 12 being in contact with the second surface.
Specifically, as shown in fig. 1, the shape of the linear evaporation boat 11 is illustrated by taking a rectangular parallelepiped as an example, the initial position of the conductive member 12 is located in the edge area, so as to avoid affecting the evaporation rate in the inner area, but if the evaporation rate in a part of the area is too high during evaporation, the conductive member 12 can be moved to this position, so as to reduce the evaporation rate in this position, and the position with low evaporation rate is not processed, so as to ensure that the evaporation rate in each position of the entire linear evaporation boat 11 is close to the same.
That is, the device adjusts the conductivity by placing the conductive component 12 with adjustable position and posture at the bottom of the linear evaporation boat 11, and further adjusts the evaporation rate of different positions on the whole linear evaporation boat 11 to be consistent as much as possible.
Optionally, the linear evaporation boat 11 is a conductive linear evaporation boat, for example, the linear evaporation boat 11 is a graphite linear evaporation boat.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a conductive component according to an embodiment of the present invention, and referring to fig. 3, fig. 3 is a schematic structural diagram of another conductive component according to an embodiment of the present invention.
The conductive members 12 are a plurality of independent metal sheets 13, for example, the metal sheets 13 are copper sheets.
As shown in fig. 2 and 3, fig. 2 is a schematic view of a folded state of a plurality of independent metal sheets 13, fig. 3 is a schematic view of a tiled state of a plurality of independent metal sheets 13, and the apparatus further includes: and a folding member 14 disposed between adjacent two of the metal sheets 13.
Specifically, the folding component 14 can ensure that a plurality of independent metal sheets 13 are in a folded state and a tiled state, and different conductivities can be realized through the number of the metal sheets 13 in the tiled state, so that different overhigh evaporation rates can be adjusted.
Optionally, as shown in fig. 3, the apparatus further includes: a first push hook 15 provided on the first metal sheet 13; a second push hook 16 provided on the last metal sheet 13.
The device further comprises: a drive assembly; the driving assembly is used for controlling the position and the posture of the metal sheet 13 through the first push hook 15 and the second push hook 16.
Specifically, the adjustment of the position and posture of the plurality of metal sheets 13 is realized by the driving assembly in combination with the first push hook 15 and the second push hook 16, for example, the metal sheets 13 are moved to a preset position by the driving assembly in combination with the first push hook 15 and the second push hook 16, and the folded metal sheets 13 are stretched by the first push hook 15 and the second push hook 16 again to lay flat a preset number of metal sheets 13, so as to realize different conductivity.
That is, according to the numerical value obtained by monitoring the online evaporation rate of the evaporated film, the position of the moving Cu sheet and the length of the Cu sheet can be determined, and the purpose of uniform film thickness at each position can be achieved without opening the cavity.
Specifically, the absolute difference between the evaporation rate at each position of the linear evaporation boat 11 and the target is monitored, and then whether the percentage of the absolute difference at each position to the target value is smaller than a preset value is determined, for example, the preset value is 12%; when the concentration is less than 12%, starting sheet feeding and conveying, and carrying out evaporation coating on the sample; when the percentage of each position is larger than or equal to 12%, calculating the length of the required Cu sheet according to the percentage of each position and the conductivity of the graphite linear evaporation boat and the Cu sheet, calculating the number of the required Cu sheets according to the length, feeding the number back to the driving assembly, combining the first push hook and the second push hook to move the Cu sheet to a preset position and expand the corresponding number of the Cu sheets, after the operation of the Cu sheet is finished, performing evaporation coating again, and continuously monitoring the evaporation rate of each position until the evaporation rate is smaller than 12%.
The following description will be given by taking an embodiment as an example:
referring to fig. 4, fig. 4 is a schematic structural diagram of another apparatus for online adjusting evaporation rate according to an embodiment of the present invention, wherein the grooves are divided into positions at intervals of 10 units, assuming that position coordinates of 0-50 are formed, where point 0 may be the positive end of the linear evaporation boat, and the length direction of the linear evaporation boat is the x-axis direction; as shown in table 1, table 1 characterizes the evaporation rate of the linear evaporation boat at different positions:
TABLE 1
| Position of | 0 | 10 | 20 | 30 | 40 | 50 |
| Evaporation rate (angstroms/second) | 0.59 | 0.63 | 0.9 | 1.0 | 0.62 | 0.58 |
The target evaporation rate was set to 0.6 a/sec, and the Cu sheet was moved according to the difference between the evaporation rate data and the target value in table 1, and processed according to the processing logic described above to obtain table 2, and as can be seen from the calculation results in table 2, the percentage at locations 20 and 30 is greater than 12%, and the Cu sheet needs to be moved to adjust the on-line evaporation rate.
TABLE 2
The calculated Cu sheet length l is calculated according to the following formula (it should be noted that the formula is obtained from a large number of empirical summary simulations): wherein, W Cu Width of Cu plate in linear evaporation boat, sigma Cu Is the electrical conductivity, σ, of the Cu sheet C The conductivity of the graphite linear evaporation boat; r 1 Evaporation rate in angstroms per second; r is the target evaporation rate in angstroms per second.
According to the above formula, the length of the Cu piece at the position 20 is calculated to be 2cm, and the length of the Cu piece at the position 30 is calculated to be 2.6cm.
Assuming that in the embodiment of the present invention, the minimum unit of each individual Cu piece is 1cm, the calculated Cu length is kept as an integer according to the algorithm, for example, the Cu piece length at position 30 is 2.6cm, and the algorithm is 3cm.
In summary, 2 Cu sheets are required at position 20 and 3 Cu sheets are required at position 30, i.e., 5 Cu sheets in total are required.
And then, moving the Cu sheets to a preset position by combining the first push hook and the second push hook through the driving assembly, unfolding a corresponding number of Cu sheets, namely unfolding 5 Cu sheets, after the operation on the Cu sheets is finished, carrying out evaporation coating again, continuously monitoring the evaporation rate at each position until the evaporation rate is less than 12%, then starting sheet feeding and conveying, and carrying out vacuum evaporation coating operation on the sample.
It should be noted that, in the embodiment of the present invention, fig. 2 and fig. 3 are only described by taking three Cu sheets as an example, and the first copper sheet and the last copper sheet can be understood as two copper sheets on two sides.
The device for adjusting the evaporation rate on line provided by the present invention is described in detail above, and the principle and the implementation of the present invention are explained by applying specific examples herein, and the description of the above examples is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be changes in the specific embodiments and the application range, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include or include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (1)
1. An apparatus for on-line adjustment of an evaporation rate, the apparatus comprising:
the linear evaporation boat comprises a first surface and a second surface which are opposite, the first surface comprises an inner area and an edge area which surrounds the inner area, a groove is formed in the inner area and used for containing an evaporation material source, and the linear evaporation boat is a conductive linear evaporation boat;
a position-posture-adjustable conductive member located on the side of the second surface, the conductive member being in contact with the second surface; the conductive parts are a plurality of independent metal sheets;
a folding member disposed between adjacent two of the metal sheets;
a first push hook provided on the first metal sheet;
a second push hook provided on the last metal sheet;
and the driving assembly is used for controlling the position and the posture of the metal sheet through the first push hook and the second push hook.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221671744.2U CN218372485U (en) | 2022-06-30 | 2022-06-30 | Device for adjusting evaporation rate on line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221671744.2U CN218372485U (en) | 2022-06-30 | 2022-06-30 | Device for adjusting evaporation rate on line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218372485U true CN218372485U (en) | 2023-01-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221671744.2U Active CN218372485U (en) | 2022-06-30 | 2022-06-30 | Device for adjusting evaporation rate on line |
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| Country | Link |
|---|---|
| CN (1) | CN218372485U (en) |
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- 2022-06-30 CN CN202221671744.2U patent/CN218372485U/en active Active
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