CN214142520U - Substrate clamping device capable of adjusting target base distance - Google Patents
Substrate clamping device capable of adjusting target base distance Download PDFInfo
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- CN214142520U CN214142520U CN202020620550.4U CN202020620550U CN214142520U CN 214142520 U CN214142520 U CN 214142520U CN 202020620550 U CN202020620550 U CN 202020620550U CN 214142520 U CN214142520 U CN 214142520U
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Abstract
The utility model belongs to the technical field of automatic coating, especially, relate to a substrate clamping device of adjustable target base distance. The special-shaped substrate coating device comprises a substrate frame, wherein a plurality of mounting positions for mounting gaskets are arranged on the substrate frame, and the distance between the coating surface of the substrate and the surface of a target can be adjusted by mounting the gaskets with different heights, so that the distance between the target when the front surface of the special-shaped substrate is coated is equal to or close to that when the back surface of the special-shaped substrate is coated. The mounting positions are arranged on the substrate frame for placing the substrate, and the gasket can be mounted, so that the target base distance of the front and back surfaces of the substrate can be directly changed by selecting different clamping devices in the continuous coating process, and the process consistency and the film performance consistency of the front and back surfaces of the product during coating are ensured. And through installing different gaskets, can make the substrate that satisfies different specifications adjust the practicality, need not to change the substrate frame, its flexibility is strong.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of automatic coating, especially, relate to a substrate clamping device of adjustable target base distance.
[ background of the invention ]
In various coating devices, the distance between a cathode target and a coated substrate, namely the target base distance, is determined in the device design and processing stage generally, and in the subsequent production, the target base distance has slight change along with the consumption of the target material, but the slight change is compensated by adjusting parameters such as power and the like, and the original target base distance does not need to be adjusted.
The conditions for the coating of a planar product, no matter single-side coating or substrate double-side coating, the coating effect is ensured by process adjustment due to the small change of the target base distance caused by the consumption of the target material, along with the increasing coating demand, more and more products need coating, non-planar product special shapes appear, for the special-shaped products, the distance difference between the positive and negative coated surfaces and the target material is larger, and the strict requirement on the surface temperature change of the substrate in the coating process is met, and the requirement cannot be met only by process adjustment; if the target base distance is adjusted by moving the whole cathode target back and forth, the cathode mechanism becomes complicated and the machine must be stopped to affect the production efficiency.
[ summary of the invention ]
For solving the problem that the front and back target base distance of the non-planar coating product has large difference and can not be adjusted in time to cause low efficiency in the prior art, the utility model provides a substrate clamping device with adjustable target base distance.
The utility model discloses a realize through following technical scheme:
the substrate clamping device comprises a substrate frame, wherein a plurality of mounting positions for mounting gaskets are arranged on the substrate frame, and the substrates with different heights can be mounted to adjust the target base distance between the coating surface of the substrate and the surface of a target material, so that the target base distance of the special-shaped substrate during front coating is equal to or close to the target base distance of the substrate during back coating.
According to the substrate clamping device capable of adjusting the target base distance, the substrate frame is provided with the plurality of adjusting cross beams arranged at intervals, and the installation positions are arranged on the adjusting cross beams or on the adjusting cross beams and the substrate frame.
The substrate clamping device with the adjustable target base distance comprises a substrate frame, a substrate frame vertical beam and two substrate frame cross beams, wherein the substrate frame comprises the two substrate frame vertical beams which are arranged in parallel and the two substrate frame cross beams which are arranged in parallel, the two substrate frame vertical beams and the two substrate frame cross beams enclose a frame type substrate frame, and the adjusting cross beams are connected to the two substrate frame vertical beams on the two sides and located between the two substrate frame cross beams.
According to the substrate clamping device with the adjustable target base distance, the substrate frame vertical beam is further provided with a connecting position for connecting the adjusting beam, the connecting position is a concave type, so that the upper end face of the adjusting beam after being installed is flush with the upper end face of the substrate frame, and a connecting structure capable of changing the connecting position of the adjusting beam is arranged in the connecting position.
The substrate clamping device with the adjustable target base distance comprises a connecting structure and a connecting structure, wherein the connecting structure comprises a mounting hole arranged in the connecting position, a connecting hole arranged on the adjusting beam and a connecting piece which penetrates through the connecting hole and the mounting hole to enable the adjusting beam to be connected with the substrate frame.
According to the substrate clamping device with the adjustable target base distance, the connecting hole is a long-strip-shaped hole.
According to the substrate clamping device with the adjustable target base distance, the two sides of the adjusting beam are provided with the plurality of installation positions which are arranged side by side or at intervals.
According to the substrate clamping device with the adjustable target base distance, the two sides of the adjusting beam are provided with the plurality of installation positions which are arranged side by side or at intervals.
The substrate clamping device with the adjustable target base distance is characterized by further comprising a gasket and an anti-slip sheet capable of being mounted on the upper end face of the gasket or in the mounting position.
Compared with the prior art, the utility model discloses there is following advantage:
1. the utility model provides a substrate clamping device of adjustable target base distance through set up the installation position on the substrate frame that is used for putting the substrate, mountable gasket for the substrate positive and negative is at continuous coating film in-process, through selecting different clamping devices, can directly change the target base distance of substrate positive and negative coating film, thereby the uniformity of technology and the uniformity of rete performance when guaranteeing the coating film of product positive and negative. And through installing different gaskets, can make the substrate that satisfies different specifications adjust the practicality, need not to change the substrate frame, its flexibility is strong.
2. The utility model discloses adjustable target base distance's substrate clamping device, through the setting of adjusting the crossbeam, can change the position of gasket or change the mounted position of gasket in a flexible way, come to adjust in a flexible way according to the size of a dimension of substrate, to the less substrate of size, still can set up two substrates on same substrate frame, raise the efficiency greatly.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic view of the substrate clamping device for adjusting the target base distance according to the present invention;
FIG. 2 is a schematic view of the substrate reversed placement of the substrate clamping device with adjustable target base distance of the present invention;
FIG. 3 is an exploded view of the substrate holder and substrate (substrate right side up);
FIG. 4 is an exploded view of the substrate holder and substrate (substrate inverted);
FIG. 5 is a schematic diagram of a structure of a substrate clamping device for placing double substrates;
fig. 6 is an enlarged view of a portion a of fig. 5.
[ detailed description ] embodiments
In order to make the technical problem, technical solution and advantageous effects solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to further explain the present invention in detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The utility model discloses a realize through following technical scheme:
as shown in fig. 1 to 6, a substrate clamping device capable of adjusting target base distance, comprises a substrate frame 1, wherein a plurality of mounting positions 11 are arranged on the substrate frame 1, and the target base distance between the substrate coating surface and the target surface 8 can be adjusted by mounting spacers 2 with different heights so that the target base distance D1 when the front coating of the special-shaped substrate is performed and the target base distance D2 when the reverse coating is performed are equal to or close to each other. And through installing different gaskets, can make the substrate that satisfies different specifications adjust the practicality, need not to change the substrate frame, its flexibility is strong.
As shown in fig. 1 and 2, the special-shaped product is not a plane, both sides of the special-shaped product need to be coated with films, the thickness of the films on both sides is the same as the performance requirement of the films, the temperature rise on the surfaces of the films is strictly required, and the product is deformed due to overhigh temperature. If the same traditional substrate frame is used, the front side and the back side of a plated product can be plated, the target base distance of the plated film is different, the difference is related to the edge thickness of the product, if the thickness difference is small, the target power can be finely adjusted, if the thickness difference is large, the front side of the substrate is placed upwards as shown in figure 1, the plated film surface is the front side 91, as shown in figure 2, the plated film surface is the back side 92, if the substrate frame placed at the same height is adopted, the thicknesses of the film layers on the two sides are ensured to be the same, the temperature of the surface of the substrate can be increased in the film plating process by increasing the power and prolonging the film plating time, and therefore, the film performance can not be ensured by adopting the above mode. If the whole target is moved back and forth to change the target base distance, the vacuum in the equipment needs to be broken, the equipment is opened for adjustment, then the equipment is closed and vacuumized until the vacuum degree required by the process is reached, the production can be started, the production generally delays for tens of hours, the front side of the product is plated, the product is turned over by the turning mechanism and then the back side of the product is plated immediately, the operation according to the method cannot be carried out, and the production efficiency of the whole production line is greatly reduced due to the fact that the production line is ceaseless to halt adjustment of the production line caused by different products due to different types of products and different thicknesses of the frames of each product, aiming at the phenomenon, the scheme adopts a mode of adding different cushion blocks on the substrate frame according to different products to adjust the target base distance, and in the automatic part of the production line, the running substrate frame and the reserved substrate frame exist, different substrate frames and cushion blocks thereof are selected for different coated surfaces of the product, the mode does not need to be stopped, the substrate frames can be replaced at any time according to the coating requirements of the product in the production process, and the expected purpose is achieved through the substrate frames and the different cushion blocks.
Furthermore, a plurality of adjusting beams 12 arranged at intervals are arranged on the substrate frame 1, and the mounting positions 11 are arranged on the adjusting beams 12 or on the adjusting beams 12 and the substrate frame 1. Moreover, a plurality of installation positions 11 arranged side by side or at intervals are arranged on two sides of the adjusting beam 12. Thus, the width sizes of substrates with different specifications can be adapted by installing the gasket at different positions on the adjusting beam 12.
In addition, still be equipped with the connection position that is used for connecting adjusting beam 12 on the substrate frame erects roof beam 101, the connection position makes for the depressed type adjusting beam 12 installation back up end keeps the same with substrate frame 1 up end, just be equipped with the connection structure that can change adjusting beam 12 hookup location in the connection position. And the length sizes of substrates with different specifications can be adapted by adjusting the position of the whole adjusting beam 12. Moreover, the adjusting beam in the scheme is detachable, and the beam with the suitable width can be replaced aiming at substrates with different specifications.
Further, the specific structure of the substrate frame is as follows: the substrate frame 1 comprises two substrate frame vertical beams 101 arranged in parallel and two substrate frame cross beams 102 arranged in parallel, the two substrate frame vertical beams 101 and the two substrate frame cross beams 102 enclose a frame-type substrate frame 1, and the adjusting cross beam 12 is connected to the two substrate frame vertical beams 101 on the two sides and is located between the two substrate frame cross beams 102. The substrate frame mainly plays a supporting role, is simple in structure, is matched with the adjusting beam, is more flexible to use, and can be adapted to coating films of special-shaped substrates of different specifications.
Still further, the connecting structure comprises a mounting hole 3 arranged in the connecting position, a connecting hole 31 arranged on the adjusting beam 12 and a connecting piece 32 which passes through the connecting hole 31 and the mounting hole 3 to connect the adjusting beam 12 with the substrate frame 1. The adjusting beam is a mode for adjusting the position, and the position of the adjusting beam is changed by enabling the connecting hole of the adjusting beam to be opposite to the mounting holes in different positions.
In addition, the connection hole 31 is a long-strip-shaped hole. The position is adjusted through the strip-shaped hole in another mode of adjusting the position, the mode belongs to fine adjustment, and the maximum adjusting distance is the length of the strip-shaped hole.
Still further, still include gasket 2 and can install on gasket 2 up end or install the antiskid piece 21 in installation position 11, can make the substrate directly place on the substrate frame through antiskid piece 21 setting, and antiskid piece can adopt the silica gel material, and it can directly place on the installation of substrate frame and contact with the substrate, also can set up on the gasket up end and contact with the substrate to prevent that the substrate can remove relative to the substrate frame in the transportation, and can prevent to leave the indentation on the substrate surface, influence coating film quality.
In addition, in the scheme, the gasket 2 or the anti-slip sheet can be installed in the installation position in a bonding mode, and the gasket 2 or the anti-slip sheet can be fixed in the installation position through the connecting piece, so that the assembly and disassembly are convenient.
The utility model provides a substrate clamping device of adjustable target base distance through set up the installation position on the substrate frame that is used for putting the substrate, mountable gasket for the substrate positive and negative is at continuous coating film in-process, through selecting different clamping devices, can directly change the target base distance of substrate positive and negative coating film, thereby the uniformity of technology and the uniformity of rete performance when guaranteeing the coating film of product positive and negative. And through installing different gaskets, can make the substrate that satisfies different specifications adjust the practicality, need not to change the substrate frame, its flexibility is strong.
The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not to be construed as limiting the invention to the precise embodiments disclosed herein. All with the utility model discloses a method, structure etc. are similar, the same, or to the utility model discloses make a plurality of technological deductions under the design prerequisite, or the replacement should all regard as the utility model discloses a protection scope.
Claims (8)
1. The substrate clamping device capable of adjusting the target base distance comprises a substrate frame (1) and is characterized in that a plurality of mounting positions (11) used for mounting gaskets (2) are arranged on the substrate frame (1), and the target base distance between the substrate coating surface and the target surface (8) can be adjusted by mounting the gaskets (2) with different heights, so that the target base distance (D1) when the front surface of a special-shaped substrate is coated with a film is equal to the target base distance (D2) when the back surface of the special-shaped substrate is coated with a film.
2. The substrate clamping device with the adjustable target base distance according to claim 1, characterized in that a plurality of adjusting beams (12) are arranged on the substrate holder frame (1) at intervals, and the mounting positions (11) are arranged on the adjusting beams (12) or on the adjusting beams (12) and the substrate holder frame (1).
3. The substrate clamping device with the adjustable target base distance according to claim 2, characterized in that the substrate holder frame (1) comprises two substrate holder vertical beams (101) arranged in parallel and two substrate holder cross beams (102) arranged in parallel, the two substrate holder vertical beams (101) and the two substrate holder cross beams (102) enclose a framed substrate holder frame (1), and the adjusting cross beam (12) is connected to the two substrate holder vertical beams (101) at two sides and is located between the two substrate holder cross beams (102).
4. The substrate clamping device with the adjustable target base distance according to claim 3, characterized in that the substrate frame vertical beam (101) is further provided with a connecting position for connecting the adjusting beam (12), the connecting position is recessed to enable the upper end surface of the adjusting beam (12) to be flush with the upper end surface of the substrate frame (1) after installation, and a connecting structure capable of changing the connecting position of the adjusting beam (12) is arranged in the connecting position.
5. The substrate holder with adjustable target base distance according to claim 4, characterized in that the connecting structure comprises a mounting hole (3) arranged in the connecting position, a connecting hole (31) arranged on the adjusting beam (12), and a connecting piece (32) penetrating the connecting hole (31) and the mounting hole (3) to connect the adjusting beam (12) and the substrate holder frame (1).
6. The substrate holder with adjustable target base distance as claimed in claim 5, characterized in that the connecting hole (31) is an elongated hole.
7. The substrate clamping device with adjustable target base distance according to claim 2, characterized in that a plurality of the mounting positions (11) are arranged side by side or at intervals on both sides of the adjusting beam (12).
8. The adjustable target base distance substrate clamping device according to claim 1, further comprising a gasket (2) and an anti-slip sheet (21) which can be mounted on the upper end surface of the gasket (2) or in the mounting position (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020620550.4U CN214142520U (en) | 2020-04-22 | 2020-04-22 | Substrate clamping device capable of adjusting target base distance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020620550.4U CN214142520U (en) | 2020-04-22 | 2020-04-22 | Substrate clamping device capable of adjusting target base distance |
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| Publication Number | Publication Date |
|---|---|
| CN214142520U true CN214142520U (en) | 2021-09-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020620550.4U Active CN214142520U (en) | 2020-04-22 | 2020-04-22 | Substrate clamping device capable of adjusting target base distance |
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| CN (1) | CN214142520U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
| CN115613001A (en) * | 2022-10-26 | 2023-01-17 | 四川旭虹光电科技有限公司 | Coated cylinder and use method thereof |
-
2020
- 2020-04-22 CN CN202020620550.4U patent/CN214142520U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
| CN115613001A (en) * | 2022-10-26 | 2023-01-17 | 四川旭虹光电科技有限公司 | Coated cylinder and use method thereof |
| CN115613001B (en) * | 2022-10-26 | 2024-06-11 | 四川旭虹光电科技有限公司 | Coating barrel and use method thereof |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A substrate clamping device with adjustable target base distance Effective date of registration: 20220124 Granted publication date: 20210907 Pledgee: Science and Technology Branch of Torch Development Zone of Zhongshan Rural Commercial Bank Co.,Ltd. Pledgor: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Registration number: Y2022980001039 |
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| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: Building 4, Haiyin Technology Industrial Park, No.1 Industrial Avenue, Banfu Community, Banfu Town, Zhongshan City, Guangdong Province, 528400 Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 528400 No.3, niuchangling, Shenwan village, Banfu Town, Zhongshan City, Guangdong Province (block 301, 1st floor) Patentee before: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. |